• Title/Summary/Keyword: Si 분포

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Improvement of Wear Resistance and Formation of Si Alloyed Layer on Aluminum Alloy by PTA Process (PTA법에 의한 Al 합금표면의 Si 합금층 형성과 내마모성 개선)

  • ;;松田福久;中田一博
    • Journal of Welding and Joining
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    • v.15 no.5
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    • pp.134-143
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    • 1997
  • The formation of thick alloyed layer with high Si content have been investigated on the surface of Al alloy (A5083) plate by PTA process with Si powder. Hardening characteristics and wear resistance of alloyed layer was examined in relation to the microstructure of alloyed layer. Thick hardened layer in mm-order thickness on the surface of A5083 plate can be formed by PTA process with wide range of process condition by using Si powder as alloying element because of eutectic reaction of Al-Si binary alloy. High temperature and rapid solidification rate of molten pool, which are features of PTA process, enable the formation of high Si content alloyed layer with uniform distribution of fine primary Si paticle. High plasma arc current was beneficial to make the alloyed layer with smooth surface appearance in wide range of powder feeding rate, because enough volume of molten pool was necessary make alloyed layer. Uniform dispersion of fine primary Si particle with about 30${\mu}{\textrm}{m}$ in particle size can be obtained in layer with Si content ranging from 30 to 50 mass %. Hardness of alloyed layer increased with increasing Si content, but increasing rate of hardness differed with macrostructure of alloyed layer. Wear resistance of alloyed layer depended on $V_{si}$(volume fraction of primary Si) and was remarkably improved to two times of base metal at 20-30% $V_{si}$ without cracking, but no more improvement was obtained at larger $V_{si}$.

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Mechanical Properties and Castabilities of Al-12Mg-5.5Zn-xSi Alloys

  • Kim, Jeong-Min;Sung, Ki-Dug;Jun, Joong-Hwan;Kim, Ki-Tae;Jung, Woon-Jae
    • Journal of Korea Foundry Society
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    • v.24 no.6
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    • pp.340-346
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    • 2004
  • The plan for obtaining a good combination of strength and castability appeared feasible and the following observations were made. 1. In Al-12Mg-6.6Zn-xSi alloys, more primary $Mg_2Si$ phase formed with reduced $Al_3Mg_2$ phase, as Si content is necessary for an effective solution heat treatment because the solidus temperature is very low silicon contents. 2. A high tensile strength could be obtained in the heat-treated Al-12Mg-5.5Zn-5Si alloy attributed in the heat-treated Al-12Mg-5.5Zn-5Si alloy attributes to fine $MgZn_2$ particles that precipitated uniformly in the matrix. 3. Al-12Mg-5.5Zn-Si alloys showed excellent casting capabilities such as hot cracking resistance and fluidity compared to the reference commercial alloys. 4. The wear resistance of Al-12Mg-5.5Zn-5Si alloy was superior to that of A7075 alloy, and even higher resistance is expected if the morphology and size of primary $Mg_2Si$ phase is carefully controlled.

ICP-CVD 방법에 의한 TiN diffusion Barrier Thin Film 형성

  • 오대현;강민성;오경숙;양창실;양두훈;이유성;이광만;변종철;최치규
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.118-118
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    • 1999
  • CVD방법에 의한 TiN 박막 형성에 있어서 ICP-CVD 방법이 대두되고 있다. 이것은 precursor에 대한 radical 형성, 식각된 패턴에서 양 벽의 self-shadowing 효과, 낮은 tress등으로 dense 한 박막을 얻을 수 있기 때문이다. TiN 박막은 Si 기판의 온도를 상온에서 50$0^{\circ}C$까지 유지하면서 TEMAT의 유량을 5-20sccm으로 변화시키면서 증착하였다. 증착 후 TiN 박막의 결정화에 따른 열처리는 Ar과 N2-가스분위기에서 in-situ로 증착하였다. 증착 후 TiN 박막증착 조건수립에 따른 플라즈마 특성진단은 전자의 온도와 밀도, 평균 전자밀도, 이온 에너지 분포, radical 분포, negative 이온분포 등으로 측정하였다. 플라즈마 변수에 따른 TiN 박막의 결정성과 상 변화는 XRD로 분석하였고, 조성비 및 TiN 박막의 원소화학적 상태, 결합에너지, 각 상에 따른 결합 에너지 천이정도, 초기 형성과정 및 반응기구 등은 RBS와 XPS로 조사하였다. TiN 박막의 표면상태, morphology 거칠기, TiN/Si(100)구조에서 계면상태 등은 SEM, AFM, 그리고 HRTEM으로 분석하였다. TiN 구조 박막의 비저항, carrier concentration 그리고 mobility 측정은 박막의 표면이 균일하고 bls-홀이 없는 것으로 하여 4-point probe 방법으로 측정하였다. 이들 분석으로부터 ICP-CVD 방법에 의하여 형성된 TiN 박막이 초고집적 반도체 소자의 contact barrier layer로서의 적용 가능성을 평가하였다.

