Estimating the Reliability of Virtual Metrology Predictions in Semiconductor Manufacturing : A Novelty Detection-based Approach (이상치 탐지 방법론을 활용한 반도체 가상 계측 결과의 신뢰도 추정)
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- Journal of Korean Institute of Industrial Engineers
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- v.38 no.1
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- pp.46-56
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- 2012