• 제목/요약/키워드: Sensitivity of metals

검색결과 109건 처리시간 0.02초

가연성 가스 인식을 위한 $SnO_2$계열의 박막 가스센서 ($SnO_2$-based thin film gas sensors in array for recognizing inflammable gases)

  • 이대식;심창현;이덕동
    • 한국진공학회지
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    • 제10권3호
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    • pp.289-297
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    • 2001
  • 가연성 가스의 검지 및 인식을 위하여, SnO$_2$계열의 4가지 종류의 박막을 형성하였다. 감지막 형성을 위하여, Sn, Pt/Sn, Au/Sn 그리고 Pt, Au/Sn 막을 Sn의 열증착과 귀금속의 스퍼터링으로 증착하였다. 증착된 박막들을 $700^{\circ}C$ 정도에서 2 시간 열산화시켜 $SnO_2$계열의 감지막을 형성하였다. 제작된 박막은 tetragonal구조의 $SnO_2$이었고, 가스 흡착을 위한 가스 흡착점과 기공도를 많이 갖고 있었다. 스퍼터로 형성된 박막보다 열산화법으로 형성된 박막이 고감도를 보였다. 제작 박막들은 작업환경기준치정도의 저농도에서 측정 가연성 가스(부탄, 프로판, LPG, 일산화탄소)에 대해 고감도와 재현성을 나타내었다. 특히, 백금(30 $\AA$)을 첨가한 박막이 LPG와 부탄 가스에 대해, 순수 열산화된 $SnO_2$ 박막이 프로판과 일산화탄소에 대하여 가장 고감도를 나타내었다. 이들 센서들의 각 가스별로 차별화된 감도패턴을 이용하여 주성분 분석 기법을 통해 환경기준치(LEL, TLV) 범위에서 부탄, 프로판, LPG, 일산화탄소와 같은 가연성 가스의 종류 인식 및 정량을 인식할 수 있었다.

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Sensitivity Enhancement of RF Plasma Etch Endpoint Detection With K-means Cluster Analysis

  • Lee, Honyoung;Jang, Haegyu;Lee, Hak-Seung;Chae, Heeyeop
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.142.2-142.2
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    • 2015
  • Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

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Ceriodaphnia dubia의 온도조절에 근거한 단기급성독성 조사법 (Rapid Bioassay Technique Based on Temperature Control of Ceriodaphnia dubia)

  • 박종호;이상일;조영옥;이원호;연익준;조규석
    • 한국수산과학회지
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    • 제37권3호
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    • pp.209-214
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    • 2004
  • A method for rapid acute toxicity test based on temperature control of Ceriodaphnia dubia has been developed and evaluated. A new toxicity test based on temperature control (TTBTC) which are based on temperature control, was developed and compared for the adsorption of the better methodology for short-term toxicity screening. Initially, daphnid larval are exposed to toxicants and at the same time the temperature of the water bath containing media is increased to high temperature $(35.5^{\circ}C).$ After 1.25 hrs of contact time, the number of the daphnids, either living (no toxic effect) or dead (toxic effect), is counted by the naked eyes. Effect of exposure time on test sensitivity was not significantly different between 1 to 1.5 hr. Comparison of the rapid 1.25 hr acute toxicity test developed in this study and the standard 48 hr acute toxicity test using heavy metals, cyanide and pentachlorophenol indicated that the 1.25 hour test provides an acceptable level of sensitivity in toxicity test for C. dubia.

방사광을 이용한 Si 웨이퍼 표면불순물 검출감도 향상 (Improvement of detection sensitivity of impurities on Si wafer surface using synchrotron radiation)

  • 김흥락;김광일;강성건;김동수;윤화식;류근걸;김영주
    • 한국진공학회지
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    • 제8권1호
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    • pp.13-19
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    • 1999
  • 방사광을 이용한 전반사 형광 분석법으로 Si 웨이퍼 표면 금속 불순물의 검출능을 향상시켰다. 측정장치는 특정 단색광 에너지만을 선택할 수 있는 모노크로메팅부, 측정챔버안으로 유입되는 방사광은 차폐하고 원하는 크기의 단색광을 선택하는 슬릿부 그리고 Si 웨이퍼 표면에서 전반사에 의해 발생하는 형광 X-선을 검출하는 측정부로 구성되어 있다. 단색광의 에너지는 10.90 KeV로 선택하였고, 최적의 전반사 조건을 확립하기 위하여 소멸시간과 Fe의 형광 X-선의 강도비의 관계를 이용하였다. 기존 X-선원을 이용하여 관찰한 결과와 비교하였을 경우에, 최대 약 50배까지 검출감도를 향상 시킬 수 있었다. 특히, TRXFA(Total Reflection X-ray Fluorescence Analyzer)법으로는 검출하기 어려운 $5\times10^{10}\textrm{atomas/cm}^2$ 수준의 금속오염은 방사광을 이용한 TRSFA(Total Reflection Synchrotron Fluorescence Analyzer)법으로는 충분히 검출할 수 있고, $5\times10^{9}\textrm{atomas/cm}^2$금속 불순물가지 검출할 수 있는 방법 및 장치를 개발하였다. 이를 이용하여 차세대 Si 웨이퍼의 초극미량 금속 불순물 분석에 이용할 수 있는 방법으로 기대된다.

