• Title/Summary/Keyword: Semiconductor equipment

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FHD Flexible Endoscopy Design Using Wedge Prism (Wedge Prism을 이용한 FHD급 연성 내시경 광학계 설계)

  • Park, Sung-Woo;Jung, Mee-Suk
    • Korean Journal of Optics and Photonics
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    • v.33 no.6
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    • pp.295-302
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    • 2022
  • In this paper, a wedge prism application method was studied to design a full-high-definition (FHD)-class high-resolution flexible endoscope. In the case of the conventional flexible endoscope optical system, the F number is made large or a liquid lens is applied to obtain the same imaging performance in a wide depth of field. However, there is a problem in that the diameter of the optical system increases because an additional light guide and equipment are required. To solve this problem, two wedge prisms were applied to the flexible endoscope optical system to adjust the image distance for each object distance. First, two wedge prisms were symmetrically placed on the designed endoscopic optical system. An image distance satisfying the target imaging performance according to each objective distance was derived. Next, the wedge prism decenter value for controlling the image distance was derived. By combining these two data, a wedge prism decenter value that satisfied the target imaging performance at each object distance was applied in multi configurations. As a result of the optimal design applied with the wedge prism, a target imaging performance of more than 20% of the modulation transfer function for a resolution of 178 cycles/mm was satisfied in the entire depth of field of 100 mm-7 mm.

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating (옥시불화이트륨 분말의 고상합성 및 플라즈마 스프레이 코팅 적용)

  • Lee, Jung-Il;Kim, Young-Ju;Chae, Hui Ra;Kim, Yun Jeong;Park, Seong Ju;Sin, Gyoung Seon;Ha, Tae Bin;Kim, Ji Hyeon;Jeong, Gu Hun;Ryu, Jeong Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.6
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    • pp.276-281
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    • 2021
  • In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y2O3 and YF3 as raw materials. Mixing ratio of the Y2O3 and YF3 was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

Effect of AlF3 addition to the plasma resistance behavior of YOF coating deposited by plasma-spraying method (플라즈마-스프레이법에 의해 코팅한 옥시불화이트륨(YOF) 증착층의 플라즈마 내식성에 미치는 불화알루미늄(AlF3) 첨가 효과)

  • Young-Ju Kim;Je Hong Park;Si Beom Yu;Seungwon Jeong;Kang Min Kim;Jeong Ho Ryu
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.4
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    • pp.153-157
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    • 2023
  • In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we mixed AlF3 powder with the solid-state reacted yttrium oxyfluoride (YOF) in order to increase plasma-etching resistance of the plasma spray coated YOF layer. Effects of the mixing ratio of AlF3 with YOF powder on crystal structure, microstructure and chemical composition were investigated using XRD and FE-SEM. The plasma-etching ratios of the plasma-spray coated layers were calculated and correlation with AlF3 mixing ratio was analyzed.

Fabrication of an Oxide-based Optical Sensor on a Stretchable Substrate (스트레처블 기판상에 산화물 기반의 광센서 제작)

  • Moojin Kim
    • Journal of Industrial Convergence
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    • v.20 no.12
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    • pp.79-85
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    • 2022
  • Recently, a smartphone manufactured on a flexible substrate has been released as an electronic device, and research on a stretchable electronic device is in progress. In this paper, a silicon-based stretchable material is made and used as a substrate to implement and evaluate an optical sensor device using oxide semiconductor. To this end, a substrate that stretches well at room temperature was made using a silicone-based solution rubber, and the elongation of 350% of the material was confirmed, and optical properties such as reflectivity, transmittance, and absorbance were measured. Next, since the surface of these materials is hydrophobic, oxygen-based plasma surface treatment was performed to clean the surface and change the surface to hydrophilicity. After depositing an AZO-based oxide film with vacuum equipment, an Ag electrode was formed using a cotton swab or a metal mast to complete the photosensor. The optoelectronic device analyzed the change in current according to the voltage when light was irradiated and when it was not, and the photocurrent caused by light was observed. In addition, the effect of the optical sensor according to the folding was additionally tested using a bending machine. In the future, we plan to intensively study folding (bending) and stretching optical devices by forming stretchable semiconductor materials and electrodes on stretchable substrates.

