• 한국전기전자재료학회논문지
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• 제13권7호
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• pp.563-567
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• 2000

We presented the etch results of indium-tin oxide thin films by using SF$_{6}$/O$_2$gas electron cyclotron resonance plasma and conducted X-ray phtoelectron spectroscopy and quadrupole mass spectrometer analyses for the etch characteristics. The etch rate of the films was greatly dependent on that of oxygen which was the major constituent element of the films. The oxygen was removed by the forms like $O_2$or SOF$_2$. We examined the ratio of atomic content of O and In and the change of this ratio was related to the removal rate of InF$_{x}$ and the S-metal bonding.ing.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.284-286
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• 1994

This paper describes the dielectric characteristics of $SF_6$ gas in non-uniform electric filed under lightning under lightning impulse and oscillating impulse voltages. The breakdown voltage-time characteristics and the breakdown voltage-pressure characteristics are measured over a pressure range extending from 0.1 to 0.5 [MPa] fur the coaxial electrode with a needle protrusion. The curvature radius of needle protrusion is 0.3[mm]. Also, the growth of the predischarge is simultaneously observed. As a result the polarity effect is pronounced, and the breakdowns voltage under the oscillating impulse voltage are higher than those under the lightning impulse voltage. It is found that the breakdown mechanism md predischarge phenomena ate closely related with the polarity and waveforms of the testing voltage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1455-1456
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• 2007

This paper presents the experimental results on impulse breakdown characteristics under a highly non-uniform electric field in $SF_{6}/N_{2}$ gas mixtures according to a change in temperature. Test temperature ranges from $-25^{\circ}C$ to $25^{\circ}C$. The impulse predischarge breakdown developments are investigated by the measurements of current pulse and discharge luminous events. As a result, the predischarge development mechanisms for both positive and negative polarities are same. When increasing the temperature, breakdown voltage due to lightning impulse voltage is increased in negative polarity. On the other hand, when increasing the temperature, breakdown voltage due to lightning impulse voltage is not changed in positive polarity.

• 조명전기설비학회논문지
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• 제23권10호
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• pp.121-127
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• 2009

본 논문은 Knife 전극을 사용했을 때 친환경 절연가스인 $N_2:O_2$(100[%]:0[%]) 및 $N_2:O_2$(80[%]:20[%], I-Air), $N_2:O_2$(60[%]:40[%])의 혼합가스 및 $SF_s$ 중 Teflon수지에서의 연면절연특성을 구명하여 절연설계 시에 응용 가능한 기초자료를 제공하고자 한다. 사용한 전극은 Knife형 전극으로써, 거리 및 압력을 조정하며 절연가스의 종류에 따른 연면절연파괴전압, 연면방전 전계강도를 비교분석하였다. 혼합가스 중에 평균 연면절연파괴전압은 I-Air가 가장 높게 나타났다. 또한 $SF_6$ 의 연면방전전계강도는 I-Air의 약 2배 정도로 나타났다.

• 전기학회논문지
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• 제57권10호
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• pp.1731-1737
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• 2008

This paper present the fundamental insulation characteristics of Dry Air gas and insulation coating in high voltage power apparatus. It is known that the dielectric strength. of Dry Air is approximately one-third that of SF6 gas. we attempt that the insulation coating and dry air gas have replaced the SF6 gas as insulation of the switchgear. We proposed the dry air insulated switchgear(DAIS) for High Voltage apparatus. To acquire technology of insulation characteristic improvement made standards for complex insulation structure and conducted simulations and experiments

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권12호
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• pp.532-539
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• 2005

The demand of Gas Insulated Transformer(GIT) using $SF_6$ gas as insulating and cooling medium is being increased dramatically in the underground substation of urban area because it has the advantages of non-flammable and non-explosive, etc. This paper describes the structural features and advantages of the gas insulated transformer compare to an oil immersed transformer, and presents a brief overview of the consideration and technology which apply to $SF_6$ gas insulated transformer.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제55권10호
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• pp.528-533
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• 2006

To analyze the small current interruption performance for the gas circuit breakers, the gas density and electric field intensity should be calculated. In this paper, the FVFLIC method is used for the gas flow analysis and the FEM for the electric field analysis. Then, the dielectric withstanding voltage is evaluated by the empirical formulation or Streamer theory. By comparing the calculated dielectric strength with the test result, it is found that both methods show good prediction capability for the small current interruption performance. Especially, when both methods predict the same interrupting performance, the prediction is in accordance with the experimental result.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1548-1549
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• 2011

High voltage cryogenic insulation issues need to be addressed in order to promote the commercialization of high temperature superconducting (HTS) equipment. As a fundamental step in the development of the optimum bushings for HTS devices, the breakdown characteristics of liquid nitrogen mixed with liquefied insulating gases such as $N_2$, $SF_6$, and $CF_4$ have been investigated. In order to investigate the possibility of substituting $CF_4$ gas for $SF_6$ gas for the bushings of HTS electrical equipment, AC withstanding voltage tests have been performed. In this paper, finding the maximum electric field $E_{max}$ using utilization factor ${\eta}$. This result is applicable to developing the real scale HTS equipment of the design parameters.

• 전자공학회논문지D
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• 제34D권3호
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• pp.1-8
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• 1997

The surface properties after plasma etching of TiW alloy using the chemistries of BCl$_{3}$ and SF$_{6}$ gases with varying mixing ratio have been investigated using XPS(X-ray photoelectron spectrocopy). The elements existed on the etched sampled have been extracted with BCL$_{3}$/SF$_{6}$ ratio and their chemical binding states have also been analysed. It was confirmed that the thickness of native oxide formed on the TiW films is thinner than 10nm by using Ar sputtering. At the same time, the roughness of etched surface has been esamnied using AFM (atomic force microscopy). on the basis of the basis of this results, the relations between the caanges of oxygen contents detected by XPS and the rouhness of etched surface have been discussed. And the etch rate and etched profile of Tiw films have been examined and the changes of the etch rate and etched prfile have been discussed with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound with XPS results. From XPS results, the role of passivation layer consisted of Ti-S compound has been proposed. Ti-S compound seems to make a role of passivation layer that surpresses Ti-O formation.ion.

• 전기산업
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• 제2권4호
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• pp.18-23
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• 1991