• Title/Summary/Keyword: SiC C3M

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Petrology of Alkali Volcanic Rocks in Northern part of Ulrung Island (울릉도(鬱陵島) 북부(北部) 알칼리 화산암류(火山岩類)에 대(對)한 암석학적(岩石學的) 연구(硏究))

  • Kim, Yoon Kyu;Lee, Dai Sung
    • Economic and Environmental Geology
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    • v.16 no.1
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    • pp.19-36
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    • 1983
  • The study revealed that the sequence of volcanism in Ulrung island can be classified into 5 stages, and the volcanic history is summerized as follow: 1st stage: Eruption of basaltic agglomerates, tuffs and lavas, 2nd stage: Eruption of trachytic and trachyandesitic agglomerates and tuffs, 3rd stage: Eruption of trachyte lavas and their lapilli tuffs, 4th stage: Eruption of trachyte lavas and nepheline phonolites, 5th stage: Eruption of pumice, trachytic ash and lapilli, and plutonic ejecta (fragments of alkali gabbro, monzonite and alkali feldspar syenite) and a subsequent caldera formation. Finally, a small scale eruption of leucite bearing trachyandesite lava in the caldera. Several evidences show that there have been long erosional intervals between the 1st and 2nd stages and between the 4th and 5th stages. A K-Ar age for trachybasalt lava of the 1st stage was determined to be 1.8 Ma, and a $C^{14}$ age, 9300Y. (Machida, 1981) is available for these volcanic events. Therefore, it is considered that volcanic activity of the island above sea level began at least in early Pleistocene, and continued to until 9300 years ago exploding large amount of pumice, prior to pouring out of leucite bearing trachyandesite from the inner caldera. Using solidification index (SI) of Kuno, microscopic texture and mineral composition as criteria of the classification, the volcanic rocks are classified into alkali basalt, trachybasalt, trachyandesite, trachyte and phonolite. These are mostly prophyritic in texture. Main constituent minerals of alkali basalt and trachybasalt are plagioclase, olivine, Ti-augite and magnetite. Principal minerals of trachyandesite are plagioclase, anorthoclase, clinopyroxenes, kaersutite, biotite and magnetite. Trachyte and phonolite consist mainly of anorthoclase, clinopyroxene and magnetite, showing typical trachytic texture in groundmass. In solidification index, alkali basalt ranges from 39 to 27, trachybasalt 17 to 14, trachyandesite 12 to 9 and trachyte 8.15 to 0.72. A trend of compositional variation showing a typical alkali volcanic rock series is revealed on $SiO_2$-oxides and SI-oxides diagrams. In $SiO_2$-total alkali diagram, alkali lime index and An-Ab'-Or diagram, the samples fall into the fields of potassic series of the alkali volcanic rock series, whereas in A-F-M diagram show a trend toward the alkali enrichment with a curve approaching toward the iron apex. In particular, trachybasalt lavas in this island have higher total iron contents which is comparable to alkali rocks in other areas, e. g. as Gough and Tristan volcanic islands located near the Mid-Oceanic ridge in South Atlantic Ocean.

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Greenhouse Environment and Growth of Green Pepper (Capsicum annuum L.) in Greenhouse Covered with CEM BIO Film (CEM BIO Film 피복시설의 환경특성과 풋고추 생육)

  • Chun, Hee;Kim, Kyung-Je;Kwon, Young-Sam;Kim, Hyun-Hwan;Lee, Si-Young
    • Journal of Bio-Environment Control
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    • v.9 no.3
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    • pp.161-165
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    • 2000
  • Spectroradiometric light transmittance from 300 to 1,100nm in the greenhouse covered with the CEM BIO polyethylene film was greater than that in the greenhouse covered with polyethylene film (control). As a whole, solar radiation transmittance into greenhouse was a half level, due to shades caused by double layer covering, frame and equipment. Net radiation energy emitted throughout surface of the greenhouse covered with CEM BIO polyethylene film was 5,424.5W.m$^{-2}$ , which was lower by 2.9% as compared to that of the greenhouse covered with polyethylene film. Photosynthetically active radiation from 400 to 700nm of the greenhouse covered with CEM BIO polyethylene film was 3,861.2W.m$^{-2}$ , which was higher by 3.8% as compared to hat of the greenhouse covered with polyethylene film. Accumulated minimum air temperature from Oct. 7, 1997 to Oct. 16, 1997 of the greenhouse covered with CEM BIO polyethylene film was 100.5$^{\circ}C$, which was higher by 2.5$^{\circ}C$ as compared to that of the greenhouse covered with polyethylene film. As results, height, stem diameter, leaf count, leaf area, fresh weight and dry weight of green pepper plants and canopy production structure measured at 30 days after transplanting were enhanced. Mean fruit weight n the greenhouse covered with CEM BIO polyethylene film was 11.28 g and 1.25 g greater as compared to that in the greenhouse covered with polyethylene film, due to increased fruit diameter and flesh thickness. Percent marketable fruits produced in the greenhouse covered with CEM BIO polyethylene film were 96.1%, and was greater by 2.7% thant that of the greenhouse covered with polyethylnee film due to decreased infection, sterility, severe curve and twisted fruits. The green pepper yield of the greenhouse covered with CEM BIO polyethylene film from Nov. 19, 1997 to Feb. 3, 1998 was greater by 974 kg per hectare than that of the greenhouse covered with polyethylene film, but the total fruit had no difference.

