• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.321-322
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• 2006

Nano-structured ceramics, which consist of structural elements with nanometer-size crystallites, are expected to show various unusual properties. We developed the novel nano-structured ceramics which consists of $Si_3N_4$ and TiN and a self-lubricant material. The ceramics was fabricated by powder metallurgy process using mechano-chemical grinding process and short-time sintering process. Each grain size of matrix and the self-lubricant particle was under about 50 nm and a few namometer. It showed high wear resistance and low friction coefficient by controlling of microstructure.

• Carbon letters
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• v.15 no.3
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• pp.180-186
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• 2014

This study highlights a novel method and mechanism for the rapid and effective milling of carbon fibers (CFs) in silicon carbide (SiC) powder, and also the dispersion of CFs in SiC powder. The composite powders were prepared by chopping and exfoliation of CFs, and ball milling of CFs and SiC powder in isopropyl alcohol. A wide range of CFs loading, from 10 to 50 vol%, was studied. The milling of CFs and SiC powder was checked by measuring the average particle size of the composite powders. The dispersivity of CFs in SiC powder was checked through scanning electron microscope. The results show that the usage of exfoliated CF tows resulted in a rapid and effective milling of CFs and SiC powder. The results further show an excellent dispersion of CFs in SiC powder for all CFs loading without any dispersing agent.

• Journal of Ocean Engineering and Technology
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• v.16 no.6
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• pp.60-64
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• 2002

This paper describes the machining characteristics of the MoSi$_2$--based composites through the process of electric discharge drilling with various tubular electrodes. In addition to hardness characteristics, microstructures of Nb/MoSi$_2$laminate composites were evaluated from the variation of fabricating conditions, such as preparation temperature, applied pressure, and pressure holding time. MoSi$_2$-based composites have been developed in new materials for jet engines of supersonic-speed airplanes and gas turbines for high-temperature generators. These high performance engines may require new hard materials with high strength and high temperature-resistance. Also, with the exception of grinding, traditional machining methods are not applicable to these new materials. Electric discharge machining (EDM) is a thermal process that utilizes a spark discharge to melt a conductive material. The tool electrode is almost -unloaded, because there is n direct contact between the tool electrode and the work piece. By combining a non-conducting ceramic with more conducting ceramic, it was possible to raise the electrical conductivity. From experimental results, it was found that the lamination from Nb sheet and MoSi$_2$ powder was an excellent strategy to improve hardness characteristics of monolithic MoSi$_2$. However, interfacial reaction products, like (Nb, Mo)SiO$_2$and Nb$_2$Si$_3$formed at the interface of Nb/MoSi$_2$, and increased with fabricating temperature. MoSi$_2$composites, with which a hole drilling was not possible through the conventional machining process, enhanced the capacity of ED-drilling by adding MbSi$_2$, relative to that of SiC or ZrO$_2$reinforcements.

• Resources Recycling
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• v.12 no.3
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• pp.25-30
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• 2003

The synthesis of SiC used for the parts of the gas turbine and the heat exchanger, was carried out. In this study, wire cutting slurry of silicon wafer and the graphite rod of spent zinc-carbon battery were applied to the starting materials for the synthesis. The powders of Si or Si+SiC were obtained from the waste material by filtration, gravity separation and magnetic separation. Graphite powder was produced by dismantling, grinding and gravity separation from spent zinc-carbon battery. The synthesis of SiC could be completed from the mixture powders of Si and C or Si+SiC and C at the condition of equivalent ratio of Si and C, atmosphere of Ar or vacuum, temperature of above 1$600^{\circ}C$ and 2 hours reactions. The purity of synthesized Si-C was above 99%.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.13-18
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• 2007

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.81-81
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• 2009

