• Title/Summary/Keyword: Saw blade

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An investigation on dicing 28-nm node Cu/low-k wafer with a Picosecond Pulse Laser

  • Hsu, Hsiang-Chen;Chu, Li-Ming;Liu, Baojun;Fu, Chih-Chiang
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.4
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    • pp.63-68
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    • 2014
  • For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.

A Study on Plasma Display Panel Barrier Rib Fabrication by Silicone Rubber Tooling and electromagnetic Wave (실리콘고무형과 전자기파에 의한 PDP격벽의 성형에 관한 연구)

  • 정해도;손재혁;조인호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.20-23
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    • 2001
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper, Stripes of grooves of which width 48${\mu}{\textrm}{m}$, depth 124$\mu\textrm{m}$ , pitch 274$\mu\textrm{m}$ was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6nm Ra in grooving Si. Barrier ribs were formed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waveness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

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The effect of welding parameters on the formation of discontinuities in the laser fusion zone between Fe-Co-W sintered segment and mild steel (Fe-Co-W 소결체와 탄소강의 레이저 용융부 결함형성에 미치는 공정변수의 영향)

  • Kim S. W.;Yoon B. H.;Jung W. G.;Lee C. H.
    • Laser Solutions
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    • v.7 no.3
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    • pp.25-36
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    • 2004
  • This study was performed to clarification of the formation of weld discontinuities in the dissimilar laser fusion zone. Welding parameters were beam power of 1300, 1430, 1560, and 1700 W and travel speed of 1, 1.3, and 1.7 m/min. Most cavities in the fusion zone were observed near the tip. Cavities in the fusion zone observed to be formed and grown from pores in the tip. More cavities were formed as the beam position moves to the tip side. Small cavities were decreased but large cavities were increased when the energy input increased. W content in the fusion zone was increased with heat input and as the beam position close to the tip. In the fusion zone, W content in the dendrite boundary was increased with heat input. Considering the propagation path and fracture morphology, cracks were solidification cracking, and were initiated and propagated along the dendrite boundaries. The formation of cracks might be related with the W rich ${\mu}$ phase which was formed in the grain boundaries and dendrite boundaries.

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The advent of Large Jar coffin Tombs in Yeongsangang River Valley (영산강류역(榮山江流域) 옹관고분(甕棺古墳) 발생(發生) 배경(背景))

  • Kim, Nak-Jung
    • Korean Journal of Heritage: History & Science
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    • v.37
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    • pp.37-63
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    • 2004
  • Large Jar had been manufactured and used broadly in Mahan area from late second century. At first, it was used for various purposes, for example storing utensils at household and religious service at tombs. But it's usage was shifted with the political expansion of Baekje. In late third century, large jar coffin appeared in tombs as an important burial unit at Yeongsangang river valley. It has specific traits such as saw blade-shaped design etc. That style is distinguished from Baekje's. Unification of form and style of large jar coffin signify the socio-political distinction between Yeongsangang river valley and Baekje. Large jar coffin was used emblemic style for this purposes by the political elites of the Yeongsangang river valley. This process was caused by political reason, that is, need for integration of the Yeongsangang river valley communities against the territorial expansion of Baekje state.