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The Design and Fabrication of Conversion Layer for Application of Direct-Detection Type Flat Panel Detector (직접 검출형 평판 검출기 적용을 위한 변환층 설계 및 제작)

  • Noh, Si-Cheol;Kang, Sang-Sik;Jung, Bong-Jae;Choi, Il-Hong;Cho, Chang-Hoon;Heo, Ye-Ji;Yoon, Ju-Seon;Park, Ji-Koon
    • Journal of the Korean Society of Radiology
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    • v.6 no.1
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    • pp.73-77
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    • 2012
  • Recently, Interest to the photoconductor, which is used to flat form X-ray detector such as a-Se, $HgI_2$, PbO, CdTe, $PbI_2$ etc. is increasing. In this study, the film layer by using the photoconductive material with particle sedimentation was fabricated and evaluated. The quantization efficiency of the continuous X-ray with the 70 kVp energy bandwidth was analyzed by using the Monte Carlo simulation. With the results, the thickness of film with 64 % quantization efficiency was 180 ${\mu}m$ which is similar to the efficiency of 500 ${\mu}m$ a-Se film. And $HIg_2$ film has the high quantization efficiency of 74 % on 240 ${\mu}m$ thickness. The electrical characteristics of the 239 ${\mu}m$ $Hgl_2$ films produced by particle sedimentation were shown as very low dark current(under 10 $pA/mm^2$), and high sensitivity(19.8 mC/mR-sec) with 1 $V/{\mu}m$ input voltage. The SNR, which is influence to the contrast of X-ray image, was shown highly as 3,125 in low driving voltage on 0.8 $V/{\mu}m$. With the results of this study, the development of the low-cost, high-performance image detector with film could be possible by replacing the film produced by particle sedimentation instead to a-Se detector.

A Study on Batch-Type Remote Plasma Dry Cleaning Process for Native Oxide Removal (배치식 플라즈마 세정 설비를 이용한 자연산화막 제거 공정)

  • Park, Jae-Young;Yi, Wook-Yeol;Hyung, Yong-Woo;Nam, Seok-Woo;Lee, Hyeon-Deok;Song, Chang-Lyong;Kang, Ho-Kyu;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.247-251
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    • 2004
  • 반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

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Effect of Long-Term Annual Dressing of Organic Matter on Physico-Chemical Properties and Nitrogen Uptake in the Paddy Soil of Fluvio-Marine Deposit (하해혼성 평야지 논토양에서 유기물 장기 연용이 토양의 이화학적 특성 변화 및 질소 흡수에 미치는 영향)

