• Title/Summary/Keyword: Si Particle

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The Adhesion of Abrasive Particle during Poly-Si, TEOS and SiN CMP (Poly-Si, TEOS, SiN 막질의 CMP 공정 중의 연마입자 오염 특성 평가.)

  • Kim, Jin-Young;Hong, Yi-Kwan;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.561-562
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    • 2006
  • The purpose of this study was to investigate the root cause of adhesion of silica and ceria particles during Poly-Si, TEOS, and SiN CMP process, respectively. The zeta-potentials of abrasive particles and wafers were observed negative surface charges in the alkaline solutions. SAC and STI patterned wafers have intermediate values of their composition surface's zeta potentials. The theoretical interaction force and adhesion force of silica and ceria particle were calculated in solution with acidic, neutral and alkaline pH. A stronger attractive force was calculated for silica and ceria particles on wafers in acidic solutions than in alkaline solutions. The theoretical interaction forces of the SAC and STI patterned wafers have intermediate values of their constitution wafer's values. The adhesion forces is observed lower values in alkaline solutions than in acidic solutions. And the ceria particle has lower adhesion than that of the silica particle.

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Synthesis and Properties of $Al_2O_3-SiC$ Composites from Alkoxides (알콕사이드로부터 $Al_2O_3-SiC$ 복합재료의 제조 및 특성)

  • 이홍림;김규영
    • Journal of the Korean Ceramic Society
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    • v.30 no.2
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    • pp.123-130
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    • 1993
  • Dispersed type Al2O3-SiC composite powders were synthesized from Al-isopropoxide (Al(i-OC3H7)3) and Si(OC2H5)4 precursors by hydrolysis of mixed alkoxides and carbothermal reaction method. The characteristics of the synthesized (dispersed type) Al2O3-SiC composite powders were investigated using XRD, SEM, TEM, BET and particle size analyzer. Carbothermal reaction to produce Al2O3-SiC composite was completed in 10h at 135$0^{\circ}C$ on 3~4㎤/s (0.21~0.28cm/s) of H2 flow rate and about 1/1 of carbon/oxides(=SiO2+Al2O3) molar ratio. The synthesized powders were observed to have the mean particle size range of 0.4~1.26${\mu}{\textrm}{m}$ and showed finer particle size with increasing SiC content.

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Effect of Heat Treatment on the Microstructure and Mechanical Properties for Al-Si Alloyed Powder Material by Gas Atomizing and Hot Extrusion Process (가스 분무 공정에 의해 제조된 Al-Si 합금 분말 압출재의 열처리에 의한 미세조직 및 기계적 특성 변화)

  • Nam, Ki-Young;Jin, Hyeong-Ho;Kim, Yong-Jin;Yoon, Seog-Young;Park, Yong-Ho
    • Journal of Powder Materials
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    • v.13 no.6 s.59
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    • pp.421-426
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    • 2006
  • The microstructural and mechanical properties of Al-Si alloyed powder, prepared by gas atomization fallowed by hot extrusion, were studied by optical and scanning electron microscopies, hardness and wear testing. The gas atomized Al-Si alloy powder exhibited uniformly dispersed Si particles with particle size ranging from 5 to $8{\mu}m$. The hot extruded Al-Si alloy shows the average Si particle size of less than $1{\mu}m$. After heat-treatment, the average particle size was increased from 2 to $5{\mu}m$. Also, mechanical properties of extruded Al-Si alloy powder were analyzed before and after heat-treatment. As expected from the microstructural analysis, the heat-treated samples resulted in a decrease in the hardness and wear resistance due to Si particle growth. The friction coefficient of heat-treated Al-Si alloyed powder showed higher value tough all sliding speed. This behavior would be due to abrasive wear mechanism. As sliding speed increases, friction coefficient and depth and width of wear track increase. No significant changes occurred in the wear track shape with increased sliding speed.

R-Curve Behavior of Particulate Composites of ${Al_2}{O_3}$ Containing SiC and $ZrO_2$: II. Theoretical Analysis (SiC와 $ZrO_2$를 함유하는 ${Al_2}{O_3}$ 입자복합체의 균열저항거동: II. 이론적 분석)

  • 나상웅;이재형
    • Journal of the Korean Ceramic Society
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    • v.37 no.4
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    • pp.368-375
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    • 2000
  • Fracture toughness of particulate composites of Al2O3/SiC, Al2O3/ZrO2 and Al2O3/ZrO2/SiC was analysed theoretically. According to the suggested particle bridging model for obtaining the R-curve height, the crack extension resistance for the long crack was linearly proportional to the residual calmping stress at the interface between the second phase and the matrix. It was also a function of the particle size and the content. It was confirmed that the rising R-curve behavior of Al2O3 containing 30 vol% SiC particles of 3${\mu}{\textrm}{m}$ was owing to the strong crack bridging by SiC particles. For Al2O3/ZrO2/SiC composites, the tensional stress from the 3${\mu}{\textrm}{m}$ SiC particles was large enough to activate the spontaneous transformation of the ZrO2. The crack extension resistance due to the particle bridging mechanism did not seem to be affected much by the coupled toughening, but its resultant toughness increase could be significantly smaller due to the dependency on the matrix toughness.

