• Title/Summary/Keyword: Saturation depth

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Characteristics calculation on radio frequency power transfer in a planar inductively coupled plasma source (평면형 유도결합 플라즈마 장치에서의 RF 전력 전달 특성 계산)

  • 이정순;정태훈
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.368-375
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    • 1999
  • The Maxwell equation and the transformer equivalent-circuit model are applied to a radio frequency planar inductively coupled plasma. The spatial distribution of the vector potential, the magnetic field, and the electric field are obtained analytically. As a result, the plasma current, the mutual inductance between the coil and the plasma, and the self inductance of plasma are found to increase with increasing skin depth. The spatial distribution of absorbed power has maximum where the antenna coil exists, and has a similar profile to that of the induced electric field. The power transfer efficiency is found to increase with increasing gas pressure before a saturation around p+ 20mTorr, while it shows an increase with the plasma density before a slight decrease around a density of $5\times10^{11}/\textrm{cm}^3$.

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Atomic Layer Deposition of $Sb_2S_3$ Thin Films on Mesoporous $TiO_2$

  • Han, Gyu-Seok;Jeong, Jin-Won;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.282-282
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    • 2013
  • The antimony sulfide ($Sb_2S_3$) thin films were deposited using the gas phase method which known as atomic layer deposition (ALD) on mesoporous micro-films. Tris (dimethylamido) antimony (III[$(Me_2N)_3Sb$] and hydrogensulfide ($H_2S$) were used as precursors to deposit $Sb_2S_3$. Self-terminating nature of $(Me_2N)_3Sb$ and $H_2S$ reaction were demonstrated by growth rate saturation versus precursors dosing time. Absorption spectra and extinction coefficient were investigated by UV-VIS spectroscopy. Scanning electron microscopic analysis and X-ray photoelectron spectroscopy (XPS) depth profile were employed to determine the conformal deposition.

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Permeability Coefficient of Unsaturated Soil in Steep Slope Failure Area (붕괴가 발생한 급경사지의 현장 투수계수)

  • Choi, Eun-Kyeong;Kim, Sung-Wook;Park, Dug-Keun;Oh, Jeong-Rim
    • Proceedings of the Korean Geotechical Society Conference
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    • 2010.03a
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    • pp.921-926
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    • 2010
  • To examine saturation characteristics of an unsaturated soil in the steep slope area with collapse, it separated dry season from rainy season and measured water content and permeability, and measured permeability by using a tension infiltrometer in the site. In addition, it conducted electrical resistivity survey to look into thickness of ground and geological structure of underground. The collapsed slope increased depth of weathered zone compared to upper slope, and there electrical resistivity anomalous zone caused by the filtrated underground water was observed. The permeability of the collapsed area was observed high compared to upper and lower slopes of retarding basin without collapse, and the permeability measured by dividing the dry season and rainy season was measured high in case of dry season.

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Analytical modeling for the short-channel MOSFET (Short-Channel MOSFET의 해석적 모델링)

  • 홍순석
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.17 no.11
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    • pp.1290-1298
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    • 1992
  • In this paper, the Poisson's equation is solved two-dimensionally without employing any fitting parameters, and the model formulation of a short-channel MOSFET is accomplished fully analytically. It automatically derives a very accurate drain current expression that can be used simultaneously for strong inversion, subthreshold, and saturation regions. Furthermore, this model gives a unified explanation for the short-channel effect, the body effect, the DIBL effect, and even the variation of the effective carrier mobility. The obtained expression of the threshold voltage also includes the dependence on the oxide thickness, the n+ junction depth, and temperature.

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Unmanned Turning Process Control Based on Spindle-Motor Power Characteristics (주축 모터 출력 특성에 근거한 무인 선삭 제어)

  • Pak, Chang-Ho;Hong, Sung-Hahm;Lee, Byeong-Huee;Huh, Kun-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.7
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    • pp.1446-1452
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    • 2002
  • In the turning process, the feed is usually selected by a machining operator considering workpiece, cutting tool and depth of cut. Even if this selection can avoid power saturation or tool breakage, it is usually conservative compared to the capacity of the machine tools and can reduce the productivity significantly. This paper proposes a selection method of the feed and the reference cutting force based on MRR(material removal rate), maximum spindle power and specific energy. In order to estimate and control cutting force accurately in transient and steady state, this study utilizes a synthesized cutting force estimation method and a Fuzzy controller. The experimental results show that these systems can be useful for the unmanned turning process.