반도체 산업의 중심 소재인 실리콘(Si)은 사용 목적과 환경에 따라 물성적 한계가 표출되기 시작했다. 그래서 각각의 목적에 맞는 재료의 개발이 필요하다는 것을 인식하게 되었다. SiC wafer는 큰 band gap energy와 고온 안정성, 캐리어의 높은 드리프트 속도 그리고 p-n 접합이 용이하다. 또한 소재 자체가 화학적으로 안정하고 $500\sim600^{\circ}C$에서 소자 제조 시 고온공정이 가능하며, 실리콘이나 GaAs에 비해 고출력을 낼 수 있는 재료이다. 반도체 소자로 이용하기 위한 wafer 가공 공정에 있어 물리적 힘에 의한 stress를 많이 받아 wafer가 휘는 현상이 생긴다. 반도체 소자의 기본이 되는 wafer가 휨 현상을 일으키면 wafer 위에 소자가 올라갈 경우 소자의 불균일성 때문에 반도체의 물성에 나쁜 영향을 미치게 된다. 그래서 반도체 소자의 기본이 되는 wafer의 휨 현상 개선이 중요하다. 본 연구에서는 산화로에서 Ar 분위기에서 압력 760torr, 온도 $1100^{\circ}C$ 부근에서의 조건으로 진행을 하여 wafer의 Flatness Tester(FT-900, NIDEK) 장비로 SORI, BOW, GBIR 값의 변화에 초점을 맞추었다. SiC 단결정을 sawing후 가공 전 wafer를 열처리하여 가공을 진행하는 것과 열처리 하지 않은 wafer의 SORI, BOW, GBIR 값 비교, 그리고 lapping, grinding, polishing 등의 가공 진행 중간 중간에 열처리를 하여 진행하는 것과 가공 진행 중간 중간에 열처리를 하지 않고 진행한 wafer의 SORI, BOW, GBIR 값의 비교를 통해 wafer의 휨 현상 개성에 관해 알아본다.

• Journal of the Korean Ceramic Society
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• v.21 no.1
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• pp.27-32
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• 1984

During the last decade there have been many studies on the new ceramics especially engineering ceramics. Sintered silicon carbide is one of the main materials in engineering ceramics. This study shows the effects of surface treatment and microstructure especially the abnormal grain growth on the strength of sintered SiC. Surface of sintered SiC and treated with 400, 800 and 1200 grit diamond wheel. Grain growth is introduced by increasing the sintering times at 205$0^{\circ}C$. The $\beta$longrightarrow$\alpha$ transformation occurs during the sintering of $\beta$-starting materials and is often accompanied by abnormal grain growth. The overall strength distribution are estimated using the Weibull statistics. The results show that the strength of sintered SiC is limited by extrinsic surface flaws in normal-sintered specimens. And it is sound that the finer the surface finishing and the grain size the higher the strength results. But the strength of abnormal sintering specimens is limited by the abnormally-grown large tabular grains. The Weibull modulus increases with the decreasing grain size and the decreasing grit size of grinding.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.2
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• pp.63-68
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• 2021

This study was focused to investigate the effect of NbC-coated crucible on the quality of the SiC crystals. Then, the different properties between SiC crystals grown in a conventional graphite crucible and NbC-coated crucible were systematically compared. SiC crystals were grown using the Physical Vapor Transport (PVT) method at a temperature of 2300℃ and a pressure of 5 Torr in Ar atmosphere. After grinding and polishing, the polytype of the grown SiC crystal was analyzed using Raman spectroscopy, and crystallinity was confirmed by HR-XRD. Furthermore, the defect density and the concentration of impurities were analyzed by an optical microscope and a SIMS, respectively.

• Journal of the Korean Ceramic Society
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• v.21 no.4
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• pp.361-365
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• 1984

This study has been carried out to sinter silicon nitride with additives and to show the effect of surface finishments on its strength and Weibull modulus which are two most important factors for its applications into structural ceramics. Silicon nitride was sintered with the additions of $Al_2O_3$ and $Y_2O_3$ under pressureless cond-ition. The optimum properties were obtained by sintering at 1, 75$0^{\circ}C$ for 3hrs under $N_2$ atmosphere and the strength showed 6, 500kg/$cm^2$ at room temperature and 3, 300kg/$cm^2$ at 120$0^{\circ}C$. The effects of surface treatment on the strength of sintered $Si_3N_4$ were studied and the results showed that fine surface treatment increased the strength by up to 50% The Weibull analysis showed that its modulus was increased with increasing fineness of surface finishments. It was concluded that the mechanical properties of sintered silicon nitride could be improved by fine surface grinding which implied the brittle-fracture nature of sintered silicon nitride.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.61-70
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• 2004

Generally, ceramics are very difficult-to-cut materials because of its high strength and hardness. The machining process of ceramics can be characterized by cracking and brittle fracture. In the machining of ceramics, edge chipping and crack propagation are the principal reasons to cause surface integrity deterioration. Such phenomenon can cause not only poor dimensional and geometric accuracy, but also possible failure of the ceramic parts. Ceramics can be machined with traditional method such as grinding and polishing. However, such processes are generally cost-expensive and have low material removal rate. Thus, in this paper, to overcome these problems. BN powder, which gives good cutting property, is added for the fabrication of machinable ceramics by volume of 5,10,15,20,25 and 30%. And, mechanical properties, R-curve behavior and machining tests are carried out to evaluate the machining properties of the manufactured machinable ceramics.