• Title/Summary/Keyword: Se Deposition

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Method to Evaluate Fabric Contamination Due to Fine Dust (섬유소재의 미세먼지 오염도 평가 방법 개발에 관한 연구)

  • Hwang, So-Young;Kwon, Jin-Kyung;Kim, Young-Sil;Choi, Eun-Jin;Kim, Da-Jin;Kim, Min;Yook, Se-Jin
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.11
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    • pp.86-91
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    • 2021
  • Recently, functional clothes that can reduce deposition and/or penetration of fine dust have been developed. However, there are no methods to quantitatively evaluate the performance of these clothes. In this study, we developed a method to contaminate a fabric using fine dust and established an approach to quantitatively assess the degree of particle contamination on the fabric surface. Silicate powder was chosen as the particle to simulate fine dust because silicate particles are fluorescent under UV light; therefore, they can be distinguished from any color of non-fluorescent fabric surface. A camera with a high-resolution lens system was used to scan the surface of the contaminated fabric surface, and the degree of particle contamination of the fabric surface was analyzed in terms of the pixels corresponding to the area of the fabric surface contaminated by silicate particles. Finished or unfinished nylon fabrics as well as cotton fabrics were contaminated with silicate particles, and their surfaces were scanned using the established camera. The proposed assessment method was found to be useful for quantitatively comparing the degree of particle contamination of the fabrics.

Smartphone Digital Image Processing Method for Sand Particle Size Analysis (모래 입도분석을 위한 스마트폰 디지털 이미지 처리 방법)

  • Ju-Yeong Hur;Se-Hyeon Cheon
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.35 no.6
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    • pp.164-172
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    • 2023
  • The grain size distribution of sand provides crucial information for understanding coastal erosion and sediment deposition. The commonly used sieve analysis for grain size distribution analysis has limitations such as time-consuming processes and the inability to obtain information about individual particle shapes and colors. In this study, we propose a grain size distribution analysis method using smartphone digital images, which is simpler and more efficient than the sieve analysis method. During the image analysis process, we effectively detect particles from relatively low-resolution smartphone digital images by extracting particle boundaries through image gradient calculation. Using samples collected from four beaches in Gyeongsangbuk-do, we compare and validate the proposed boundary extraction image analysis method with the analysis method that does not extract boundaries, against sieve analysis results. The proposed method shows an average error rate of 8.21% at D50, exhibiting a 65% lower error compared to the method without boundary extraction. Therefore, grain size distribution analysis using smartphone digital images is convenient, efficient, and demonstrated accuracy comparable to sieve analysis.

Solution-Processed Indium-Gallium Oxide Thin-Film Transistors for Power Electronic Applications (전력반도체 응용을 위한 용액 공정 인듐-갈륨 산화물 반도체 박막 트랜지스터의 성능과 안정성 향상 연구)

  • Se-Hyun Kim;Jeong Min Lee;Daniel Kofi Azati;Min-Kyu Kim;Yujin Jung;Kang-Jun Baeg
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.4
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    • pp.400-406
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    • 2024
  • Next-generation wide-bandgap semiconductors such as SiC, GaN, and Ga2O3 are being considered as potential replacements for current silicon-based power devices due to their high mobility, larger size, and production of high-quality wafers at a moderate cost. In this study, we investigate the gradual modulation of chemical composition in multi-stacked metal oxide semiconductor thin films to enhance the performance and bias stability of thin-film transistors (TFTs). It demonstrates that adjusting the Ga ratio in the indium gallium oxide (IGO) semiconductor allows for precise control over the threshold voltage and enhances device stability. Moreover, employing multiple deposition techniques addresses the inherent limitations of solution-processed amorphous oxide semiconductor TFTs by mitigating porosity induced by solvent evaporation. It is anticipated that solution-processed indium gallium oxide (IGO) semiconductors, with a Ga ratio exceeding 50%, can be utilized in the production of oxide semiconductors with wide band gaps. These materials hold promise for power electronic applications necessitating high voltage and current capabilities.

GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Changes of Serum IgM, IgG in Pig's Xenograft Perfusion and Immunofluorescence Changes of the Deposition of IgM, IgG in the Xenograft in Dogs (잡종견에서 돼지 신장과 폐를 이용한 혈액관류에서 수술 전.후 혈액의 IgM, IgG와 이식 장기의 IgM, IgG 침착 정도 변화)

  • Lee, Doo-Yun;Paik, Hyo-Chae;Jeon, Se-Eun;Kim, Eun-Young;Nam, Jin-Young;Hong, Soon-Won;Hwang, Jung-Joo;Wada, Hiromi;Bando, Toru
    • Journal of Chest Surgery
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    • v.40 no.7 s.276
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    • pp.467-472
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    • 2007
  • Background: Lung transplantation is the definitive therapy for end stage lung disorders. The success of allogenic lung transplantation has led to an increasing shortage of donor lungs from humans, including cadavers, and attention has now turned to transplantation of lungs from other species. However, there are many biological hurdles when using organs from other species because of hyperacute rejection after discordant xenotransplantation. Material and Method: Pigs (n=6, weighing $20{\sim}30kg$ each) for the donors and mongrel dogs (n=6, weighing $20{\sim}28kg$ each) for the recipients were used in this experiment. The left kidney of a pig was perfused to a mongrel dog for 30 minutes through the femoral artery and vein of the dog, and the right kidney was perfused for 30 minutes sequentially. Then, both lungs of the pig were perfused to the dog through the pulmonary artery and left atrium with using the same time intervals. The levels of IgM and IgG were measured from the blood and specimens of the kidney and lung. Result: The average levels of serum IgM gradually decreased after the perfusion, but the average levels of serum IgG did not charge from before to after perfusion. The immunohistochemical findings revealed decreased deposition of IgG and IgM after the perfusion. Conclusion: We conclude that the levels of the serum natural antibodies would be decreased with pre-transplantation xenograft perfusion in the recipient and the occurrence rate of hyperacute rejection after transplantation would be decreased.

Mesothermal Gold-Silver Mineralization at the Bodeok Mine, Boseong Area : A Fluid Inclusion and Stable Isotope Study (전남(全南) 보성지역(寶城地域) 보덕광산(寶德鑛山)의 심부(深部) 중온형(中溫型) 금(金)-은(銀) 광화작용(鑛化作用): 유체포유물(流體包有物) 및 안정동위원소(安定同位元素) 연구(硏究))

  • So, Chil-Sup;Yun, Seong-Taek;Kim, Se-Hyun;Youm, Seung-Jun;Heo, Chul-Ho;Choi, Seon-Gyu
    • Economic and Environmental Geology
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    • v.26 no.4
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    • pp.433-444
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    • 1993
  • Electrum (32~73 atom. % Ag)-sulfide mineralization of the Bodeok mine in the Boseong area was deposited in two stages of mineralogically simple, massive quartz veins that fill the fractures along fault shear zones in Precambrian gneiss. Radiometric dating indicates that mineralization is Late Jurassic age ($155.9{\pm}2.3$ Ma). Fluid inclusion data show that ore mineralization was formed from $H_2O-CO_2$ fluids with variable $CO_2$ contents ($X_{CO_2}=0.0$ to 0.7) and low salinities (0.0 to 7.4 wt. % eq. NaCl) at temperatures between $200^{\circ}$ and $370^{\circ}C$. Evidence of fluid unmixing ($CO_2$ effervescence) indicates pressures up to 1 kbar. Gold-silver deposition occurred later than base-metal sulfide deposition, at temperatures near $250^{\circ}C$ and was probably a result of cooling and decreasing sulfur activity caused by sulfide precipitation and/or $H_2S$ loss (through fluid unmixing). Calculated sulfur isotope compositions of ore fluids (${\delta}^{34}S_{{\Sigma}S}=1.7$ to 3.3‰) indicate an igneous source of sulfur in hydrothermal fluids. Measured and calculated O and H isotope compositions of ore fluids (${\delta}^{18}O_{water}=4.8$ to 7.2‰, ${\delta}D_{water}=-73$ to -76‰) indicate that mesothermal auriferous fluids at Bodeok were likely mixtures of $H_2O-rich$, isotopically evolved meteoric waters and magmatic $H_2O-CO_2$ fluids.

