• 제목/요약/키워드: SiC filter

검색결과 115건 처리시간 0.027초

Ion assisted deposition of $TiO_2$, $ZrO_2$ and $SiO_xN_y$ optical thin films

  • Cho, H.J.;Hwangbo, C.K.
    • 한국진공학회지
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    • 제6권S1호
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    • pp.75-79
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    • 1997
  • Optical and mechanical characteristics of $TiO-2, ZrO_2 \;and\; SiO_xN_y$ thin films prepared by ion assisted deposition (IAD) were investigated. IAD films were bombarded by Ar or nitrogen ion beam from a Kaufman ion source while they were grown in as e-beam evaporator. The result shows that the Ae IAD increases the refractive index and packing density of $TiO_2 films close to those of the bulk. For $ZrO_2$ films the Ar IAD increases the average refractive index decreases the negative inhomogeneity of refractive index and reverses to the positive inhomogeneity. The optical properties result from improved packing density and denser outer layer next to air The Ar-ion bombardment also induces the changes in microstructure of $ZrO_2$ films such as the preferred (111) orientation of cubic phase increase in compressive stress and reduction of surface roughness. Inhomogeneous refractive index SiOxNy films were also prepared by nitrogen IAD and variable refractive index of $SiO_xN_y$ film was applied to fabricate a rugate filter.

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분무연소합성(SCS)법에 의한 나노크기 물라이트(3Al2O3.42SiO2) 콜로이드 제조 (Nano-Sized Mullite(3Al2O3.42SiO2) Colloids Fabricated by Spray Combustion Synthesis (SCS) Technique)

  • 이상진;전병세
    • 한국세라믹학회지
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    • 제41권4호
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    • pp.297-301
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    • 2004
  • 분무연소합성법을 이용하여 나노크기의 물라이트(3Al$_2$O$_3$$.$2SiO$_2$) 콜로이드를 제조하였다. 연소반응을 위한 산화제로서 Al(NO$_3$)$_3$$.$9$H_2O$와 환원제(연료)로서 CH$_{6}$N$_4$O를 사용하였으며, 실리카 소스로서 콜로이드 실리카를 첨가하였다. 분무된 액적들의 착화를 위해 연소반응기의 온도를 80$0^{\circ}C$로 유지하였다. 액적의 응고에 의한 액적크기 성장을 억제하기 위하여 금속 스크린 필터를 사용함으로써 액적의 개수 농도를 감소시켰으며, 에어로졸 입자의 체류시간을 2.5초로 유지하여 열 유체의 흐름을 층류로 유도하였다. 제조된 입자들의 모양은 모두 구형이었으며, 평균입자크기는 130nm이었다 XRD와 TEM 분석 결과 각각의 초미립자들은 정량화합물의 물라이트 결정성을 나타내었다.

Survival of Microorganisms on Antimicrobial Filters and the Removal Efficiency of Bioaerosols in an Environmental Chamber

  • Kim, Sung Yeon;Kim, Misoon;Lee, Sunghee;Lee, JungEun;Ko, GwangPyo
    • Journal of Microbiology and Biotechnology
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    • 제22권9호
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    • pp.1288-1295
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    • 2012
  • Exposure to bioaerosols causes various adverse health effects including infectious and respiratory diseases, and hypersensitivity. Controlling exposure to bioaerosols is important for disease control and prevention. In this study, we evaluated the efficacies of various functional filters coated with antimicrobial chemicals in deactivating representative microorganisms on filters or as bioaerosols. Tested functional filters were coated with different chemicals that included (i) Ginkgo and sumac, (ii) Ag-apatite and guanidine phosphate, (iii) $SiO_2$, ZnO, and $Al_2O_3$, and (iv) zeolite. To evaluate the filters, we used a model ventilation system (1) to evaluate the removal efficiency of bacteria (Escherichia coli and Legionella pneumophila), bacterial spores (Bacillus subtilis spore), and viruses (MS2 bacteriophage) on various functional filters, and (2) to characterize the removal efficiency of these bioaerosols. All experiments were performed at a constant temperature of $25^{\circ}C$ and humidity of 50%. Most bacteria (excluding B. subtilis) rapidly decreased on the functional filter. Therefore, we confirmed that functional filters have antimicrobial effects. Additionally, we evaluated the removal efficiency of various bioaerosols by these filters. We used a six-jet collision nebulizer to generate microbial aerosols and introduced it into the environmental chamber. We then measured the removal efficiency of functional filters with and without a medium-efficiency filter. Most bioaerosol concentrations did not significantly decrease by the functional filter only but decreased by a combination of functional and medium-efficiency filter. In conclusion, functional filters could facilitate biological removal of various bioaerosols, but physical removal of these by functional was minimal. Proper use of chemical-coated filter materials could reduce exposure to these agents.

