• 한국세라믹학회지
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• 제43권10호
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• pp.595-600
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• 2006

The preparation of $\beta$-SiAlON powder by SHS in the system of $Si-Al-SiO_2-NH_4F(\beta-Si_3N_4)$ was investigated in this study. In the preparation of SiAlON powder, the effect of gas pressure, compositions such as Si, $NH_4F$, \beta-Si_3N_4$ and additive in mixture on the reactivity were investigated. At 50 atm of the initial inert gas pressure in reactor, the optimum composition for the preparation of pure $\beta$-SiAlON was $3Si+Al+2SiO_2+NH_4F$. The $\beta$-SiAlON powder synthesized in this condition was a single phase $\beta$-SiAlON with a rod like morphology.

• 한국세라믹학회지
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• 제51권3호
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• pp.197-200
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• 2014

We investigated the influence of blistering on $Al_2O_3$/SiON stacks and $Al_2O_3$/SiNx:H stacks passivation layers. $Al_2O_3$ film provides outstanding Si surface passivation quality. $Al_2O_3$ film as the rear passivation layer of a p-type Si solar cell is usually stacked with a capping layer, such as $SiO_2$, SiNx, and SiON films. These capping layers protect the thin $Al_2O_3$ layer from an Al electrode during the annealing process. We compared $Al_2O_3$/SiON stacks and $Al_2O_3$/SiNx:H stacks through surface morphology and minority carrier lifetime after annealing processes at $450^{\circ}C$ and $850^{\circ}C$. As a result, the $Al_2O_3$/SiON stacks were observed to produce less blister phenomenon than $Al_2O_3$/SiNx:H stacks. This can be explained by the differences in the H species content. In the process of depositing SiNx film, the rich H species in $NH_3$ source are diffused to the $Al_2O_3$ film. On the other hand, less hydrogen diffusion occurs in SiON film as it contains less H species than SiNx film. This blister phenomenon leads to an increase insurface defect density. Consequently, the $Al_2O_3$/SiON stacks had a higher minority carrier lifetime than the $Al_2O_3$/SiNx:H stacks.

• 한국분말재료학회지
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• 제28권6호
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• pp.502-508
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• 2021

SiAlON-based ceramics are a type of oxynitride ceramics, which can be used as cutting tools for heat-resistant super alloys (HRSAs). These ceramics are derived from Si3N4 ceramics. SiAlON can be densified using gas-pressure reactive sintering from mixtures of oxides and nitrides. In this study, we prepare an α-/β-SiAlON ceramic composite with a composition of Yb_0.03Y_0.10Si_10.6Al_1.4O_1.0N_15.0. The structure and mechanical/thermal properties of the densified SiAlON specimen are characterized and compared with those of a commercial SiAlON cutting tool. By observing the crystallographic structures and microstructures, the constituent phases of each SiAlON ceramic, such as α-SiAlON, β-SiAlON, and intergranular phases, are identified. By evaluating the mechanical and thermal properties, the contribution of the constituent phases to these properties is discussed as well.

• 한국진공학회지
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• 제10권1호
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• pp.22-26
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• 2001

Plasma assisted molecular beam epitaxy(PAMBE)를 사용하여 Si 기판위에 성장시킨 AlN 박막에 대하여 성장온도 및 기판의 방향성에 따른 박막의 결정성 변화를 분석하였다. Reflection high energy electron diffraction(RHEED) 패턴을 이용하여 성장 중의 결정성을 관찰하였고, 성장 후에는 X-ray diffraction(XRD), double crystal X-ray diffraction(DCXD), transmission electron microscopy/diffraction(TEM/TED)분석을 하였다. $850^{\circ}C$이상의 온도에서 Si(100)위에 성장된 AlN박막은 육방정계의 c축 방향으로 우선 배향되어 있음을 확인하였으며 Si(111)위에 성장된 AlN박막의 경우 AlN(0001)/Si(111), AlN(1100)/Si(110), AlN(1120)/Si(112)의 결정방위를 가지고 성장하였음을 확인하였다. 또한 Si(111) 기판 위에서는 전위와 적층결함 등 많은 결정결함에 의해 DCD패턴의 반치폭이 2$\theta$=$36.2^{\circ}$에서 약 3000arcsec에 이르는 등 결정성은 좋지 않았으나 AlN박막이 단결정으로 성장된 것으로 나타났다.

• 마이크로전자및패키징학회지
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• 제7권2호
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• pp.37-42
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• 2000

저유전상수 폴리머와 $SiO_2$위에 형성된 Al/Ti박막의 우선방위에 대해 비교하였다. DC 마그네트론 스퍼터를 이용하여 50 nm 두께의 Ti과 500 nm의 Al-1%Si-0.5%Cu(wt%) 합금 박막을 저유전상수 폴리머와 $SiO_2$기판위에 증착하였다. Al의 우선방위는 XRD $\theta$-2$\theta$와 rocking curve로 측정하였고, Al/Ti박막의 미세조직은 투과전자현미경 (TEM)으로 관찰하였다. 저 유전상수 폴리머 위에 증착된 Al/Ti박막은 $SiO_2$위에 증착된 것보다 낮은 우선방위를 가졌다. 단면 TEM으로 Ti을 관찰한 결과, $SiO_2$위의 Ti의 결정립은 기판에 수직하게 성장하였으나 저유전상수 폴리머 위의 Ti 결정립은 등축정으로 성장하였으며, 저유전상수 폴리머위의 Al/Ti박막이 낮은 우선방위를 갖는 이유는 Ti 미세조직 때문이었다.

