• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.963-968
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• 2002

In this work, porous silicon (PS) layer is investigated as a sensing material to detect organic vapors such as ethanol (called alcohol), methanol, and acetone in low concentrations. To do this, PS sensors were fabricated. They have a membrane structure and comb-type electrodes were used to detect the change of electrical resistance effectively. PS layer on Si substrates was formed by anodization in HF solution of 25%. From fabricated sensors, current-voltage (Ⅰ-Ⅴ) curves were measured for gases evaporated from 0.1 to 0.5% organic solution concentrations at 36$\^{C}$. As the result, all curves showed rectifying behavior due to a diode structure between Si and the PS layer. The conductance of most sensors increased largely at high voltage of 5V, but the built-in potential on the measured Ⅰ-Ⅴ curve was lowered inversely by the adsorption effect of the organic vapors with high dipole moment.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.609-611
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• 1997

Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

• Bulletin of the Korean Chemical Society
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• 제12권5호
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• pp.474-477
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• 1991

The preferential transport phenomena of neutral cation-anion moieties in neutral macrocycle-facilitated emulsion liquid membrane were described in this study. Emulsion membrane systems consisting of (1) aqueous source phase containing 0.001 M M($NO_3$)$_2(M=Mn^{2+},\;Co^{2+},\;Ni^{2+},\;Cu^{2+},\;Zn^{2+},\;Sr^{2+},\;Cd^{2+},\;and\;Pb^{2+})$ (2) a toluene membrane containing 0.01 M ligand $(DBN_3O_2$, DA18C6, DT18C6, TT18C6, HT18C6) and the surfactant span 80 (sorbitan monooleate) (3% v/v) and (3) an aqueous receiving phase containing $Na_2S_2O_3$ or $NaNO_3$ were studied with respect to the disappearence of transition metal ions from the source phase as a function of time. Cation transports for various two component or three component equimolar mixture of transition metal and $Cu^{2+}$ in a emulsion membrane system incorporating macrocyclic ligand (HT18C6) as carrier were determinded. $Cu^{2+}$ was transported higher rates than the other $M^{2+}$ in the mixture solution. Equilibrium constants for cation-source phase co-anion, cation macrocycle and cation-receiving phase reagent interaction are examined as parameters for the prediction of cation transport selectivities.

• 멤브레인
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• 제32권5호
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• pp.314-324
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• 2022

본 연구에서는 분리막을 이용하여 천일염내 미세플라스틱을 비롯한 불순물을 제거하는 분리막 공정 설계를 위한 연구이다. 천일염 염전에 적합한 분리막 재질, 공경 사이즈, 모듈을 선정하여 다양한 조건에서 실험을 진행하였다. 선정된 200 kDa, 4 kDa 한외여과막 그리고 3 kDa 나노여과막을 선정하였고, 실험은 실험실과 실제 염전에 파일롯 플랜트를 건설하여 각각 실험하였다. 천일염내 불순물은 대부분 0.1 ㎛ 이상의 크기를 가졌고 크기 분포는 0.1 ㎛에서 1 ㎛ 사이 입자가 가장 많은 부분을 차지하였다. 그리고 성분 분석결과 불순물 내에 7종류 이상의 다양한 미세플라스틱이 검출되었다. 분리막 공정 이후 여과된 염전수 분석한 결과 미세플라스틱을 포함한 불순물이 검출되지 않았고 기존의 천일염과 분리막 여과수로 제작한 천일염의 성분 비교해본 결과 천일염 성분의 변화 없이 불순물만 효과적으로 제거됨을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권12호
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.781-784
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• 2005

Twenty four types of thermopile for micro spectrometer infrared sensors were fabricated on low-stress $Si_3N_4$ membranes with $1.2{\mu}m-thickness$ using MEMS technology. Poly-Si thin film with thickness of 3500 ${\AA}$ as the first thermocouple material, was deposited by LPCVD method. And aluminum thin film with thickness of 6000 ${\AA}$ as the second thermocouple material, was deposited by sputtering method. Thermopile were designed and fabricated for optimum conditions by five parameters of thermocouple numbers (16 ${\sim}$ 48), thermocouple line widths (10 ${\mu}m$ ${\sim}$ 25 ${\mu}m$), thermocouple lengths (100 ${\mu}m$ ${\sim}$ 500 ${\mu}m$), membrane areas ($1^2\;mm^2$ ${\sim}$ $2.5^2\;mm^2$) and junction areas (150 ${\mu}m^2$ ${\sim}$ 750 ${\mu}m^2$), respectively. Electromotive forces of fabricated thermopile were measured 1.1 mV ${\sim}$ 7.4 mV at $400^{\circ}C$. It was thought that measurement results could be used for thermopile infrared sensors optimum structure for micro spectrometers.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.53-53
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• 2003