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Mineralogical Studies on Sulfide Ore Species of the Tong Myeong Tungsten Deposits (동명중석광산산(東明重石鑛山産) 유화광물(硫化鑛物)의 광물학적(鑛物學的) 연구(硏究))

  • Lee, Pyeong-Koo;So, Chil-Sup;Kim, Se-Hyun;Yun, Seong-Taek;Kim, Moon-Young
    • Economic and Environmental Geology
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    • v.19 no.spc
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    • pp.207-226
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    • 1986
  • The skarn type tungsten deposits in Jechon area are developed in the contact aureole of Jurassic granodiorite and lower Paleozoic limestone beds. The Tong Myeong mine contains scheelitebearing skarns found at and near the contacts between crystalline limestone and hornfels. Although the skarns are heterogeneous, there are clear patterns in the preferred associations and nonassociations of minerals on all scales. The skarn show a zonal arrangement from limestone to hydrothermal vein as follow: wollastonite skarn, clinopyroxene skarn, clinopyroxene-garnet skarn, garnet skarn, and vesuvianite skarn. Scheelite, abundant in all skarn units except wollastonite skarn and also in quartz veins near orebodies, is everywhere strongly correlated with pyrrhotite. It is implied that it was a stable phase throughout the evolution of the zoned skarns, at least in pyrrhotite.forming environments. Deposition of scheelite was probably widely caused by increasing $a_{Ca^{2+}}$ in the fluid, resulting from associated and interrelated reactions: $FeCl_2\;aq+H_2S\;aq{\rightarrow}FeS+2H^{+}+2Cl^-$; and $CaCO_3+2H^+{\rightarrow}Ca^{+2}+H_2CO_3$. The spectral reflection powers of nine sulfide species were studied, for three mineralization stage. The shapes and characteristics of the spectral reflectivity profiles are significant in their control of other optical properties. The characteristics of the Vickers microhardness and the optical symmetry for the minerals studied are discussed. Broad radicle groupings of the sulfides can be made with regard to the reflectivity-microhardness values.

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Multi Layer Thin Film Deposition Using Rotatable Hexagonal Gun by Sputtering for the Insulating Glass

  • Park, Se-Yeon;Lee, Jong-Ho;Choi, Bum-Ho;Han, Young-Ki;Lee, Kee-Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.314-315
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    • 2012
  • 최근들어 반도체 및 디스플레이 소자의 구조가 복잡해짐에 따라 다층 박막 증착에 대한 중요성이 날로 증가하고 있다. 본 연구에서는 다층 박막을 효율적으로 증착하기 위해 회전이 가능한 육각건을 개발하였고, 이를 이용하여 에너지 절약형 단열 유리 증착 공정을 구현 하였다. 개발된 회전형 육각건은 기존 플래너형 스퍼터링 건의 확장형으로서 최대 6개의 물질을 하나의 챔버에서 증착이 가능하도록 구성되었다. 기존 공정의 경우 서로 다른 물질 증착을 위해서는 각각의 챔버가 필요한 반면, 회전형 육각건을 이용할 경우 하나의 챔버에서 공정을 진행할 수 있어 원가 절감이 가능하다. Fig. 1은 개발된 회전형 육각건의 모식도로서, 스퍼터링 타겟이 장착 가능한 건과, 회전부로 구성되어 있다. 이를 이용하여 투명전극-금속-투명전극-금속-절연체로 구성되어 있는 에너지 절약형 단열 유리용 다층 박막 증착 공정을 개발하였다. 이때 알루미늄이 도핑된 ZnO (AZO)는 RF 마그네트론 스퍼터로, 금속 박막은 DC 스퍼터, $SiO_2$ 및 SiN과 같은 절연 박막은 $O_2$$N_2$ 분위기에서 반응성 RF 스퍼터로 각각 증착하였다. Base pressure는 $10^{-7}$ torr였으며, 증착 시 공정 압력은 1~3 mTorr로 조정하였다. 증착 균일도 향상을 위해 20 rpm의 속도로 기판을 회전시켰다. Fig. 2(a)는 ZnO-Ag-ZnO 구조로 이루어진 다층 박막의 단면을 관찰한 투과전자 현미경 사진으로 각 층간의 계면이 뚜렷하게 나타남을 확인할 수 있으며, 각 층간의 intermixing 현상이 발생하지 않음을 확인 가능하다. 이를 보완하기 위해 Fig. 2(b)에서 보는 바와 같이 XPS를 이용하여 depth profile을 측정하였다. 각 층에서 서로 다른 물질이 발견되는 현상, 즉 교차 오염이 발생함에 따라 나타나는 intermixing 없이 거의 순수한 형태의 ZnO, Ag 박막 성분이 검출되었다. 이는 6개의 서로 다른 물질이 장착된 회전형 육각건을 이용하여 고 품질의 다층 박막 증착이 가능함을 제시하는 결과이다. 증착된 다층 박막의 균일도는 3.8%, 가시광선 영역에서 80% 이상의 투과도, 면저항 값은 3 ${\Omega}/{\Box}$ 이하를 보임으로서 에너지 절약형 단열 유리로서의 사양을 만족시키는 결과를 제시하였다.