Development of a Belt Pick-up Type Two-row Sesame Reaper

  • Jun, Hyeon-Jong;Choi, Il-su;Kang, Tae-Gyoung;Kim, Young-Keun;Lee, Sang-Hee;Kim, Sung-Woo;Choi, Yong;Choi, Duck-Kyu;Lee, Choung-Keun
    • Journal of Biosystems Engineering
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    • v.41 no.4
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    • pp.281-287
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    • 2016
  • Purpose: The purpose of this study is to develop a walking-type two-row sesame reaper, which can simultaneously perform the cutting and collecting of sesame plants and other crops like perilla and soybean. Methods: The factors involved in reaping sesame were determined experimentally in order to design a prototype of the sesame reaper. The prototype is made up of four parts for cutting, conveying, collecting, and running. The height of two disc-plate saw blades on the cutting part is adjusted by an adjusting wheel, and peripheral speed is adjusted in accordance with the running speed. The conveying belt of the conveying part can be tilted from $0^{\circ}$ to $90^{\circ}$. The collecting part extracts a predetermined amount of transferred sesame plants. The prototype was used to evaluate the performance at different working speeds, so that the work efficiency can be calculated. Results: The center of gravity of the sesame plants was 900 mm, measured from the end of the cut stem. The diameter of the disc-plate saw blade was determined to be 355 mm, peripheral speed was 20.4-32.7 m/s, and the picking height of the conveying belt for sesame was 130 mm. The performance of transfer and collection of the sesame, when the insertion angles were $60^{\circ}$ and $90^{\circ}$, proved to be excellent. However, when the angle was over $120^{\circ}$, the performance was only 75-80%. The performance was at 100% efficiency when the ratio between running speed and conveying belt speed of the prototype was 1:2, which seems to be the ideal ratio for the sesame reaper. Conclusions: A sesame reaper was developed, which can integrate the processes of cutting, conveying, and collecting, by investigating and considering various factors involved in the reaping process. The sesame reaper can reduce the costs for yielding and producing sesame due to its highly efficient performance.

Effect Analysis of Tillage Depth on Rotavator Shaft Load Using the Discrete Element Method (이산요소법을 활용한 경심이 로타리 작업기의 경운날 축 부하에 미치는 영향 분석)

  • Bo Min Bae;Dae Wi Jung;Dong Hyung Ryu;Jang Hyeon An;Se O Choi;Yeon Soo Kim;Sang Dae Lee;Seung Je Cho
    • Journal of Drive and Control
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    • v.20 no.4
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    • pp.115-122
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    • 2023
  • This study utilized a discrete element method (DEM) simulation, as one of the virtual field trials, to predict the impact of tillage depth on the rotary blade shaft during rotavator tilling. The virtual field for the simulation was generated according to soil properties observed in an actual field. Following the generation of particles for the virtual field, a sequence of calibration steps followed to align the mechanical properties more closely with those of real soil. Calibration was conducted with a focus on bulk density and shear torque, resulting in calibration errors of just 0.02% for bulk density and 0.52% for shear torque. The prediction of the load on a rotary tiller's blade shaft involved a three-pronged approach, considering shaft torque, draft force, and vertical force. In terms of shaft torque, the values exhibited significant increases of 42.34% and 36.91% for every 5-centimeter increment in tillage depth. Similarly, the vertical force saw substantial growth by 40.41% and 36.08% for every 5-centimeter increment. In contrast, the variation in draft force based on tillage depth was comparatively lower at 18.49% and 0.96%, indicating that the effect of tillage depth on draft force was less pronounced than its impact on shaft torque and vertical force. From a perspective of agricultural machinery research, this study provides valuable insights into the DEM soil modeling process, accounting for changes in soil properties with varying tillage depths. These findings are expected to be instrumental in future agricultural machinery design studies.

A Study on Plasma Display Panel Barrier Rib Fabrication by Mold and Electromagnetic Wave (몰드와 전자기파에 의한 PDP격벽의 성형에 관한 연구)

  • Son, Jae-Hyeok;Im, Yong-Gwan;Jeong, Yeong-Dae;Jeong, Seong-Il;Jeong, Hae-Do
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.6
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    • pp.176-183
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    • 2002
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper , Stripes of grooves of which width 48$\mu$m, depth 124$\mu$m , pitch 274$\mu$m was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6 nm Ra in grooving Si. Barrier ribs were farmed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waviness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

Scanning electron microscopy of filiform papillae development in Korean native goats (Capra hircus)

