• Title/Summary/Keyword: Semiconductor $CO_2$ gas sensor

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Induction of the High Order Calibration Equation of Metal Oxide Semiconductor Gas Sensors (산화물 반도체식 가스센서의 입출력 고차 캘리브레이션 방정식 도출)

  • Park, Gyoutae;Kim, Kangmin;Lee, Hyeonggi;Yoon, Myeongsub
    • Journal of the Korean Institute of Gas
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    • v.24 no.2
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    • pp.44-49
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    • 2020
  • In this paper, a measuring circuit is designed through analyzing manufacture specification of the sensor based on MOS. And the best input-output polynomial are induced that really gas sensors are used in gas safety management industrial fields. Response characteristics of a MOS gas sensor is analysed by through sensor's output voltages are measured after standard gases with six kinds of concentrations are manufactured and are injected to the sensor. A lookup table is created by relations of sensor's output voltages by injecting gases with other concentrations. Because data of the formed lookup table are equal interval, a polynomial can be induced of method of approximation function. So the 5th polynomial of input-output for a sensor is defined, coefficients are calculated by using least squares method, and the 5th polynomial is completed for representing characteristics of the sensor. If the proposed polynomial is applied to gas leak detectors, an inverse transformation of polynomial and programing of array codes are recreated. In this research, polynomial is implemented with array types that intervals of values of a lookup table are one-fifth sampled and interpolated. The performance of proposed 5th calibration equation is verified that errors are reduced than a linear expression when tests are performed by measurement of concentrations against injection of standard gases.

Preparation of Gas Sensor from Pitch-based Activated Carbon Fibers and Its Toxic Gas Sensing Characteristics (피치계 활성탄소섬유기반 가스센서 제조 및 유해가스 감응 특성)

  • Kim, Min Il;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.25 no.2
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    • pp.193-197
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    • 2014
  • The electrode for gas sensor was prepared by using pitch-based activated carbon fibers and polyvinyl alcohol (PVA) to investigate the toxic gas sensing characteristics. The physicochemical properties of activated carbon fibers electrode for gas sensor were analyzed with SEM and BET. Toxic gases sensing property of the electrode was also identified by different toxic gases such as $NH_3$, NO and $CO_2$. The specific surface area of activated carbon fibers electrode for gas sensor was decreased by 33% owing to PVA used as a binder compared with the activated carbon fibers. However, its pore size distribution of the ACF electrode was not greatly influenced by PVA. The activated carbon fibers electrode for gas sensor responded to toxic gases by electron hopping unlike semiconductor based gas sensors. In this study, activated carbon fibers electrode was decreased to 7.5% in resistance for the NH3 gas of the 100 ppm concentration and its $NH_3$ gas sensing property was confirmed the most excellent compared with other toxic gases.

Ethanol Gas Sensing Properties of NiO-based Composite Oxide Semiconductor with Co3O4 Nanoparticles (산화코발트 나노입자의 첨가에 따른 산화니켈 기반 반도체 산화물의 에탄올 가스 검출 특성 향상)

  • Kang, Wooseung
    • Journal of the Korean institute of surface engineering
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    • v.49 no.4
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    • pp.382-388
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    • 2016
  • NiO nanoparticles were synthesized by hydrothermal method for the application to ethanol gas sensor. They were composited with $Co_3O_4$ nanoparticles to improve the sensitivity to ethanol gas. Scanning electron microscopy revealed that the synthesized NiO nanoparticles were plate-shaped with the approximate size and thickness of 60 - 120 nm and 20 nm, respectively. On the other hand, $Co_3O_4$ nanoparticles mixed with NiO was observed to be spherical with the size range of 30 - 50 nm. The sensitivities of NiO sensors composited with $Co_3O_4$ nanoparticles at an optimal ratio of 8 : 2 were enhanced to approximately 1.44 - 1.79 times as high as those of as-synthesized NiO sensors for the ethanol concentration of 10 - 200 ppm at $200^{\circ}C$. The mechanism of the improved ethanol gas sensing of the NiO sensors composited with $Co_3O_4$ nanoparticles was discussed.