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국내 폐광산 지역의 Vibrio fisheri, Selenastrum capricornutum, 그리고 Daphnia magna를 이용한 생태 위해성 평가 (Ecological Risk Assessment(ERA) of Abandoned Mine Drainage(AMD) in Korea Based on Vibrio fisheri, Selenastrum capricornutum, and Daphnia magna)

  • 김기태;이병천;김동욱;김상돈
    • 대한환경공학회지
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    • 제29권2호
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    • pp.163-168
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    • 2007
  • 국내 5개 폐광산 지역의 갱내수 및 배출수에 대해 화학적 분석 및 생물학적인 독성 평가를 통한 생태 위해성 평가를 실시하였다. 본 연구에서 선정한 9가지 중금속의 화학적 분석 결과, 거의 모든 지점에서 높은 중금속 농도가 검출되었으며, 특히 송천, 낙동, 덕음 지역에서는 상대적으로 비소가 높게 검출되었고, 낙동 지역은 하류까지 전체적으로 각 항목의 중금속이 높은 농도로 존재하였다. 통합 방류수 독성 평가(WET)에 기초해 Vibrio fisheri, Selenastrum capricornutum, Daphnia magna를 이용한 생물학적 독성 평가 결과, 모든 지점에서 높은 독성이 나타났다. 유출수가 처음 흐르는 갱구에서 가장 높은 독성이 나타났으며, S. capricornutum에 대한 독성이 모든 지점에 걸쳐 $1.3\sim32.0$ TU 사이의 독성이 나타나 독성 민감도가 가장 높은 것으로 나타났다. 각각의 독성 평가 종에 따른 독성 미감도 차이는 폐광사의 위해성을 평가함에 있어 두 종 이상의 평가 종이 사용되어야 함을 의미한다. HQ(Hazard Quotient) 개념을 적용한 생태 위해성 평가 결과, 폐광산에서 분석된 대부분의 중금속에 대해 HQ 값이 1보다 훨씬 크게 나타났으므로, 폐광산의 중금속에 대한 영향은 심각한 정도의 위해도를 가지고 있다고 판단된다. 한편, 생물학적 독성은 유하 거리의 증가에 따라 감소하는 것으로 나타났다. 따라서, 폐광산의 복원이나 생태 위해성 평가 시 지점별로 희석률뿐 아니라 DOM, 경도 등 환경인자들이 고려되어야 할 것으로 판단된다.

Modulation of the Metal(loid) Specificity of Whole-Cell Bioreporters by Genetic Engineering of ZntR Metal-Binding Loops

  • Kim, Hyojin;Jang, Geupil;Kim, Bong-Gyu;Yoon, Youngdae
    • Journal of Microbiology and Biotechnology
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    • 제30권5호
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    • pp.681-688
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    • 2020
  • Bacterial cell-based biosensors, or whole-cell bioreporters (WCBs), are an alternative tool for the quantification of hazardous materials. Most WCBs share similar working mechanisms. In brief, the recognition of a target by sensing domains induces a biological event, such as changes in protein conformation or gene expression, providing a basis for quantification. WCBs targeting heavy metal(loid)s employ metalloregulators as sensing domains and control the expression of genes in the presence of target metal(loid) ions, but the diversity of targets, specificity, and sensitivity of these WCBs are limited. In this study, we genetically engineered the metal-binding loop (MBL) of ZntR, which controls the znt-operon in Escherichia coli. In the MBL of ZntR, three Cys sites interact with metal ions. Based on the crystal structure of ZntR, MBL sequences were modified by site-directed mutagenesis. As a result, the metal-sensing properties of WCBs differed depending on amino acid sequences and the new selectivity to Cr or Pb was observed. Although there is room for improvement, our results support the use of currently available WCBs as a platform to generate new WCBs to target other environmental pollutants including metal(loid)s.