  • Lee, Si-Joon;Cho, Gyu-Hyen;Kim, Mun-Ki;Kim, Chong-Sup;Won, Chung-Kil
    • Korean Journal of Veterinary Research
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    • v.58 no.4
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    • pp.171-175
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    • 2018
  • The aim of this study was to investigate morphological development of filiform papillae (FP) in Korean native goats by using scanning electron microscopy. Tongues were removed from goat fetuses (days 60, 90, and 120), neonates, and juveniles (days 30, 60, 90, 120, 150, and 180 after birth). During the prenatal period, primordia of FP appeared at fetal day 60 and were observed to be developed at day 90. At fetal day 120, the FP were observed like flower leaves of a double flower bud. In neonates, FP were shaped like an obliquely sectioned cylinder with secondary papillae irregularly arranged in a saw blade-like manner. In 60-day-old juvenile goats, the FP were densely distributed at the inner base of 1/3-1/2 degrees. In 90-, 120-, and 150-day-old goats, FP were compacted at the inner base of 1/2-2/3, 3/4, and 4/5 degrees, respectively. In 180-day-old goats, FP were found to be completely compacted on the inner surface with complete morphogenesis. Microridges, microplicae, and micropits were well-developed on the epithelial surface of lingual papillae from embryonic day 120 to juvenile day 180. These results indicate that FP of goats have different shapes and sizes during development both before and after birth.

REMINERALIZATION DEPTH OF CPP-ACP ON DEMINERALIZATION HUMAN ENAMEL IN VITRO (탈회된 법랑질에서 CPP-ACP의 재광화 깊이)

  • Choi, Han-Ju;Choi, Yeong-Chul;Kim, Kwang-Chul;Choi, Sung-Chul
    • Journal of the korean academy of Pediatric Dentistry
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    • v.35 no.2
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    • pp.278-286
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    • 2008
  • Many studies regarding Casein phosphopeptides-amorphous calcium phosphate(CPP-ACP) have demonstrated the remineralization ability on the demineralized enamel surface. A question is still remained that how deep can the calcium (Ca) and phosphorus (P) ions supplied by the CPP-ACP paste penetrate into the enamel subsurface. The aims of this study were to measure the penetrating depth of Ca and P ions in the demineralized human enamel in vitro, and were to determine the amount and depth of Ca and P ions according to the duration. The amount and depth of Ca and P ions were measured by microscopic observation with Field Emission Scanning Electron Microscopy (FE-SEM; LEO SUPRA 55, Carl Zeiss, Germany) and Energy Dispersive X-ray Spectrometer (EDS; GENESIS 2000, EDAX, USA: Linescan of Calcium and Phosphorus). Freshly extracted four human 1st premolars were obtained from the Dept. of Pediatric Dent., Kyung Hee Univ. Buccal surfaces of the 1st premolars were covered with nail varnish to form a window on the middle third of buccal surface. All of the teeth with enamel windows were immersed in a solution of 0.1 M lactic acid, Carbopol C907 (carboxypolymethylene BF Goodrich, Cleveland, OH, USA) at pH 4.8, and then incubated for 7 days. Each tooth crown was sawn in half through the midline of buccal window along the long axis of premolar. The four blocks of premolars were immersed in a 10-times diluted solution of CPP-ACP paste (Tooth Mousse, GC Corp., Tokyo, Japan) for 1, 2, 3 and 5 weeks while the rests were immersed in a placebo solution (distilled water) for the same duration. Each specimen was embedded in epoxy resin, and was sectioned perpendicular to the window, using a water-cooled diamond blade saw. The spectrum density indices of Ca and P were measured in the sound, de- and remineralized enamels by FE-SEM and EDS. The Student's t test was performed to compare the Spectrum Density Indices (SDI) of sound, re-and demineralized enamels, and to compare the differences among the durations. Followings are the conclusion : 1. The penetration depth of the remineralizing ions (Ca & P) of CPP-ACP paste is related to the depth of demineralized enamel (approximately $1050{\sim}1350{\mu}m$). It is revealed that the penetration depth of both ions reaches full thickness of decalcification and even slightly into the sound enamel. 2. The Ca & P levels of remineralized enamels in 1, 2 weeks were significantly higher than those of the sound enamels (p<0.05). 3. No statistically significant difference of Ca & P levels was found in relation with the increasing duration of remineralization (p>0.05).