  • Yang, Chang-Hyu;Jeong, Ji-Ho;Kim, Taek-Kyum;Kim, Sun;Baek, Nam-Hyun;Choi, Weon-Young;Kim, Young-Doo;Jung, Won-Kyo;Kim, Si-Ju
    • Korean Journal of Soil Science and Fertilizer
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    • v.43 no.6
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    • pp.981-986
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    • 2010
  • This study was carried out to investigate the effects of fertilizer and organic resource annual dressing for 30 years of Jeonbug series (silt loam) on soil properties and rice N uptake in paddy field soil. In the study field, treatments including control (NPK), NPK+rice straw, NPK+rice straw compost and nitrogen fertilization levels at 0, 100, 150, 200, 250 kg $ha^{-1}$ have been imposed for 30 years. Soil hardness and bulk density decreased from 15.7 mm and 1.381 Mg $m^{-3}$ in the control to 12.5 mm and 1.244 Mg $m^{-3}$ in NPK+rice straw compost treatment, respectively, indicating improvement of soil physical conditions such as porosity. Co-application of straw compost with NPK also result in a better chemical properties than NPK alone as it increased available phosphate (from 96 to 133 mg $kg^{-1}$), available silicate (from 81 to 116 mg $kg^{-1}$), and cation exchange capacity (from 9.8 to 11.4 $cmol_c\;kg^{-1}$). Soil organic matter concentration of top soil (0 to 7.5 cm in depth) was higher in NPK+rice straw and NPK+rice straw compost than in control. Fertilizer N uptake amount was much higher in NPK+rice straw (nitrogen fertilization level; 250 kg $ha^{-1}$) and NPK+rice straw compost (nitrogen fertilization levels; 200, 250 kg $ha^{-1}$) plots compared to the control (nitrogen fertilization level; 100 kg $ha^{-1}$) plot. Nitrogen use efficiency was showed significantly high in the NPK+rice straw compost (nitrogen fertilization levels; 100, 150 kg $ha^{-1}$) plot compared to the control (nitrogen fertilization level; 100 kg $ha^{-1}$) plot. Therefore, it was suggested that application of organic inputs is helpful in improving soil fertility and physical conditions and thus in N uptake.

The Characteristics of PEO-Based Composite Electrolyte added functionalized SiO_2$ Filler and (3-cyanopropyl)methylsiloxane cyclics. (기능성 실리카 filler와 (3-cyanopropyl)methylsiloxane cyclics를 가소제로 이용해 제조되어진 PEO-Based 전해질의 특성 연구)

  • 이재필;김정남;문희수;이승원;이영식;서동학;김인수;박종완
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.214-214
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    • 2003
  • 고체 고분자 전해질에 대한 연구는 1979년 wright와 Armand에 처음 시작된 이래로 지난 20여년간 연구가 계속적으로 지속되고 있다. 전지의 적용되기 위해 전해질이 갖추어야 할 조건중에 이온전도도가 상온에서 10-4 S/cm 이상의 전도도를 나타내야 하지만 지금까지 연구되고 있는 여러 고체 고분자 전해질은 이런 조건을 만족시키지 못하고 있는 실정이다. 본 연구에서는 이런 상온에서의 이온 전도성을 향상시키기 위해 여러 종류의 실리카와 세라믹 계열의 첨가제를 첨가하여 이온전도성의 향상을 꾀하고자 하였다. 본 연구에서는 고체 고분자 전해질의 host polymer로써 분자량 400,000 의 Polyethylene oxide를 사용하였으며 Lithuim salt로는 Lithium (bisperfluroethylsulfonyl)imide(3M)를 기본적으로 사용하였다. 여기에 가소제의 역활로써 (3-cyanopropyl)methylsiloxane cyclics를 첨가하였고 표면그룹이 CH3와 OH기로 이루어진 기능성 나노 실리카를(<11nm)이용하여 함량별 전기 화학적 특성 및 기본 물성을 측정하였다. 기본적으로 이 네 가지 물질을 유기용매 Acetonitril에 잘 용해하여 Solid Casting방법으로 80-100 마이크로의 복합고분자 전해질을 제조하였다. Homogeneous하고 uniform한 필름 제조하기 위해 9$0^{\circ}C$에서 열처리를 24h 동안 실시하였다. 제조되어진 복합고분자전해질은 XRD를 통하여 결정성을 조사하였고 DSC를 이용하여 유리 전이온도 및 결정화도를 조사하였다. 복합고체고분자의 전기화학적 성질을 평가하기 위해 blocking electrode를 제작하여 임피던스 스펙트로 스코피를 이용하여 이온전도성을 측정하였다. 또한 복합 고분자 전해질의 온도의존성에 대해서도 조사하였다. 또한 실제 전지의 작동구간에서의 전해질의 안정성을 확인하기 위해 LSV를 측정하였고. Li metal을 사용하여 non-blocking electrode를 제작하여 복합고분자 전해질과의 계면저항을 측정하였다.

