• Title/Summary/Keyword: STI

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The Trench Design Using Sentaurus Tool (Sentaurus를 이용한 트렌치 제작 공정)

  • Lee, Sang-Ho;Jung, Hak-Kee;Lee, Jae-Hyung;Jeong, Dong-Soo;Lee, Jong-In
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2007.06a
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    • pp.544-547
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    • 2007
  • 본 연구에서는 Shallow trench isolation(STI)를 형성하기 위한 과정을 제시할 것이다. 소자간 분리를 위한 전통적인 방법으로 LOCOS(Local Oxidation of Silicon) 방식이 사용되어왔으나, 소자가 미세해짐에 따라 LOCOS 방식에서 나타나는 단차와 Birds Beak이라는 횡 방향의 산화에 의한 활성 영역의 손실을 무시할 수 없게 되어 새로운 소자 분리 방법이 필요하게 되었으며 이러한 요구에 의해 도입된 Isolation 기술이 Shallow Trench Isolation(STI) 기술이다. 다양한 etching options은 중요한 부분이다. 이 경우에 trench etching의 방향은 점점 좁아지는 측면을 경사지게 하면서 협곡을 만드는 효과적인 방법을 사용할 것이다. 본 연구에서는 좁은 협곡(Shallow trench)의 절반만 시뮬레이션 될 것이다. 만약 모든 협곡의 시뮬레이션을 필요로 한다면 다변의 etching은 사용될 수 있다. STI 공정의 핵심은 trench etch를 좁게하면서 반도체 소자를 어떻게 하면 잘 분리할 수 있는가에 있다.

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Development of a Drought Detection Indicator using MODIS Thermal Infrared Data

  • Park, Sun-Yurp
    • Korean Journal of Remote Sensing
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    • v.20 no.1
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    • pp.1-11
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    • 2004
  • Based on surface energy balance climatology, surface temperatures should respond to drying conditions well before plant response. To test this hypothesis, land surface temperatures (LST) derived from MODIS data were analyzed to determine how the data were correlated with climatic water balance variables and NDVI anomalies during a growing season in Western and Central Kansas. Daily MODIS data were integrated into weekly composites so that each composite data set included the maximum temperature recorded at each pixel during each composite period. Time-integrated, or cumulative values of the LST deviation standardized with mean air temperatures had significantly high correlation coefficients with SM, AE/PE, and MD/PE, ranging from 0.65 to 0.89. The Standardized Thermal Index (STI) is proposed in this study to accomplish the objective. The STI, based on surface temperatures standardized with observed mean air temperatures, had significant temporal relationships with the hydroclimatological factors. STI classes in all the composite periods also had a strong correlation with NDVI declines during a drought episode. Results showed that, based on LST, air temperature observations, and water budget analysis, NDVI declines below normal could be predicted as early as 8 weeks in advance in this study area.

Comparison of the Korean and Chinese Speech Intelligibility with Increasing Sound Absorption in a Classroom (강의실의 실내흡음력 증가에 따른 한국어 및 중국어의 음성요해도 비교)

  • Ding, Wei;Park, Chan-Jae;Haan, Chan-Hoon
    • The Journal of the Acoustical Society of Korea
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    • v.31 no.3
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    • pp.129-141
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    • 2012
  • The present study aims to investigates the effects of the physical sound clarity (D50, STI) on the subjective speech intelligibility of the both Korean and Chinese languages which can be caused by increase of the sound absorption in classroom. In order to this, sound measurements were undertaken at a classroom with and without absorption materials. Also, speech intelligibility tests were conducted by Korean and Chinese students using their native languages. As the results, it was found that both sound clarity and speech intelligibility were improved with increasing sound absorption. Also, it was revealed that Chinese speech intelligibility was more improved than Korean with same impose of sound absorption. It was considered by the difference of phonetic characteristics of two languages. Analysing correlation of physical sound clarity and subjective speech intelligibility, it was shown that D50 is highly correlated with Korean (0.696) and Chinese (0.707) respectively. Also, STI was highly correlated with Korean (0.651) and Chinese (0.665). Thus, it can be concluded that D50 and STI have significant correlations with the speech intelligibility.