• 제목/요약/키워드: SURFACE CRYSTALLIZATION

검색결과 433건 처리시간 0.028초

PRAM을 위한 Ge-Se-Te 박막의 상변환 특성 (Phase Change Characteristics of Ge-Se-Te Thin Film for PRAM)

  • 신재호;김병철;여종빈;이현용
    • 한국전기전자재료학회논문지
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    • 제24권12호
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    • pp.982-987
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    • 2011
  • In this study, $Ge_8Se_{(2+x)}Te_{(6-x)}$ thin film amorphous-to-crystalline phase-change rate was evaluated in using a nano-pulse scanner. The focused laser beam with a diameter <10 ${\mu}m$ was illuminated in the power (P) and pulse duration (t) ranges of 1-31 mW and 10-460 ns, respectively, with subsequent detection of the responsive signals reflected from the film surface. We also evaluated the material characteristics, such as optical absorption and energy gap, crystalline phases, and sheet resistance of as-deposited and annealed films. The result of experiments showed that the thermal stability of the Ge-Se-Te film is largely improved by adding Se.

비정질 $As_{40}Se_{50-x}S_{x}Ge_{10}$ 박막의 구조특성에 관한 연구 (A Study on the Structure Properties of Amorphous $As_{40}Se_{50-x}S_{x}Ge_{10}$ Thin Film)

  • 김종빈;정홍배
    • 전자공학회논문지A
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    • 제29A권11호
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    • pp.106-112
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    • 1992
  • In this paper, we analyze the structure characteristics of $As_{40}Se_{50-x}S_{x}Ge_{10}$ system bulk and thin films. As the results of XRD patterns, it identified amorphous state. In order to find the glass transition temperature($T_g$), crystallization($T_c$) and melting point ($T_m$)of bulk sample, it ascertained that TS1gT is 238$^{\circ}C$ in $As_{40}Se_{15}S_{35}Ge_{10}$, and 231$^{\circ}C$ in $As_{40}Se_{25}S_{25}Ge_{10}$ & $As_{40}Se_{50}Ge_{10}$ following the thernal analysis by DSC, DTA, & TGA method. Also it was confirmed the phase seperation of continuous phase and dispertion phase by the optical texture of polarizing microscope and $T_g$ near 20$0^{\circ}C$ in thin film. Therefore, it was found that it occurs the phase seperation of Ge-rich dontinuous phase and Se-rich dispersion phase following the EDS analysis of thin film and the surface SEM photograph.

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Electrical Characteristics of $(Ba,Sr)TiO_3/RuO_2$ Thin films

  • Park Chi-Sun
    • 마이크로전자및패키징학회지
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    • 제11권3호
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    • pp.63-70
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    • 2004
  • The structural, electrical properties of $(Ba, Sr)TiO_3[BSTO]/RuO_2$ thin films were examined by the addition of amorphous BSTO layer between crystlline BSTO film and $RuO_2$ substrate. We prepared BSTO films with double-layered structure, that is, amorphous layers deposited at $60^{\circ}C$ and crystalline films. Crystalline films were prepared at 550 on amorphous BSTO layer. The thickness of the amorphous layers was varied from 0 to 170 nm. During the deposition of crystalline films, the crystallization of the amorphous layers occurred and the structure was changed to circular while crystalline BSTO films showed columnar structure. Due to insufficient annealing effect, amorphous BSTO phase was observed when the thickness of the amorphous layers exceeded 30 nm. Amorphous BSTO layer could also prevent the formation of oxygen deficient region in $RuO_2$ surface. Leakage current of total BSTO films decreased with increasing amorphous layer thickness due to structural modifications. Dielectric constant showed maxi-mum value of 343 when amorphous layer thickness was 30 nm at which the improvement by grain growth and the degradation by amorphous phase were balanced.

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$TiO_2$ 의 첨가가 Lead-Zinc-Borosilicate 봉착 유리에 미치는 영향 (Effect of $TiO_2$ in the Lead-Zinc-Borosilicate Solder Glass)