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용액 방법을 사용한 TIZO 박막 트랜지스터 제작 및 전기적 특성 조사

  • Seo, Ga;Jeong, Ho-Yong;Lee, Se-Han;Kim, Tae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.400-400
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    • 2012
  • 산화물 반도체는 넓은 에너지갭을 가지고 높은 이동성과 높은 투명성을 가지기 때문에 초고 속 박막 트랜지스터(Thin film transistor; TFT)에 많이 응용되고 있다. 그러나 ZnO 및 $In_2O_3$ 산화물 반도체를 박막트랜지스터에 사용할 경우 소자가 불안정하여 전기적 성질이 저하되고 문턱전압의 이동이 일어난다. TFT에 사용되는 산화물 반도체로는 GaInZnO, ZrInZnO, HfInZnO 및 GaSnZnO의 전기적 특성에 관한 연구가 많이 되었다. 그러나 titanium-indium-zinc-oxide (TIZO) TFT에 대한 연구는 비교적 적게 수행 되었다. 본 연구에서는 TFTs의 안정성을 향상하기 위하여 TFT의 채널로 사용되는 TiInZnO를 형성하는데 간단한 제조 공정과 낮은 비용의 용액 증착방법을 사용하였다. 졸-겔 전해액은 Titanium (IV) isopropoxide $[Ti(OCH(CH_3)_2)_4]$, 0.1 M Zinc acetate dihydrate $[Zn(CH_3COO)_2{\cdot}2H_2O]$ 그리고 indium nitrate hydrate $[In(NO_3)_3{\cdot}xH_2O]$을 2-methoxyethanol의 용액에 합성하였다. $70^{\circ}C$에서 한 시간 동안 혼합 하였다. Ti의 몰 비율은 10%, 20% 및 40% 로 각각 달리하여 제작하였다. $SiO_2$층 위에 2,500 rpm 속도로 25초 동안 스핀 코팅하여 TFT를 제작하였다. TIZO 박막에 대한 X-선 광전자 스펙트럼 관측 결과는 Ti 몰 비율이 증가함에 따라 Ti 2p1/2피크의 세기가 증가함을 보여주었다. TiZO 박막에 Ti 원자를 첨가하면 $O^{2-}$ 이온이 감소하기 때문에 전하의 농도가 변화하였다. 전하 농도의 변화는 TiZO 채널을 사용하여 제작한 TFT의 문턱전압을 양 방향으로 이동 하였으며 off-전류를 감소하였다. TiZO 채널을 사용하여 제작한 TFT의 드레인 전류-게이트 전압 특성은 on/off비율이 $0.21{\times}107$ 만큼 크며 이것은 TFT 소자로서 우수한 성능을 보여주고 있다.

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Crystal Structure of a Benzene Sorption Complex of Dehydrated Fully $Cd^{2+}$-Exchanged Zeolite X

  • 김양;염영훈;최은영;김안나;한영욱
    • Bulletin of the Korean Chemical Society
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    • v.19 no.11
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    • pp.1222-1227
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    • 1998
  • The crystal structure of a benzene sorption complex of fully dehydrated Cd2+-exchanged zeolite X, Cd46Si100Al92O384·43C6H6 (a=24.880(6) Å), has been determined by single-crystal X-ray diffraction techniques in the cubic space group Fd3 at 21 ℃. The crystal was prepared by ion exchange in a flowing stream of 0.05 M aqueous Cd(NO3)2 for 3 d, followed by dehydration at 400 ℃ and 2 x 10-6 Torr for 2 d, followed by exposure to about 92 Torr of benzene vapor at 22 ℃. The structure was determined in this atmosphere and refined to the final error indices R1=0.054 and Rw=0.066 with 561 reflections for which I > 3σ(I). In this structure, Cd2+ ions are found at four crystallographic sites: eleven Cd2+ ions are at site 1, at the centers of the double six-oxygen rings; six Cd2+ ions lie at site I', in the sodalite cavity opposite to the double six-oxygen rings; and the remaining 29 Cd2+ ions are found at two nonequivalent threefold axes of unit cell, sites Ⅱ' (in the sodalite cavity ) and site Ⅱ (in the supercage) with occupancies of 2 and 27 ions, respectively. Each of these Cd2+ ions coordinates to three framework oxylkens, either at 2.173(13) or 2.224(10) Å, respectively, and extends 0.37 Å into the sodalite unit or 0.60 Å into the supercage from the plane of the three oxygens to which it is bound. The benzene molecules are found at two distinct sites within the supercages. Twenty-seven benzenes lie on threefold axes in the large cavities where they interact facially with the latter 27 site-Ⅱ Cd2+ ions (Cd2+-benzene center=2.72 Å; occupancy=27 molecules/32 sites). The remaining sixteen benzene molecules are found in 12ring planes; occupancy=16 molecules/16 sites. Each hydrogen of these sixteen benzenes is ca. 2.8/3.0 Å from three 12-ring oxygens where each is stabilized by multiple weak electrostatic and van der Waals interactions with framework oxygens.