LPE meltaback-etch and re-epitaxy of GaAs/AlGaAs for optical micro-lenses fabrication (광소자용 미소렌즈 제작을 위한 GaAs/AlGaAs계 액상식각 및 에피택시)

  • 함성호;권영세
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.9
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    • pp.64-71
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    • 1997
  • A new etching technique of meltback was investigated for GaAs lensed optical devices with selective windows opending in the LPE (liquid phase epitaxy) system. In the meltback process, the etch depth and the etch shape were controlled by the degree of under-saturation, etch time and other parameters. A GaAs/AlGaAs DH layer was grown on the selectively etched hemispherical well for optical device application such as lensed surface emitting LED. The regrowth process were related with the coolin grate and the well to well spacing. A novel surface emitting LED with hemispherical AlGaAs lens was fabricated using the meltbakc and regrowth as the key process for AlaAs lens array. The light emitting efficiency of the LED was upto three times higher than the similar structure LED without lens. The meltback and regrowth technique was applicable to manufacture the optical device in LPE.

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The Studies of Irradiation Hardening of Stainless Steel Reactor Internals under Proton and Xenon Irradiation

  • Xu, Chaoliang;Zhang, Lu;Qian, Wangjie;Mei, Jinna;Liu, Xiangbing
    • Nuclear Engineering and Technology
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    • v.48 no.3
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    • pp.758-764
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    • 2016
  • Specimens of stainless steel reactor internals were irradiated with 240 keV protons and 6 MeV Xe ions at room temperature. Nanoindentation constant stiffness measurement tests were carried out to study the hardness variations. An irradiation hardening effect was observed in proton- and Xe-irradiated specimens and more irradiation damage causes a larger hardness increment. The Nix-Gao model was used to extract the bulk-equivalent hardness of irradiation-damaged region and critical indentation depth. A different hardening level under H and Xe irradiation was obtained and the discrepancies of displacement damage rate and ion species may be the probable reasons. It was observed that the hardness of Xe-irradiated specimens saturate at about 2 displacement/atom (dpa), whereas in the case of proton irradiation, the saturation hardness may be more than 7 dpa. This discrepancy may be due to the different damage distributions.

Laser Cutting of Thick Diamond Films Using Low-Power Laser (저 출력 레이저를 이용한 다이아몬드 후막의 절단)

  • 박영준;백영준
    • Journal of the Korean Ceramic Society
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    • v.37 no.2
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    • pp.140-144
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    • 2000
  • Laser cutting of thick diamond films is studied using a low-power(10 W) copper vapor laser. Due to the existence of the saturation depth in laser cutting, thick diamond films are not easily cut by low-power lasers. In this study, we have adopted a low thermalconductivity underlayer of alumina and a heating stage (up to 500$^{\circ}C$ in air) to prevent the laser energy from consuming-out and, in turn, enhance the cutting efficiency. Aspect ratio increases twice fromm 3.5 to 7 when the alumina underlayer used. Adopting a heating stage also increases aspect ratio and more than 10 is obtained at higher temperatures than 400$^{\circ}C$. These results show that thick diamond films can be cut, with low-power lasers, simply by modifying the thermal property of underlayer.

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The care giving experience of middle-aged child care providers (중년기 아이돌보미 여성의 돌봄활동 경험)

  • Chu, Min-Sun;Lee, Young-Ran
    • Journal of Korean Academic Society of Home Health Care Nursing
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    • v.24 no.1
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    • pp.23-33
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    • 2017
  • Purpose: The purpose of this phenomenological study was to explore middle-aged child care providers' experience in caring for children in the community. Methods: The participants were 10 middle-aged child care providers. In-depth interviews were conducted between August and September, 2014 until data. Colaizzi's method of data analysis was applied to inductively determine themes and formulated meanings. Data saturation was achieved and methodological rigor was established Results: Four themes were extracted from 12 meanings. The four themes of the child care providers' experience in caring for children were: 1) weariness from care-giving, 2) the search for one's own solutions, 3) a cheerful attitude to life, 4) the opportunity to start a new life. Conclusion: The results of this study provide useful information for understanding child care providers' experiences in caring for children and establishing effective strategies to support these child care providers.

Illness Experience of Adolescents with Hematologic Malignancies (혈액종양 청소년의 질병 경험)

  • Son, Sun-Young
    • Journal of Korean Academy of Nursing
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    • v.41 no.5
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    • pp.603-612
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    • 2011
  • Purpose: The purpose of this study was to describe the experience process of adolescents with hematologic malignancies. The question for the study was "What is the experience of adolescents with hematologic malignancies like?" Methods: The grounded theory methodology was used for this study. The data were collected through in-depth interview from 10 adolescents with hematologic malignancies. Data collection was done from January to June 2007. Theoretical sampling was used until the data reached saturation. Results: As a result of the analysis, "Reconstructing self-image from deviated and suspended life" was identified as the core category. And 11 subcategories were identified and they were integrated to the core category. 'Establishment of expanded and matured self' was identified as the consequence. Conclusion: The results of the study provide a frame for effective individualized nursing intervention strategies in helping adjustment of the adolescents with hematologic malignancies.