한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제38권3호
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  • Pages.100-105
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  • 2005
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

하이브리드 코팅 시스템으로 제조된 초고경도 Cr-Si-C-N 나노복합 코팅막의 미세구조 및 기계적 특성

Microstructure and Mechanical Properties of Superhard Cr-Si-C-N Coatings Prepared by a Hybrid Coating System

  • Jang Chul Sik (School of Materials Science and Engineering, Pusan National University) ;
  • Heo Su Jeong (School of Materials Science and Engineering, Pusan National University) ;
  • Song Pung Keun (School of Materials Science and Engineering, Pusan National University) ;
  • Kim Kwang Ho (School of Materials Science and Engineering, Pusan National University)
  • 발행 : 2005.06.01
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초록

Cr-Si-C-N coatings were deposited on steel substrate (SKD 11) by a hybrid system of arc ion plating (AIP) and sputtering techniques. From XRD, XPS, and HRTEM analyses, it was found that Cr-Si-C-N had a fine composite microstructure comprising nano-sized crystallites of Cr(C, N) well distributed in the amorphous phase of $Si_3N_4/SiC$ mixture. Microhardness of Cr(C, N) coatings and Cr-Si-N coatings were reported about $\~22 GPa$ and $\~35 GPa$, respectively. As the Si was incorporated into Cr(C, N) coatings, The Cr-Si-C-N coatings having a Si content of $9.2 at.\%$ showed the maximum hardness value. As increased beyond Si content of $9.2 at.\%$, the interaction between nanocrystallites and amorphous phase was gone, the hardness was reduced as dependent on amorphous phase of $Si_3N_4/SiC$. In addition, the average coefficient of Cr-Si-C-N coatings largely decreased compared with Cr(C, N) coatings.

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