• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1994년도 하계학술대회 논문집 A
• /
• pp.237-239
• /
• 1994

The MOS-controlled thyristor(MCT) is a new power semi-conductor device that combines four layers thyristor structure presenting regenerative action and MOS-gate providing controlled turn-on and turn-off. The MCT has very fast switching speed owing to voltage controlled MOS-gate, and very low on-state voltage drop resulting from regenerative action of four layers thyristor structure. In addition, because of a higher dv/dt rating and di/dt rating, gate drive circuit and snubber circuit can be simpler comparing to other power switching devices. So recently much interest and endeavor is being applied to develop the performance and ratings of the MCT. This paper describes the switching characteristic of the MCT for its practical applications and presents a model for PSPICE circuit simulation. The model for PSPICE circuit simulation is compared to the experimental result using MCTV75P60F1 made by Harris co..

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1997년도 하계학술대회 논문집 E
• /
• pp.1853-1855
• /
• 1997

This paper describes the characteristics of partial discharge generated by conducting particle in cable splice using ultrasonic method. For simulating partial discharges generated by defects, outer semi conductor of cable splice as ring share electrode was used. The conductive particle was attached on the surface of cable insulator(XLPE) to examine the affection of conducting particles in cable splice. The correlation between the partial discharge quantity and the magnitude of the ultrasonic signal was investigated as the number, length, diameter and alignment of particle when applied voltage increased.

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
• /
• pp.145-149
• /
• 2006

As the minimum feature size decreases, it is more difficult to control critical contaminant particles. For 16GB flash memory introduced by Samsung a few months ago, 50nm process was used and in this case, contaminant particles as small as 25nm should be control led. The particle beam mass spectrometer (PBMS) was developed to directly sample particles at pressures down to 100 mtorr. This instrument is sensitive to small particles (>5nm) produced in low concentrations ($>20cm^{-3}$). The PBMS has proved to be effect ive in measuring particles generated during semi-conductor fabrication processes, such as low-pressure chemical vapor deposition (LPCVD) of thin films. The operating principle of the PBMS and some measurement results are reviewed in this paper.

• 반도체디스플레이기술학회지
• /
• 제5권4호
• /
• pp.35-40
• /
• 2006

This paper shows that the effect of exposing on the top area and a solution which using a water circulation system. Semiconductor substrate stage is made from Aluminum and is repeated the sequence of exposing (150), turning OFF shutter, taking 30 sec. interval at the top area of stage. So the temperature of substrate temperature rises continuously. On this, we made a waterway at the inner part of the substrate stage and operated a water circulation system. We measured the temperature of a substrate stage surface with a thermocouple attached to the substrate stage. To analyze the top area's temperature, we used Analysis Program ANSYS for analysis and 3D CAD program Solid-Works for modeling.

• 조명전기설비학회논문지
• /
• 제26권4호
• /
• pp.67-74
• /
• 2012

This paper presents the novel design and implementation of a switched reluctance motor with commutator. Unlike typical switched reluctance motor, this motor doesn't require semi-conductor devices and inverter circuits for driving. Instead, the brushes and commutator can make rotating field for driving the switched reluctance motor. Moreover, because this motor has no magnet, the total cost for manufacturing the motor is very cheap. In order to verify the usability of the proposed motor, the authors manufactured the prototype motor, and showed the torque-speed curve of the motor.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.945-947
• /
• 2009

We developed a new laser irradiation (BLDA: Blue Multi-Laser-Diode Annealing) system. The system forms the uniform line beam, which is constructed by 48 pieces of semiconductor lasers. This new system has achieved high laser output stability and the highly accurate beam shape by adopting a reliable laser control, the auto-focus control in addition to an original laser photosynthesis technology and the beam homogenizing technology. It was confirmed to crystallize the Si films effectively with good quality.

• Journal of Advanced Marine Engineering and Technology
• /
• 제28권1호
• /
• pp.56-64
• /
• 2004

A numerical study have been performed on a cavity with one heat source by the open ratio and tilt angle. The goal of this study is to get the information for designing a solar collector absorber. semi-conductor equipment and block heater and so on. The parameters for this study is the various open ratio. and tilt angle of the cavity and Rayleigh numbers The finite volume method with SIMPLE computational algorithm are used and calculated the heat transfer in the cavity. As a result, the heat trans(or was promoted by increase of Rayliegh numbers and open ratios But, the heat transfer was not promted at lower wall of cavity because the flow pattern are very small at lower space in the cavity(Or=0.1) As the Rayleigh number is increased the mean nusselt numbers are increased at inside wall.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2005년도 춘계학술대회 논문집
• /
• pp.258-263
• /
• 2005

Because of its high performance and accuracy, electron beam welding has an important role in industrial applications such as semi-conductor and LCD manufactures. Since its operation has been done in a vacuum room, it is very difficult to check out their weldability as well as the correct welding area of the specimen. In this study, a measurement system of the electron beam welding has been developed based on the 3-axis LVDT controlled table. In addition, the algorithm to tracking the welding line has been developed. Welded regions were measured by using an A-scan ultrasonic sensor only. Weldability of the aluminum specimen has been tested by newly developed measuring system. The results are compared with those by using an C-scan ultrasonic sensor, which show good agreements with each other.

• 반도체디스플레이기술학회지
• /
• 제11권2호
• /
• pp.63-69
• /
• 2012

As decreasing size of chips, the need of wafer level packaging is increased in semi-conductor and display industries. Temperature uniformity is a crucial factor in vacuum soldering process to guarantee quality of bonding between chips and wafer. In this paper, a stepwise iterative algorithm has been suggested to obtain output profile of each heat source. Since this algorithm is based on open-loop stepwise iterative experimental technique, it is easier to implement and cost effective than real time feedback controls. Along with some experiments, it was shown that the suggested algorithm can remarkably improve temperature uniformity of wafer during whole heating process compared with the ordinary manual trial-and error method.

• 한국공간구조학회논문집
• /
• 제14권2호
• /
• pp.87-94
• /
• 2014

In this study, a smart isolation platform has been developed for control of microvibration of high-technology facilities, such as semi-conductor plants and TFT-LCD plants. Previously, microvibration control performance of a smart base isolation system has been investigated. This study compared microvibration control performance of a smart isolation platform with that of conventional base isolation and fixed base. For this purpose, train-induced ground acceleration is used for time history analysis. An MR damper was used to compose a smart isolation platform. A fuzzy logic controller was used as a control algorithm and it was optimized by a multi-objective genetic algorithm. Numerical analysis shows that a smart isolation platform can effectively control microvibration of a high-technology facility subjected to train-induced excitation compared with other models.