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Microstructure and Properties of Ni-SiC Composite Coating Layers Formed using Nano-sized SiC Particles (SiC 나노입자를 이용하여 형성한 Ni-SiC 복합도금막의 미세구조 및 특성)

  • Lee, Hong-Kee;Son, Seong-Ho;Lee, Ho-Young;Jeon, Jun-Mi
    • Journal of the Korean institute of surface engineering
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    • v.40 no.2
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    • pp.63-69
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    • 2007
  • Ni-SiC composite coating layers were formed using two kinds of SiC nano-particles by DC electrodeposition in a nickel sulfamate bath containing SiC particles. The effect of stirring rate and SiC particle type on the microstructure and properties of Ni-SiC composite coating layers were investigated. Results revealed that the trend of deposition rate is closely related to the codeposition of SiC and the deposition rate. or nickel, and the codeposition behavior of SiC can be explained by using hydrodynamic effect due to stirring. The average roughness and friction coefficient are closely related to the codeposition of SiC and SiC particle size. It was found that the Victors microhardness of the composite coating layers increased with increasing codeposition of SiC. The composite coating layers containing smaller SiC particle showed higher hardness. This can be explained by using the strengthening mechanism resulting from dispersion hardening. Anti-wear property of the composite coating layers formed using 130 nm-sized SiC nano-particles has been improved by 2,300% compared with pure electroplated-nickel layer.

Effects of the SiC Particle Size and Content on the Sintering and Mechanical Behaviors of $Al_2O_3$/SiC Particulate Composites

  • Ryu, Jung-Ho;Lee, Jae-Hyung
    • The Korean Journal of Ceramics
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    • v.3 no.3
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    • pp.199-207
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    • 1997
  • $Al_2O_3$/SiC particulate composites were fabircated by pressureless sintering. The dispersed phase was SiC of which the content was varied from 1.0 to 10 vol%. Three SiC powders having different median diameters from 0.28 $\mu\textrm{m}$ to 1.9 $\mu\textrm{m}$ were used. The microstructure became finer and more uniform as the SiC content increased except the 10 vol% specimens, which were sintered at a higher temperature. Under the same sintering condition, densification as well as grain growth was retarded more severly when the SiC content was higher or the SiC particle size was smaller. The highest flexural strength obtained at 5.0 vol% SiC regardless of the SiC particle size seemed to be owing to the finer and more uniform microstructures of the specimens. Annealing of the specimens at $1300^{\circ}C$ improved the strength in general and this annealing effect was good for the specimens containing as low as 1.0 vol% of SiC. Fracture toughness did not change appreciably with the SiC content but, for the composites containing 10 vol% SiC, a significantly higher toughness was obtained with the specimen containing 1.9$\mu\textrm{m}$ SiC particles.

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Fabrication and Mechanical Properties of A356/SiCp Manufactured by Gas-Particle Co-injection Method (가스-입자 동시주입법에 의한 A356/SiCp 복합재료의 제조 및 기계적 특성)

  • Lee, Jung-Mu;Kang, Suk-Bong;Eum, Chil-Yong;Lim, Cha-Yong
    • Journal of Korea Foundry Society
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    • v.21 no.1
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    • pp.33-40
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    • 2001
  • Among the many techniques available to synthesis metal matrix composites, liquid phase processing, especially, conventional casting process such as stir-casting process is particularly attractive for their simplicity, economy and flexibility, In the present study, A356/20%SiCp composites were fabricated by gas-particle co-injection method. The gas-particle co-injection method is a modified stir-casting method and the corporation of particle could be improved by acceleration of particles due to rotation of impeller and gas purging. The microstructures and mechanical properties such as tensile properties and resistance to wear of fabricated materials were examined. Further, the particle injection mechanism in gas-particle co-injection method was discussed.

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Fabrication and Characteristics of SiCp/AC8A Composites by Pressureless Metal Infiltration Process (무가압함침법에 의한 SiCp/AC8A 복합재료의 제조 및 특성)

  • 김재동;고성위
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2000.04a
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    • pp.139-142
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    • 2000
  • The SiCp/AC8A composites were fabricated by the pressureless metal infiltration process successfully. The effect of additional Mg, which were mixed with SiC particles to promote interfacial wetting between the reinforcement and matrix alloy, and particle size on the mechanical properties was investigated. By increasing the additional Mg content the hardness of SiCp/AC8A composites was increased due to the hard reaction products, but the bending strength was decreased by the excess reaction of Mg and high porosity level when the additional Mg content is over 7%. The Hardness and bending strength was increased by decreasing the size of SiC particle.

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FE-Simulation on drawing process of $Al-1\%Si$ bonding wire considering influence of fine Si particle (미세 Si 입자의 영향을 고려한 $Al-1\%Si$ 본딩 와이어의 신선공정해석)

  • Hwang W. H.;Moon H. J.;Ko D. C.;Kim B. M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.05a
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    • pp.393-396
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    • 2005
  • This paper is concerned with the drawing process of $Al-1\%Si$ bonding wire. In this study, the finite-element model established in previous work was used to analyze the effect of various forming parameters, which included the reduction in area, the semi-die angle, the aspect ratio, the inter-particle spacing and orientation angle of the fine Si particle in drawing processes. The finite-element results gave the consolidation condition. From the results of analysis, the effects of each forming parameter were determined. It is possible to obtain the Important basic data which can be guaranteed in the fracture prevention of $Al-1\%Si$ wire by using FE-Simulation.

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