• 제목/요약/키워드: Screw-type vacuum pump

검색결과 4건 처리시간 0.017초

스크류 형 건식진공펌프 기술 현황 및 응용 (Screw-type Dry Vacuum Pump Technology and Application in Semiconductor Process)

  • 노명근;황태경;박제우
    • 한국진공학회지
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    • 제17권4호
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    • pp.292-301
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    • 2008
  • 반도체 및 디스플레이 공정과 같이 진공의 높은 청결도의 진공이 필수적으로 요구되어 지는 산업분야가 확대됨에 따라 건식진공펌프의 중요성은 급격히 증대되어 왔다. 다단루츠형 진공펌프와 함께 건식진공펌프 양대 축의 하나를 형성하는 스크류형 건식진공펌프는 공정부산물 발생이 많은 고 난이도 응용분야에서 그 장점을 발휘하여 왔다. 최근 들어 에너지 효율이 획기적으로 개선된 스크류형 건식진공펌프의 개발이 활발히 진행되고 있다. 이 총설논문에서는 스크류형 건식진공펌프의 전반적 기술사항들을 살펴보고 실제 반도체 공정에의 응용 및 스크류형 건식진공펌프의 향후 발전 방향에 대하여 살펴보았다.

고효율 복합형 진공펌프의 로터다이나믹 해석 (A Rotordynamics Analysis of High Efficiency and Hybrid Type Vacuum Pump)

  • 김병옥;이안성;노명근
    • 한국소음진동공학회논문집
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    • 제17권10호
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    • pp.967-975
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    • 2007
  • A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

준설토 일괄처리시스템을 위한 진공사이로 설계에 관한 연구 (A Study on Design of Vacuum Silo for Batch Treatment System for Dredged Soil)

  • 김용석;양해림;김학선;정찬세;양순용
    • 대한기계학회논문집A
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    • 제36권5호
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    • pp.571-577
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    • 2012
  • 본 논문에서는 우수관로부터 발생되는 퇴적토의 준설처리를 위한 소형의 이동식 준설일괄처리 시스템을 제안하고, 특히 진공사이로와 1차 선별분리기 그리고 컨베이어를 일체화하는 진공사이로 선별분리장치를 설계하였다. 진공사이로 선별분리장치는 저장조, 이송 스크류, 진공 게이트, 스크린 바, 스크린 바 클리너, 진공배출장치로 구성된다. 특히 저장조 내에서 흡입공기의 흐름은 선별분리 성능의 주요 요소임을 고려하여 CFD 유동해석을 통해 최적형상을 도출하였다. 또한 CAE 구조해석을 통해 판재로 이루어지는 저장조의 안전성을 검토하였다. 그리고 3D-CAD 모델링을 통한 구동 메커니즘의 기구적, 역학적 시뮬레이션을 수행하여 사양을 결정하였다. 본 연구에 이어서, 드럼 스크린형 2차선별기, 데칸터형 탈수장치 그리고 보조장치인 오수탱크와 펌프 등을 설계할 것이다. 그리고 본 설계를 바탕으로 시제품을 제작하고 필드테스트를 수행할 것이다.

설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013)

  • 이대영;김사량;김현정;김동선;박준석;임병찬
    • 설비공학논문집
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    • 제26권12호
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    • pp.605-619
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    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.