Gas sensing characteristics of Co3O4 thick films with metal oxides (금속산화물을 첨가한 Co3O4 후막의 가스 감지특성)

  • Jo, Chang-Yong;Park, Ki-Cheol;Kim, Jeong-Gyoo
    • Journal of Sensor Science and Technology
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    • v.18 no.1
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    • pp.54-62
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    • 2009
  • ${Co_3}{O_4}$ and ${Co_3}{O_4}$-based thick films with additives such as ${Co_3}{O_4}-{Fe_2}{O_3}$(5 wt.%), ${Co_3}{O_4}-{SnO_2}$ (5 wt.%), ${Co_3}{O_4}-{WO_3}$(5 wt.%) and ${Co_3}{O_4}$-ZnO(5 wt.%) were fabricated by screen printing method on alumina substrates. Their structural properties were examined by XRD and SEM. The sensitivities to iso-${C_4}H_{10}$, $CH_4$, CO, $NH_3$ and NO gases were investigated with the thick films heat treated at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. From the gas sensing properties of the films, the films showed p-type semiconductor behaviors. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed higher sensitivity to i-${C_4}H_{10}$ and CO gases than other thick-films. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed the sensitivity of 170 % to 3000 ppm iso-${C_4}H_{10}$ gas and 100 % to 100 ppm CO gas at the working temperature of $250^{\circ}C$. The response time to i-${C_4}H_{10}$ and CO gases showed rise time of about 10 seconds and fall time of about $3{\sim}4$ minutes. The selectivity to i-${C_4}H_{10}$ and CO gases was enhanced in the ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film.

Implementation of a Residual Quantity Monitoring System in a Liquefied Gas Storage Tank based on Wireless Sensor Network Technology (무선센서 네트워크 기술 기반 액화가스 저장탱크 내 잔량 모니터링 시스템 구현)

  • Kim, Min-Kyu;Han, Hae-Jin;Han, Jaehwan
    • Journal of Sensor Science and Technology
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    • v.27 no.5
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    • pp.352-356
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    • 2018
  • This paper relates to a technology for monitoring a liquefied gas storage tank in the special gas field where demand is increasing owing to the continuous growth of related fields such as the semiconductor, display, and ICT convergence electronics industries. We have proposed a system for real - time monitoring using wireless sensor network technology, and implemented a system consisting of a sensor unit, transmitter module, and receiver module to be attached to a liquefied gas storage tank. The system was applied to LCO2 tanks among various liquefied gas storage tanks to verify the feasibility. The storage tanks employed in the experiments has capacities of 16,179 l and was 1,920 mm in inner diameter. Furthermore, the density was 1.03 g/l. The measured data were compared with reference data on the remaining gas level versus the $CO_2$ height of the surface, expressed using a conventional water meter, provided by an existing storage tank supplier. The experimental results show that the data is similar to the standard data provided by the tank supplier, and has a high accuracy and reliability within an error range of 0.03%.

Zinc Oxide Wire-Like Thin Films as Nitrogen Monoxide Gas Sensor

  • Hung, Nguyen Le;Kim, Hyojin;Kim, Dojin
    • Korean Journal of Materials Research
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    • v.25 no.7
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    • pp.358-363
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    • 2015
  • We present an excellent detection for nitrogen monoxide (NO) gas using polycrystalline ZnO wire-like films synthesized via a simple method combined with sputtering of Zn metallic films and subsequent thermal oxidation of the sputtered Zn nanowire films in dry air. Structural and morphological characterization revealed that it would be possible to synthesize polycrystalline hexagonal wurtzite ZnO films of a wire-like nanostructure with widths of 100-150 nm and lengths of several microns by controlling the sputtering conditions. It was found from the gas sensing measurements that the ZnO wire-like thin film gas sensor showed a significantly high response, with a maximum value of 29.2 for 2 ppm NO at $200^{\circ}C$, as well as a reversible fast response to NO with a very low detection limit of 50 ppb. In addition, the ZnO wire-like thin film gas sensor also displayed an NO-selective sensing response for NO, $O_2$, $H_2$, $NH_3$, and CO gases. Our results illustrate that polycrystalline ZnO wire-like thin films are potential sensing materials for the fabrication of NO-sensitive high-performance gas sensors.

Classification of Chemical Warfare Agents Using Thick Film Gas Sensor Array (후막 센서 어레이를 이용한 화학 작용제 분류)