돌연변이 식물 및 형질전환된 효모에서 phytochelatin synthase 발현이 살균제 tolclofos-methyl 분해에 미치는 영향 (Effect of Phytochelatin Synthase Expression on Degradation of Fungicide Tolclofos-methyl in Mutant Plant and Transformed yeast)

  • 윤하임;김장억;신재호;김정회;이상만
    • 한국환경농학회지
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    • 제28권4호
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    • pp.409-411
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    • 2009
  • Phytochelatins (PCs) are small-sized peptides synthesized by PC synthase (PCS) using glutathione (GSH) as a substrate, and they play an important role in the detoxification of toxic heavy metals in plants, fission yeast, and other living organisms. Recently, it has been suggested that PCS is also involved in degradation of some xenobiotics including monobromobimane. PCS cleaves the Gly residue from GSH-xenobiotics conjugates resulting in ${\gamma}$-Glu-Cys-xenobiotics, and this is to degraded further. Therefore, our research is focus on whether PCS is also involved in degradation of tolclofos-methyl, an important pesticide which has been used in ginseng cultivated areas. Heterologous expression of Arabidopsis PCS confers tolerance to tolclofos-methyl in yeast. Furthermore, PCS-deficient Cad1-3 Arabidopsis mutant showed high sensitivity to tolclofos-methyl compared with wild-type plants. These results imply that PCS is involved in degradation of tolclofos-methyl as other xenobiotics.

취성재료의 소구충돌에 의한 충격손상 (I) (Impact Damage on Brittle Materials with Small Spheres (I))

  • 우수창;김문생;신형섭;이현철
    • 한국정밀공학회지
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    • 제18권11호
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    • pp.93-100
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    • 2001
  • Brittle materials are very weak for impact because of typical characteristics which happen to be easily fractured with low fracture toughness and crack sensitivity. When brittle materials are subjected to impact due to small spheres, high contact pressure is occurred to impact surface and then local damage on specimen is developed, since there are little plastic deformations due to contact pressure compared to metals. This local damage is a dangerous factor which gives rise to final fracture of structures. In this research, the crack propagation process of soda lime glass by impact of small sphere is explained and the effects of the constraint conditions of impact spheres and materials for the material damage were studied by using soda-lime glass. that is the effects for the materials and sizes of impact ball, thickness of specimen and residual strength. Especially, this research has focused on the damage behavior of ring crack, cone crack and several kinds of cracks.

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변압기 냉각 특성 해석 (Cooling Characteristic Analysis of Transformer's Radiator)

  • 김현재;양시원;김원석;권기영;이민제
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.1920-1925
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    • 2007
  • A transformer is a device that changes the current and voltage by electricity induced between coil and core steel, and it is composed of metals and insulating materials. In the core of the transformer, the thermal load is generated by electric loss and the high temperature can make the break of insulating. So we must cool down the temperature of transformer by external radiators. According to cooling fan's usage, there are two cooling types, OA(Oil Natural Air Natural) and FA(Oil Natural Air Forced). For this study, we used Fluent 6.2 and analyzed the cooling characteristic of radiator. we calculated 1-fin of detail modeling that is similar to honeycomb structure and multi-fin(18-fin) calculation for OA and FA types. For the sensitivity study, we have different positions(side, under) of cooling fans for forced convection of FA type. The calculation results were compared with the measurement data which obtained from 135.45/69kV ultra transformer flowrate and temperature test. The aim of the study is to assess the Fluent code prediction on the radiator calculation and to use the data for optimizing transformer radiator design.

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Construction and Characterization of a Recombinant Bioluminescence Streptomycetes for Potential Environmental Monitoring

  • Park, Hyun-Joo;Hwang, Keum-Ok;Kim, Eung-Soo
    • Journal of Microbiology and Biotechnology
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    • 제12권4호
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    • pp.706-709
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    • 2002
  • Bacterial bioluminescence has been known to be a highly valuable reporter system for its potential application as an effective and simple environmental monitoring method for toxic compounds. In this short report, we constructed a streptomycetes-Escherichia coli shuttle vector-containing bioluminescence system and evaluated its potential application for toxic compounds monitoring. The luxAB biolurninescence genes from Vibrio harveyi were cloned into a streptornycetes-E. coli shuttle vector (named pESK004) and functionally expressed in Streptomyces lividans. The recombinant S. lividans containing pESK004 exhibited an optimal biolurninescence at the optical density ($OD_{600\;nm}$) of 0.4-0.5 and aldehyde concentration of 0.005%. When the recombinant bioluminescence streptomycetes was exposed to a toxic compound such as heavy metals, chlorinated phenols, or pesticides, the bioluminescence was decreased proportionally to the concentration of toxic compound in the assay mixture. The $EC_{50}$ (effective concentration to decrease 50% of the bioluminescence prior to exposure) values in the recombinant biolurninescence streptomycetes for mercury, 2,4-dichlorophenol, and malathion were measured at 2.2 ppm, 144.0 ppm, and 82.4 ppm, respectively. The degree of sensitivity and specificity pattern toward these toxic compounds characterized in this recombinant bioluminescence streptomycetes were unique when compared with previously reported bacterial bioluminescence systems, and this revealed that a recombinant bioluminescence streptomycetes might provide an alternative or complementary system for potential environmental monitoring.