• 제목/요약/키워드: SiC coating

검색결과 563건 처리시간 0.024초

Coated $Si_3N_4$-TiC ceramic 공구의 마모 특성 (Wear characteristics of coated $Si_3N_4$-TiC ceramic tool)

  • 김동원;권오관;이준근;천성순
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1988년도 제7회 학술강연회초록집
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    • pp.43-48
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    • 1988
  • 보호피막을 입히는 방법으로는 화학증착법과 물리증착법이 주로 사용되고 있다. 고온 분위기에서 기체 상태인 반응물의 화학반응을 통하여 원하는 물질을 증착시키는 화학증착법은 물리증착법에 비해 점착성(adhesion)이 우수하고, 보호피막층의 성분조절이 용이하며, 반응물이 기체상태이므로 대량생산이 용이하여 보호피막 증착법으로 많이 사용되고 있다. $Si_3N_4$-TiC ceramic 표면에 TiC, TiN 및 Ti(C, N) coating을 함으로써 얻을 수 잇는 장점들은 표면층의 경도를 증가시키며, steel과의 마찰계수의 감소 및 coating 층 자체가 고온에서 고체 윤활제로 작용하여 마찰열의 상당한 감소를 얻을 수 있으며, 또한 coating층 자체가 비교적 안정한 화합물로 피삭재내의 성분원소들에 대한 diffusion barrier로 작용되며, 내식성을 증가시킬 수 있다. 본 연구에서는 각 증착층의 미소경도, 열충격저항, steel과의 마찰계수를 측정하였으며, 최종적으로 절삭시험을 통하여 증착층들의 내마모성을 조사, 규명하였다.

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Pack-cementation 방법에 의해서 탄화규소로 도포된 탄소/탄소 복합재의 산화거동 (Oxidation Behavior of SiC Coated Carbon/carbon Composite by Pack-cementation Method)

  • 김정일;박인서;주혁종
    • Composites Research
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    • 제13권2호
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    • pp.22-29
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    • 2000
  • 탄소/탄소 복합재는 고온에서의 우수한 물성에도 불구하고, 산화에 대한 취약한 성질로 인하여 많은 분야에서 사용에 제약을 받고 있다. 그러므로 탄소/탄소 복합재의 산화안정성을 향상시키기 위해서 수많은 연구가 수행되어지고 있다. 본 연구에서는 고온에서 보다 개선된 물성과 높은 산화안정성을 부여하고, 타 도포물질과 비교해서 낮은 열팽창계수의 차이를 보이는 탄화규소를 Pack-Cementation 방법으로 4방향성 탄소/탄소 복합재에 도포하였다. 제작된 탄화규소로 도포된 탄소/탄소 복합재는 광학현미경의 관찰을 통하여 도포기구를 추정하였으며, 산화시험을 통하여 개선된 산화안정성을 조사하였다. 그리고 여러 시험을 종합 ·분석하여 도포공정의 최적의 반응조건을 연구하였다.

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Dip Coating 법에 의한 Al/$VF_2$-TrFE/Si(100) 구조의 제작 특성 (Fabrications and Properties of Al/$VF_2$/$n^+$-Si(100) Structures by Dip Coating Methode)

  • 김가람;정상현;윤형선;이우석;곽노원;김광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.20-21
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    • 2008
  • Ferroelectric vinylidene fluoride-trifluoroethylene ($VF_2$-TrFE) copolymer films were directly deposited on degenerated Si ($n^+$, 0.002 $\Omega{\cdot}cm$) using by dip coating method. A 1 ~ 3 wt% diluted solution of purified vinylidene fluoride-trifluoroethylene ($VF_2$:TrFE=70:30) in a dimethylformamide (DMF) solvent were prepared and deposited on silicon wafers using dip coating method for 10 seconds. After Post-Annealing in a vacuum ambient at 100~200 $^{\circ}C$ for 60 min, upper aluminum electrodes were deposited by thermal evaporation through the shadow mask to complete the MFS structure. The ferroelectric $\beta$-phase peak of films, depending on the annealing temperature, started to show up around $125^{\circ}C$, and the intensity of the peak increased with increasing annealing temperature. Above $175^{\circ}C$, the peak started to decrease. The C-V characteristics were measured using a Precision LCR meter (HP 4284A) with frequency of 1MHz and a signal amplitude of 20 mV. The leakage-current versus electric-field characteristics was measured by mean of a pA meter/DC voltage source (HP 4140B).

