• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Korean Journal of Materials Research
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• v.3 no.5
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• pp.443-450
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• 1993

Self-alignment gatc Schottky contact structure on Si- implanted GaAs was formed by plasma enhanced chemical vapor dcposirion. Tungsten nitride thin films (ahclut 1600$\AA$) \vcre dopositcd on GaAs at $350^{\circ}C$ in order to fahricarc GaAs 1Cs and ttwn rapidly annealed at $750^{\circ}C$ to $900^{\circ}C$. Thermal charac tcristics of PECVD)-$W_{67}N_{43}$/GaAs structure were investigated by X-ray diffraction, photolumintesccnce. and optical deep level transient specrroscopy. Results revealed that $W_{67}N_{33}$ gate was more thermally sta ble with GaAs substrate than W gate and Si atoms implanted In $W_{67}N_{33}$/GaAs structure became morr active than those In W/GaAs after annealing. I-V characteristics of $W_{67}N_{33}$/GaAs diod c exhibired a nearly ideal diode behavior. The termal stability of $W_{67}N_{33}$/GaAs diode was better than that of W/GaAs diode with the post annealing at temperatures from 800 to $900^{\circ}C$ for 20s without As overpressure.

• The Korean Journal of Rehabilitation Nursing
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• v.4 no.1
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• pp.46-57
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• 2001

This study was done to investigate of instrumental activities of daily living(IADL) and quality of life and their relationships between the elderly. Data were collected from 150 elderly home residents. The data were collected from December 1st to December 20th, 2000. Structured questionnaires developed by Lawton & Brody and by Ro were adopted to measure IADL and Quality of life. Data were analyzed for percentage, means, t-test, ANOVA and Parson correlation coefficients using the SPSS program. The results were as follows: 1. The average score of the level of IADL was $20.68{\pm}2.98$ ($M{\pm}SD$) with a range of 7-26. 2. The average score of the level of Quality of life was 2. $96{\pm}0.25$ ($M{\pm}SD$). In the average score of each lower area, highest score was 3.22 for neighbor relationship and family relationship and then 3.00 for self-esteem, 2.95 for economic status, 2.86 for emotional status, and 2.85, lowest score, for physical condition and function. 3. Comparing IADL and Quality of life with general characteristics, IADL showed that there were significant difference in age(t=2.927, p=0.036) and separated children contact frequency(t=2.482, p=0.046), while Quality of life showed that there were significant difference in spouse existence(t=2.334, p=0.021), religion(t=4.089, p=0.008), family style(t=3.285, p=0.040), children number living together(t=5.332, p=0.006), communication with separated children frequency(t=4.129, p=0.003), and separated children contact frequency(t=3.908, p=0.005). 4. There was also significant positive correlation between IADL and Quality of life. The above results show that neighbor relationship and family relationship which have greatly an influence on IADL and Quality of life are very important. The elderly should be helped to satisfy their basic desire and show their potential living together with the younger generation interdependently without being isolated from family and society. Therefore, the nursing strategy that enhance IADL and Quality of life are needed and the nursing strategy that can improve IADL and Quality of life of Elderly Home Residents should be developed.

• Journal of Adhesion and Interface
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• v.21 no.4
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• pp.143-155
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• 2020

Hydrophobic Organic-Inorganic (O-I) hybrid materials prepared by sol-gel process have been widely used at functional coating fields such as coatings for anti-corrosion, anti-icing, self-cleaning, anti-reflection. The key point for fabricating hydrophobic surface is to optimize the surface energy and roughness of the coating films. There are typical processes to control the surface energy and roughness which are 'In situ fabricating', 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating'. In this study, particle-binder process was used for in-situ fabrication of hydrophobic coating films. Various O-I hybrid compounds prepared using several kinds of alkoxysilane compounds were used as a binder for silica nanoparticles at particle-binder process. To study effect of fluorine content and weight ratio of particle : binder on the hydrophobicity and surface morphology, Hydrophobic coating films were prepared onto glass substrate at various content of fluorine content of O-I hybrid binder and weight ratio of particle : binder. The coating films prepared using O-I hybrid binder (GPTi-HF10) having 10 wt% of fluorine content showed the highes water contact angle (107.52±1.6°). The coating films prepared at 1:3 weight ratio of GPTi-HF10 : silica nanoparticle exhibited the highest water contact angle (130.84±1.99°).

