• Journal of Korean Society for Atmospheric Environment
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• v.27 no.1
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• pp.1-15
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• 2011

Korea Global Atmosphere Watch Center (KGAWC), which is located in Anmyeondo and, belongs to the Korea Meteorological Administration (KMA), measures sulfur hexafluoride ($SF_6$) in every hour since 2007. In this study, $SF_6$ observed in 2007 are discussed. A gas chromatograph-electron capture detector (GC-ECD) with pre-cooled device is applied during the observation, and produced data are qualified by means of periodic calibration with $SF_6$ standard gas made by Korea Research Institute of Standard and Science (KRISS). $SF_6$ has been greatly paid attention since Kyoto protocol because of its high global warming potential(GWP) with 22,200 times of $CO_2$ in the period of 100 years. It is a man-made compound and has been usually used for gas insulation since 1970s and for etching process in the information technology-based industry since 1990. Average mixing ratio of $SF_6$ in 2007 was 6.65 pmol/mol at Anmyeondo. According to the GAW report published in 2008, average mixing ratio of $SF_6$ in the atmosphere is continuously growing. At present, the average mixing ratio of $SF_6$ in the atmosphere is known to be approximately 6.25 pmol/mol at global observatory. $SF_6$ value in Anmyeondo shows 0.40 pmol/mol greater than that of the Mauna Loa observatory in 2007.

• Korean Journal of Materials Research
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• v.15 no.3
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• pp.161-165
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• 2005

We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

• Korean Journal of Materials Research
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• v.10 no.6
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• pp.450-455
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• 2000

For further scaling down of the silicon devices, the application of low dielectric constant materials instead of silicon oxide has been considered to reduce power consumption, crosstalk, and interconnection delay. In this paper, the effect of $O_2/SF_6$ plasma chemistry on the etching characteristics of polyimide-one of the promising low-k interlayer dielectrics-has been studied. The etch rate of polyimide decreases with the addition of $SF_6$ gas due to formation of nonvolatile fluorine compounds inhibiting reaction between oxygen and hydrocarbon polymer, while applying substrate bias enhances etching process through physical attack. However, addition of small amount of $SF_6$ is desirable for etching topography. $SiO_2$ hard mask for polyimide etching is effective under $O_2$plasma etching(selectivity~30), while $O_2/SF_6$ chemistry degrades etching selectivity down to 4. Based on the above results, $1-2\mu\textrm{m}$ L&S PI2610 patterns were successfully etched.

• Progress in Superconductivity and Cryogenics
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• v.13 no.1
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• pp.27-30
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• 2011

A sub-cooled liquid nitrogen cooling system is known as a most promising method to develop large scale superconducting apparatuses such as superconducting fault current limiters and superconducting cables [1]. Gaseous helium (GHe), gaseous nitrogen ($GN_2$) and sulfur hexafluoride ($SF_6$) are commonly used for designing an high voltage applied superconducting device as an injection gaseous medium [2, 3]. In this paper, the analysis on the dielectric characteristics of GHe, $GN_2$ and $SF_6$ are conducted by designing and manufacturing sphere-to-plane electrode systems. The AC withstand voltage experiments on the various gaseous insulation media are carried out and the results are analyzed by using finite element method (FEM) considering field utilization factors (${\xi}$). It is found that the electric field intensity at sparkover ($E_{MAX}$) of insulation media exponentially decreases according to ${\xi}$ increases. Also, the empirical expressions of the functional relations between $E_{MAX}$ and ${\xi}$ of insulation media are deduced by dielectric experiments and computational analyses. It is expected that the electrical insulation design of applied superconducting devices could be performed by using the deduced empirical formulae without dielectric experiments.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.50 no.7
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• pp.331-337
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• 2001