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The In-situ Dressing of CMP Pad Conditioners with Novel Coating Protection

  • Sung, James-C.;Kan, Ming-Chi
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1142-1143
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    • 2006
  • Kinik Company pioneered diamond pad conditioners protected by DLC barrier ($DiaShield^{(R)}$ Coating) back in 1999 (Sung & Lin, US Patent 6,368,198). Kink also evaluated Cermet Composite Coating (CCC or $C^3$, patent pending) with a composition that grades from a metallic (e.g. stainless steel) interlayer to a ceramic (e.g. $Al_2O_3$ or SiC) exterior. The metallic interlayer can form metallurgical bond with metallic matrix on the diamond pad conditioner. The ceramic exterior is both wear and corrosion resistant. The gradational design of $C^3$ coating will assure its strong adherence to the substrate because there is no weak boundary between coating and substrate.

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반응소결 물라이트를 위한 \$alpha-Al_2O_3/SiO_2$ 복합분말의 합성 및 그 특성 (Synthesis of \$alpha-Al_2O_3/SiO_2$ Composite Powders for Reaction-Sintered Mullite and its Properties)

  • 김희수;이종국;김환
    • 한국세라믹학회지
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    • 제32권8호
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    • pp.909-914
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    • 1995
  • From alumina powder and TEOS, $\alpha$-Al2O3/SiO2 composite powder for reaction-sintered mullite was synthesized by heterogeneous coagulation and surface coating, and investigated the mullitization reaction and sintering behavor of these powders. In $\alpha$-Al2O3/SiO2 composite powder prepared by heterogeneous coagulation, each alumina particles were surrounded by silica particles of 50~60 nm in size. And the alumina particles in composite powder prepared by surface coating were coated by uniform silica layer with thickness of 50 nm. In both methods, mullitization reaction was completed at 1$650^{\circ}C$ for 3h, and specimen sintered above 145$0^{\circ}C$ was about 95% fo the theoretical relative density. Mullite grains formed from the reaction with composite powders showed spherical shape with a size of 1~2${\mu}{\textrm}{m}$.

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Characterization of the Galvanizing Behavior Depending on Annealing Dew Point and Chemical Composition in Dual-Phase Steels

  • Shin, K.S.;Park, S.H.;Jeon, S.H.;Bae, D.C.;Choi, Y.M.
    • Corrosion Science and Technology
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    • 제9권6호
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    • pp.247-253
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    • 2010
  • The characteristics of selective oxidation prior to hot-dip galvanizing with the annealing atmosphere dew point and chemical composition in dual-phase steels and their effect on the inhibition layer formation relevant to coating adhesion have been studied using a combination of electron microscopic and surface analytical techniques. The annealed and also galvanized samples of 3 kinds of Si/Mn ratios with varied amounts of Si addition were prepared by galvanizing simulator. The dew point was controlled at soaking temperature $800^{\circ}C$ in 15%$H_2$ -85%$N_2$ atmosphere. It was shown that good adhesion factors were mainly uniformity of oxide particle distribution of low number density and low Si/Mn ratio prior to hot-dip galvanizing. Their effect was the greatly reduced coating bare spots and the formation of uniform inhibition layer leading to good adhesion of Zn overlay. The mechanism of good adhesion is suggested by two processes: the formation of inhibition layer on the oxide free surface uncovered with no $SiO_2$-containing particles in particular, and the inhibition layer bridging of oxide particles. The growth of inhibition layer was enhanced markedly by the delayed reaction of Fe and Al with the increase of Si/Mn ratio.