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Role of an edge ring in plasma processing systems for semiconductor wafers (반도체용 플라즈마 장치에서 edge ring의 역할)

  • Ju, Jeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.71-71
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    • 2017
  • 플라즈마를 이용하는 건식 식각 또는 박막 증착 장비(PECVD)의 경우 웨이퍼에 rf bias를 인가하여 이온의 에너지와 입사각을 조절한다. 종래에는 웨이퍼의 가장 자리 3 mm영역을 공정 대상에서 제외하는 exclusion area로 지정하였으나 점차 공정 기술의 발달로 2 mm 이내로 감소하고 있다. 따라서 웨이퍼의 가장 자리에서 발생하는 전기장의 방향 및 크기 변화를 조절할 수 있는 기술의 개발이 필요하게 되었으며 그중 핵심적인 부품이 Si 또는 SiC로 제작되는 edge ring이다. Focus ring이라고도 불리는 이 부품은 웨이퍼 상에서 반경 방향으로 흐르는 가스의 유속이 가장 자리에 근접하면 빨라지는 현상과 이에 의해 식각/증착 화학 반응 속도가 증가하는 문제를 완화하기 위한 것과 적절한 전기 전도도를 부여함으로써 가장 자리의 전기장 분포를 최적화 할 수 있는 새로운 설계 변수로 활용할 수 있다. 스퍼터링의 경우에도 웨이퍼 중앙과 주변 부는 마그네트론 음극의 회전 링과의 입체각이 차이가 나므로 가장 자리의 경우 트렌치나 홀의 내측이 외측에 비해서 증착막의 두께가 얇아지는 문제가 있으며 건식 식각의 경우 홀의 형상이 수직에서 벗어나는 경향이 발생할 수 있다. 또한 사용 시간에 비례해서 edge ring의 형상이 변화하는데 상대적으로 고가품이어서 교체 주기를 설정하는 보다 합리적 기준이 필요하다. 본 연구에서는 전산 유체 역학 모델을 사용하는 ESI사의 CFD-ACE+를 활용하여 edge ring의 형상과 재질이 갖는 영향을 전산 모사하기 위한 기초 작업을 그림 1과 같이 진행하였다. 2D-CCP model에 Ar 가스를 가정하고 비유 전율 10내외 전도도 $0.1/Ohm{\cdot}m$정도의 재질에 대한 용량성 결합 플라즈마에 대해서 계산을 하고 이 때 기판에 인가되는 고주파 전력에 의한 이온의 입사 에너지 분포 및 각도 분포를 Monte Carlo 방법으로 처리하여 계산하였다.

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Distribution of Spawning Sites of Kaolula borealis in Jeju Island (제주지역에서의 맹꽁이(Kaloula borealis) 산란지 분포)

  • Ko, Sang-Beom;Ko, Young-Min;Oh, Hong-Shik
    • Korean Journal of Environment and Ecology
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    • v.25 no.6
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    • pp.846-852
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    • 2011
  • This study researched the spawning sites of Kaloula borealis in a large number of wetlands in Jeju Island between May and August from 2007 to 2010. Based on the surveys, we discovered the locations of their habitats by investigating their calls from a rainy night to the next day and where their spawning sites were by ascertaining the existence of their eggs and tadpoles. According to the results, 83 wetlands were used as spawning sites across Jeju Island. A large number of wetlands were found to be permanent wetlands for Kaloula borealis. In addition, 81.9% of the wetlands in Jeju Island were found to be at an altitude of 150m or lower, and they spawned in shallow water not more than 50cm in depth. By region, 54 wetlands were in Jeju-island 29 wetlands were in Seogwipo-si. One of the reasons that Seogwipo-si has less wetlands than Jeju-si is that there are more orchards in Seogwipo-si than Jeju-si; accordingly, wetlands in Seogwipo-si were found to be more destroyed by farming. In the case of Seongsan-eup, a reedy marsh stretches out widely so that spawning sites were well preserved compared to other regions. This research will provide useful data for sustaining the population of Kaloula borealis by protecting their spawning sites from development, by offering habitats, and restoring spawning sites, which have become severely damaged and destroyed.

