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http://dx.doi.org/10.4313/JKEM.2004.17.3.319

ZnO Nanostructure Formed by Off-axis Pulsed Laser Deposition  

강정석 (연세대학교 전기전자공학과)
강홍성 (연세대학교 전기전자공학과)
김재원 (연세대학교 전기전자공학과)
이상렬 (연세대학교 전기전자공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.3, 2004 , pp. 319-322 More about this Journal
Abstract
ZnO nanostructures were formed on a Si substrate by off-axis pulsed laser deposition(PLD) system in which a substrate plane was tilted toward a plume propagation direction. Atomic force microscopy (AFM) showed islands of 20∼40 nm width. From the x-ray diffraction (XRD) pattern exhibiting only (002) ZnO peak, the islands observed in AFM image were found to well crystallized. Optical bandgap enlargement from 3.26 eV to 3.35 and 3.47 eV due to the quantum size effect of ZnO nanostructures were observed by Photoluminescence (PL) at room temperature.
Keywords
ZnO nanostructure; Pulsed laser deposition; Off-axis PLD; Quantum size effect;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 /
[ S.V.GAPONENKO ] / Optical properties of Semiconductor Nanocrystals
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[ H.Ohta;K.Kawamura;M.Orita;M.Hirano;N.Sarukura;H.Hosono ] / Appl. Phys. Lett   DOI   ScienceOn
3 Optical properties of ZnO rods formed by metalorganic chemical vapor deposition /
[ B.P.Zhang;N.T.Binh;Segawa ] / Appl. Phys. Lett.   DOI   ScienceOn
4 펄스레이저 증착법에 의해 제작된 ZnO-Si-ZnO 다층 박막의 특성 연구 /
[ 강홍성;강정식;심은섭;방성식;이상렬 ] / 전기전자재료학회논문지   과학기술학회마을
5 The blue photoluminescence emitted from ZnO films deposited on glass substrate by rf magnetron sputtering /
[ X.Y.Xue;D.H.Zhang;Q.P.Wang;J.H.Wang ] / Applied Surface Science   DOI   ScienceOn
6 Control of morphology and orientation of ZnO thin films grown on SiO₂/Si substrates /
[ S.Muthukumar;C.R.Gorla;N.W.Emanetoglu;S.Liang;Y.Lu ] / J. Cryst Growth   DOI   ScienceOn
7 ZnO 박막의 두께변화에 따른 광학적 특성변화 연구 /
[ 심은섭;강홍성;강정식;김종훈;이상렬 ] / 한국전기전자재료학회 2001 하계학술대회논문집
8 Enhancement of exciton binding energies in ZnO/ZnMgO multiquantum wells /
[ H.D.Sun;T.Makino;Y.Segawa;M.Kawasaki;A Othtoo;K.Tamura;H.Koinuma ] / J. Appl. Phys.   DOI   ScienceOn
9 PLD 중착 변수에 따른 Ⅱ-Ⅵ족 화합물 ZnO 반도체 박막의 발광특성 연구 /
[ 배상혁;윤일구;서대식;명재민;이상렬 ] / 전기전자재료학회논문지   과학기술학회마을
10 Electrical and optical properties of boron-doped ZnO thin films for solar cells grown by metalorganic chemical vapor deposition /
[ W.W.Wenas;A.Yamada;K.Takahashi ] / J. Appl. Phys.   DOI
11 The effect of Zn butter layer on growth and luminescence of ZnO films deposited on Si substrates /
[ Z.Fu;B.Lin;G.Liao;Z.Wu ] / J. Cryst. Growth   DOI   ScienceOn
12 Band-edge photoluminescence in plycrstalline ZnO films at 1.7 /
[ S.A.Studenikin;Michael Cocivera;W.Kellner;H.Pascher ] / Journal of luminescence   DOI   ScienceOn
13 Self-organized ZnO quantum dots on SiO₂/Si substrates by metalorganic chemical vapor deposition /
[ S.W.Kim;S.Fujita;S.Fujita ] / Appl. Phys. Lett   DOI   ScienceOn
14 Control of preferred orientation for ZnOx films: control of self-texture /
[ N.Fujimura;T.Nishhara;S.Goto;J.Xua;T.Ito ] / J. Cryst. Growth   DOI   ScienceOn