  • 채수철;김철영
    • 한국세라믹학회지
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    • 제21권4호
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    • pp.349-354
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    • 1984
  • The purpose of present study is to find the structure crystallization mechanism and physical properties in $TiO_2$ containing lead zinc borosilicate glass system. The experiments such as differential thermal analysis infrared spectral analysis. X-ray diffraction analysis and thermal expansion measurements have been done. Differential thermal analysis of coarse and fine glass powder showed bulk nucleating mechanism for high $TiO_2$ containing glasses and surface nucleation mechanism for low $TiO_2$ containing glasses. The prepared glasses crystallized to crystalline mixture of PbO.2ZnO. $B_2O_3$ .4PbO.2ZnO.$5B_2O_3$and 2PbO.ZnO.$B_2O_3$ when heat-treated in the range of 480 and 51$0^{\circ}C$ and crystallized to PbTiO3 when heat-treated at $600^{\circ}C$. Obtained crystalline phase of $PbTiO_3$ in glass matrix strongly affects to thermal expansion coefficient and the value of crystallized glass varied 68.0 to $107.1{\times}10-7$/$^{\circ}C$ depending on the amount of $TiO_2$added. Infrared spectral analysis showed that [$BO_3$] triangle and [$BO_3$] tetrahedral units were coexisted in the glass with high content of PbO.

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솔-젤법을 이용한 Bismuth Layered Structure를 가진 강유전성 박막의 제조 및 특성평가에 관한 연구 (The preparation and Characterization of Bismuth Layered Ferroelectric Thin Films by Sol-Gel Process)

  • 주진경;송석표;김병호
    • 한국세라믹학회지
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    • 제35권9호
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    • pp.945-952
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    • 1998
  • Ferroelectric Sr0.8Bi2.4Ta2O9 stock solutions were prepared by MOD(Metaloganic Decompostion) process. The phase transformation for the layered perovskite of the SBT thin films by changing RTA(Rapid her-mal Annealing) temperatuer from 700$^{\circ}C$to 780$^{\circ}C$ were observed using XRD and SEM. Layered perovskite phase began to appear above 740$^{\circ}C$ and then SBT thin films were annealed at 800$^{\circ}C$ for 1hr for its com-plete crystallization. The specimens showed well shaped hysteresis curves without post annealing that car-ried out after deposition of Pt top electrode. The SBT thin films showed the asymmetric ferroelectric pro-perties. It was confirmed that the properties were caused by interface effect to SBT and electrode by leak-age current density measurement and asymmetric properties reduced by post annealing. At post annealing temperature of 800$^{\circ}C$ remanant polarization values (2Pr) were 6.7 9 ${\mu}$C/cm2 and those of leakage current densities were 3.73${\times}$10-7 1.32${\times}$10-6 A/cm2 at 3, 5V respectively. Also bismuth bonding types of SBT thin film surface were observed by XPS.

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Ce 담지 NaZSM-5의 이산화타소 흡착 특성 ($CO_2$ adsorption on ceria impregnated)

  • 푸시파라지 헤마라다;마니 기니쉬;말간단 바기아락스미;팽 메이메이;장현태
    • 한국산학기술학회:학술대회논문집
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    • 한국산학기술학회 2010년도 추계학술발표논문집 1부
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    • pp.318-322
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    • 2010
  • NaZSM 5 was synthesized in an alkaline medium and impregnated with cerium oxide by wet method using cerium nitrate as the source for cerium. There TGA results shows decomposition of nitrate at $200^{\circ}C$. The ceria impregnated ZSM 5 materials were designated as NaZSM 5 (X) where X is the percent ceria impregnated (3, 5, 7, 11, 19%). They were characterized by XRD, SEM, EDAX, BET techniques. XRD analysis showed decrease in intensity of the patterns with the increase in the ceria loading but crystallization of ceria to larger size is evident for 11 and 19% loading. The surface area and pore volume decreased with increase in ceria loading. The maximum adsorption capacity of NaZSM 5 (5%) is 100.2 mg/g of sorbent. The ceria impregnated NaZSM 5's were found to be regenerable, selective and recyclable.

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일축 연신 조건에 따른 Poly(ethylene 2,6-naphthalate) 배향에 관한 연구 (Effect of Uniaxial Drawing Conditions on the Orientation of Poly (ethylene 2,6- naphthalate))

  • 진병석;이성효;이광희
    • 폴리머
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    • 제25권5호
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    • pp.699-706
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    • 2001
  • 연신온도, 연신속도, 연신비 등 연신 조건에 따른 poly(ethylene 2,6-naphthalate) (PEN)의 배향상태 변화를 살펴보았다. 연신온도가 낮을수록 연신속도가 빠를수록 연신비에 따라 큰 복굴절 값을 보이며 FT-IR ATR dichroism 방법으로 구한 배향 특성도 복굴절의 실험결과를 뒷받침하였다. PEN을 $120^{\circ}C$에서 연신하면 무정형사슬 배향함수 ($f_a$)가 연신속도가 빠를수록 높은 값을 갖지만 $141^{\circ}C$에서 연신하면 반대로 연신속도가 빠를수록 낮은 값을 갖게 된다. 이러한 경향은 결정화 속도와 사슬 이완속도와의 관계로부터 설명이 가능하다. X-선 회절 실험 결과로부터 PEN의 naphthalene ring 구조가 필름표면에 평행하게 배열됨을 확인할 수 있었다.

