• Title/Summary/Keyword: SI 방향

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A study on anisotropic etching property of single-crystal silicon using KOH solution (KOH 용액을 이용한 단결정 실리콘의 이방성 식각특성에 관한 연구)

  • 김환영;천인호;김창교;조남인
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.3
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    • pp.449-455
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    • 1997
  • The anisotropic etching behavior of single crystal silicon were studied in aqueous KOH solution. N-type (100) oriented single crystal silicon wafers were used for the study, and the $SiO_2$ layer, whose etching rate is known to be much slower than that of silicon in the KOH solution, was used as a mask for the silicon etching. The silicon etching rate and the etching properties are shown to be a function of etchant temperature uniformity, circulation speed, and circulation direction of the etchant as well as the etchant concentration and the temperature. The etching rate is increased as the temperature is increased from $10\mu \textrm{m}/hr$ to $250\mu \textrm{m}/hr$ in the range of $50^{\circ}C~105^{\circ}C$. Hillock density and height is observed to be correlated with the etchant concentration and the etch temperature. The variation of the hillock density was explained by the ratio between the etching rate of (100) orientation and that of (111) orientation.

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Effect of Glass Composition on the Properties of Glass-Infiltrated Alumina (II) : Effect of La2O3 (유리침투 알루미나 복합체의 물성에 미치는 유리조성의 영향 (II) : La2O3의 영향)

  • Lee, Jae-Hee;Kim, Cheol-Young
    • Journal of the Korean Ceramic Society
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    • v.41 no.12 s.271
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    • pp.939-945
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    • 2004
  • Glasses of $SiO_2-B_{2}O_3-Al_{2}O_3-CaO-La_{2}O_3$ with various amounts of $La_{2}O_3$ were infiltrated into a porous alumina to make an alumina-glass composite. The infiltration characterization and bending strength of the composite were examined in terms of glass composition. $La_{2}O_3$ in the glass decreased the high temperature viscosity and this enhanced the wetting behaviour of this glass to alumina, and made glass infiltration easier. The infiltrated glass dissolved the alumina skeleton, and $Al_{2}O_3$ component in the glass melt reprecipitated on the alumina. The grain growth occurred to a specific crystal direction. The glass containing $20mole\%$ of $La_{2}O_3$ was crystallized after infiltration, and this enhanced the bending strength of the composite.

A Study of Performance Characteristics for Electronic Personal Dosimeters in Photon and Electron Radiation Field (광자 및 베타 방사선에 대한 전자개인선량계의 성능특성연구)

  • Kim, Hyun-Ki;Kim, Bong-Hwan;Lee, Jai-Ki
    • Journal of Radiation Protection and Research
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    • v.22 no.2
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    • pp.85-95
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    • 1997
  • TLD and film badges have been traditionally used as formal dosimeters in personal monitoring and are still most widely used. Recently, electronic personal dosimeters based upon Si diode or miniature G-M tube were developed and are getting attractions due to their merits of active nature ; indication of dose rates and the commutative dose, and facilitation of record keeping and radiological control. Response characteristics of the electronic dosimeters including reproducibility, accuracy, linearity, energy and angular dependencies, detection threshold, and response time were examined for three commercial types ; EPD2, STEPHEN6000, and PD-3i. The results were compared with the relevant requirements of IEC standards and Ontario Hydro standards to conclude that their general performances were good. Some specific deficiencies, e.g. incapability of shallow dose measurement of STEPHEN6000, and PD-3i, however, should be corrected to be used as a formal dosimeter.

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An Information System Implementation Case Research on Korea Train eXpress (고속철도에 있어서의 정보시스템 구현 사례에 대한 연구)

  • Lee, Sung-Ho;Ahn, Joong-Ho
    • Information Systems Review
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    • v.7 no.2
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    • pp.1-21
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    • 2005
  • Integrated Railroad Information System(IRIS) Construction Project is one of the super projects in Korea required to invest over 100 billion won and 10,000 engaged manpower until Dec 30, 2004. Composition of this paper is as follows; firstly, examined individual contents and aspects of IRIS, and studied formality and contents that have been based to project methodology for successful propulsion of project in overall situation of SI project progress until present. Secondly, presented for construction background of IRIS as well as Project Management and Project Development Methodologies. Thirdly, described each characteristic and development substance for individual systems after present whole contents and system image of the system. Finally, presented successful propulsion result of this project and development directions. We presented development example laying stress on IRIS's Project contents and propulsion circumstances. Evaluation about operation results should be analyzed and studied in detail operating system from now on.

A Scientific Analysis on the Glass Beads Excavated from the Daho-ri site NO. 6, Changwoen (창원 다호리 유적 6호분 출토 유리구슬의 과학적 분석)

  • Yun, Eunyoung;Kang, Hyungtae
    • Conservation Science in Museum
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    • v.13
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    • pp.45-49
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    • 2012
  • A scientific analysis was carried out on the 14 pieces of glass beads excavated from the Daho-ri site NO. 6, Changweon. Most of the glass pieces were made of light blue transparent glass with round bubbles aligned in a regular direction. As a result of the SEM-EDS analysis, all the glass pieces turned out to be within the potash glass group (K2O-SiO2) and were identified to be the LCA (Low CaO, Low Al2O3) series glass, of which the concentration is 5% or below for CaO and Al2O3 respectively. In addition, it is presumed that plant materials were refined or a mineral (saltpetre, KNO3) was used as the raw materials for making potash and also that the ingredient acting as a colorants for light blue color was affected deeply by CuO.