There has been increasing interest in the fabrication of nano-sized structures because of their various advantages and applications. Anodic Aluminum Oxide (AAO) is one of the most successful methods to obtain highly ordered nano pores and channels. Also It can be obtained diverse pore diameter, density and depth through the control of anodization condition. The three types of substrates were used for anodization; sheets of Aluminum on Si wafer and Aluminum on Mo-coated Si wafer. In Aluminum sheet, a highly ordered array of nanoholes was formed by the two step anodization in 0.3M oxalic acid solutions at 10$^{\circ}C$ After the anodization, the remained aluminum was removed in a saturated HgCl$_2$ solution. Subsequently, the barrier layer at the pore bottom was opened by chemical etching in phosphoric acid. Finally, we can obtain the through-channel membrane. In these processes, the effect of various parameters such as anodizing voltage, anodizing time, pore widening time and pre-heat treatment are characterized by FE-SEM (HITACH-4700). The pore size. density and growth rate of membrane are depended on the anodizing voltage and temperature respectively. The pore size is proportional to applied voltage and pore widening time The pore density can be controlled by anodizing temperature and voltage.

• 대한전자공학회논문지SD
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• 제38권3호
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• pp.229-235
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• 2001

Si₃N₄/SiO₂/Si₃N₄ 멤브레인에 의해 실리콘 기판으로부터 열차단된 비냉각 초전형 박막 (Ba,Sr)TiO₃ 적외선 검지기를 제작하고, 적외선 검지기의 특성을 논의하였다. 25℃의 공기중에서 쵸핑주파수가 1 ㎐일 때 적외선 검지기는 약 168.8 V/W의 비교적 높은 전압 감응도를 나타내었으나, 매우 작은 신호대잡음비 때문에 약 2.6×10⁴㎝·㎐/sup 1/2//W의 낮은 비검지도를 나타내었다. 또한 출력파형의 쵸핑주파수 및 온도 의존성에 대한 정성적인 해석으로부터 적외선 검지기의 열잡음전압 및 열시정수가 모두 상당히 크다는 것을 알 수 있었다.

• 한국결정성장학회지
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• 제8권1호
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• pp.55-63
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• 1998

조성이 각각 1.9 $SiO_2-1.5\;Na_2O-Al_2O_3-40\;H_2O$인 반응물과 10 $SiO_2-7\;Na_2O-Al_2O_3-280\;H_2O$인 반응물로부터 다공성 지지판에 성장된 A형 및 Y형 제올라이트 결정박막을 합성하였다. 합성된 제올라이트 막은 X선회절분석기와 주사전자현미경으로 특성을 검토하였다. 지지체 상에 붙어 성장한 A 및 Y형 제올라이트 결정은 치밀하게 서로 붙은 상태였으며 그 두께가 약 8-15$\mu$m 정도였다. 또한 반응물을 조제할 때, 물은 첨가하지 않은 채로 혼합하고 디스크형으로 가압성형하여 $100^{\circ}C$에서 결정화시켜도 치밀하게 성장된 제올라이트 결정박막을 합성할 수 있었다. 박막으로 결정화시킨 A형 제올라이트는 미세세공의 분자체기능을 통하여 물과 메탄올의 혼합수용액에서 물만을 선택적으로 투과시키는 것을 알 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.44-44
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• 2003

Growth mechanism of carbon nanotubes(CNTs) synthesized by chemical vapor deposition is abided by two growth modes. These growth modes are classified by the position of activated catalytic metal particle in the CNTs. Growth mode can be also affected by interaction between substrate and catalytic metal and induced energy such as thermal and plasma. We studied the reaction of catalytic metal to the substrate and growth mode of CNTs. Various substrates such as Si(100), graphite plate, coming glass, sapphire and AAO membrane are used to study the relation between catalytic metal and substrate in the synthesis of CNTs. For catalytic metal, thin film was deposited on various substrate via sputtering technique with a thickness of ∼20nm and magnetic fluids with none-sized particles were dispersed on AAO membrane. After laying process on AAO membrane, it was dried at 80$^{\circ}C$ for 8 hour. Synthesizing of CNTs was carried out at 900$^{\circ}C$ in NH3/C2H2 mixture gases flow for 10minutes.