산업폐기물 소각시설에서 폐기물 유형에 따른 입자상물질의 배출특성 (Emission Characterization of Particulate Matters According to the Types of Wastes from Industrial Waste Incinerator)

  • 박정호;서정민;조정구;류재용;한성종
    • 한국환경과학회지
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    • 제16권11호
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    • pp.1225-1230
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    • 2007
  • The emissions characteristics of particulate matters(PM) according to the types of wastes from industrial waste incinerator of 800 kg/hr treatment capacity were investigated. For this study, the incinerate waste are as follows; waste resin, waste wood, waste urethane, waste gunny, and waste paper. The particulate samples were collected to be emitted in stack and air pollution control(both cyclone and bag filter). In stack, the concentrations of PM were in the range of 2.61 to $26.51 mg/Sm^3$ and the major chemical species were C, Si, Cl, K, Na, Ca in all the wastes. In cyclone fly ash, the mean content of heavy metal were in the order of Fe > Zn > Pb > Cu > Mn > Cr > Ni > Cd > As > Hg and the heavy metal content of waste resin were Zn 34,197.5 mg/kg, Fe 27,587.6 mg/kg, Pb 6,055.8 mg/kg, respectively. In bag filter fly ash, the mean content of heavy metal were in the order of Zn > Pb > Fe > Cu > Mn > Cd > Cr > Ni > As > Hg and the heavy metal content of waste wood were Pb 36,405.2 mg/kg, Fe 15,762.9 mg/kg, Cu 9,989.5 mg/kg, Cd 2,230.1 mg/kg, respectively. Comparing the heavy metal content of both cyclone and bag filter, in cyclone, the Cr, Fe, Ni content were higher than in bag filter and the Cd, Cu, Hg content were lower than in bag filter.

The Effect of the Sintering Additives on the Fabrication and Thermal Conductivity of Porous Sintered RBSN

  • Park, Young-Jo;Kim, Hai-Doo
    • 한국세라믹학회지
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    • 제44권7호
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    • pp.354-357
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    • 2007
  • The nitriding and post-sintering behavior of silicon powder compact containing sintering additives of 2.3 wt% and 7 wt% were investigated in this study. Regardless of the liquid phase content, elongated large grains of a typical morphology evolved in the post-sintered specimens. Phase analysis revealed a complete phase transformation into ${\beta}-Si_3N_4$ in both porous systems. Oxynitride second phases (mellilite) precipitated in the latter, while those were free in the former containing less amount of liquid phase. The post-sintering condition that yielded a favorable microstructure for a filter application was achieved when the specimens were soaked at $1800^{\circ}C$ for 2 h. It was found that the thermal conductivity of porous $Si_3N_4$ ceramics is dominated by the porosity more than this factor is influenced by the addition of $Al_2O_3$.

An Integrated System for Radioluminescence, Thermoluminescence and Optically Stimulated Luminescence Measurements

  • Park, Chang-Young;Park, Young-Kook;Chung, Ki-Soo;Lee, Jong-Duk;Lee, Jungil;Kim, Jang-Lyul
    • Journal of Radiation Protection and Research
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    • 제43권4호
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    • pp.160-169
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    • 2018
  • Background: This study aims to develop an integrated optical system that can simultaneously or selectively measure the signals obtained from radioluminescence (RL), thermoluminescence (TL), and optically stimulated luminescence (OSL), which are luminescence phenomena of materials stimulated by radioactivity, heat, and light, respectively. The luminescence mechanism of various materials could be investigated using the glow curves of the luminescence materials. Materials and Methods: RL/TL/OSL integrated measuring system was equipped with a X-ray tube (50 kV, $200{\mu}A$) as an ionizing radiation source to irradiate the sample. The sample substrate was used as a heating source and was also designed to optically stimulate the sample material using various light sources, such as high luminous blue light emitting diode (LED) or laser. The system measured the luminescence intensity versus the amount of irradiation/stimulation on the sample for the purpose of measuring RL, TL and OSL sequentially or by selectively combining them. Optical filters were combined to minimize the interference of the stimulation light in the OSL signal. A long-pass filter (420 nm) was used for 470 nm LED, an ultraviolet-pass filter (260-390 nm) was used for detecting the luminescence of the sample by PM tube. Results and Discussion: The reliability of the system was evaluated using the RL/OSL characteristics of $Al_2O_3:C$ and the RL/TL characteristics of LiF:Mg,Cu,Si, which were used as dosimetry materials. The RL/OSL characteristics of $Al_2O_3:C$ showed relatively linear dose-response characteristics. The glow curve of LiF:Mg,Cu,Si also showed typical RL/OSL characteristics. Conclusion: The reliability of the proposed system was verified by sequentially measuring the RL characteristics of radiation as well as the TL and OSL characteristics by concurrent thermal and optical stimulations. In this study, we developed an integrated measurement system that measures the glow curves of RL/TL/OSL using universal USB-DAQs and the control program.

