• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1998.04a
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 1994.10a
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• pp.55-60
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• 1994

The paper is aimed at investigating the buckling strength of single-layer latticed domes with the geometrically initial imperfection under the uniformly distributed vertical-loading and the partially concentrated equipment-loading. The results show that the effect of initial imperfection on the buckling strength, if the magnitude of equipment-loading is small, is much more sensitive in domes of overall buckling than in domes of member buckling, but with increasing equipment-loading, it is very sensitive both in domes of overall buckling and of member buckling

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.362-369
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be expressed in the form of 'exactness' and 'accuracy', because this is made basic data in the use of building structure design. This paper made a study on the specification of high sensitive equipment and proposed a contents of the specification.

• Journal of Magnetics
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• v.22 no.2
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• pp.315-325
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• 2017

Magnetically suspended sensitive gyroscopes (MSSGs) provide an interesting alternative for achieving precious attitude angular measurement. To effectively reduce the measurement error caused by the non-uniformity of the air-gap flux density in a MSSG, this paper proposes a novel compensation method based on measuring and modeling of the air-gap flux density. The angular velocity measurement principle and the structure of the MSSG are described, and then the characteristic of the air-gap flux density has been analyzed in detail. Next, to compensate the flux density distribution error and improve the measurement accuracy of the MSSG, a real-time compensation method based on the online measurement with hall probes is designed. The common issues caused by the non-uniformity of the air-gap flux density can be effectively resolved by the proposed method in high-precision magnetically suspended configurations. Comparative simulation results before and after compensation have verified the effectiveness and superiority of the proposed compensation method.

• Journal of Magnetics
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• v.21 no.4
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• pp.529-536
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• 2016

Magnetically suspended sensitive gyroscopes (MSSGs) provide an interesting alternative for achieving precious attitude angular measurement. To effectively reduce the measurement error caused by dynamic imbalance, this paper proposes a novel compensation method based on analysis and modeling of the error for a MSSG. Firstly, the angular velocity measurement principle of the MSSG is described. Then the analytical model of dynamic imbalance error has been established by solving the complex coefficient differential dynamic equations of the rotor. The generation mechanism and changing regularity of the dynamic imbalance error have been revealed. Next, a compensation method is designed to compensate the dynamic imbalance error and improve the measurement accuracy of the MSSG. The common issues caused by dynamic imbalance can be effectively resolved by the proposed method in gyroscopes with a levitating rotor. Comparative simulation results before and after compensation have verified the effectiveness and superiority of the proposed compensation method.

• Journal of Electrical Engineering and Technology
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• v.11 no.5
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• pp.1475-1485
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• 2016

• International Journal of High-Rise Buildings
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• v.1 no.1
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• pp.15-19
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• 2012

Occupant footfalls are often the most critical source of floor vibration on upper floors of buildings. Floor motions can degrade the performance of imaging equipment, disrupt sensitive research equipment, and cause discomfort for the occupants. It is essential that low-vibration environments be provided for functionality of sensitive spaces on floors above grade. This requires a sufficiently stiff and massive floor structure that effectively resists the forces exerted from user traffic. Over the past 25 years, generic vibration limits have been developed, which provide frequency dependent sensitivities for wide classes of equipment, and are used extensively in lab design for healthcare and research facilities. The same basis for these curves can be used to quantify acceptable limits of vibration for human comfort, depending on the intended occupancy of the space. When available, manufacturer's vibration criteria for sensitive equipment are expressed in units of acceleration, velocity or displacement and can be specified as zero-to-peak, peak-to-peak, or root-mean-square (rms) with varying frequency ranges and resolutions. Several approaches to prediction of floor vibrations are currently applied in practice. Each method is traceable to fundamental structural dynamics, differing only in the level of complexity assumed for the system response, and the required information for use as model inputs. Three commonly used models are described, as well as key features they possess that make them attractive to use for various applications. A case study is presented of a tall building which has fitness areas on two of the upper floors. The analysis predicted that the motions experienced would be within the given criteria, but showed that if the floor had been more flexible, the potential exists for a locked-in resonance response which could have been felt over large portions of the building.

• Journal of the Semiconductor & Display Technology
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• v.1 no.1
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• pp.1-7
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• 2002

Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.

• Journal of Magnetics
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• v.22 no.2
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• pp.203-213
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• 2017

Magnetically suspended control & sensitive gyroscope (MSCSG) is a novel type of gyroscope with the integration of attitude control and attitude angular measurement. To improve the precision and reduce the power consumption of Lorentz Force-type Magnetic Bearing (LFMB), the air gap flux density distribution of LFMB has been studied. The uniformity of air gap flux density is defined to qualify the uniform degree of the air gap flux density distribution. Considering the consumption, the average value of flux density is defined as well. Some optimal designs and analyses of LFMB are carried out by finite element simulation. The strength of the permanent magnet is taken into consideration during the machining process. To verify the design and simulation, a high-precision instrument is employed to measure the 3-dimensional magnetic flux density of LFMB. After measurement and calculation, the uniform degree of magnetic flux density distribution reaches 0.978 and the average value of the flux density is 0.482T. Experimental results show that the optimal design is effective and some useful advice can be obtained for further research.