• Journal of Broadcast Engineering
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• v.25 no.6
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• pp.973-979
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• 2020

This study aims to objectively and quantitatively determine the social emotion of empathy by collecting pupillary response. 52 subjects (26 men and 26 women) voluntarily participated in the experiment. After the measurement of the reference of 30 seconds, the experiment was divided into the task of imitation and spontaneously self-expression. The two subjects were interacted through facial expressions, and the pupil images were recorded. The pupil data was processed through binarization and circular edge detection algorithm, and outlier detection and removal technique was used to reject eye-blinking. The pupil size according to the empathy was confirmed for statistical significance with test of normality and independent sample t-test. Statistical analysis results, the pupil size was significantly different between empathy (M ± SD = 0.050 ± 1.817)) and non-empathy (M ± SD = 1.659 ± 1.514) condition (t(92) = -4.629, p = 0.000). The rule of empathy according to the pupil size was defined through discriminant analysis, and the rule was verified (Estimation accuracy: 75%) new 12 subjects (6 men and 6 women, mean age ± SD = 22.84 ± 1.57 years). The method proposed in this study is non-contact camera technology and is expected to be utilized in various virtual reality with smart glasses.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.5
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• pp.492-501
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• 2021

This study was undertaken to identify the perception and sexual attitude of nursing students and obstetrics and pediatric nurses towards unwed mothers, and to identify differences in the general characteristics. Data were collected as a self-reported questionnaire survey from September, 2018 to January, 2019. Subjects included 94 nursing students enrolled at 2 nursing colleges, and 101 nurses of 8 hospitals located in the B & C Metropolitan. The data collected was analyzed by descriptive statistics, frequencies, percentages, means and standard deviations, independent t-test, and one-way ANOVA. Comparing results obtained from nursing students and nurses revealed a statistically significant difference in their overall perception of an unwed mother and sexual attitude. The perception of an unwed mother showed significant differences considering the grade, age and sibling status of nursing students, whereas nurses revealed significantly different perceptions according to their age, occupational position, clinical career, career of current work department, marital status, and children status. Sexual attitude was significantly different for nursing students according to their experience contact with unwed mother, whereas perception of nurses differed significantly for sexual attitude according to experience contact with unwed mother, types of hospital, and marital status. We propose that data obtained from this research can be used as basic data for research and education related to the perception of unwed mothers and sexual attitude of nursing students and nurses.

• The Journal of Korean Physical Therapy
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• v.4 no.1
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• pp.79-93
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• 1992

