Anti-Reflection Properties of In-Situ Doped Spin-On Film |
U. Gangopadhyay
(School of Electrical and Computer, Engineering, Sungkyunkwan University)
Kim, Kyung-Hae (School of Electrical and Computer, Engineering, Sungkyunkwan University) Park, J.H. (School of Electrical and Computer, Engineering, Sungkyunkwan University) S.K. Dhungel (School of Electrical and Computer, Engineering, Sungkyunkwan University) D. Mangalaraj (School of Electrical and Computer, Engineering, Sungkyunkwan University) J. Yi (School of Electrical and Computer, Engineering, Sungkyunkwan University) H. Saha (Department of Electronics and Tele-communication Engineering, Jadavpur University) Kim, D.W. (Samsung SDI Co. Ltd., Corporate R&D Center, Yongin City) |
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