• 멤브레인
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• 제12권2호
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• pp.107-119
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• 2002

이번 연구에서 효율적인 기체분리를 위한 탄소-실리카($C-SiO_2$) 분리막이 방향족 이미드 블록과 실록산 블록으로 구성된 공중합체의 비활성분위기에서의 열분해를 통해 제조되었다. 이 탄소-실리카 기체분리막은 비교적 작은 크기의 기체분리, 즉 $He/N_2, O_2/N_2$ 그리고 $Co_2/N_2$의 분리에 있어 매우 뛰어난 기체선택도를 나타내었다. 두 상을 가진 공중합체의 열분해는 600도, 800도 그리고 1000도의 최종열분해온도로서 수행되었으며, 이러한 두 상으로 이루어진 전구체는 탄소막의 제조에 처음으로 보고되었다. 이러한 전구체는 두 상의 조성 및 같은 조성에서 중합방법의 차이에 의해 형성되는 모폴로지의 변화가 최종 탄소-실리카막의 기체분리특성에 미치는 영향을 살피기 위해 제조되었다. 이러한 탄소-실리카분리막은 $2.6-3.6{\AA}$의 동력학적 반경을 가진 작은 기체분자(헬륨, 산소, 질소, 이산화탄소)들을 사용한 기체투과실험에서, 탄소-실리카 분리막은 높은 투과도와 함께 뛰어난 분자체 효과를 보였다. 게다가 탄소-실리카분리막의 기체분리특성은 사용한 고분자 전구체의 기체분리특성과 매우 유사하며, 이것은 열적으로 안정한 두상의 사용으로 전구체의 초기 모폴로지가 열처리 후에도 상당히 유지되었기 때문이다. 현재의 연구는 탄소막 전구체의 초기의 모폴로지가 최종 탄소막의 분리특성 및 미세구조에 결정적인 영향을 미침을 암시한다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.792-796
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• 2002

In this work, porous silicon(PS) layer is used as a sensing material to detect organic gases. To do this, PS sensors with membrane structure are fabricated. The sensors were made by applying the technologies of membrane formation by anisotropic etching of silicon, and PS layer formation by anodization in HF solution. From fabricated sensors, current-voltage (I-V) curves were measured against ethanol (called alcohol), methanol and acetone gases evaporated from 0.1 to 0.5% solution concentrations at $36^{\circ}C$. As the result, all curves showed rectifying behavior due to a diode structure between Si and PS, and the conductance of sensor devices increased largely with the organic solution concentration at high voltage of 5V.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.411-414
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• 1998

In this paper, the silicon-nitride membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PT layer as a IR detection layer was deposited on the membrane and its characteristics were measured. The attack of PT layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer can be solved through the method of bonding/etching of silicon wafer. Because the PT layer of c-axial orientation rained thermal polarization without polling, the more integration capability can be achieved. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by IR detector, and the bonding interface was observed by SEM. The polarization characteristics and the dielectric characteristics of the PT layer were measured, too.

• Bulletin of the Korean Chemical Society
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• 제25권5호
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• pp.687-693
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• 2004

Composite membranes with a titania layer were prepared by soaking-rolling method with the titania sol of nanoparticles formed in the sol-gel process and investigated regarding the vapor permeation of various organic mixtures. The support modification was conducted by pressing $SiO_2$ xerogel of 500 nm in particle size under 10 MPa on the surface of a porous stainless steel (SUS) substrate and designed the multi-layered structure by coating the intermediate layer of ${\gamma}-Al_2O_3$. Microstructure of titania membrane was affected by heat-treatment and synthesis conditions of precursor sol, and titania formed at calcination temperature of 300$^{\circ}C$ with sol of [$H^+$]/[TIP]=0.3 possessed surface area of 210 $m^2$/g, average pore size of 1.25 nm. The titania composite membrane showed high $H_2/N_2$ selectivity and water/ethanol selectivity as 25-30 and 50-100, respectively. As a result of vapor permeation for water-alcohol and alcohol-alcohol mixture, titania composite membrane showed water-permselective and molecular-sieve permeation behavior. However, water/methanol selectivity of the membrane was very low because of chemical affinity of permeants for the membrane by similar physicochemical properties of water and methanol.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권6호
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• pp.303-306
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• 2001

STFR were fabricated on the floating membrane which was formed by SOI-micromachining process. The floating membranes having a thickness range of $3{\sim}15{\mu}m$ could be simply formed by micromachining the directly-bonded and thinned SOI substrate. The STFR device fabricated on the $15{\mu}m$-thick membrane showed resonance frequency of fr = 1.65 GHz, coupling coefficient of Keff2 = 2.4 %, and series and parallel quality factors of Qs = 91.7 and Qp = 87.7, respectively.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2004년도 춘계학술대회
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• pp.96-99
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• 2004

A new proton conductive inorganic-organic hybrid membrane doped with $H_3PO_4$ was fabricated via sol-gel process wit 3- glycidoxypropyltrimethoxysilane(GPTMS), 3-aminopropyltriethoxysilane(APTES) and tetraethoxysilane(TEOS) asprecursors. Theproto conductivity of about 3.0$\times10^{-3}S/cm$ was obtained at $120^{\circ}C$ under $50\%$ relative humidity (R.H). DTA curves showed that the thermal stability of the membrane is significantly enhanced by the presence of $SiO_2$ framework up to $250^{\circ}C$. SEM and XRD revealed that the gel is microporou and amorphous. The addition of APTES improved the conductivity of the membranes and the effect of the APTES on the conductivity was also discussed in this paper.

