• Journal of the Semiconductor & Display Technology
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• v.7 no.2
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• pp.35-38
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• 2008

This study shows the improvement of PR-Ashing rates in semi-conductor process using Atmospheric Plasma. Taguchi method is used to improve Ashing rates of photo-resist that is spread on the surface of a wafer. Improvement of Ashing rates is acquired through the decision of the effective factors and suitable combination of the factors. The results show the contribution rate of each factor and the effectiveness of Plasma for PR-Ashing process in this system.

• Proceedings of the KIEE Conference
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• 2001.10a
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• pp.262-268
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• 2001

Remarkable progress has been performed in power electronics, using high frequency switching based on the improvement of power semi-conductor devices. In the other hands, it gives us serious problems, such as, insulation, increasing of the high frequency leakage current, and electric corrosion of bearing in the loaded motors driven by inverters using high frequency switching. To improve these problems, many researches have made especially on the application of soft switching technologies. From this point of view IEE-Japan had started the research groups on soft-switching technology 1997 and 1999. This paper is a survey based on the discussion in this research group with results of ARCP inverter applied for 210kVA power supply.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.746-748
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• 1987

A volocity and an efficiency of an induction motor are lower than those of a DC motor. But in the control, the utility of an AC motor is more enlarged with the development of inverter. But unfortunately, in using the induction motor, it include a lot of harmonics because of switching of semi-conductor devices(SCR or Tr) in the inverter. In PCR, as the change of a firing angle $\alpha$, harmonics are changed. Hence, in this thesis analyze the harmonics and provide the region of it's application when PWM and 6-step applied to inverter. Of course, frequencies of inverter changed. Especially, in PWM a carrier ratio is changed.

• Proceedings of the Korea Institute of Convergence Signal Processing
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• 2000.12a
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• pp.145-148
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• 2000

Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.23-25
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• 2004

HFPD(High Frequency Partial Discharge) measurement has been widely performed to diagnose cable system in the world. Shin-Yeongdeungpo 345kV XLPE line was successfully diagnosed by PD measurement methode last year. Moreover, aged power cable lines which were installed 15 years ago have been tested from this year. In this paper, the result of PD diagnosis for aged 154kV cable line is reported. The PD pattern from TMJ which was monitored by PD measurement system for several days showed typical void pattern. The joint was replaced and voids between semi-conductor layer and insulating layer in the joint was founded.

• Proceedings of the KIPE Conference
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• 2001.07a
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• pp.654-656
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• 2001

This research used triac that is semi-conductor that act to static contact to overcome happened shortcoming been using mechanical centrifugal force switch usually Detect starting current of single phase induction motor and decided moving time. Therefore, could improve life of switch semipermanently. Also, wish to reduced impact that electric motor suffers at the starting moment and do stable starting which there is no life improvement and noise of electric motor itself, arc.

• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.1047-1050
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• 1993

Recently, AC servo motor has expanded its application areas the to the development of the power semi-conductor and control technology. But it has large torque ripple for its nonlinear characteristics and phase commutaion. In this paper, we proposed the switching angle overlapping method, and current control using tracking method in order to generate the constant torque of AC servo motor that has the trapezoidal back e.m.f. It is compared the these types of control method with the characteristics through simulation. We show that these methods lead the torque ripple to reduce and makes the position and speed characterlistics improved effectively. Also we prove that current control using tracking method is the best way to reduce torque ripple among the these types of control method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.2
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• pp.178-183
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• 2009

This paper introduces experimental investigates of an accident pattern for the distributing cross linking-polyethylene(XLPE) cable terminations considering product liability(PL) law environment. The influence of defects such as thickness and length decrease of XLPE, an impurity on XLPE and the gap between stress-con of housing and semi-conductor on insulating properties of the termination have been studied. The thickness and length decrease of XLPE decrease ac breakdown strengths. Breakdown traces of XLPE that is damaged by knife displayed ellipse shape. The gap of between stress-con and semiconductor deteriorates dielectric strength of XLPE seriously.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.137-137
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• 2010

Copper electroplating is a very popular and important technology for depositing high-quality conductor interconnections, especially in through silicon via (TSV). As this advanced packaging technique developing, a mass of copper and chemical solution are used, so attention to these chemical materials into the utilization and costs can not be ignored. An economical and practical real-time chemical solution monitoring has not been achieved yet. Either Red-green-blue (RGB) or optical emission spectroscopy (OES) color sensor can successfully monitor the color condition of solution during the process. The reaction rate, uniformity and quality can map onto the color changing. Hidden Semi Markov model (HSMM) can establish mapping from the color change to upper indicators, and artificial neural network (ANN) can be integrated to comprehensively determine its targets, whether the solution inside the container can continue to use.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.5
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• pp.96-102
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• 2008

Manufacturing of printed electronics using printing technology has begun to get into the hot issue in many ways due to the low cost effectiveness to existing semi-conductor process. This technology, with low cost and high productivity, can make it possible to produce printed electronics such as TFT, solar cell, RFID Tag, printed battery, and so on. In this study, apparatus of gravure-offset printing are developed for fine line-width/gap printing and the results obtained from the apparatus shows that it is possible to make around 20 micro-meter line-width/gap printing patterns. The roll-to-roll printing system for fine line-width printing based on primary experiment is presented. The printing results obtained from the system shows around 30 micro-meter line-width/gap printing patterns.