• Journal of Korean Society of Environmental Engineers
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• v.35 no.4
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• pp.240-246
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• 2013

$SF_6$ is the most important greenhouse gas with the highest GWP (global warming potential). The $SF_6$ decomposition study was performed with silicon carbide with aluminium oxide by microwave irradiation. DRE (Decomposition and Removal Efficiencie) of $SF_6$ were evaluated by GC-TCD unit using 3,000 ppm $SF_6$ gas. DRE of $SF_6$ was increased by $Al_2O_3$ contents to 10~30 wt%, otherwise $Al_2O_3$ content of 40~50 wt% was decreased. DRE of $SF_6$ up to 99.99% have been achieved in SiC-$Al_2O_3$ (20 wt%) and SiC-$Al_2O_3$ (30 wt%) above $900^{\circ}C$. Also, the DRE of SiC-$Al_2O_3$ (30 wt%) at $700^{\circ}C$ showed 96.72%. In addition to consideration microwave input energy and $Al_2O_3$ content, SiC-$Al_2O_3$ (30 wt%) can be suggested the best material to control $SF_6$. The results of this study suggest it is important to control content of $Al_2O_3$ in SiC for decomposition of $SF_6$ with microwave energy.

• Clean Technology
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• v.19 no.2
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• pp.113-120
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• 2013

The treatment of chemically stable perflourocompounds (PFCs) requires a large amount of energy. An energy efficient arc plasma system has been developed to overcome such disadvantage. $CF_4$, $SF_6$ and $NF_3$ were injected into the plasma torch directly, and net plasma power was estimated from the measurement of thermal efficiency of the system. Effects of net plasma power, waste gas flow rate and additive gases on the destruction and removal efficiency (DRE) of PFCs were examined. The calculation of thermodynamic equilibrium composition was also conducted to compare with experimental results. The average thermal efficiency was ranged from 60 to 66% with increasing waste gas flow rate, while DRE of PFCs was decreased with increasing gas flow rate. On the other hand, DRE of each PFCs was increased with the increasing input power. Maximum DREs of $CF_4$, $SF_6$ and $NF_3$ were 4%, 15% and 90%, respectively, without reaction gas at the fixed input power and waste gas flow rate of 3 kW and 70 L/min. A rapid increase of DRE was found using hydrogen or oxygen additional gases. Hydrogen was more effective than oxygen to decompose PFCs and to control by-products. The major by-product in the arc plasma process with hydrogen was hydrofluoric acid that is easy to be removed by a wet scrubber. DREs of $CF_4$, $SF_6$ and $NF_3$ were 25%, 39% and 99%, respectively, using hydrogen additional gas at the waste gas flow rate of 100 L/min and the input power of 3 kW.

• Journal of Environmental Science International
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• v.22 no.8
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• pp.1019-1027
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• 2013

Sulfur hexa-fluoride has been used as a etching gas in semiconductor industry. From the globally environmental issues, it is urgent to control the emissions of this significant greenhouse gas. The main objective of this experimental investigation was to find the effective catalyst for $SF_6$ decomposition. The precursor catalyst of hexa-aluminate was prepared to investigate the catalytic activity and stability. The precursor catalyst of hexa-aluminate was modified with Ni to enhance the catalytic activities and stability. The catalytic activity for $SF_6$ decomposition increased by the addition of Ni and maximized at 6wt% addition of Ni. The addition of 6wt% Ni in precursor catalyst of hexa-aluminate improved the resistant to the HF and reduced the crystallization and phase transition of catalyst.

• Journal of the Korean Ceramic Society
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• v.40 no.9
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• pp.886-890
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• 2003

The etching characteristics of a LiNbO$_3$ single crystal have been investigated using helicon wave plasma source with bias power and the mixture of CF$_4$, HBr, SF$_{6}$ gas parameters. The etching rate of LiNbO$_3$ with etching parameters was evaluated by surface profiler. The etching surface was evaluated by Atomic Force Microscopy (AFM). The surface morphology of the etched LiNbO$_3$ changed with bias power and the mixture of CF$_4$/Ar/Cl$_2$, HBr/Ar/Cl$_2$, and SF$_{6}$/Ar/Cl$_2$ parameters. Optimum etching conditions, considering both the surface flatness and etch rate were determined.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.113-114
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• 2008

The purpose of this paper is to analyze AC Breakdown of solid/air composite insulation depending on the thickness and the pressure of dry air for eco-friendly insulation. SF6 gas has been widely used in electric equipment as gas insulation because of high dielectric strength and arc extinguishing performance. However, because SF6 gas is one of the green house effect gases, alternative insulation such as SF6 mixture, extremely low temperature gas, vacuum, liquid and solid insulating are being investigated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.306-309
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• 1995

This paper describes the dielectric characteristics of $SF_{6}$ gas in a non-uniform electric field under overvoltages. The breakdown voltage-time characteristics and the breakdown voltage-gas pressure characteristics are measured within a gas pressure range extending from 0.1 to 0.5 [Mpa] for the plane electrode system with a needle-shaped protrusion. The curvature radius of the needle protrusion is 0.5[mm]. Also, the growth process of the predischarge are simultaneously observed. As a result, it is found that the breakdown mechanism and predischarge phenomena are closely associated with the polarity and waveforms of the testing voltage.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.289-290
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• 2008

The purpose of this paper is to analyze AC Breakdown of solid/air composite insulation depending on the thickness and the pressure of dry air for eco-friendly insulation. SF6 gas has been widely used in electric equipment as gas insulation because of high dielectric strength and arc extinguishing performance. However, because SF6 gas is one of the green house effect gases, alternative insulation such as SF6 mixture, extremely low temperature gas, vacuum, liquid and solid insulating are being investigated.

• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.601-604
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• 1993

The effect of an insulator inserted along the axis of a red-to-plane gap on an ion flow field in $SF_6$ gas is investigated experimentally in the pressure region where a proceeding corona discharge exists. Without the insulator, the calculated electric field on the plane electrode agrees fairly well with the measured one. With the insulator, the ion flow field characteirstics may be attributed to the change in the electric field distribution by the accumulated charge, the increase in the ratio of the dielectric strength in gas gap to that along the insulator surface with the gas pressure, and the thermal diffusion of ions near the insulator.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1574-1576
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• 1994

$SF_6$ gas has become an important insulation medium in modern electric power apparatus, because of its high insulation withstand levels and good arc quenching capability. For the application of $SF_6$ gas in GIS the estimation of insulation properties is a fundamental point. Moreover the reduction of withstand levels in case of inhomogeneous fields caused by particles or fixed protrusions is of special interest. It is known that the presence of free conducting particles in GIS can significantly lower the insulating level of $SF_6$ gas at elevated pressure and also it has been recently shown that dielectric strength is greatly reduced by fast transients such as disconnector surges where metallic particles are involved. In this paper, we have disigned the particle test chamber rated 362kV for the purpose of investigating the discharge characteristics in SF6 gas where inhomogenius fields are caused by metallic particles.

• Proceedings of the KIEE Conference
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• 2003.07e
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• pp.75-78
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• 2003

Energy distribution function for electrons in $SF_6$-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range $30\sim300$[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6$-Ar mixtures were measured by time-of-flight(TOF) method. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values. The transport coefficients for electrons in (0.2[%])$SF_6$-Ar and (0.5[%]$SF_6$ - Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.