• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.3
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• pp.319-322
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• 2004

ZnO nanostructures were formed on a Si substrate by off-axis pulsed laser deposition(PLD) system in which a substrate plane was tilted toward a plume propagation direction. Atomic force microscopy (AFM) showed islands of 20∼40 nm width. From the x-ray diffraction (XRD) pattern exhibiting only (002) ZnO peak, the islands observed in AFM image were found to well crystallized. Optical bandgap enlargement from 3.26 eV to 3.35 and 3.47 eV due to the quantum size effect of ZnO nanostructures were observed by Photoluminescence (PL) at room temperature.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.240-240
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• 2012

MgZnO는 전기적, 광학적 특성으로 인해 여러 연구 분야에서 주목을 받고 있으며, 발광특성을 알아보기 위해 Si 기판에 ZnO나노막대를 성장시킨 후 MgZnO 덮개층을 성장시켰다.열처리 효과에 따른 구조적 및 광학적 특성을 조사하기 위해 scanning electron microscopy, X-ray diffraction (XRD), 그리고 photoluminescence (PL)를 이용하였다. PL 측정 결과 3.3 eV에서 ZnO 나노막대 피크가 관측되었고, 3.48 eV에서 MgZnO 덮개층과 관련 된 피크가 관측되었다. 열처리 온도가 증가함에 따라 균일한 밀도를 가지는 청색 (432nm), 녹색 (512nm), 적색 (652nm)의 피크가 관측되었다.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2020.11a
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• pp.151-152
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• 2020

When concrete is exposed to fire, the thermal decomposition of hydrates of Portland cement paste results in critical damage to the concrete structure of a building. Recently, nanosilica arose as the effective nano-additive which can enhance the thermal resistance of the cementitious materials. However, the mechanism of the enhancement was not elucidated specifically. In this study, we investigated the properties of calcium silicate hydrates(C-S-H)of the nanosilica incorporated cement paste after heating to different heating temperatures (200℃, 500℃, and 800℃) by 29Si nuclear magnetic resonance. The results showed that the polymerization of C-S-H of nanosilica incorporated samples was larger than ordinary cement paste after heating to 200℃, and C-S-H formed during heating process to 500℃ due to the pozzolanic reaction during heating process.

• Journal of the Korean institute of surface engineering
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• v.38 no.3
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• pp.100-105
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• 2005

Cr-Si-C-N coatings were deposited on steel substrate (SKD 11) by a hybrid system of arc ion plating (AIP) and sputtering techniques. From XRD, XPS, and HRTEM analyses, it was found that Cr-Si-C-N had a fine composite microstructure comprising nano-sized crystallites of Cr(C, N) well distributed in the amorphous phase of $Si_3N_4/SiC$ mixture. Microhardness of Cr(C, N) coatings and Cr-Si-N coatings were reported about $\~22 GPa$ and $\~35 GPa$, respectively. As the Si was incorporated into Cr(C, N) coatings, The Cr-Si-C-N coatings having a Si content of $9.2 at.\%$ showed the maximum hardness value. As increased beyond Si content of $9.2 at.\%$, the interaction between nanocrystallites and amorphous phase was gone, the hardness was reduced as dependent on amorphous phase of $Si_3N_4/SiC$. In addition, the average coefficient of Cr-Si-C-N coatings largely decreased compared with Cr(C, N) coatings.

• Journal of the Korean institute of surface engineering
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• v.54 no.5
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• pp.230-237
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• 2021

In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti-Al-Si-N coatings were systematically investigated for application of cutting tools. The composition of the Ti-Al-Si-N coatings were controlled by different combinations of TiAl₂ and Ti₄Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N₂ during depositions. Ti-Al-Si-N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si₃N₄/SiO₂ matrix. The instrumental analyses revealed that the synthesized Ti-Al-Si-N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5-7 nm in dia.) and a three dimensional thin layer of amorphous Si₃N₄ phase. The hardness of the Ti-Al-Si-N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti-Al-Si-N coatings could help to improve the performance of machining and cutting tool applications.

• Proceedings of the Korea Concrete Institute Conference
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• 2010.05a
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• pp.473-474
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• 2010

This high pressure synchrotron X-ray diffraction study examined the change of bulk modulus of C-S-H(I), core material creating strength in alkali-activated slag cement as well as structural model of C-S-H, mainly attributed to Al-substitution for Si, which occurs at the bridging tetrahedral sites in dreierketten silicate chains in the nanostructure of C-S-H(I). This study presents that Al-substitution in C-S-H(I) does not affect the bulk modulus of C-S-H(I), which is surprising because many researchers have expected that Al-substitution should induce some critical change in mechanical properties of C-S-H(I).

