• Title/Summary/Keyword: Semi- Insulating GaAs

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Band-gap energy (Eo) measurements of semi-insulating GaAs by photoreflectance (Photoreflectance에 의한 반절연성 GaAs의 띠간격 에너지(Eo)측정)

  • 배인호;김말문;이정열;김인수;김기홍
    • Electrical & Electronic Materials
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    • v.7 no.6
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    • pp.490-495
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    • 1994
  • We investigated photoreflectance of semi-insulating GaAs with respect to modulation sources, that is, modulation beam intensity, modulation frequency, temperature, and thickness of sample. PR spectra by each modulation source turned out to be signals of low electric field third differential, and band gap values of sample were fitted by least square root method for Aspnes' theoretical equation.

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Surface Photovoltage in Electron Beam Irradiation Semi-insulating GaAs

  • Yu, Jae-In;Lim, Jin-Hwan;Yu, Jae-Yong;Kim, Ki-Hong
    • Journal of Electrical Engineering and Technology
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    • v.1 no.4
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    • pp.543-545
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    • 2006
  • Surface photovoltage (SPV) measurements were performed to investigate the optic-electrical properties in the electron beam irradiation semi-insulating GaAs (e-beam irradiation SI-GaAs) and semi-insulating GaAs (SI-GaAs). The signal intensity showed stronge. dependency on the frequency in the SI-GaAs than it did in the e-beam irradiation SI-GaAs. This result indicates that the number of the generated photo-carriers depends on the surface state. Also, the B region of the e-beam irradiation SI-GaAs found a weak signal. This result was explained by the surface and internal damage with e-beam irradiation.

Deep Levels in Semi-Insulating GaAs : Cr and Undoped GaAs (SI GaAs : Cr과 Undoped GaAs의 깊은 준위)

  • Rhee, Jin-Koo
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.11
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    • pp.1294-1303
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    • 1988
  • Electron and hole traps in semi-insulating GaAs with activation energies ({\Delta}E_r) ranging from 0.16 $\pm$ 0.01 to 0.98 $\pm$ 0.01 eV, have been detected and characterized by photo-induced current transient measurements. SI undoped GaAs has fewer deep levels than SI GaAs: Cr. The thermal capture cross section and density of the traps have been estimated and some of the centers have been related to native defects. In particular, the activation energy of the compensating Cr, and "0" levels in semi-insulating GaAs were accurately measured. The transient measurements were complemented by Hall measurements at T > 300K and photocurrent spectra measurements. The transition energies for the deep compensating levels obtained by the analyses of data from these measurements, when compared with those from the transient measurements, indicate negligible lattice-coupling of these centers. Analysis of the transport data also indicates that neutral impurity scattering plays a significant role in semi-insulating materials at high temperatures.

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Fabrication of a depletion mode p-channel GaAs MOSFET using $Al_2O_3$ gate insulator ($Al_2O_3$ 게이트 절연막을 이용한 공핍형 p-채널 GaAs MOSFET의 제조)

  • Jun, Bon-Keun;Lee, Tae-Hyun;Lee, Jung-Hee;Lee, Yong-Hyun
    • Journal of Sensor Science and Technology
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    • v.8 no.5
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    • pp.421-426
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    • 1999
  • In this paper, we present p-channel GaAs MOSFET having $Al_2O_3$ as gate insulator fabricated on a semi-insulating GaAs substrate, which can be operated in the depletion mode. $1\;{\mu}m$ thick undoped GaAs buffer layer, $4000\;{\AA}$ thick p-type GaAs epi-layer, undoped $500{\AA}$ thick AlAs layer, and $50\;{\AA}$ thick GaAs cap layer were subsequently grown by molecular beam epitaxy(MBE) on (100) oriented semi-insulating GaAs substrate and this wafer was oxidized. AlAs layer was fully oxidized as a $Al_2O_3$ thin film. The I-V, $g_m$, breakdown charateristics of the fabricated GaAs MOSFET showed that wet thermal oxidation of AlAs/GaAs epilayer/S I GaAs was successful in realizing depletion mode p-channel GaAs MOSFET.

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Semi-insulation Behavior of GaN Layer Grown on AlN Nucleation Layer

  • Lee, Min-Su;Kim, Hyo-Jeong;Lee, Hyeon-Hwi
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.132-132
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    • 2011
  • The sheet resistance (Rs) of undoped GaN films on AlN/c-plane sapphire substrate was investigated in which the AlN films were grown by R. F. magetron sputtering method. The Rs was strongly dependent on the AlN layer thickness and semi-insulating behavior was observed. To clarify the effect of crystalline property on Rs, the crystal structure of the GaN films has been studied using x-ray scattering and transmission electron microscopy. A compressive strain was introduced by the presence of AlN nucleation layer (NL) and was gradually relaxed as increasing AlN NL thickness. This relaxation produced more threading dislocations (TD) of edge-type. Moreover, the surface morphology of the GaN film was changed at thicker AlN layer condition, which was originated by the crossover from planar to island grains of AlN. Thus, rough surface might produce more dislocations. The edge and mixed dislocations propagating from the interface between the GaN film and the AlN buffer layer affected the electric resistance of GaN film.