  • Kwak Jun-Hyuk;Choi Nak-Jin;Bahn Tae-Hyun;Lim Yeon-Tae;Kim Jae-Chang;Huh Jeung-Soo;Lee Duk-Dong
    • Journal of the Korea Institute of Military Science and Technology
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    • v.7 no.2 s.17
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    • pp.81-87
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    • 2004
  • Semiconductor thick film gas sensors based on tin oxide are fabricated and their gas response characteristics are examined for four simulant gases of chemical warfare agent (CWA)s. The sensing materials are prepared in three different sets. 1) The Pt or Pd $(1,\;2,\;3\;wt.\%)$ as catalyst is impregnated in the base material of $SnO_2$ by impregnation method.2) $Al_2O_3\;(0,\;4,\;12,\;20\;wt.\%),\;In_2O_3\;(1,\;2,\;3\;wt.\%),\;WO_3\;(1,\;2,\;3\;wt.\%),\;TiO_2\;(3,\;5,\;10\;wt.\%)$ or $SiO_2\;(3,\;5,\;10\;wt.\%)$ is added to $SnO_2$ by physical ball milling process. 3) ZnO $(1,\;2,\;3,\;4,\;5\;wt.\%)$ or $ZrO_2\;(1,\;3,\;5\;wt.\%)$ is added to $SnO_2$ by co-precipitation method. Surface morphology, particle size, and specific surface area of fabricated sensing films are performed by the SEM, XRD and BET respectively. Response characteristics are examined for simulant gases with temperature in the range 200 to $400^{\circ}C$, with different gas concentrations. These sensors have high sensitivities more than $50\%$ at 500ppb concentration for test gases and also have shown good repetition tests. Four sensing materials are selected with good sensitivity and stability and are fabricated as a sensor array A sensor array Identities among the four simulant gases through the principal component analysis (PCA). High sensitivity is acquired by using the semiconductor thick film gas sensors and four CWA gases are classified by using a sensor array through PCA.

A study on monoxide gas sensing characteristics of Pt-$SnO_2$-SiC Schottky diode (Pt-$SnO_2$-SiC 쇼트키 다이오드 구조를 갖는 CO 가스 감지특성에 관한 연구)

  • Lee, Joo-Hun;Lee, Jae-Hong;Jang, Suk-Won;Lee, Eui-Sik;Kim, Chang-Kyo
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1555-1557
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    • 2004
  • The Pt-doped $SnO_2$ thin film for CO sensor applications obtained by RF sputtering from a target of the same compound in an Ar-$O_2$ atmosphere. Pt-SnO2-SiC Schottky diode detection of CO gas Cause the remarkable change in electrical resistivity of the semiconductor. the good gas sensitivity is shown when annealing condition is 600$^{\circ}C$, 1hr in RTP and detected temperature is 350$^{\circ}C$.

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Fabrication and Characterization of Portable Electronic Nose System using Gas Sensor Array and Artificial Neural Network (가스센서 어레이와 인공 신경망을 이용한 소형 전자코 시스템의 제작 및 특성)

  • 홍형기;권철한;윤동현;김승렬;이규정
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.99-102
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    • 1997
  • An electronic nose system is an instrument designed far mimicking human olfactory system. It consists generally of gas (odor) sensor array corresponding to olfactory receptors of human nose and artificial neural network pattern recognition technique based on human biological odor sensing mechanism. Considerable attempts to develop the electronic nose system have been made far applications in the fields of floods, drinks, cosmetics, environment monitoring, etc. A portable electronic nose system has been fabricated by using oxide semiconductor gas sensor array and pattern recognition technique such as principal component analysis (PCA) and back propagation artificial neural network The sensor array consists of six thick film gas sensors whose sensing layers are Pd-doped WO$_3$ Pt-doped SnO$_2$ TiO$_2$-Sb$_2$O$_3$-Pd-doped SnO$_2$ TiO$_2$-Sb$_2$O$_{5}$-Pd-doped SnO$_2$+Pd filter layer, A1$_2$O$_3$-doped ZnO and PdCl$_2$-doped SnO$_2$. As an application the system has been used to identify CO/HC car exhausting gases and the identification has been successfully demonstrated.d.

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Sensing Characteristics of $SnO_{2}$ type CO sensors for combustion exhaust gases monitoring (연소배가스 모니터링을 위한 $SnO_{2}$계 CO센서의 검지특성)

  • Kim, I.J.;Han, S.D.;Lim, H.J.;Son, Y.M.
    • Journal of Sensor Science and Technology
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    • v.6 no.5
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    • pp.369-375
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    • 1997
  • $V_{2}O_{5}/ThO_{2}/Pd$-doped $SnO_{2}$ sensor has a good selectivity and stability to CO at high sensor temperature of about $500^{\circ}C$, and shows rapid response. In particular, many kinds of interference gases, such as $NO_{x}$, $C_{3}H_{8}$, $CH_{4}$ and $SO_{2}$ have been found to give only a slight influence on the sensor selectivity to CO gas sensitivity by doped $V_{2}O_{5}$ (3.0 wt.%). For the sensor we used well-known thick film technological route with $V_{2}O_{5}$(3.0 wt.%), Pd(1.0 wt.%) and $ThO_{2}$(l.5 wt.%) as catalytic materials. In the case of mixed $NO_{x}$-CO gases, as combustion exhaust gas, only CO detection by $SnO_{2}$ type semiconductor sensor is generally very difficult because of $NO_{x}$ interference. The developed sensors can use to measure the exhausting gas of the automobile or the boiler for the Air-to-Fuel ratio control.

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