Implementation of a walking-aid light with machine vision-based pedestrian signal detection (머신비전 기반 보행신호등 검출 기능을 갖는 보행등 구현)

  • Jihun Koo;Juseong Lee;Hongrae Cho;Ho-Myoung An
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.17 no.1
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    • pp.31-37
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    • 2024
  • In this study, we propose a machine vision-based pedestrian signal detection algorithm that operates efficiently even in computing resource-constrained environments. This algorithm demonstrates high efficiency within limited resources and is designed to minimize the impact of ambient lighting by sequentially applying HSV color space-based image processing, binarization, morphological operations, labeling, and other steps to address issues such as light glare. Particularly, this algorithm is structured in a relatively simple form to ensure smooth operation within embedded system environments, considering the limitations of computing resources. Consequently, it possesses a structure that operates reliably even in environments with low computing resources. Moreover, the proposed pedestrian signal system not only includes pedestrian signal detection capabilities but also incorporates IoT functionality, allowing wireless integration with a web server. This integration enables users to conveniently monitor and control the status of the signal system through the web server. Additionally, successful implementation has been achieved for effectively controlling 50W LED pedestrian signals. This proposed system aims to provide a rapid and efficient pedestrian signal detection and control system within resource-constrained environments, contemplating its potential applicability in real-world road scenarios. Anticipated contributions include fostering the establishment of safer and more intelligent traffic systems.

Partial Discharge Detection of High Voltage Switchgear Using a Ultra High Frequency Sensor

  • Shin, Jong-Yeol;Lee, Young-Sang;Hong, Jin-Woong
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.4
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    • pp.211-215
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    • 2013
  • Partial discharge diagnosis techniques using ultra high frequencies do not affect load movement, because there is no interruption of power. Consequently, these techniques are popular among the prevention diagnosis methods. For the first time, this measurement technique has been applied to the GIS, and has been tested by applying an extra high voltage switchboard. This particular technique makes it easy to measure in the live state, and is not affected by the noise generated by analyzing the causes of faults ? thereby making risk analysis possible. It is reported that the analysis data and the evaluation of the risk level are improved, especially for poor location, and that the measurement of Ultra high frequency (UHF) partial discharge of the real live wire in industrial switchgear is spectacular. Partial discharge diagnosis techniques by using the Ultra High Frequency sensor have been recently highlighted, and it is verified by applying them to the GIS. This has become one of the new and various power equipment techniques. Diagnosis using a UHF sensor is easy to measure, and waveform analysis is already standardized, due to numerous past case experiments. This technique is currently active in research and development, and commercialization is becoming a reality. Another aspect of this technique is that it can determine the occurrences and types of partial discharge, by the application diagnosis for live wire of ultra high voltage switchgear. Measured data by using the UHF partial discharge techniques for ultra high voltage switchgear was obtained from 200 places in Gumi, Yeosu, Taiwan and China's semiconductor plants, and also the partial discharge signals at 15 other places were found. It was confirmed that the partial discharge signal was destroyed by improving the work of junction bolt tightening check, and the cable head reinforcement insulation at 8 places with a possibility for preventing the interruption of service. Also, it was confirmed that the UHF partial discharge measurement techniques are also a prevention diagnosis method in actual industrial sites. The measured field data and the usage of the research for risk assessment techniques of the live wire status of power equipment make a valuable database for future improvements.

Calibration Examination of Dose Area Product Meters using X-ray (X선을 이용한 면적선량계의 교정 연구)

  • Jung, Jae Eun;Won, Do-Yeon;Jung, Hong-Moon;Kweon, Dae Cheol
    • Journal of the Korean Society of Radiology
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    • v.11 no.1
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    • pp.37-42
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    • 2017
  • We measured the absorbed dose and the area dose using an ionization chamber type of area dose product (DAP) meter and measured the calibration factor in the X-ray examination. In the indirect dose measurement method, the detector was installed in the radiation part of the X-ray equipment, and the measured value was calculated as the dose at the exposure part. The instrument used to calculate the calibration factor was an X-ray equipment (DK-550R / F, DongKang Medical Co., Ltd., Seoul, Korea). The calibration method for the calibration factor was to connect the DAP meter (PD-8100, Toreck Co. Ltd., Japan) to the calibration dosimeter tube voltage of 70 kV, tube current of 500 mA, 0.158 sec. The reference dosimeter used a semiconductor (DOSIMAX plus A, Scanditronix, $Wellh{\ddot{o}}fer$, Germany). After installing the DAP meter on the front of the multi-collimator of the ionization chamber, the calibration factor of the dosimeter was obtained using the reference dosimeter for accurate dose measurement. Experimental exposure values and values from the calibration dosimeter were calculated by multiplying each calibration factor. The calibration factor was calculated as 1.045. In order to calculate the calibration coefficient according to the tube voltage in the ionization type DAP dosimeter, the absorbed dose and the area dose were calculated and the calibration factor was calculated. The corrective area dose was calculated by calculating the calibration factor of the DAP meter.