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A study on thermally stimulatede current in semi-insulating GaAs (반절연성 GaAs에서 열자극 전류에 관한 연구)

  • 배인호;김기홍;김인수;최현태;이철욱;이정열
    • Electrical & Electronic Materials
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    • v.7 no.5
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    • pp.383-388
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    • 1994
  • Deep levels in semi-insulating GaAs were observed by thermally stimulated current(TSC) measurement In the temperature ranges of 100-300K Tl(E$\_$c/-0.18eV), T2(E$\_$c/-0.20eV), T3(E$\_$c/-0.31eV), T4(E$\_$c/-0.40eV), and T5(E$\_$c/-O.43eV) traps have been observed. The TI, T2, and T5 traps seem to be related to the V$\_$As/, V$\_$Ga/-complex, and As$\_$Ga/$\^$++/ respectively. T4 trap is considered with respect to V$\_$Ga/-V$\_$As/ complex.

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Semi-Insulating GaAs의 재료특성과 응용

  • 강광남
    • 전기의세계
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    • v.33 no.4
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    • pp.214-220
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    • 1984
  • 본고에서는 SI Ga As의 제조방법 및 전도매체들의 깊은 에너지위치(deep level)에 의한 상쇄현상(compensation)을 간략히 설명한 후 넓은 자장영역 (B=0-13T)에서의 Hall 효과 및 magnetoresistance (MR)에 의한 전기적 특성 연구방법을 설명하고, 전도매체의 재결합 현상을 연구할 수 있는 일반화 PME효과 (FA-PME)에 대해 기술한 후 SI Ga As 기판의 응용에 대해 간략히 기술하였다.

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A Semi-MMIC Hair-pin Resonator Oscillator for K-Band Application (K-Band용 SEmi-MMIC Hair-pin 공진발진기)

  • 이현태
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.25 no.9B
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    • pp.1635-1640
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    • 2000
  • In this paper, a 18 GHz oscillator is designed with the push-push method an fabricated by semi-MMIC process, in which the second harmonic is the main output signal with the suppressed fundamental mode. In semi-MMIC process, passive components with microstrip transmission line are implemented using MMIC process on semi-insulating GaAs substrate. Then, chip types of P-HEMT, resistors, and capacitors are connected through Au wire-bonding. Also, the ground plane is inserted around the circuit and connected each other with the back-side of substrate through Au wire-bonding instead of via-hole. The semi-MMIC push-push oscillator shows the output powder of -10.5 dBm, the fundamental frequency suppression of -17.3 dBc/Hz, and the phase noise of -97.9 dBc/Hz at the offset frequency of 100 kHz.

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Fabrication of a Depletion mode n-channel GaAs MOSFET using $Al_2O_3$ as a gate insulator ($Al_2O_3$ 절연막을 게이트 절연막으로 이용한 공핍형 n-채널 GaAs MOSFET의 제조)

  • Jun, Bon-Keun;Lee, Suk-Hyun;Lee, Jung-Hee;Lee, Yong-Hyun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.1
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    • pp.1-7
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    • 2000
  • In this paper, we present n-channel GaAs MOSFET having $Al_2O_3$ as gate in insulator fabricated on a semi-insulating GaAs substrate. 1 ${\mu}$m thick undoped GaAs buffer layer, 1500 ${\AA}$ thick n-type GaAs, undoped 500 ${\AA}$ thick AlAs layer, and 50 ${\AA}$ GaAs caplayer were subsequently grown by molecular beam epitaxy(MBE) on (100) oriented semi-insulating GaAs substrate oxidized. When it was wet oxidized, AlAs layer was fully converted $Al_2O_3$. The I-V, $g_m$, breakdown charateristics of the fabricated GaAs MOSFET showed that wet thermal oxidation of AlAs/GaAs epilayer/S${\cdot}$I GaAs was suitable in realizing depletion mode GaAs MOSFET.

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A study on the deep levels in boron ion implanted semi-insulating GaAs by PICTS (PICTS방법에 의한 Boron이온을 주입시킨 반절연성 GaAs의 깊은준위에 관한 연구)

  • 최현태;김인수;이철욱;손정식;김영일;배인호
    • Electrical & Electronic Materials
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    • v.8 no.4
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    • pp.426-433
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    • 1995
  • Effect of boron in GaAs have been investigated by photo induced current transient spectroscopy(PICTS). The starting material was undoped liquid encapsulated Czochralski(LEC) semi insulating GaAs and boron ion implantation at 150keV energy was conducted with dose of 10$\^$12/ and 10$\^$13/ions/cm$\^$2/. In ion implanted samples, the peaks related arsenic vacancy(V$\_$As/) were decreased but complex lattice defect was increased with annealing temperature. U band was observed at ion implanted(10$\^$13/ ions/cm$\^$2/) and thermally treated(550.deg. C) sample. More negative peak was detected after annealing at temperature between 600 and 700.deg. C. The measurement of dark current showed that the formation of B$\_$GA/-V$\_$As/, complex defect and complex lattice defect by ion implantation were a reasonable explanation for the decrease in dark current.

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