• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2005.05a
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• pp.342-345
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• 2005

This paper describes the electron energy distribution function characteristics in $SF_6-He$ gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation(MCS) and Boltzmann equation(BE) method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by time of flight(TOF) method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The results of Boltzmann equation and Monte carlo simulation have been compared with experimental data by Pollock, Ohmori, cottrell and Walker.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2007.05a
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• pp.421-423
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• 2007

The paper used to the Neral Netwok for a forecasting conservation system A neural network is a powerful data modeling tool that is able to capture and represent complex input/output relationships. The motivation for the development of neural network technology stemmed from the desire to develop an artificial system that could perform "intelligent" tasks similar to those performed by the human brain. The true power and advantage of neural network lies in their ability to represent both linear and non-linear relationships and in their ability to learn these relationships directly from the data being modeled. Form results of this study, the Neral Netwok is will play an important role for insulation diagnosis system of real site GIS and power equipment using $SF_6$ gas.

• Proceedings of the KIEE Conference
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• 1988.11a
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• pp.249-251
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• 1988

In this paper, the negative ion mobility of $SF_6$ is determined using as a negative ion detector the burst pulse which is triggered in a positive point-plane gap by electrons detached from negative ions near the anode point. The result obtained for the negative ion mobility for zero field at atmospheric pressure is $0.57cm^2v^{-1}s^{-1}$.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.355-356
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• 2008

현재 초고압 송변전기기에 적용되고 있는 $SF_6$ 가스는 절연 및 소호성능이 우수하며 회복특성이 뛰어나기 때문에 초고압 기기의 절연매체로서 일반적으로 사용하고 있다. 그렇지만 $SF_6$ 가스의 온난화 계수는 $CO_2$의 약 23,900배로 매우 높고, 대기 중으로 방출될 경우에는 온실효과 가스로 문제가 되고 있다. 따라서, $SF_6$ 가스의 대기 중에의 방출을 최대로 피하기 위해 단계별 연구가 필요하다. 본 논문에서는 초고압 전력기기의 DS/ES부에 Dry Air Gas와 절연코팅소재를 적용하여 절연특성에 대한 연구를 하였다.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.39 no.9
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• pp.956-963
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• 1990

The general shapes of prebreakdown pulses in a discharge gap were calculated and the current pulses due to avalanche were detected in SF6 by changing the polarity of the protrusion placed on an electrode at pressures up to about 400 Kpa. The mathematical model of prebreakdown pulse development with a negative protrusion shows agreement with the observed pulses. No evidence of intense bursts of field-emitted electrons was observed. Breakdown probably results from a single avalanche developing to a critical size. However the calculated shape of prebreakdown current pulse does not agree with the observed pulses with a positive protrusion. The breakdown is preceded by multiple avalanche development at pressures less than about 200 Kpa. This observation has been interpreted as due to the formation of negative ions following photoionization in the gas which drift into the critical volume near a positive protrusion.

• Proceedings of the KIEE Conference
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• 2000.07b
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• pp.816-818
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• 2000

본 논문에서는 $SF_6$ 차단기 내의 대전류 아크에 대한 수치적인 해석을 모의하는 도구를 제시한다. 대전류의 차단을 위해서 해석을 통해 열적 파괴를 예측하는 것이 필수적이다. 본 논문에서 사용한 방법은 FVFLIC(finite volume fluid in cells)이며 지배방정식은 압축성 오일러 방정식으로 아크와 유동의 상호 작용을 해석한다. 아크는 기본적으로 에너지 보존식에서 열소스항으로 나타나며 주울열과 복사항으로 표현된다. 주울열은 플라즈마 영역내의 전계해석을 통해 계산되며 복사항은 방출과 흡수항의 합으로 나타내어지고 이것은 국소적인 온도와 압력의 함수이다. 본 논문에서는 수정된 방출과 흡수 모델로 복사 열전달을 계산하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.413-417
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• 1997

In this study, chlorine(Cl)-based gas chemistry is generally used to etching for AlCu films metallization. The corrosion phenomena of AlCu films were examined with XPS (X-ray photoelectron spectroscopy), SEM (Scanning electron microscopy), and TEM (Transmission electron microscopy). SF$\sub$6/ plasma treatment subsequent to the etch process prevents the corrosion effectively in the pressure of 300 mTorr. It is found that the chlorine atoms on the etched surface are not substituted for fluorine atoms during SF$\sub$6/ treatment, but a passivation layer on the surface by fluorine-related compounds would be formed. The passivation layer prevents the moisture penetration on the SF$\sub$6/ treated surface and suppresses the corrosion successfully.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1436-1437
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• 2007

This paper presents the experimental results of the dielectric characteristics with temperature changes under highly non-uniform electric field in $SF_6$ gas. The impulse preliminary breakdown developments were investigated by the measurement of predischarge current and breakdown voltage. As a result, the first stremer corona is initiated at the tip of needle electrode, and bridges the test gap. Also the first stremer corona onset and breakdown voltages the negative polarity was much higher than that in the positive polarity in same temperature. In addition, the varition of temperature have a little effect on the positive polarity. On the other hand, in some cases negative polarity corona onset and breakdown voltages increased with increasing a high temperature.

• Electrical & Electronic Materials
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• v.5 no.1
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• pp.99-110
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• 1992

본 논문은 고정된 바늘모양의 공기물에 의하여 형성된 불평등전계중에서 뇌임펄스전압에 대한 SF$_{6}$가스의 절연특성과 전구방전진전에 관한 것이다. 하전입자의 이동에 의하여 외부회로에 흐르는 전도전류의 측정방법에 대하여 기술하고 0.05~0.3[MPa]의 압력범위에서 섬락전압-압력특성을 측정하였으며 분류기와 광전자증배관을 사용하여 전구방전의 순시적 진전과정을 관측하였다. 전구방전은 돌기물의 선단에서 발생한 초기스트리머에 의하여 발단되며 정극성의 경우 섬락전압은 국부고전계에 매우 민감하며 리이더메카니즘으로 진전됨이 확인되었다. 전구방전현상의 극성의존성은 공간전하의 영향이 지배적이었다. 더불어 본 연구에서 제안된 전구전류의 측정기법은 불평등전계중에서의 전자사태전류, 코로나방전과 공극내에서의 부분방전의 측정에 매우 유용하게 적용될 것이다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.6-12
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• 2000

In this study, molybdenum thin films were etched with Cl\ulcorner/(Cl\ulcorner+SF\ulcorner) gas mixing ratio in an magneti-cally enhanced reactive ion etching(MERIE) by the etching parameters such as rf power of 250 watts, chamber pressure of 100 mTorr and B-field of 30 gauss. The etch rate was 150nm/min under Cl\ulcorner/(Cl\ulcorner+SF\ulcorner) gas mixing ratio of 0.25. At this time, the selectivity of Mo to SiO\ulcorner, photoresist were respectively 0.94, 0.05. The surface reaction of the etched Mo thin films was investigated with X-ray photoelectron spectroscopy(XPS). It was analyzed that Mo peaks was mainly observed in Mo-O bonds formed MoO\ulcorner compounds and F was detected in Mo-F and O-F bonds. Cl peaks were detected by the peak of Cl 2p\ulcorner in Cl-Mo bonds of MoCl\ulcorner or MoO\ulcornerCl\ulcorner formulas. Almost all of both Cl and S atoms had been com-bined with Mo, respectively.