• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.1054-1056
• /
• 2002

High temperature Kermal diffusion from $POCl_3$ source usually used for conventional process through put of a cell manufacturing line and potentially reduce cell efficiency through bulk like time degradation. To fabricate high efficiency solar cells with minimal thermal processing, spin-on-doping(SOD) technique can be employed to emitter diffusion of a silicon solar cell. A technique is presented to emitter doping of a mono-crystalline solar cell using spin-on doping (SOD). Moreover it is shown that the sheet resistance variation with RTA temperature and time fer mono-crystalline and multi-crystalline silicon samples. This novel SOD technique was successfully used to produces 11.3% efficiency l04mm by 104mm size mono-crystalline silicon solar cells.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.335-336
• /
• 2009

저가격 고효율 실리콘 태양전지를 구현하기 위하여 핵심적으로 적용되는 공정인 SOD(Spin on Doping) 확산공정 최적화에 관하여 연구하였다. n-type 도핑 물질로는 인(P509)을 사용하였으며, Spinning 속도와 Spinning 시간을 각 3000 rpm, 30 초로 고정하고 급속 열처리로에서 확산 온도와 확산 시간을 $800\;^{\circ}C\;{\sim}\;950\;^{\circ}C$, 2 분에서 20 분까지 가변하며 확산공정을 실시하였다. 4-Point Probe 장비로 에미터 표면 저항을 측정한 결과 확산 온도 $850\;^{\circ}C$에서 5분간 열처리 하여 확산 공정을 하였을 때 저가의 고효율 실리콘 태양전지를 구현하는데 적용 하기위한 $30\;{\sim}\;50\;{\Omega}$-sq의 에미터 표면 저항을 만족 시키는 $36\;{\Omega}$-sq의 값을 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.317-319
• /
• 2004

이 논문에서는 태양전지 공정 중에서 중요시되는 에미터 형성에 대한 방법 중 하나인 SOD기술을 도입하였다. SOD(Spin-On Doping)은 저가형 고효율 태양전지를 개발하기 위하여 연구되고 있는 방법 중의 하나이다. 태양전지 제작을 위해 사용한 기판은 P형 다결정 Si 페이퍼를 사용하였고, SOD 기술을 적용하여 온도와 시간에 따른 도핑특성의 변화를 실험적으로 연구하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.3
• /
• pp.240-244
• /
• 2011

The high cost of crystalline silicon solar cells has been considered as one of the major obstacles to their terrestrial applications. Spin on doping (SOD) is presented as a useful process for the manufacturing of low cost solar cells. Phosphorus (P509) was used as an n-type emitters of solar cells. N-type emitters were formed on p-type EFG ribbon Si wafers by using a SOD at different spin speed (1,000~4,000 rpm), diffusion temperatures ($800^{\circ}C{\sim}950^{\circ}C$), and diffusion time (5~30 min) in $N_2+O_2$ atmosphere. With optimum condition, we were able to achieve cell efficiency of 14.1%.

• Current Photovoltaic Research
• /
• v.12 no.2
• /
• pp.31-36
• /
• 2024

Passivating contacts are a promising technology for achieving high efficiency Si solar cells by reducing direct metal/Si contact. Among them, a polysilicon (poly-Si) based passivating contact solar cells achieve high passivation quality through a tunnel oxide (SiO_x) and poly-Si. In poly-Si/SiO_x based solar cells, the passivation quality depends on the amount of dopant in-diffused into the bulk-Si. Therefore, our study fabricated cells by inserting silicon oxide (SiO₂) as a doping barrier before doping and analyzed the barrier effect of SiO₂. In the experiments, p⁺ poly-Si was formed using spin on dopant (SOD) method, and samples ware fabricated by controlling formation conditions such as existence of doping barrier and poly-Si thickness. Completed samples were measured using quasi steady state photoconductance (QSSPC). Based on these results, it was confirmed that possibility of achieving high V_oc by inserting a doping barrier even with thin poly-Si. In conclusion, an improvement in implied V_oc of up to approximately 20 mV was achieved compared to results with thicker poly-Si results.

• 한국신재생에너지학회:학술대회논문집
• /
• 2011.05a
• /
• pp.124.1-124.1
• /
• 2011

결정질 태양전지에서 도핑(Doping)은 반도체(Semiconductor)의 PN 접합(Junction)을 형성하는 중요한 역할을 한다. 도핑은 반도체에 불순물(Dopant)을 주입하는 공정으로 고온에서 진행되며 온도는 중요한 변수(Parameter)로 작용한다. 본 연구에서는 여러 가지 도핑 방법 중 SOD(Spin-On Dopant)를 이용하여 온도에 따른 도핑 결과와 특성을 분석 하였다. P-type 웨이퍼(Wafer)에 SOD를 이용하여 불순물을 증착 후 Hot-plate에서 15분간 Baking 하였다. Baking된 웨이퍼는 노(Furnace)에 넣고 $860^{\circ}C{\sim}880^{\circ}C$까지 $10^{\circ}C$씩 가변하였다. 각각의 조건에 대해 Lifetime과 Sheet Resistance을 측정하였고, 그 결과 $880^{\circ}C$에서의 Lifetime이 $23.58{\mu}s$로 $860^{\circ}C$에 비해 235.8% 증가하여 가장 우수 하였으며, Sheet Resistance 또한 $68{\Omega}$/sq로 $860^{\circ}C$에서 가장 우수하게 측정되었다. SOD의 속도 가변에 따른 특성 변화를 보기 위해 온도는 $880^{\circ}C$에 고정한 후 속도를 3000rpm~4500rpm까지 500rpm간격으로 1시간동안 실험한 결과 rpm 속도에 따른 lifetime 변화는 거의 없었으며, Sheet Resistance는 3000rpm에서 $63{\Omega}$/sq로 가장 우수 하였다. 본 연구를 통해 온도와 Spin rpm에 따른 특성을 확인한 결과 온도가 높을 때 Sheet Resistance가 가장 안정화 되며, lifetime이 더욱 우수한 것을 확인할 수 있었다.

• Transactions on Electrical and Electronic Materials
• /
• v.5 no.1
• /
• pp.7-10
• /
• 2004

A new method for fabrication of transistor like structure of the bifacial solar cell using spin-on doping and electroless plating has been proposed and the basic characteristics of the bifacial cell have been investigated. It is found that 9％ increase in short circuit current is achieved with bifacial connection than the unifacial connection. Some unwanted effect of the series resistance on collection efficiency under different mode of illumination has been pointed out. Loss mechanisms inherent in the transistor like bifacial structure have also been discussed.

• Transactions on Electrical and Electronic Materials
• /
• v.4 no.6
• /
• pp.1-4
• /
• 2003

Anti-reflection properties of post diffusion doped spin-on source (in-situ AR coating) have been investigated in some detail. A simple experiment for reflectivity study using oblique incidence of light and necessary modification of the theory of minimum reflectivity at oblique incidence has been established. The comparative study of the in-situ AR coating with available spin-on AR film on silicon Solar Cell Surface have been investigated.