This study is search for analyzed the primary factor of psychological characters of crippled person toward psychological rehabilitation that is the most foundmental to all rehabilitation for a crippled person. The research is, make a comparative analyze to personality character, value character, and motion, and then examined the relation of among then, by applies to high school's crippled students. First. in the personality character aspect, a group of crippled student's is shown that the factor of family relations is lack harmony than normal group, that is, shown up that a parents and family members is oversensitiveness to crippled person, So sometimes they overprotectiveness, unconcered, and not accept it is. Also, in the factor of confrontability aspect, a group of crippled person's average is shown to high as compared with normal group, and then, it shown that they are irresponsible, have a weak self-control, and show a marked trend toward self-control. This is means that crippled person have scruples about psychological and social adaptation. But friendship, adaptability, cheefulness. and emotonal stability is shown no difference with normal person. Accordingly, in the personality aspect, the falter of family-relation and confrontability can be know that the object of psychological rehabilitation. Second, in the sence of value aspect, crippled students is show that the average score had higher than normal group toward the factor of variety, therefor we can know that they have purpose to more pursur of variety in the living. This is consideration that a raise from the limited of social contact chance and badly informed and experience. Also, the factor of purpose-intention is shown that crippled students had low non than normal group, then, that means that they have a weak will toward cope with various problems in daily living. Crippled student is, in contrast to lacked fixed purpose with self-living, and also insufficient tring to accomplish their objects. Third, crippled students motion shown that related to low level of personality character and a sence of value factor. Daily living activity is show that related to the factors of confrontability and cheerfulness. This means that rehabilitation service given a change to confrontability and cheerfulness that can be effect is related. And the activity of home is related with confrontability, psychological rehabilitation for the change of activity is can say that it should be contribute to strengthen toward responsibility and self-control from self-central to intention at rho others. Fourth, the relation between an motion and a value of crippled student is shown low level of regulations that can be ignore. In sum, in the rehabilitation of crippled person, hereafter, a study subject is if which search to character factor and to find out effect inter-factors within the the factor of psychological rehabilitation as medical, occupational, social rehabilitation, then probably more effective development toward rehabilitation programs. Conseguently, hereafter for the crippled person's rehabilitaton, the study should be rquirement for establish a character and factors each filed of rehabilitation. The study sibject toward crippled person's rehabilitation for the fature is search for character factor toward medical. occupational, and social rehabilitation. and find out inter-relation among then like as search of this study for psychological rehabilitation. For the rehabilitation of crippled person, if is not preceding of study like this, it ought to be difficult to creation service as well as development to effective program.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.400-401
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• 2012

그래핀(Graphene)은 열 전도도가 높고 전자 이동도(200 000 cm2V-1s-1)가 우수한 전기적 특성을 가지고 있어 전계 효과 트랜지스터(Field effect transistor; FET), 유기 전자 소자(Organic electronic device)와 광전자 소자(Optoelectronic device) 같은 반도체 소자에 응용 가능하다. 그러나 에너지 밴드 갭이 없기 때문에 소자의 전기적 특성이 제한되는 단점이 있다. 최근에는 아크 방출(Arc discharge method), 화학적 기상 증착법(Chemical vapor deposition; CVD), 이온-조사법(Ion-irradiation) 등을 이용한 이종원자(Hetero atom)도핑과 화학적 처리를 이용한 기능화(Functionalization) 등의 방법으로 그래핀을 도핑 후 에너지 밴드 갭을 형성시키는 연구 결과들이 보고된 바 있다. 그러나 이러한 방법들은 표면이 균일하지 않고, 그래핀에 많은 결함들이 발생한다는 단점이 있다. 이러한 단점을 극복하기 위해 자가조립 단층막(Self-assembled monolayers; SAMs)을 이용하여 이산화규소(Silicon oxide; SiO2) 기판을 기능화한 후 그 위에 그래핀을 전사하면 그래핀의 일함수를 쉽게 조절하여 소자의 전기적 특성을 최적화할 수 있다. SAMs는 그래핀과 SiO2 사이에 부착된 매우 얇고 안정적인 층으로 사용된 물질의 특성에 따라 운반자 농도나 도핑 유형, 디락 점(Dirac point)으로부터의 페르미 에너지 준위(Fermi energy level)를 조절할 수 있다[1-3]. 본 연구에서는 SAMs한 기판을 이용하여 그래핀의 도핑 효과를 확인하였다. CVD를 이용하여 균일한 그래핀을 합성하였고, 기판을 3-Aminopropyltriethoxysilane (APTES)와 Borane-Ammonia(Borazane)을 이용하여 각각 아민 기(Amine group; -NH2)와 보론 나이트라이드(Boron Nitride; BN)로 기능화한 후, 그 위에 합성한 그래핀을 전사하였다. 기판 위에 NH2와 BN이 SAMs 형태로 존재하는 것을 접촉각 측정(Contact angle measurement)을 통해 확인하였고, 그 결과 NH2와 BN에 의해 그래핀에 도핑 효과가 나타난 것을 라만 분광법(Raman spectroscopy)과 X-선 광전자 분광법(X-ray photoelectron spectroscopy: XPS)을 이용하여 확인하였다. 본 연구 결과는 안정적이면서 패턴이 가능하기 때문에 그래핀을 기반으로 하는 반도체 소자에 적용 가능할 것이라 예상된다.

