• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Restorative Dentistry and Endodontics
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• v.23 no.1
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• pp.346-356
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• 1998

The purpose of this study was to evaluate the sealing ability of various canal filling methods. Palatal roots of ninety extracted human maxillary molar teeth were resected at cementoenamel junction. Eighty of them were randomly assigned to four experimental groups, ten were served as positive and negative controls. All canals were prepared to # 40 using Profile. Experimental groups were obturated by lateral condensation technique, Thermafil technique, Continuous Wave of Condensation Technique, and down-pack & back-fill technique of Obtura-II, each with root canal sealer. Control groups were not obturated. Teeth were immersed in resorcinol-formaldehyde resin for 5 days at $4^{\circ}C$, and the resin was allowed to polymerize completely for 4 days at room temperature. Teeth were then ground horizontally at 1.5mm(level 1), 2.5mm(level 2), 3.5 mm(level 3) from the anatomical apex and examined with a stereomicroscope at ${\times}40$ magnification. The gap between the canal wall and the filling material, which was filled with the resin, was measured at each of the three levels. Each ratio of leakage was obtained by calculating the ratio of the area of the resin to the total area of the canal and was analyzed statistically (Rank-sum test). The results were as follows : 1. At the level 1, there was the greatest leakage in the Thermafil group and Obtura-II group, and the difference between the Obtura-II group and Continuous Wave of Condensation Technique group was statistically significant(p<0.05). 2. At the level 2, there was the least leakage in the Continuous Wave of Condensation Technique group, but there was no statistically significant difference between each group (p>0.05). 3. At the level 3, there was no statistically significant difference between each group(p>0.05).

• The Journal of Korean Academy of Prosthodontics
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• v.39 no.4
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• pp.366-375
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• 2001

The objective of this study was to investigate the surface contact and screw joint stability between screw and implant interface by use of sealer. The implants evaluated in this study were Steri-Oss futures(Hexlock $3.8D{\times}10mm$: Steri-Oss, Yorba Linda, CA), and Steri-Oss staight abutment. Titanium alloy screws were used to secure abutments to implants. The other titanium alloy screws applicating sealer(Impla-Seal, Implant Support Systems, Inc. Irvine, CA) were used to secure abutments to implants. In one another sample, 6kg of force was applied during simulated intraoral movements after abutment screws were secured to the implants with sealer. All samples were cross sectioned with sandpaper and polished with $0.1{\mu}m\;Al_2O_3$. Then samples were recorded with an scanning electron microscope. The results were as follows : 1. In the case of titanium alloy screw, irregular contacts and relatively large gap were present at thread mating surface. Also abutment screw/implant interface demonstrate incomplete seating and only one surface contact of threads between implant and screw. 2. In the case of titanium alloy screw applecating sealer, sealer was present between implant and screw. Therefore implant and screw had relatively close and tight contact without the presence of large gap. 3. On the other hand, in the case of titanium alloy screw applicating sealer and dynamic loading of suprastructures, sealer was partially present between implant and screw. Conclusively, sealer fills voids, creating a barrier to moisture and bacteria. In addition, loading of suprastructures may change the situation and limit the indications for gap sealing.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.5
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• pp.623-628
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• 2006

Laser material processing is a very fast advancing technology for various industrial applications. because of many advantages. Its major advantage of less and controlled heat input has been exploited successfully for the very critical application of aluminium alloy welding. This study suggested the occurrence source of weld-defects and its solution methods in a welding of lithium ion battery by pulsed Nd:YAG laser. In experiment. battery case has changed over joint geometry from welding of side position to flat one. In the case of a electrolyte injection hole in order to seal it. welding is carried out after pressing Al ball. At this time. an eccentric degree. contact length and gap are worked as a major parameters. As improving the method of Al ball pressing. it was able to reduce an eccentricity. increase the contact length and decrease gap. As a results of a experiment. a sound weld bead shape and crack-free weld bead can be obtained.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2005.06a
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• pp.339-343
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• 2005

Laser material processing is a very fast growing technology for various industrial applications, because of many advantages. Its major advantage of less and controlled heat input has been exploited successfully for the very critical application of aluminium alloy welding. This study suggested the occurrence source of weld-defects and its solution methods in a welding of lithium ion battery by pulsed Nd:YAG laser. In experiment, battery case has changed over joint geometry from welding of side position to flat one. In case of a electrolyte injection hole in order to seal it, welding is carried out after pressing Al ball. At this time, an eccentric degree, contact length and gap are worked as a major parameters. As improving the method of Al ball pressing, it was able to reduce an eccentricity, increase the contact length and decrease gap. As a results of a experiment, a sound weld bead shape and crack-free weld bead can be obtained.