연소재 및 식품폐기물의 혼합 반응에 따른 수처리 여과재 제조 특성 (The Characteristics of Manufacture Filter Media for Water Treatment Using Mixture Response with Ash and Food Waste)

  • 박승도;이원호;이민희
    • 한국지반환경공학회 논문집
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    • 제19권5호
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    • pp.5-12
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    • 2018
  • 본 연구에서는 연소재와 식품폐기물의 산업부산물을 이용하여 비점오염 수처리 여과재로 활용 가능한 여과재를 개발하였다. 첨가제 주입에 따른 공극 형성은 강도가 유지되는 전제하에 알루미늄 파우더 3%, $Ca(OH)_2$ 2%일 경우 기포형성이 가장 많이 발생하는 것으로 나타났다. 결합재의 적정 혼합비로서 (연소재+식품 폐기물+점토):(물유리+콜로이드성 실리카)는 7:3 이상에서 가장 효과적인 것으로 나타났으며, 온도에 따른 강도반응은 $1,000^{\circ}C$일 경우가 효과적이다. 최적의 혼합비율은 연소재 30%, 점토 30%, 식품 폐기물 10%에서 가장 높은 강도를 보여 비점오염 수처리로 활용도가 가장 높을 것이라 판단된다. 최적 배합조건에서 제조된 여과재는 $SiO_2$ 65.8%, 밀도 $1.4g/cm^3$, 공극률 25.6%, pH 9.8로 분석되었으며, 유해물질은 검출되지 않았다. 수처리에 대한 여과능을 알아본 결과 여과된 SS의 평균농도는 $14.06mg/{\ell}$로서 SS의 제거효율은 90.63%로 나타났으며, 역세척 회복률도 97.1%로 나타났다. 이는 폐자원의 활용뿐만 아니라 경제성 및 효율성을 고려한 수처리 여과재 제조가 가능함에 따라 폐자원의 높은 부가가치화가 가능하다.

LiNbO$_{3}$의 스트레인광학 효과를 이용한 모드변환형 광여파기 제작에 관한 연구 (A Study on the Fabriation of Mode Convertible Optical Filter Utilizing Strain-optic Effect in LiNbO$_{3}$)

  • 박석봉;장홍식
    • 전자공학회논문지D
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    • 제35D권1호
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    • pp.72-78
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    • 1998
  • Polarization mode converters have been produced by utilizing Ti:LiNbO$_{3}$ channel waveguide and strain-optic effect. Shear strain for periodic perturbations of optical channel waveguides and phase matching can be obtained by an evaporated periodic SiO$_{2}$ thin film at 300.deg. C. The electrodes located on the either side of waveguide provide a means to electro-optically tune the wavelength for maximum polarization conversion via the electrooptic effect. The maximum conversion effeciency was observed at 21.deg. C for V=0 and 46.deg. C for V=30V aro the device having 7 .mu.m waveguide wiith and 350 periodic pads. The dependence of the number of pads on conversion efficiency was observed experimentally.fficiency was observed experimentally.

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ZnO 박막의 RF 마그네트론 스퍼터 증착 중 미리 가열된 기판의 자연냉각 효과 (The Natural Cooling Effects of Pre-heated Substrate during RF Magnetron Sputter Deposition of ZnO)

  • 박성현;이능헌
    • 전기학회논문지
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    • 제56권5호
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    • pp.905-909
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    • 2007
  • Crystalline and micro-structural characteristics of ZnO thin films which were deposited on p-Si(100) with cooling naturally down of pre-heated substrate during RF magnetron sputter deposition, were investigated by XRD and SEM in this paper. The film which was prepared on the substrate which was pre-heated to $400^{\circ}C$ before deposition and then cooled naturally down during deposition, showed the most outstanding c-axis preferred orientation. The ZnO thin film having the best crystalline result were applied to SMR type FBAR device and resonance properties of the device were investigated by network analyzer. It showed that resonance frequency was 2.05 GHz, return loss was -30.64 dB, quality factor was 3169 and electromechanical coupling factor was 0.4 %. This deposition method would be very useful for application of surface acoustic wave filter or film bulk acoustic wave resonator.

기계경비용 전기센서필터의 압전박막 특성 (Piezoelectric Thin Film of Electrical Sensor Filter for Security System)

  • 이동윤
    • 한국콘텐츠학회:학술대회논문집
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    • 한국콘텐츠학회 2008년도 춘계 종합학술대회 논문집
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    • pp.595-597
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    • 2008
  • RF 마그네트론 스퍼터링 법으로 ZnO박막을 실리콘기판 위에 증착 하였고, 인가전력에 따른 박막의 결정학적, 전기적 특성을 연구하였다. 기판온도 $200^{\circ}C$, 산소:아르곤 가스의 비율이 50%:50%, 증착압력이 10mTorr의 조건에서 RF 전압에 따라 증착된 박막은 강한 c-축 성장과 우수한 결정성을 나타내었다.

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