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임피던스 측정법을 이용한 엑시머 레이져 열처리 Poly-Si의 특성 분석 (APPLICATION OF IMPEDANCE SPECTROSCOPY TO POLYCRYSTALLINE SI PREPARED BY EXCIMER LASER ANNEALING)

  • 황진하;김성문;김은석;류승욱
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.200-200
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    • 2003
  • Polycrystalline Si(polysilicon) TFTs have opened a way for the next generation of display devices, due to their higher mobility of charge carriers relative to a-Si TFTs. The polysilicon W applications extend from the current Liquid Crystal Displays to the next generation Organic Light Emitting Diodes (OLED) displays. In particular, the OLED devices require a stricter control of properties of gate oxide layer, polysilicon layer, and their interface. The polysilicon layer is generally obtained by annealing thin film a-Si layer using techniques such as solid phase crystallization and excimer laser annealing. Typically laser-crystallized Si films have grain sizes of less than 1 micron, and their electrical/dielectric properties are strongly affected by the presence of grain boundaries. Impedance spectroscopy allows the frequency-dependent measurement of impedance and can be applied to inteface-controlled materials, resolving the respective contributions of grain boundaries, interfaces, and/or surface. Impedance spectroscopy was applied to laser-annealed Si thin films, using the electrodes which are designed specially for thin films. In order to understand the effect of grain size on physical properties, the amorphous Si was exposed to different laser energy densities, thereby varying the grain size of the resulting films. The microstructural characterization was carried out to accompany the electrical/dielectric properties obtained using the impedance spectroscopy, The correlation will be made between Si grain size and the corresponding electrical/dielectric properties. The ramifications will be discussed in conjunction with active-matrix thin film transistors for Active Matrix OLED.

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Effect of Substrate Bias Voltage on the Properties of Hafnium Nitride Films Deposited by Radio Frequency Magnetron Sputtering Assisted by Inductive Coupled Nitrogen Plasma

  • Heo, Sung-Bo;Lee, Hak-Min;Kim, Dae-Il;Choi, Dae-Han;Lee, Byung-Hoon;Kim, Min-Gyu;Lee, Jin-Hee
    • Transactions on Electrical and Electronic Materials
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    • 제12권5호
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    • pp.209-212
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    • 2011
  • Hafnium nitride (HfN) thin films were deposited onto a silicon substrate by inductive coupled nitrogen plasma-assisted radio frequency magnetron sputtering. The films were prepared without intentional substrate heating and a substrate negative bias voltage ($-V_b$) was varied from -50 to -150 V to accelerate the effects of nitrogen ions ($N^+$) on the substrate. X-ray diffractometer patterns showed that the structure of the films was strongly affected by the negative substrate bias voltage, and thin film crystallization in the HfN (100) plane was observed under deposition conditions of -100 $V_b$ (bias voltage). Atomic force microscopy results showed that surface roughness also varied significantly with substrate bias voltage. Films deposited under conditions of -150 $V_b$ (bias voltage) exhibited higher hardness than other films.

열가소성 복합재료의 압축성형조건에 따른 기계적 특성 변화 (The Change of Mechanical Properties with Forming Conditions of Thermoplastic Composite in Compression Molding)

  • 이중희;이호언
    • 대한기계학회논문집A
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    • 제25권9호
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    • pp.1416-1422
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    • 2001
  • The objective of this work was to characterize mechanical properties of thermoplastic composites with various forming conditions in compression molding. Randomly oriented long glass fiber reinforced polypropylene(PP) was used in this work. The composite materials contained 20%, 30%, and 40% glass fiber by weight. Compression molding was conducted at various mold temperatures and charge sizes. The temperatures on the mold surface and at the material in the mid-plain were monitored during the molding. Differential Scanning Calorimeter was used to measure crystallinity at both in-side and out-side of the sheet material. Crystallinity at each temperature was also measured by X-ray diffractometer. Dimensional stability was studied at various conditions with the spring forward angle. Among the processing parameters, the crystallization time at the temperature above 130$^{\circ}C$, was found to be the most effective. Spring-forward angle was reduced and the tensile modulus was increased as the mold temperature increased.