알루미나 졸-겔 코팅 공정을 이용한 질화규소의 상압소결 및 물질 특성 (Application of Sol-Gel Coating Process in Pressureless Sintering of Si3N4 and Their Properties)

  • 임경란;임창섭
    • 한국세라믹학회지
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    • 제31권1호
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    • pp.69-73
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    • 1994
  • Si3N4 ceramics could be densified above 3.2g/㎤ with pressureless sintering at below 178$0^{\circ}C$ by coating Si3N4 and Y2O3 powder with an alumina sol. Substitution a portion of Al2O3 with AlN improved densification. Additional milling of the coated powder in large improvement in bending strength greater than 800 MPa (4-point).

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탄소-탄소 복합재료의 하프늄 탄화물 코팅재의 열적/기계적 특성 (Thermal/Mechanical Properties of Hafnium Carbide Coatings on Carbon-Carbon Composites)

  • 최소담;서형일;임병주;신인철;이정민;박종규;이기성
    • Composites Research
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    • 제31권5호
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    • pp.260-266
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    • 2018
  • 본 논문에서는 C/C-SiC 복합재료의 하프늄 탄화물 코팅재에 대한 열적, 기계적 특성을 평가하였으며 특히 코팅에 의한 내산화성과 내마모성의 향상여부를 평가하였다. 하프늄 탄화물(HfC)을 용사시켜 코팅한 샘플들을 가공한 후, 공기 중에서 열적 특성평가 및 마모, 압입시험 평가에 대한 연구를 수행하였다. 공기 중에서 $1200^{\circ}C$의 온도까지 승온시킨 후 1시간 유지하는 싸이클을 10싸이클 진행하여 각 싸이클마다의 무게변화를 통해 탄소의 산화저항성을 평가하였고, 초경 구(tungsten carbide)를 사용하여 마모시험과 압입시험을 수행하여 그 결과를 비교하였다. 열피로 시험 수행 결과 하프늄 탄화물 코팅재가 상대적으로 무게감소가 적어 상대적으로 내산화성이 높은 것으로 평가되었다. 코팅된 하프늄 탄화물에 의해 탄성계수가 상대적으로 증가하였으며, 또한 C/C-SiC 복합재료는 하프늄 탄화물의 코팅에 의하여 내마모성이 향상되어 동일조건에서 마모량이 상대적으로 적었고 낮고 안정된 마찰계수가 유지되었다.

Ti-Al-N과 Ti-Al-Si-N 코팅막의 상 특성 및 내산화 거동 (Phase Characterization and Oxidation Behavior of Ti-Al-N and Ti-Al-Si-N Coatings)

  • 김정욱;전준하;조건;김광호
    • 한국표면공학회지
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    • 제37권3호
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    • pp.152-157
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    • 2004
  • Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocomposite microstructure consisting of nanosized(Ti,Al,Si)N crystallites and amorphous $Si_3$$N_4$, with smooth surface morphology. Ti-Al-N coating of which surface $Al_2$$O_3$ layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about $700^{\circ}C$. Ti-Al-Si-N coating showed better oxidation resistance because both surface Ab03 and near-surface $SiO_2$ layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.

Spin coating 공정을 이용한 Polymethyl methacrylate (PMMA) 박막의 polymer gate dielectric layer로써의 특성평가 (Properties of Polymethyl methacrylate (PMMA) for Polymer Gate Dielectric Thin Films Prepared by Spin Coating)

  • 나문경;강동필;안명상;명인혜;강영택
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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    • pp.29-32
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    • 2005
  • Poly (methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observeed by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for different thermal treatment temperature. PMMA films were showed proper dielectric constant and breakdown voltage. Above the glass transition temperature PMMA films degraded. C-V measured at various frequencies, dielectric constant increased a little. The absence of hysteresis in the C-V characteristics, which eliminate the possibility of mobile charges in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

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