Development of High Efficiency Dehumidifiers in low temperature (저온에서 고효율 제습기 개발)

  • Kim, Jong-Ryeol
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.206-211
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    • 2016
  • Various applications require dry air at low temperature, such automation equipment, semiconductor manufacturing, chemical production lines, and coating processes for the shipbuilding industry. Four evaporators for low temperature (below $0^{\circ}C$) were installed for a dehumidification system. Moist air is cooled sequentially over three evaporators. The first evaporator has an evaporation temperature of $13^{\circ}C$, that of the second evaporator is $5^{\circ}C$, and that of the third evaporator is maintained at $-1.3^{\circ}C$. In the fourth evaporator implantation thereby the moisture contained in the moisture air. A pressure regulator (CPCE 12) is used at this point and is defrosted when the vapor pressure is below a set value. The non-implantation moisture of the air is a heating system that uses the waste heat of a condenser with high temperature. It develops the cooling type's dehumidifier, which is important equipment that prevents the destruction of protein and measures the temperature and humidity at each interval by changing the front air velocity from 1.0 m/s to 4.0 m/s. The cooling capacity was also calculated. The greatest cooling capacity was 1.77 kcal/h for a front air velocity of 2.0 m/s

A Study on the Compensation of Thermal Errors for Phase Measuring Profilometry (PMP 형상 측정법의 열 변위 보정에 관한 연구)

  • Kim, Gi-Seung;Park, Yoon-Chang
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.6
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    • pp.598-603
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    • 2019
  • Three-dimensional shape measurement technology is used in various industries. Among them, optical three-dimensional shape measurement techniques based on the optical trigonometry are mainly used in the field of semiconductor product inspection, where large quantities of three-dimensional shape measurements are made daily in factories and fine measurements are also required. The light source and the drive circuit, which are components of three-dimensional measurement equipment based on this optical trigonometry, produce heat generated by prolonged operation, and may be exposed to conditions where the ambient temperature is not constant, resulting in temperature-induced measurement errors. In this study, the compensation method of the Thermal Errors for Phase Measuring Profilometry is proposed. Three-Dimensional Shape Measurement Equipment based on Phase Measuring Profilometry is implemented to measure the height of an object and ambient temperature for 10 Hours, and a regression line was obtained line by making simple linear regression using measured temperature and height values. This regression line was used to correct the error of the height measurement according to the temperature, and thermal error was from 139.88 um(Micrometer) to 13.12 um.

An Empirical Study on the Success Factors of Korean Venture Firms: The Suggestion of the Integrated Model Utilizing Secondary Data (한국 벤처기업의 성공요인에 관한 실증적 연구: 2차 자료를 활용한 통합적 모형의 제시)

  • Koh, InKon
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.13 no.2
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    • pp.1-13
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    • 2018
  • This study examines the relationship between the organizational general characteristics (industry, size, location, development stage, and company age) and success factors of Korean venture firms using secondary data. Among the industries with the highest sales figures in 2016 are food / fiber / (non) metals, and the smallest category was software development. The sectors with the highest net profit were computer / semiconductor / electronic components, and the smallest category was telecommunication equipment / broadcasting equipment. The industries with the largest sales growth rate are IT / broadcasting services and software development. The industries with the highest net profit margin of sales are energy / medical / precision, and the smallest is telecommunication equipment / broadcasting equipment. In terms of the number of employees, venture firms with more than 100 employees have the largest sales and net profit, with employees between 1 and 9 have the smallest. However, these results are predictable. In general, the number of employees is highly correlated with sales and net profit. Rather, the sales growth rate and the net profit margin of sales may be meaningful. In particular, with employees between 50 ~ 99, the growth rate of sales and the net profit margin of sales were high. In terms of location, Seoul / Incheon / Gyeonggi were the regions with the highest sales and Daejeon / Sejong / Chungcheong / Gangwon were the least regions. Gwangju / Jeolla / Jeju and Seoul / Incheon / Gyeonggi were almost similar in the areas with the largest net profit. However, Daejeon / Sejong / Chungcheong / Gangwon had the lowest net profit. Unusually, the areas with the highest sales growth rate and the highest net profit margin of sales were Gwangju / Jeolla / Jeju, and the smallest areas were Busan / Jeonnam / Ulsan In the relationship between the stage of development and the performance of the company, the sales of maturity and decline stages were the highest and establishing stage was the lowest. Net profit was also the highest in mature stage and the smallest in establishing stage. The sales growth rate shows a typical pattern in the order of establishing stage, early growth stage, high growth stage, maturity stage, and decline stage. In terms of business performance, sales and net profit are the highest with 21 years or more of company age, and the smallest is less than 3 years. In addition, the sales growth rate was the highest in three years or less, and the net profit margin of sales was the highest in 4 to 10 years. This study can present lots of useful implications by suggesting integrated research model and examining the success factors of Korean venture firms and presenting the application methods of secondary data in analyzing the current status of venture industry in Korea.