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Phase Characterization and Oxidation Behavior of Ti-Al-N and Ti-Al-Si-N Coatings  

Kim, Jung-Wook (School of Materials Science and Engineering, Pusan National University)
Jeon, Jun-Ha (School of Materials Science and Engineering, Pusan National University)
Cho, Gun (School of Materials Science and Engineering, Pusan National University)
Kim, Kwang-Ho (School of Materials Science and Engineering, Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.37, no.3, 2004 , pp. 152-157 More about this Journal
Abstract
Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocomposite microstructure consisting of nanosized(Ti,Al,Si)N crystallites and amorphous $Si_3$$N_4$, with smooth surface morphology. Ti-Al-N coating of which surface $Al_2$$O_3$ layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about $700^{\circ}C$. Ti-Al-Si-N coating showed better oxidation resistance because both surface Ab03 and near-surface $SiO_2$ layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.
Keywords
Oxidation; Ti-Al-Si-N; Ti-Al-N; Coatings; Nanocomposite;
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