• Journal of Korean Academy of Nursing
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• v.26 no.2
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• pp.483-496
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• 1996

The purpose of this study was to describe how Korean nurses overcome the language barrier while working in the U.S. hospital settings. Twelve Korean nurses living in New York metropolitan area were asked open-ended, descriptive questions to collect the data. The interviews were done in Korean. All interviews were audiotaped under the permission of the participants and were transcribed verbatim. The data were analyzed using grounded theory analysis. The research process consisted of two phases. In the first phase 8 Korean nurses were interviewed and analyzed. In the second phase, further data were collected to verify categories and working hypotheses that were emerged from the first phase. The results of this study show that all Korean nurses experienced severe psychological stress such as confusion, anxiety, frustration, loss of self-confidence, embarrassment, guilt, depression, anger, and fear. Among the mode of communication such as listening, speaking, leading, and writing, they had the most difficulty in speaking. Speaking ability was especially important for them because of the emphasis of individualism and self-defense in the U.S. Among the verbal communication modes, non-face-to-face communications such as phone conversation and body language were the most difficu1t for them to overcome. It took at least 2 years for the participants to initially overcome the language barrier in U.S. hospitals. After 2-5 years they began to feel comfortable even in non-face-to-face communication. They could actively search for the better place to work after 5 years. They finally felt comfortable in English and in their job almost after 10 years. The factors that influenced the English improvement were ‘the years of clinical experience in Korea’, ‘the decade they came to the U.S.’ ‘coming to U.S. alone or with other Korean nurses’, ‘racial homogeneity or heterogeneity of the working unit’, and ‘the degree of social support’. The strategies Korean nurses used to overcome the language barrier included depending on the written communication, using ‘nunchi’, working and studying hard, and establishing good interpersonal relationships with co-workers. They also employed assertive behavior of the U.S., such as using more explicit verbal language and employing smiles and eye contact with others during the conversation. The results of the study may help Korean nurses and nursing students who try to work in U.S. hospital settings by understanding problems other Korean nurses faced, factors that influenced their English improvement, and strategies they used. They may also help U.S. nurses and administrators in developing and implementing efficient programs for newly employed Korean nurses by understanding major problems and feelings the Korean nurses experienced and strategies they used to overcome the language barriers.

• Journal of Korean Library and Information Science Society
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• v.38 no.2
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• pp.13-30
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• 2007

The purpose of this study was to explore the role orientation that librarians are expected to carry during their career-life. More specifically, this study examined the pattern of librarians subjectivism related to attitude, belief, and confidence. Q questions were made of 36 items, including personal value system and role attitude. P sample included 23 librarians. Data were collected for 8 days (from April 15, 2005 to April 22, 2005). Analyses showed the following results. First, librarians role orientations were classified into 3 types: user-centered orientation, organization-centered orientation, and expertise-centered orientation. (1) The first type librarians were interested in having good relationships with users, while emphasizing the importance of providing good services to the users. (2) The second type of librarians were concerned with social function of the library, while placing highlight on their roles as organizational members. Among them, achievement evaluation was regarded as an important indicator of personal success. They were interested in having stable organizational culture, as well as economic growth of libraries. This orientation was dominant among married members. (3) The third type of librarians focused on librarians role implementation and professional achievement. They showed interest not only in the improvement of librarians creativity and the growth of expertises, but also the expansion of retraining opportunities. This orientation was conspicuous among female librarians. Second, several commonalities and differences were consistently found among librarians. The first type was interested in user-centered orientation(user contact, need satisfaction, self dignity, etc.). The second type was interested in organization-centered orientation(creativity, expertise growth, retraining opportunity, professional achievement. self-respect, etc.).