• 한국재료학회지
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• 제7권2호
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• pp.102-106
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• 1997

박막형 접촉연소식을 포함한 마이크로 가스센서에서 membrane은 Si식각시 식각정지용으로서 또 센서 소자를 지지하는 층으로서 응력이 없어야 하며 이는 응력이 membrane파괴의 주 원인으로 작용하기 때문이다. 이에 따라 본 연구에서는 증착조건이 low pressure chemical vapor deposition(LPCVD)법과 sputtering법으로 제작된 $SiN_{x}$과 $SiN_{x}/SiO_{x}/(NON)$막의 응력고 굴절율 변화에 미치는 효과에 대한 실험을 행하였다. LPCVD의 경우 단일막인 $SiN_{x}$의 압축응력 및 굴절율을 나타내었다. Sputtering의 경우 $SiN_{x}$는 공정압력이 1mtorr에서 30torr까지 증가할수록 인가전력밀도가 $2.74W/cm^2$에서 $1.10W/cm^2$으로 감소할수록 응력값은 압축에서 인장으로 전환되었으며 본 실험에서 응력이 가장 낮게 나온 시편의경우 압축응력으로 $1.2{\times}10^{9}dyne/cm^2$가 공정압력 10mtorr, 인가전력밀도 $1.37W/cm^2$에서 얻어졌다. 굴절율은 공정압력이 1motorr에서 30motorr까지 증가할수혹 인가전력밀도가 $2.74W/cm^2$에서 $1.10W/cm^2$으로 감소할수록 감소하여 2.05에서 1.89의 변화를 보였다. LPCVD와 sputtering으로 증착된 막들은 모두 온도가 증가함에 따라 응력이 감소하였으며 온도감소시 소성적인 특성을 나타내었다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.487-488
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• 2006

Novel bisphenol-based wholly aromatic poly(ether sulfone-ketone) copolymer containing pendant sulfonate groups were prepared by direct aromatic nucleophilic substitution polycondensation of 4,4-difluorobenzophenone, 2,2'-disodiumsulfonyl-4,4'-fluorophenylsulfone (40mole% of bisphenol A) and bisphenol A. Polymerization proceeded quantitatively to high molecular weight in N-methyl-2-pyrrolidinone at $180^{\circ}C$. Organic-inorganic composite membranes were obtained by mixing organic polymers with hydrophilic $SiO_2$ (ca. 20nm) obtained by sol-gel process. The polymer and a series of composite membranes were studied by FT-IR, $^1HNMR$, differential scanning calorimetry (DSC) and thermal stability. The proton conductivity as a function of temperature decreased as $SiO_2$ content increased, but methanol permeability decreased. The nano composite membranes were found to posse all requisite properties; Ion exchange capacity (1.2meq./g), glass transition temperatures $(164-183\;^{\circ}C)$, and low affinity towards methanol $(4.63-1.08{\times}10^{-7}\;cm^2/S)$.

• Geomechanics and Engineering
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• 제34권2호
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• pp.125-138
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• 2023

To improve the understanding of infiltration characteristic of modified slurry and the support efficiency of filter cake in silty sand strata, the slurry infiltration (SI) and filter cake formation (FCF) were investigated in a laboratory apparatus. The water discharge and the excess pore pressure at different depths of silty sand strata were measured during SI. The relationship between permeability coefficient/thickness ratio of filter cake (k_c/ΔL) and effective slurry pressure conversion rate of filter cake (η) were analyzed. Moreover, the SI and FCF process as well as the modification mechanism of CMC (carboxymethyl cellulose) were clarified. The experimental results indicate the formation of only external filter cake in the silty sand strata. The slurry particles obtain thicker water membrane after being modified by CMC, which blocks partial water path in filter cake and decreases the water discharge significantly. The silty sand excavated from tunnel face also contributes to the water discharge reduction. The k_c of the external filter cake ranges from 3.83×10^-8 cm/s to 7.44×10^-8 cm/s. The η of the external filter cake is over 96%, which decreases with increasing k_c/ΔL. A silty sand content within 10% is suggested during construction to ensure the uniformity of the filter cake.

• Bulletin of the Korean Chemical Society
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• 제9권5호
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• pp.292-295
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• 1988

Macrocyclic ligands have been studies as cation carriers in a bulk liquid membrane system. $Cu^{2+}$ has been transported using nitrogen substituted macrocycles as carriers and several transition metal ions($M^{n+}\;=\;Mn^{2+},\;Co^{2+},\;Ni^{2+},\;Cd^{2+},\;Pb^{2+}\;and\;Ag^{+}$) have been transported using $DBN_3O_2,\;DBN_2O_2,\;Me_6N_414C4$ and DA18C6 as carriers in a bulk liquid membrane system. Competitive $Cu^{2+}-M2^+$ transport studies have also been carried out for the same system. In single cation transport experiments, the best macrocyclic ligand for transport is a ligand that gives a moderately stable rather than very stable complex in the extraction. However, when both cations are present in the source phase, the cation which forms the most stable complex with carrier is favored in transport over other cations. Generally, the nitrogen substiituted macrocycles transport $Cu^{2+}$ selectively over $Mn^+$. Ligand structure, equilibrium constant (or stability constant) for complex formation, source phase pH and carrier concentration are also important parameters in transport experiments.