• Journal of Sensor Science and Technology
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• v.30 no.5
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• pp.273-278
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• 2021

Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Journal of Industrial and Engineering Chemistry
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• v.67
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• pp.417-428
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• 2018

In this study, we fabricated hierarchically self-assembled thin films composed of graphene oxide (GO) sheets and gold nanoparticles (Au NPs) using the Langmuir-Blodgett (LB) and Langmuir-Schaefer (LS) techniques and investigated their gas-sensing performance. First, a thermally oxidized silicon wafer ($Si/SiO_2$) was hydrophobized by depositing the LB films of cadmium arachidate. Thin films of ligand-capped Au NPs and GO sheets of the appropriate size were then sequentially transferred onto the hydrophobic silicon wafer using the LB and the LS techniques, respectively. Several different films were prepared by varying the ligand type, film composition, and surface pressure of the spread monolayer at the air/water interface. Their structures were observed by scanning electron microscopy (SEM) and atomic force microscopy (AFM), and their gas-sensing performance for $NH_3$ and $CO_2$ was assessed. The thin films of dodecanethiol-capped Au NPs and medium-sized GO sheets had a better hierarchical structure with higher uniformity and exhibited better gas-sensing performance.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.92-97
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• 2022

Plastics are classified into 7 types such as PET (PETE), HDPE, PVC, LDPE, PP, PS, and Other for separation and recycling. Recently, large corporations advocating ESG management are replacing them with bioplastics. Incineration and landfill of disposal of plastic waste are responsible for air pollution and destruction of the ecosystem. Because it is not easy to accurately classify plastic materials with the naked eye, automated system-based screening studies using various sensor technologies and AI-based software technologies have been conducted. In this paper, NIR scanning devices considering the NIR wavelength characteristics that appear differently for each plastic material and a system that can identify the type of plastic by learning the NIR spectrum data collected through it. The accuracy of plastic material identification was evaluated through a decision tree-based SVM model for multiclass classification on NIR spectral datasets for 8 types of plastic samples including biodegradable plastic.

• Korean Journal of Remote Sensing
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• v.39 no.1
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• pp.111-127
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• 2023

In visual slam and 3D data modeling, the Iterative Closest Point method is a primary fundamental algorithm, and many technical fields have used this method. However, it relies on search methods that take a high search time. This paper solves this problem by applying an effective point cloud refinement method. And this paper also accelerates the point cloud registration process with an indexing scheme using the spatial decomposition method. Through some experiments, the results of this paper show that the proposed point cloud refinement method helped to produce better performance.

• The Journal of Korea Robotics Society
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• v.18 no.3
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• pp.271-280
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• 2023

FMCW (Frequency Modulated Continuous Wave) radar system is widely used in autonomous driving and navigation applications due to its high detection capabilities independent of weather conditions and environments. However, radar signals can be easily contaminated by various noises such as speckle noise, receiver saturation, and multipath reflection, which can worsen sensing performance. To handle this problem, we propose a learning-free noise removal technique for radar to enhance detection performance. The proposed method leverages adaptive thresholding to remove speckle noise and receiver saturation, and wavelet transform to detect multipath reflection. After noise removal, the radar image is reconstructed with the geometric structure of the surrounding environments. We verify that our method effectively eliminated noise and can be applied to autonomous driving by improving the accuracy of odometry and place recognition.

• Proceedings of the Korea Information Processing Society Conference
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• 2011.11a
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• pp.581-583
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• 2011

최근에 급격히 증가한 스마트폰의 사용자들이 이동중에도 안정적인 무선 네트워크를 이용하기 위해서는 핸드오프는 반드시 필요하다. 핸드오프를 위하여 기존에 연결되어 있는 AP(Access Point)와의 연결을 끊고 주변의 AP 를 스캐닝한 후 새로운 AP 로 재연결을 하는 과정을 거치게 된다. 이러한 과정 중에 본 논문에서는 스캐닝 단계에서 발생하는 문제점을 분석하고 이에 대한 개선방안으로 AP 의 신호세기와 스마트폰의 센서를 이용하여 사용자의 이동성을 고려하는 스캐닝 방식을 제안한다.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.163-170
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• 1997

End milling experiments are conducted to investigate characteristics of acoustic emission (AE) and cutting force singals due to tool fracture. The AE signals are obtained with a sensor attached to cutting fluid discharge nozzle. Tool states are identified with scanning electron microscopy and optical microscopy. It is demonstrated that the AE signals provide reliable informations about the cutting processes and tool states. Morever, tool fracture can be detected successfully using both the AE count rate and the standard deviation of principal cutting force.

• Journal of KIBIM
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• v.13 no.4
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• pp.64-73
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• 2023

This study introduces a method of estimating the 3D coordinates of structural damage from the detection results of visual inspection provided in 2D image coordinates using sensing data of UAV and 3D shape information of BIM. This estimation process takes place in a virtual space and utilizes the BIM model, so it is possible to immediately identify which member of the structure the estimated location corresponds to. Difference from conventional structural damage localization methods that require 3D scanning or additional sensor attachment, it is a method that can be applied locally and rapidly. Measurement accuracy was calculated through the distance difference between the measured position measured by TLS (Terrestrial Laser Scanner) and the estimated position calculated by the method proposed in this study, which can determine the applicability of this study and the direction of future research.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.99-101
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• 2000

The fabrication of the submicron size hole has been interesting due to the potential application of the near field optical sensor or liquid metal ion source. The 2 micron size dot array was photolithographically patterned. After formation of the V-groove shape by anisotropic KOH etching, dry oxidation at $1000^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have an etch-mask for dry etching. The reactive ion etching by the inductively coupled plasma (ICP) system was performed in order to etch ~90 nm $SiO_2$ layer at the bottom of the V-groove and to etch the Si at the bottom. The negative ion energy would enhance the anisotropic etching by the $Cl_2$ gas. After etching, the remaining thickness of the oxide on the Si(111) surface was measured to be ~130 nm by scanning electron microscopy. The etched Si aperture can be used for NSOM sensor.