• Journal of the Mineralogical Society of Korea
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• v.21 no.1
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• pp.27-35
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• 2008

Characterization of mineralogy and nanocrystals of ingredient materials of $Lumilite^{(R)}$ used for water treatment was made using optical microscopy, XRD, SEM, FTIR, and XRF analyses. Constituent minerals identified by XRD and microscope are clinoptilolite, illite, quartz, and albite, characterized by dense and fine texture. The cross section of nanocrystals with the size $70{$\sim}100\;nm$ is generally round or subround. Numerous spheroids with few nanometers in diameter are extensively formed on the surface of nanocrystals. Bulk chemistry is $SiO_2$ $74.22{\sim}75.65\;wt.%$, $Al_2O_3$ $13.25{\sim}13.72\;wt.%$, CaO $4.23{\sim}5.15\;wt.%$, with other major elements being minimal. When heated to $700^{\circ}C$, the crystal structure was mostly destroyed, though it persisted to $500^{\circ}C$. It is likely that high capacity and applications of $Lumilite^{(R)}$ for water treatment are originated from its structural properties such as development of nanocrystals and various tiny pores.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.8
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• pp.701-707
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• 2014

The ecofriendly yellow ocher is used in the manufacturing of cosmetics, construction, and food packaging. The polyethylene terephthalate (PET) used for manufacturing food containers has a microporous structure that causes aeration. Hydrophilic yellow ocher may be applied to hydrophobic PET by surface modification to overcome this issue. The aim of this study is to fabricate a yellow ocher polystyrene hybrid structure in the form of nanoparticles using an optimizing molar ratio of styrene, divinylbenzene, and potassium peroxodisulfate for use in emulsion polymerization. The polymerization was conducted in a yellow ocher suspension that was prepared by dispersing mechanically ground yellow ocher in DI water. The prepared hybrid structure was measured using scanning electron microscopy, energy dispersive X-ray spectroscopy, and X-ray diffraction. The measurement revealed the spherical morphology and Si component that resulted from the yellow ocher in the polystyrene particles. We expect that this hybrid structure would be used as platform material to minimize aeration in PET.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.16-22
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• 2008

We fabricated thermally-evaporated 10 nm-Ni/30 nm and 70 nm Poly-Si/200 nm-$SiO_2/Si$ structures to investigate the thermal stability of nickel silicides formed by rapid thermal annealing(RTA) of the temperature of $300{\sim}1100^{\circ}C$ for 40 seconds. We employed for a four-point tester, field emission scanning electron microscope(FE-SEM), transmission electron microscope(TEM), high resolution X-ray diffraction(HRIXRD), and scanning probe microscope(SPM) in order to examine the sheet resistance, in-plane microstructure, cross-sectional microstructure evolution, phase transformation, and surface roughness, respectively. The silicide on 30 nm polysilicon substrate was stable at temperature up to $900^{\circ}C$, while the one on 70 nm substrate showed the conventional $NiSi_2$ transformation temperature of $700^{\circ}C$. The HRXRD result also supported the existence of NiSi-phase up to $900^{\circ}C$ for the Ni silicide on the 30 nm polysilicon substrate. FE-SEM and TEM confirmed that 40 nm thick uniform silicide layer and island-like agglomerated silicide phase of $1{\mu}m$ pitch without residual polysilicon were formed on 30 nm polysilicon substrate at $700^{\circ}C\;and\;1000^{\circ}C$, respectively. All silicides were nonuniform and formed on top of the residual polysilicon for 70 nm polysilicon substrates. Through SPM analysis, we confirmed the surface roughness was below 17 nm, which implied the advantage on FUSI gate of CMOS process. Our results imply that we may tune the thermal stability of nickel monosilicide by reducing the height of polysilicon gate.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.89.1-89.1
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• 2012

실리콘 반도체의 Ultra large scale integration (ULSI) 기술 및 소자의 나노스케일화에 따라 배선 금속 물질로 사용하던 알루미늄 보다 낮은 비저항을 가지면서 금속의 전자이동효과에 잘 견딜 수 있는 차세대 배선 물질로서 구리가 큰 주목을 받고 있다. 하지만 구리의 경우, 높은 확산성을 가지기 때문에 열처리 과정에서 구리 실리사이드가 형성되는 등 소자의 신뢰성 및 성능을 감소시키므로, 이를 방지하기 위한 확산 방지막이 필요하다. IC의 배선에서 사용되는 기존의 확산 방지막은 Ta, TaN, TiN, TiW, TaSiN 등으로, 대부분 금속으로 이루어져 있기 때문에 증착 장비를 이용하여 두께를 조절하는 기술, 박막의 질을 최적화 하는 과정이 필요하며, 증착 과정 중에서 불순물이 함께 증착되거나 실리사이드가 형성되는 등의 단점을 가진다. 구리 기반의 배선 물질에서 문제될 수 있는 또 한가지의 이슈는 소자의 나노스케일화에 따른 배선 선폭의 감소로 인하여 확산 방지막 두께 또한 감소되어야 하는 것으로서, 확산 방지막의 두께가 감소함에 따른 방지막의 균일성 감소, 연속성 등이 큰 문제로 작용할 수 있어 이를 해결하기 위한 새로운 기술 또는 새로운 확산 방지막 물질의 개발이 시급한 실정이다. 본 연구에서는 구리/실리콘 구조에서 금속의 실리콘 박막 내로의 확산 및 실리사이드 형성을 방지하기 위하여 그래핀을 확산 보호막으로서 사용하였다. 그래핀은 화학기상증착법을 이용하여 한 겹에서 수 겹으로 성장되었으며, PMMA 물질을 이용하여 실리콘 기판에 전사되었다. 구리/그래핀/실리콘 구조의 샘플을 500 ~ 800도의 온도 범위에서 열처리 하였고, 구리 실리사이드 형성 여부를 XRD로 분석하였다. 또한 TEM 분석을 통해 구리 실리사이드의 형성 모양을 관측하였다.