Microstructure and Dielectric Properties of ($Sr_{1-x}Ca_x)TiO_3$ Ceramic Thin Film by RF Sputtering Method
(RF 스퍼터링법에 의한 ($Sr_{1-x}Ca_x)TiO_3$ 세라믹 박막의 미세구조 및 유전특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.11 no.11
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- pp.984-989
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- 1998