• Journal of Audiology & Otology
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• v.25 no.3
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• pp.159-162
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• 2021

Temporal bone trauma can cause hearing loss and in case of prolonged conductive hearing loss, traumatic ossicular injury should be considered. Separation of the incudostapedial joint is the most common lesion, and stapediovestibular dislocation is relatively rare but can easily cause perilymphatic fistula. Here, we report a very rare case of external stapediovestibular dislocation after trauma, ending up with successful surgical outcome. A 27-year-old man with non-progressive hearing loss on the right side since childhood visited the clinic. Audiogram showed a conductive hearing loss with air-bone gap of 55 dB on the right side. Temporal bone CT revealed the disruption of ossicular chain. An exploratory tympanotomy identified multiple ossicular disruptions including external stapediovestibular dislocation with shiny fibrous membrane sealing the oval window. Ossicular chain reconstruction was performed using the total ossicular replacement prosthesis of titanium. A postoperative audiogram showed a recovery of air-bone gap less than 10 dB. To the best of our knowledge, this is the first case of external long-standing stapediovestibular dislocation, with oval window completely sealed with fibrous membrane, ending up with successful hearing recovery by surgery. This case would help dealing with such condition which can be encountered in the clinic.

• Korean Journal of Audiology
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• v.25 no.3
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• pp.159-162
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• 2021

Temporal bone trauma can cause hearing loss and in case of prolonged conductive hearing loss, traumatic ossicular injury should be considered. Separation of the incudostapedial joint is the most common lesion, and stapediovestibular dislocation is relatively rare but can easily cause perilymphatic fistula. Here, we report a very rare case of external stapediovestibular dislocation after trauma, ending up with successful surgical outcome. A 27-year-old man with non-progressive hearing loss on the right side since childhood visited the clinic. Audiogram showed a conductive hearing loss with air-bone gap of 55 dB on the right side. Temporal bone CT revealed the disruption of ossicular chain. An exploratory tympanotomy identified multiple ossicular disruptions including external stapediovestibular dislocation with shiny fibrous membrane sealing the oval window. Ossicular chain reconstruction was performed using the total ossicular replacement prosthesis of titanium. A postoperative audiogram showed a recovery of air-bone gap less than 10 dB. To the best of our knowledge, this is the first case of external long-standing stapediovestibular dislocation, with oval window completely sealed with fibrous membrane, ending up with successful hearing recovery by surgery. This case would help dealing with such condition which can be encountered in the clinic.

• Journal of the Korean Society of Safety
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• v.22 no.5
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• pp.13-20
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• 2007

Elastomeric O-ring seals are widely used in static and dynamic applications. A compressed and highly pressurized O-ring seal inserted under laterally one-sided constrained condition has been analyzed experimentally and numerically. The deformed shape and extrusion length of the O-ring under high pressure has been measured by the computed tomography. Through the comparison of experimental and FE results, the numerical analysis technique has been verified. Using verified FE method, the contact stress profiles at sealing surfaces have been investigated and their relevance to the 0-ring performance evaluated based on stress-related and displacement-related parameters. It has been found that the contact stress profiles and deformation behaviors of the seal are affected by friction coefficient, gap clearance, and pressure considerably.

• Journal of Welding and Joining
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• v.33 no.6
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• pp.42-48
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• 2015

Reduced activation ferritic/martensitic steels are recognized as the primary candidate structural materials for fusion blanket systems. Welding is an inevitable for breeding blanket for pressure tightness and radioisotope confinement. Especially, TIG welding was chosen for sealing because it has the largest gap allowance compared to the other welding methods, and its properties are controllable by feed wire and welding conditions. In this study, the low cycle fatigue test using two-type gage such as extensometer and strain gage was applied to the TIG welded joint of F82H steel, for evaluating fatigue damage accumulation behavior of the HAZs. As the result, the over-tempered HAZ have shown a higher fatigue damage accumulation compared with other materials at all the testing conditions.

• International Journal of Control, Automation, and Systems
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• v.5 no.1
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.