Wet chemical etching of GaN (GaN의 습식 화학식각 특성)

  • 최용석;유순재;윤관기;이일형;이진구;임종수
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.249-254
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    • 1998
  • The etching experiments for n-GaN were done using the wet chemical, photo-enhanced-chemical and electro-chemical etching methods. The experimental results show that n-GaN is etched is diluted NaOH solution at room temperature and the removed thickness of n-GaN is linearly increased with etching times. The etching rate of the photo-enhanced-chemical and electro-chemical etching methods are several times higher than that of the wet chemical method. The maximum etching rate of n-GaN with $n{\fallingdotseq}1{\times}10^{19}cm^{-3}$ was 164 $\AA$/min under the experimental condition of the Photo-enhanced-chemical etching. The etching rates of n-GaN are very much dependant on the electron concentrations of the samples. The pattern is $100{\mu}m{\times}100{\mu}m$ rectangulars covered with $SiO_2$film. It is shown that the etched side-wall charactistics of the pattern is vertical without dependance of the n-GaN orientations, and the smoothness of etched n-GaN surface is fairly flat.

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The Study on Weathering Hollows Developed on the Coast of Dapyeong-ri, Sacheon-si (사천시 다평리 해안에서 발달한 풍화혈에 관한 연구)

  • Tak, Hanmyeong
    • Journal of the Korean Geographical Society
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    • v.50 no.5
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    • pp.459-472
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    • 2015
  • Weathering hollows which develop on various rocks are the terrain whose lithological characteristics and formation of the bed rock is under active discussion. The shore in Dapyeong-ri, Sacheon-si has alternation of strata of pelite and sandstone, and the weathering hollows develop on the shore platform and the sea cliff where sandstone is exposed. To analyze the development characteristics of weathering hollows by development of joints, interpenetration of veins and physical and chemical features of the stone, the study conducted a topographic investigation, XRD analysis and an observation using a polarizing microscope. As the result of the investigation and analysis, tafoni and gnamma are spread in the same area and new tafoni is being formed as the existing weathering hollows are destroyed by the expansion and growth of the joint. The vein, which was found to be a quartz vein, may accelerate the development of weathering hollows combining with the joint but may also hamper their growth if the veins are penetrating perpendicularly. It is generally known that weathering hollows develop regardless of the type of rocks, however, the analysis on the lithological features show that the development is limited on the fractured and broken rocks.

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Acrylamide Polymerization on ceramic Powders(I) : The Process Control of Si2N4 Gelcasting by Polymerization of Acrylamicde (세라믹분체 표면에서 아크릴아마이드 중합(제1보) : 아마이드 고분자중합에 의한 질화규소 겔캐스팅 공정제어)

  • 류병환;김은영;이재도
    • Journal of the Korean Ceramic Society
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    • v.36 no.2
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    • pp.178-185
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    • 1999
  • For the process control of silicon nitride gelcasting, the composition effect of acryamide system on the viscosity of slip and mechanical property of gelcast green body were investigated. The slip was prepared by ball milling of silicon nitride suspension prepared with acrylamide monomer and polyelectrolyte dispersant after premixing them by attritor. The slip mixed with initiator was vacuum deaired and cast into molds, and then polymerized. The consolidated green body was obtained by drying the gelated slip. The viscosity measument and the diametral compression test was done to evaluate the rheological behaviro of slip and mechanical property of gelcast body, respectively. Experimental results showed that the high solid loading of silicon nitride slip was obtained up to 46 vol% with a low viscosity. The mechanical property of gelcast body mainly increased with increasing the concentration of monomer. The gelcast body was machinable above the ∼3 MPa of tensile strength. The relative density of pressured-sintered body was 98.5% at 1760$^{\circ}C$, 3 h.

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Effects of process temperature on the microstructure and magnetic properties of electrodeposited Co-Pt alloy thin films (전해도금 공정온도가 Co-Pt 합금 박막의 미세구조 및 자기적 특성에 미치는 영향)

  • Lee, C.H.;Jeong, G.H.;Park, J.K.;Lee, K.K.;Suh, S.J.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.18 no.2
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    • pp.87-90
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    • 2008
  • Co-Pt alloy thin films were galvanostatically electrodeposited on Ru (30 nm)/Ta (5 nm)/Si (100) substrates from a amino-citrate based electrolyte. We used Ru(0002)-oriented buffer layers to control the crystallinity and orientation of the Co-Pt alloy thin films. The effect of solution temperature on the microstructure and magnetic properties of the Co-Pt alloy thin film was investigated. The samples were characterized by EDS, FESEM, XRD diffractometer using Cu $K{\alpha}$ radiation. The magnetic properties of these films were analyzed by a VSM and torque magnetometer. The Co-Pt alloy thin films were exhibited very high out-of-plane coercivity and squareness of the multilayer were 6527 Oe and 0.93, respectively, without heat treatment.

Design of $Ti:LiNbO_3$ Three-Waveguide Optical Switch with Outer-Waveguide Fed (바깥도파로 입사된 $Ti:LiNbO_3$ 세 도파로 광스위치의 설계 및 제작)

  • Kim, Young-Moon;Seo, Jung-Hoon;Huh, Chang-Yul;Kim, Chang-Min
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.6
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    • pp.61-70
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    • 1999
  • An optical switch composed of three-identical, equally-spaced $Ti:LinbO_3$ waveguides and overlaid Al electrodes of CPW structure was designed and fabricated. Patterned Ti was diffused into z-cut $LinbO_3$ substrates at $1025^{\circ}C$ for 6 hours to make a three-waveguide directional coupler. $SiO_2$ buffer layer of $1.2{\mu}m$ was grown by the PECVD to reduce the propagation loss of TM mode, and Al electrodes were built on the layer for switching the guided beam. For an incident beam of ${\lambda}=1.3{\mu}m$, almost perfect optical coupling between two outer waveguides was observed. When an electric field was applied to detune the three waveguides anti-symmetrically, the optical switching phenomenon was successfully confirmed.

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