Distribution Characteristic of Exploitable Macrobenthic Invertebrates of Beach Sediments in the Southern Coastal Water of Jeju Island (제주남부해역 사질대 유용생물 분포특성)

  • Ko, Jun-Cheol;Ko, Hyuck-Joon;Kim, Bo-Yeon;Cha, Hyung-Kee;Chang, Dae-Su
    • The Korean Journal of Malacology
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    • v.28 no.3
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    • pp.197-213
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    • 2012
  • This study was performed to know the community structure of macrobenthos and environmental factors at each 16 stations in the subtidal sandy bottoms of the southern coastal water of Jeju Island from July to November, 2011. Mean temperature and mean salinity were $20.2-22.7^{\circ}C$, 33.7-34.9 psu which shows stable water messes. Chlorophyll a concentrations of phytoplankton ranged from 0.71 to 1.71 mg/L (1.11 mg/L), showing higher July than September and November with a blooming in summer. The mean concentration values (the ranges in parentheses) of nitrate, phosphate, and silicate are 0.029-0.206 mg/L (0.101 mg/L), 0.001-0.027 mg/L (0.007 mg/L), 0.024-0.682 mg/L (0.454 mg/L), respectively. However, the values higher coastal zone due to influxes from the land. A total of 37 species was identified. of these mollusca comprised 29 secies (78.4%); Echinodermata 5 (13.5%); Arthropoda 3 (8.1%). density and biomass were estimated to be 550 ind./$m^2$ and 20,951.8 gwwt/$m^2$, respectively. Mollusca were the most dominant faunal group in terms of abundance (481 ind./$m^2$) and number of species as well, whereas bivalves were predominant in biomass (16,647.6 gwwt/$m^2$). The dominant species were Vasticardium burchardi, Oblimopa japonica, Mactar achatina, Bornatemishistrioiw akawai, Paphia vernicosa, Amusium japonicum, Glycymeris albolineata, Astriclypeus manni in 15-30 m. The seasonal variation appeared as distinct, Mollusca of individual and biomass. When summer was make a slow increase, after the highest decrease in autumn. The abundance of macrobenthic invertebrates showed significant correlation with environmental factors (Chlorophyll a, DIN, $SiO_2$, Fine sand, Very fine sand) in almost all sampling depths. The biodiversity, evenness richness index were appeared 1.56-2.50 (H'), 0.49-0.80 (E'), 4.12-4.67 (R) in each stations. The dominace index were appeared Highest in November and lowest in September.

Calculation and measurement of optical coupling coefficient for bi-directional tancceiver module (양방향 송수신모듈 제작을 위한 광결합계수의 계산 및 측정)

  • Kim, J. D.;Choi, J. S.;Lee, S. H.;Cho, H. S.;Kim, J. S.;Kang, S. G.;Lee, H. T.;Hwang, N.;Joo, G. C.;Song, M. K.
    • Korean Journal of Optics and Photonics
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    • v.10 no.6
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    • pp.500-506
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    • 1999
  • We designed and fabricated a bidirectional optical transceiver module for low cost access network. An integrated chip forming a pin-PD on an 1.3 urn FP-LD was assembled by flip-chip bonding on a Si optical bench, a single mode fiber with an angled end facet was aligned passively with the integrated chip on V-groove of Si-optical bench. Gaussian beam theory was applied to evaluate the coupling coefficients as a function of some parameters such as alignment distance, angle of fiber end facet, vertical alignment error. The theory is also used to search the bottle-neck between transmittance and receiving coupling efficiency in the bi-directional optical system. Tn this paper, we confirmed that reduction of coupling efficiency by the vertical alignment error between laser beam and fiber core axis can be compensated by controlling the fiber facet angle. In the fabrication of sub-module, a'||'&'||' we made such that the fiber facet have a corn shape with an angled facet only core part, the reflection of transmitted laser beam from the fiber facet could be minimized below -35 dE in alignment distance of 2: 30 /J.m. In the same condition, transmitted output power of -12.1 dEm and responsivity of 0.2. AIW were obtained.

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