• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2010년도 추계학술대회 논문집
• /
• pp.571-572
• /
• 2010

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.677-678
• /
• 2011

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.1089-1090
• /
• 2011

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.1083-1084
• /
• 2011

• International Journal of Precision Engineering and Manufacturing
• /
• 제8권2호
• /
• pp.14-19
• /
• 2007

Angle sensors based on the principle of autocollimation, which are usually called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface. This paper describes a prototype micro-angle sensor that is based on the laser autocollimation technique. The new angle sensor is compact and consists of a laser diode as the light source and a quadrant photodiode as a position-sensing device. Because of its concise design, the microangle sensor facilitates dynamic measurements of the angular error motions of a precision stage without influencing the original dynamic properties of the stage. This is because the sensor only requires a small extra target mirror to be mounted on the stage. The sensitivity of the angle detection is independent of the focal length of the objective lens; therefore, an objective lens with a relatively short focal length is employed to reduce the size of the device. The micro-angle sensor uses a single lens for the both the laser collimation and focusing, which distinguishes it from the conventional laser autocollimation method that has separate collimate and objective lenses. The new micro-angle sensor has dimensions of $15.1\times22.0\times14.0mm$ and its resolution is better than 0.1 arc-second The optical design and performance of this micro-angle sensor were verified by experimental results.

• 센서학회지
• /
• 제32권5호
• /
• pp.295-299
• /
• 2023

Herein, we propose a simple fabrication method for MXene-coated V-groove sensors for applications. To enhance the sensitivity of this sensor, we applied MXene particles, instead of conventional metal layers, as a sensing material on the sensor's surface. This allows for an easier fabrication, as well as higher sensitivity of the sensor compared to those of our previously demonstrated metal-based V-groove sensor. Additionally, polyurethane-acrylate, a UV-curable liquid polymer, can be easily applied using micro-electromechanical systems-based surface-texture micromachining. The sensor sensitivity is approximately 0.08 /mm, and it can be improved by increasing the number of V-grooves. We believe that the proposed MXene-based wearable sensor offers a great potential in detecting various types of motions characteristic of human activities.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 춘계학술대회 논문집
• /
• pp.51-55
• /
• 1997

This study is devote to developing navigation filter for detecting sensor failure in multi-sensor navigation system. In multi-sensor navigation system, Kalman filter is generally used to fuse data of each sensors. Sensor failure is fatal in case that the sensor is used as external measurement of Kalman filter therefore detection and recovery of sensor failure is one the important feature of navigation filter. Generally each sensors have its specific feature in measuring navigational information. Fuzzy theory is proposed to detect external sensor failure and provide valid external measurement to Kalman filter avoiding filter divergence and instability. This idea is applied to Autonomous Underwater Vehicle(AUV) which has two navigation sensor i. e self contained inertial sensor and acoustic external sensor. 2 dimensional simulation result shows acceptable failure detection and recovery

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 추계학술대회 논문집
• /
• pp.1029-1032
• /
• 2002

This paper describes a design of a tactile sensor, which can measure three components force and temperature due to thermal conductive. The bio-mimetic tactile sensor, alternative to human's finger, is comprised of four micro force sensors and four thermal sensors, and its size being 10mm$\times$10mm. Each micro force sensor has a square membrane, and its force range is 0.1N - 5N in the three-axis directions. On the other hand, the thermal sensor for temperature measurement has a heater and four temperature sensor elements. The thermal sensor is designed to keep the temperature. $36.5^{\circ}C$, constant, like human skin, and measure the temperature $0^{\circ}C$ to $50^{\circ}C$. The MEMS technology is applied to fabricate the sensing element of the tactile sensor.

• 한국정보통신학회:학술대회논문집
• /
• 한국해양정보통신학회 2009년도 춘계학술대회
• /
• pp.627-630
• /
• 2009

해상용 Multi Sensor Surveillance System은 다양한 기술의 복합체로서 본 과제에서 개발하고자하는 Gyro Sensor based Servo Motion Control 알고리즘은 선박의 6자유도운동을 분석하여 그에 대응할 수 있는 Motion Control 동요안정화제어장치를 개발하는 것이며, Nano Driving Precision Pan-Tilt/Gimbal System은 초정밀 초고속으로 감시용 디바이스를 적시에 정확한 동작을 수행하게 해주는 필수적인 장비이다. 최종적으로 개발하고자 하는 분야는 해상용 Nano Driving Multi Sensor Surveillance System 중 Nano Driving Precision Pan-Tilt/Gimbal의 최적설계 및 제작, 3-axis Gyro Sensor based Servo Motion Control 알고리즘 개발, 영상추적 Video Tracking Software 및 Hardware의 개발 및 각 세부주관에서 개발한 각각의 장비를 하나의 시스템으로 통합하는 시스템 Integration 및 시험인증으로 하나의 시스템을 완성 하였다.

• 한국복합재료학회:학술대회논문집
• /
• 한국복합재료학회 2003년도 추계학술발표대회 논문집
• /
• pp.154-157
• /
• 2003

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown, and the sinusoidal approximation algorithm that estimates past and coming fringe values was verified through the linearity. Real-time signal processing program was developed, and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.4 ~ 10 nm in the displacement range of $0 ~ 300\mu\textrm{m}$ was obtained by reducing the photodetector noise using low-pass filter and signal averaging. The nano-translation stage with a Piezo-electric actuator and the EFPI sensor system was designed and tested. This stage successfully reached to the desired destination in $15\mu\textrm{m}$ range within 1 nm accuracy.