Decomposition of HDPE over HZSM-5 Catalyst Modified with Si, P and Mg for Recycle of Waste Plastics (Si, P, Mg로 개질된 HZSM-5 촉매상에서 폐플라스틱(HDPE) 재활용을 위한 분해반응)

  • Yu, Eui-Yeon;Kim, Sang-Chai
    • Journal of Korean Society of Environmental Engineers
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    • v.28 no.9
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    • pp.955-960
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    • 2006
  • Catalytic decomposition over HZSM-5 was carried out in semi-batch reactor to recover gasoline from waste plastics(HDPE). To enhance the liquid yield with a molecule range of gasoline, the properties of catalytic decomposition were investigated over a commercial Si/ZSM-5 catalyst and HZSM-5 catalysts modified with P and Mg. Optimum loadings of P and Mg on HZSM-5 were 0.5 wt% and 2.0 wt%, respectively, based on conversion and liquid yield. $NH_3-TPD$ profile indicated that strong and weak acid sites totally decreased in P loading on HZSM-5 catalyst, strong acid sites moderately decreased and weak acid sites sharply reduced in Mg loading on HZSM-5 catalyst. In the case of Si/ZSM-5 catalyst, all acid sites almost disappeared, subsequently, catalytic decomposition significantly decreased, and little liquid product was produced. When HZSM-5 catalyst was modified with P and Mg, the carbon distribution of liquid product was shifted to lower carbon number and its all components was within a molecular range of gasoline($C_5-C_{11}$). Especially, over Mg(2.0 wt%)/ZSM-5 catalyst, 55.8% of liquid yield with 100% of a molecular range of gasoline, was obtained at $400^{\circ}C$, suggesting it as a promising catalyst for recycle of waste plastics.

Occurrence and Distribution of Herbicide Resistant Weeds in the Paddy Field of Chungnam Province (충남지역에서의 제초제 저항성 논 잡초 발생 및 분포)

  • Won, Ok Jae;Jia, Wei Qiang;Lee, Jeung Joo;Kim, Jin-Won;Lee, Jeongran;Park, Kee Woong
    • Weed & Turfgrass Science
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    • v.7 no.3
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    • pp.201-208
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    • 2018
  • This study was conducted to investigate the occurrence and distribution of herbicide resistant weeds at rice fields in Chungnam province of Korea in 2017. Herbicide-resistant weeds occurred in 64,782 ha, which comprise 47.0% of the total paddy field area of Chungnam province. The infested area of herbicide resistant weeds was estimated in Seosan-si (11.9%), Nonsan-si (11.1%), Dangjin-si (10.9%), Boryeong-si (9.2%) and Asan-si (7.8%). The most dominant herbicide resistant weeds in rice fields were Monochoria vaginalis, followed by Lindernia dubia, Schoenoplectus juncoides, Echinochloa oryzicola, Cyperus difformis and Sagittaria trifolia. Herbicide resistant M. vaginalis, L. dubia, and S. juncoides occurred throughout Chungnam province, and herbicide resistant S. trifolia was only found in Dangjin-si. Compared with the 2011 survey, the infested area of herbicide-resistant weeds decreased, but the incidence rates were similar. The herbicide rotation with different modes of actions across growing seasons is recommended to control herbicide-resistant weeds in the infested fields. It is necessary to monitor herbicide resistance regularly and conduct integrated herbicide resistance management in this area.

Genetic Diversity and Structure of the Korean Endemic Species, Coreanomecon hylomeconoides Nakai, as Revealed by ISSR markers (한국 특산식물 매미꽃(Coreanomecon hylomeconoides Nakai) 집단의 유전다양성 및 구조)

  • Son, Sung-Won;Chung, Jae-Min;Kim, Eun-Hye;Choi, Kyoung-Su;Park, SeonJoo
    • Korean Journal of Plant Resources
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    • v.26 no.2
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    • pp.310-319
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    • 2013
  • The genetic diversity and structure of eight populations of Coreanomecon hylomeconoides Nakai, an endemic Korean plant, were investigated using 50 ISSR loci from eight primers. The average percentage of polymorphic loci was 47.3%. The Shannon's index (SI=0.218) and gene diversity (h=0.142) were relatively lower than those of other long-lived perennials. The Sancheong (SI=0.233, h=0153), Gwangyang (SI=0.263, h=0.171), and Suncheon (SI=0.241, h=0.159) populations showed greater genetic diversity than the Namhae and Gwangju populations, which are on the edge of the distribution. Analysis of molecular variance (AMOVA) showed that 18% of the total variation could be attributed to differences among populations, and 82% to differences within populations, indicating moderate gene flow among adjacent populations. These results were supported by value of Nm (2.184). The UPGMA conducted using the genetic distance and Bayesian cluster analysis showed a remarkable geographic trend structured into east and west regions. Overall, the results indicate that the Sancheong and Gwangyang populations, which had a large population size and higher degree of genetic diversity, should be the focus of in situ conservation.