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Magnetron Sputter Coating of Inner Surface of 1-inch Diameter Tube

  • Han, Seung-Hee;An, Se-Hoon;Song, In-Seol;Lee, Keun-Hyuk;Jang, Seong-Woo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.135-135
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    • 2015
  • Tubes are of extreme importance in industries as for fluid channels or wave guides. Furthermore, some weapon systems such as cannons use the tubes as gun barrels. To increase the service life of such tubes, a protective coating must be applied to the tubes' inner surface. However, the coating methods applicable to the inner surface of the tubes are very limited due to the geometrical restriction. A small-diameter cylindrical magnetron sputtering gun can be used to deposit coating layers on the inner surface of the large-bore tubes. However, for small-bore tubes with the inner diameter of one inch (~25 mm), the magnetron sputtering method can hardly be accommodated due to the space limitation for permanent magnet assembly. In this study, a new approach to coat the inner surface of small-bore tubes with the inside diameter of one inch was developed. Instead of using permanent magnets for magnetron operation, an external electro-magnet assembly was adopted around the tube to confine the plasma and to sustain the discharge. The electro-magnet was operated in pulse mode to provide the strong axial magnetic field for the magnetron operation, which was synchronized with the negative high-voltage pulse applied to the water-cooled coaxial sputtering target installed inside the tube. By moving the electro-magnet assembly along the tube's axial direction, the inner surface of the tube could be uniformly coated. The inner-surface coating system in this study used the tube itself as the vacuum chamber. The SS-304 tube's inner diameter was 22 mm and the length was ~1 m. A water-cooled Cu tube (sputtering target) of the outer diameter of 12 mm was installed inside of the SS tube (substrate) at the axial position. The 50 mm-long electro-magnet assembly was fed by a current pulse of 250 A at the frequency and pulse width of 100 Hz and 100 usec, respectively. The calculated axial magnetic field strength at the center was ~0.6 Tesla. The central Cu tube was synchronously driven by a HiPIMS power supply at the same frequency of 100 Hz as the electro-magnet and the applied pulse voltage was -1200 V with a pulse width of 500 usec. At 150 mTorr of Ar pressure, the Cu deposition rate of ~10 nm/min could be obtained. In this talk, a new method to sputter coat the inner surface of small-bore tubes would be presented and discussed, which might have broad industrial and military application areas.

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Therapeutic Effect of Total Ginseng Saponin on Skin Wound Healing

  • Kim, Young-Soo;Cho, Ik-Hyun;Jeong, Moon-Jin;Jeong, Soon-Jeong;Nah, Seung-Yeol;Cho, Young-Sik;Kim, Seung-Hyun;Go, A-Ra;Kim, Se-Eun;Kang, Seong-Soo;Moon, Chang-Jong;Kim, Jong-Choon;Kim, Sung-Ho;Bae, Chun-Sik
    • Journal of Ginseng Research
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    • v.35 no.3
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    • pp.360-367
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    • 2011
  • In this study, we investigated the effects of total ginseng saponin (TGS) on the cutaneous wound healing process using histological analysis. A total of 24 ICR mice, 5-weeks-old, were used for all in vivo experiments. Mice were divided into control and TGS-treated groups and four equidistant 1-cm full-thickness dorsal incisional wounds were created. The wounds were extracted at days 1, 3, 5, and 7 post-injury for histomorphometrical analysis including wound area and contracture measurements, keratinocyte migration rate, and calculation of infiltrating inflammatory cells. The results showed that the wound area was smaller and keratinocyte migration rate was higher in the TGS-treated group than that of the control group from days 3 to 7. Inflammatory cells in the TGS-treated group at days 1 and 3 were reduced compared to the control group. Wound contraction in the TGS-treated group was greater than in the control group on days 3 to 5, and collagen deposition in the TGS-treated group was higher than in the control group during wound healing. The results indicate a beneficial effect of TGS when used to treat skin wounds.