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APICAL FITNESS OF NON-STANDARDIZED GUTTA-PERCHA CONES IN SIMULATED ROOT CANALS PREPARED WITH ROTARY ROOT CANAL INSTRUMENTS (전동화일로 형성된 근관에서 비표준화 Gutta-percha Cone의 적합성)

  • Kwon, O-Sang;Kim, Sung-Kyo
    • Restorative Dentistry and Endodontics
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    • v.25 no.3
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    • pp.390-398
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    • 2000
  • The purpose of this study was to evaluate the apical fitness of non-standardized gutta-percha cones in root canals prepared with rotary Ni-Ti root canal instruments of various tapers and apical tip sizes. Simulated sixty curved root canals of plastic blocks were prepared with crown-down technique using rotary root canal instruments of Maillefer ProFile$^{(R)}$ .04 and .06 taper (Maillefer Instrument SA, Switzerland). Specimens were divided into six groups and prepared as follows: Group 1, prepared up to size 25 of .04 taper ; Group 2, prepared up to size 30 of .04 taper ; Group 3, prepared up to size 35 of .04 taper ; Group 4, prepared up to size 25 of .06 taper ; Group 5, prepared up to size 30 of .06 taper ; Group 6 ; prepared up to size 35 of .06 taper. After cutting off the coronal portion of plastic, blocks perpendicular to the long axis of the canal with the use of a diamond saw, apical 5mm of canal space was analyzed. Prepared apical canal spaces were duplicated using rubber base impression material to evaluate two dimensional total area of apical canal space. Various sized gutta-percha cones were applied in the 5mm-apical canal space, which were size 25, size 30 and size 35 standardized gutta-percha cone, Diadent Dia-Pro ISO-.04$^{TM}$ and .06$^{TM}$(Diadent, Korea), and medium-fine (MF), fine (F), fine-medium (FM) and medium (M) sized non-standardized gutta-percha cones (Diadent, Korea). Coronal excess gutta-percha were cut off with a sharp blade. Photographs of impressed apical canal spaces and gutta-percha cones were taken with a CCD camera under a stereomicroscope and stored in a computer. Areas of the total canal space and gutta-percha cones were calculated using a digitalized image analysing program, CompuScope (Sungjin Multimedia Co., Korea). Ratio of apical fitness was obtained by calculating the area of gutta-percha cone to the total area of the canal space. The data were analysed statistically using One-way Analysis of Variance and Duncan's Multiple Range Test. The results were as follows: 1. In canals prepared up to size 25 ProFile$^{(R)}$ of .04 taper, non-standardized MF and F cones occupied significantly more canal space than Dia-Pro ISO-.04$^{TM}$ or size 25 standardized ones (p<0.05). 2. In canals prepared up to size 30 ProFile$^{(R)}$ of .04 taper, non-standardized F cones occupied significantly more canal space than Dia-Pro ISO-.04$^{TM}$ or size 30 standardized ones (p<0.05), and non-standardized MF cones occupied more canal space than size 30 standardized ones (p<0.05). 3. In canals prepared up to size 35 ProFile$^{(R)}$ of .04 taper, there was no significant difference in canal space occupation among non-standardized MF and F, size 35 standardized, and Dia-Pro ISO-.04$^{TM}$ cones (p>0.05). 4. In canals prepared up to size 25 ProFile$^{(R)}$ of .06 taper, non-standardized MF and F cones occupied significantly more canal space than Dia-Pro ISO-.06$^{TM}$, or size 25 standardized ones (p<0.05), and Dia-Pro ISO-.06$^{TM}$, cones occupied significantly more space than size 25 standardized ones (p<0.05). 5. In canals prepared up to size 30 ProFile$^{(R)}$ of .06 taper, non-standardized FM cones occupied significantly more canal space than Dia-Pro ISO-.06$^{TM}$ or size 30 standardized ones (p<0.05), and non-standardized F cones occupied significantly more canal space than size 30 standardized ones (p<0.05). 6. In canals prepared up to size 35 ProFile$^{(R)}$ of .06 taper, non-standardized M and FM, Dia-Pro ISO-.06$^{TM}$ occupied significantly more canal space than size 35 standardized ones (p<0.05). In summary, in both canals prepared with .04 or .06 taper ProFile$^{(R)}$, non-standardized cones showed better fitness than Dia-Pro ISO$^{TM}$ or standardized ones, which was more characteristic in smaller canals.

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