• 한국주조공학회지
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• 제42권5호
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• pp.273-281
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• 2022

Al-Cu-Si 3원계 공정합금의 응고거동과 미세조직 변화를 이해하기 위해서, 금형 예열온도를 달리하여 Al-Cu-Si 3원계 공정합금의 미세조직 변화를 관찰하였다. 금형 예열온도가 500℃일 때, 초정 Si과 덴드라이트 형상의 Al2Cu상이 관찰되며, 이후 (α-Al+Al2Cu)의 2원계 공정상이 관찰된다. 금형 예열온도가 300℃일 때 미제조직은 금형 예열온도가 500℃일 때와 유사하나 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 영역과 관찰되지 않는 영역이 나타난다. 금형 예열온도가 150℃인 경우에는 미세조직이 (α-Al+Al2Cu)의 2원계 공정상과 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 Bimodal 구조를 나타낸다. 금형 예열온도를 달리 하였을 때 가장 큰 변화를 나타내는 상은 Si상이며, 임계냉각속도를 지나면 (α-Al+Al2Cu+Si)의 3원계 공정상이 형성되는 순간에 빠른 냉각에 의한 Si의 성장이 억제되면 Cooperative 성장을 하기 때문에 Al, Cu의 성장도 함께 억제된다. 서로 다른 합금설계 전산모사 프로그램을 통해 Al-27wt%Cu-5wt%Si의 3원계 공정 합금을 분석한 결과, 합금설계 전산모사 프로그램에 따라 결과의 차이가 발생하며, 전산모사의 신뢰성을 높이기 위해서는 실제 주조를 통한 미세조직 분석이 수반되어야 한다.

• 한국주조공학회지
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• 제20권2호
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• pp.89-96
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• 2000

The effects of modification processing on the refinement of primary Si and the wear behavior of hyper-eutectic Al-Si alloys have been mainly investigated. Refining effects of primary Si in Al-17%Si alloy was more efficient than that of B.390 alloy. Optimum condition of getting the finest primary Si microstructure was when AlCuP modifier is added into the melt at $750^{\circ}C$ and held it at $700^{\circ}C$ for 30 minutes. Wear loss in the specimens of as-cast condition decreases as the size of primary Si decreases, in the order of B.390 alloy, B.390 alloy with AlCuP addition, Al-17%Si alloy and Al-17%Si alloy with AlCuP addition. Wear loss in the aged condition of Al-17%Si alloy, B.390 alloy and B.390 alloy with AlCuP addition decreased due to the increase of compressive residual stress in the matrix by the aging treatment. While, wear loss increased in the aged specimens of Al-17%Si alloy with AlCuP addition and Hepworth addition in which compressive residual stress decreases by the aging treatment. Therefore, it is assumed that higher compressive residual stress in the matrix can reduce the wear loss in composite materials such as hyper-eutectic Al-Si alloys.

• 한국표면공학회지
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• 제36권2호
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• pp.109-115
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• 2003

Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti, Al, Si)N crystallites and amorphous Si3N4 by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film haying the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of nc-(Ti,Al,Si) N/a$-Si_3$$N_4$.

• 한국표면공학회지
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• 제42권2호
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• pp.73-78
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• 2009

Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the microstructure and mechanical properties of Ti-Al-C-N films were systematically investigated. It was revealed that the microstructure of Ti-Al-Si-C-N coatings changed from a columnar to a nano-composite by the Si addition. Due to the nanocomposite microstructure of Ti-Al-Si-C-N coatings, the microhardness of The Ti-Al-Si-C-N coatings significantly increased up to 56 GPa. In addition the average friction coefficients of Ti-Al-Si-C-N coatings were remarkably decreased with Si addition. Therefore, Ti-Al-Si-C-N coatings can be applicable as next-generation hard-coating materials due to their improved hybrid mechanical properties.

• 한국주조공학회지
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• 제21권2호
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• pp.119-126
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• 2001

Al/15%Gr. composite have been manufactured by mixing, compacting, and extruding aluminium powder and graphite powder. Then, Al-6%Si/x%Gr., Al-12%Si/x%Gr., and Al-18%Si/x%Gr.(x: 0, 2, 4, 6, 8) composites have been manufactured by remelting the extruded materials(Al/15%Gr.), Al-33.3%Si alloy, and Al ingot, etc. We conducted experiments to chracterize the microstructure, and damping properties and hardness. The result of microstructure experiment on Al-x%Si/y%Gr. composites reveals the good dispersion of graphite. As to Al-Si/y%Gr. composites, the more the graphite contents, the less the tensile strength. And the tensile strength varied according to contents of Si: with its highest value in Al-18%Si/y%Gr. composites and lowest in Al-6%Si/y%Gr. composites. As to Al-x%Si/y%Gr. composites, the more the contents of graphite, the more the vibration damping properties. And we can get the highest vibration damping rate in Al-12%Si/y%Gr. composites which matrix structure is an eutectic component.