• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2003년도 international symposium on advanced powder metallurgy
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• pp.109-109
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• 2003

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

• 한국분말재료학회지
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• 제10권4호
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• pp.275-280
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• 2003

Synthesis and characteristics of Cu nanopowder were considered by in-situ characterization method using SMPS in pulsed wire evaporation process. With increasing pressure in chamber, particle size and degree of agglomeration increased by increase of collision frequency. Also, it was found from the XRD analyses and BET measurements that crystallite size and particle size decreased with elevating applied voltage. However, SMPS measurements and TEM observation revealed the increase of particle size and degree of agglomeration with increase of applied voltage. These results suggested that particle growth and agglomeration depend on overheating factor in chamber at the early stage and thermal coagulation in filtering system during powder formation until collection.

• 한국대기환경학회지
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• 제19권2호
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• pp.167-177
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• 2003

The number size distribution of urban aerosols ranging from 0.02 to 20 ${\mu}{\textrm}{m}$ in diameter was measured by using a scanning mobility particle sizer (SMPS) system and an aerodynamic particle sizer spectrometer (APS) at Seoul from November 30,2001 to January 14, 2002. The gaseous species such as CO, NO, NO$_2$, and $O_3$ were also continuously monitored. The daily average concentration of urban aerosols sorted into three groups (0.02~0.1 ${\mu}{\textrm}{m}$, 0.1~1 ${\mu}{\textrm}{m}$ and 1~10 ${\mu}{\textrm}{m}$) and the typical number, surface, and volume distributions of urban aerosols were discussed in this paper. The weekly variation of aerosol concentration was compared with those of gaseous concentrations. relative humidity, and visibility. The results showed that the particle number concentration seemed to increase in the morning and the number concentration of fine particles less than 1 fm in diameter seemed to increase when the concentrations of CO, NO, and NO$_2$ were high. The number concentration of fine particles was relatively high when the relative humidity was greater than 70％ during the increasing period of relative humidity. The visibility was weakly correlated with the concentration of aerosols ranging 0.1 to 1 ${\mu}{\textrm}{m}$, and the number size distribution for high visibility episode was apparently different from that for low visibility episode.

• 한국환경과학회지
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• 제21권11호
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• pp.1339-1348
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• 2012

The versatile aerosol concentration enrichment system (VACES) have proven useful for providing elevated levels of atmospheric aerosol to human and animal exposures. In this study, we describe a VACES and tests conducted to both optimize the enhancement factor (EF) and characterize how it depends on experiment conditions. Particle number concentrations were measured from upstream and downstream of the system by scanning mobility particle sizer (SMPS) with a long differential mobility analyzer (DMA) in combination with a condensation particle counter (CPC). SMPS was used for to determine VACES particle EF. Particle EF tends to increase for higher the saturator temperature ($T_{Sat}$) and lower the condenser temperature ($T_{Con}$). $T_{Con}$ higher than $0^{\circ}C$ and $T_{Sat}$ lower than $50^{\circ}C$ was the best to obtain the most increase in particle concentration. Correlation analysis of EF with factor variables of $T_{Sat}$ and $T_{Con}$ resulted in correlation 0.662 and 0.416, respectively. With all five predictor variables included in a multiple regression model, the EF had a liner correlation with $R^2=0.643$.

• 한국분말재료학회지
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• 제20권2호
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• pp.129-133
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• 2013

In this paper we have studied the effect of water droplet size on nano-particle size distribution using SMPS(Scanning Mobility Particle Sizer)system. It can be seen that the unknown peak at >100 nm was caused by water droplets which did not dry completely when DI water was used as a solvent in the SMPS system. Therefore, it is important to dry water droplets generated from atomizer in the SMPS system when measuring the particle size distribution using less than 100 nm nano-particles in diameter. From this study, It can be concluded that the napion was a useful material as dryer ones and using EAG(Electro Aerosol Generator) as a particle generator was the most effective in reducing the effect of water droplets.

• 반도체디스플레이기술학회지
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• 제5권1호
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• pp.45-49
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• 2006

In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.49-52
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• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using SMPS (Scanning Mobility Particle Sizer) and deposited on the wafer by electrostatic force. The Experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• Journal of Korean Society for Atmospheric Environment
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• 제20권E1호
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• pp.35-41
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• 2004

Aerosol wall loss is an important factor affecting smog chamber experiments, especially with chambers made of Teflon film. In this work, the aerosol wall loss was investigated in 2.5 and $5.8-m^3$ cubic-shaped Teflon film chambers filled with ambient air. The natural change in the particle size distribution was measured using a scanning mobility particle sizer in a dark environment. The rate of aerosol wall loss was obtained from the deposition theory suggested by Crump and Seinfeld (1981). The measured rates of aero-sol wall loss were In a good agreement with the theoretical and experimental values given by McMurry and Rader (1985), implying that the electrostatic effect enhances particle deposition on the chamber wall. The significance of aerosol wall loss correction was demonstrated with the photochemical reaction experiments using the ambient air.

• 한국자동차공학회논문집
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• 제15권6호
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• pp.144-150
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• 2007

In recent years, the particle number emissions rather than particulate mass emissions in automotive engine have become the subject of controversial discussions. Recent results from the health effects studies imply that it is possible that particulate mass does not properly correlated with the variety of health effects attributed to diesel exhaust. So, the concern is instead now focusing on nano-sized particles emitted from I. C. engine. This study has been performed for the better understanding about the engine nano-particle for 3-measurement systems with different measuring principle. Firstly, EEPS is a newly introduced instrument for size distribution measurement of engine exhaust particles. It can measure nano-particles with an adequate resolution and in real time. In this study, the characteristics of EEPS were compared with ELPI and SMPS. As a research results, EEPS showed a same effect of engine load on the size distribution with ELPI and SMPS. But the quantitative results of EEPS were more similar to SMPS than ELPI, because the EEPS and SMPS use a same principle for classifying particles by size. The capability for transient measurement of EEPS was equivalent to that of ELPI.