• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.1-8
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• 2001

Conventional microgyroscopes of vibrating type require resonant frequency tuning of the driving and sensing modes to achieve high sensitivity. These tuning conditions depend on each fabricated microgyroscopes, even though the microgyroscopes are identically designed. A new micromachined resonator, which is applicable to microgyroscopes with self-toning characteristics, is presented. Since the laterally driven two degrees of freedom (2DOF) resonator was designed as a symmetric structure with identical stiffness in two orthogonal axes, the resonator is applicable to vibrating microgyroscopes, which do not need mode tuning. A dynamic model of the resonator was derived considering gyroscopic application. The dynamic model was evaluated by experimental comparison with fabricated resonators. The microgyroscopes were fabricated using a simple 2-mask-process of a single polysilicon layer deposited on an insulator layer. The feasibility of the resonator as a vibrating microgyroscopes with self-tuning capability is discussed. The fabricated resonators of a particular design have process-induced non-uniformities that cause different resonant frequencies. For several resonators, the standard deviations of the driving and sensing frequencies were as high as 1232Hz and 1214Hz, whereas the experimental average detuning frequency was 91.75Hz. The minimum detuned frequency was 68Hz with $0.034mVsec/^{\circ}$ sensitivity. The sensitivity of the microgyroscopes was low due to process-induced non-uniformity; the angular rate bandwidth, however, was wide. This resonator could be successfully applicable to a vibrating microgyroscopes with high sensitivity, if improvements in uniformity of the fabrication process are achieved. Further developments in improved integrated circuits are expected to lower the noise level even more.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.2
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• pp.46-54
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• 2007

We have fabricated and characterized MMI (Multimode Interference) coupled ring resonator with the total internal reflection mirrors and the semiconductor optical amplifier for the integration of the WDM (Wavelength Division Multiplexing) system. The TIR (Total Internal Reflection) mirrors were fabricated by self-aligned process and had losses of about 0.71 dB per mirror. Coupling in and out of a resonator was achieved using the extremely small MMI couplers. The MMI length and width used in the experiment were $119{\mu}m$ and $9{\mu}m$, respectively. The resulting FSR (Free Spectral Range) and on-off ratio were approximately 1.333 nm (162 GHz) and 13 dB, respectively.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.9
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• pp.820-826
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• 2011

In this paper, an efficiency improvement method in the wireless power transfer system based on magnetic resonance is proposed. A combined helical-spiral structure is adopted for self-resonant coil and source and device coils are designed using circular loop structure. The proposed resonator utilizing combined helical-spiral structure yields 13 % efficiency improvement over that of an existing helical type resonator when the transmitting and receiving coils are separated by 120 mm. In addition, the size can be reduced by 33 % comparing to the previous resonator.

• Journal of Electrical Engineering and Technology
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• v.4 no.4
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• pp.546-551
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• 2009

In this paper, we describe a self-aligned fabrication method for a nano-patterned bottom electrode using flood exposure from the backside. Misalignments between layers could cause the final devices to fail after the fabrication of the nano-scale bottom electrodes. A self-alignment was exploited to embed the bottom electrode inside the glass substrate. Aluminum patterns act as a dry etching mask to fabricate glass trenches as well as a self-aligned photomask during the flood exposure from the backside. The patterned photoresist (PR) has a negative sidewall slope using the flood exposure. The sidewall slopes of the glass trench and the patterned PR were $54.00^{\circ}$ and $63.47^{\circ}$, respectively. The negative sidewall enables an embedment of a gold layer inside $0.7{\mu}m$ wide glass trenches. Gold residues on the trench edges were removed by the additional flood exposure with wet etching. The sidewall slopes of the patterned PR are related to the slopes of the glass trenches. Nano-scale bottom electrodes inside the glass trenches will be used in beam resonators operating at high resonant frequencies.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.27 no.5C
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• pp.530-534
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• 2002

In the thesis, For improving the Stability of VCHRO(Voltage Controlled Hair-pin Resonator Oscillator) the new structure using the parallel feedback of the second harmonic is proposed for self-phase locking effect. This module is composed of wilkinson divider, frequency doubler, directional coupler, and bandpass filter using a hair-pin resonator, which are integrated into miniaturized hybrid circuit. The module exhibits output power of 2.5 dBm at 19.5 GHz, -29.83 dBc fundamental frequency suppression and -76.52 dBc/Hz phase noise at 10 kHz offset frequency from carrier of center frequency 19.5 GHz.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• 한국연소학회:학술대회논문집
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• 2007.05a
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• pp.86-91
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• 2007

A study was performed to understand self-excited pressure fluctuations in the lean premixed flames and to evaluate the effect of Helmholtz resonator on the pressure fluctuations. As low-frequency pressure fluctuations have been reported to cause fatal damage to the combustor and the entire system, Helmholtz-type resonators, which reduce the damage by low-frequency pressure fluctuation in the combustor, are attached to the channel of unburned mixture flow. It is found that the range of low-frequency pressure fluctuations of flame mode 2 is narrowed by the attachment of Helmholtz resonators. From this result, if Helmholtz-type resonators are applied to actual gas turbine combustor, it is confirmed that Helmholtz resonators attached on the fuel discharge hole are also effective for narrowing the range of flame mode 2

• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.27-30
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• 2015

In this study, the LC resonators were fabricated with ferrite cores and external capacitors, and then their characteristics were investigated for the purpose of developing new displacement sensor. The frequency dependence of impedance of single resonator was estimated. There were two resonance peaks on the impedance spectrum; one by self inductance and the other by mutual inductance. The resonance frequency was shifted linearly in direct proportion to displacement of the resonator showing the proposed device, a pair of LC resonators, could be used a precision displacement sensor.

• ETRI Journal
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• v.28 no.2
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• pp.223-226
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• 2006

This letter presents a new approach to synthesize the resonator filters of an arbitrary topology. This method employs an optimization method based on the relation between the polynomial coefficients of the transfer function and those of the $S_{21}$ from the coupling matrix. Therefore, this new method can also be applied to self-equalized filters that were not considered in the conventional optimization methods. Two microwave filters, a symmetric 4-pole filter with four transmission zeros (TZs) and an asymmetric 8-pole filter with seven TZs, are synthesized using the present method for validation. Excellent agreement between the response of the transfer function and that of the synthesized $S_{21}$ from the coupling matrix is shown.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.321-324
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• 1997

In this study, Efficiency estimation of ultrasonic sensor fabricated with porous piezoelectric resonator by experiment of 3-D underwater object recognition are presented. The sensor was satisfied with requirement of ultrasonic sensor. The recognition rates for the fixed objects and the translation-rotation objects are 95.3 and 92.7[%], respectively using porous piezoelectric ultrasonic sensor and SOFM neural network. According to the experimental results, It is believed that the self-made ultrasonic sensor can be applied as underwater ultrasonic sensor.