With the increasing reliability of analysis schemes and the dramatically increased calculating speed, the computer simulation has become and indispensable process to predict the interruption capacity of circuit breakers. Generally, circuit breakers have to possess both the small current and large current interruption abilities and the circuit breaker designers need to evaluate its capacities to save the time and the expense. The analysis of small current and the large current interruption performances have been considered separately because the phenomena occurring in a interrupter are quite different. To analyze the dielectric recovery after large current interruption many physical phenomena such as heat transfer, convection and arc radiation, the nozzle ablation, the ionization of high temperature SF(sub)6 gas, the electric and themagnetic forces and so forth mush be considered. However, in the analysis of small current interruption performance only the cold gas flow analysis needs to be carried out because the capacitive current is to small that the influence from the current can be neglected. In this paper, an empirical equation which is obtained from a series of tests to estimate the dielectric recovery strength has been applied to a real circuit breaker. The results of analysis have been compared with the test results and the reliability has been investigated.

• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.374-380
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• 2011

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and $SF_6$ as an additive gas under thermal chemical vapor deposition system. The characteristics (formation density and morphology) of as-grown carbon coils according to the injection stage of $SF_6$ gas incorporation were investigated. A continuous injecting of $SF_6$ gas flow could give rise to many types of carbon coils-related geometries, namely linear tub, micro-sized coil, nano-sized coil, and wave-like nano-sized coil. However, the limitation of the geometry as the nano-sized geometries of carbon coils could be achieved by the incorporation of $SF_6$ in a short time (1 min) during the initial deposition stage. A delayed injection of a short time $SF_6$ gas flow can deteriorate the limitation of the geometries. It confirms that the injection time and its starting point of $SF_6$ gas flow would be very important to determine the geometries of carbon coils.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.6
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• pp.379-383
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• 2015

Some insulating materials are organized and analyzed with variables to obtain the optimized profile of encapsulated three phase of epoxy barrier which is applied to gas compartment and supporting conductors for high voltage GIS (gas insulated switchgear). The high voltage GIS is used in electrical power system and operating reliability. In this paper, optimization possibility of barrier shape including both electrical insulation performance and mechanical strength, premised on that condition minimizing volume and light weight should be kept for high voltage GIS, could be achieved by analysis simulation. As a result, filling material which is lower permittivity such as $SiO_2$ instead of $Al_2O_3$ properly to the epoxy material, can be improved to increase the electrical insulation performance and mechanical strength for an optimized profile barrier of a high voltage GIS.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.6
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• pp.49-57
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• 2015

This paper presents the discharge characteristics and economic feasibility of a Dry $Air/O_2$ and a $N_2/O_2$ mixture gas in order to review $SF_6$ alternative. From AC discharge experiment in an quasi-uniform field, it was found that the optimal $N_2/O_2$ mixing ratio which breakdown voltage and surface flashover voltage were the highest was 70/30 and that the pressure dependence on the breakdown voltage was higher than that of the surface flashover voltage in the Dry $Air/O_2$ and the $N_2/O_2$ mixture gas. The mixing ratio (70/30) and the tendency of the pressure dependence were described in detail based on physical factors (impact ionization coefficient, electron attachment coefficient, secondary electron emission coefficient) involved in discharge mechanism and a electron source, respectively. In addition, the performance insulation and the economic feasibility of the Dry $Air/O_2$ and the $N_2/O_2$ mixture gas were discussed so that Dry $Air/O_2$ mixture gaswas more suitable than $N_2/O_2$ mixture gas to the $SF_6$ alternative.

• Journal of Electrical Engineering and Technology
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• v.10 no.4
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• pp.1734-1737
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• 2015

Insulating characteristics of Cl₂-He mixture gases in gas discharges were analysed to evaluate ability of these gases for using in medium voltage and many industries. These are electron transport coefficients, which are the electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient, in Cl₂-He mixtures. A two-term approximation of the Boltzmann equation was used to calculate the electron transport coefficients for the first time over a wide range of E/N (ratio of the electric field E to the neutral number density N). The limiting field strength values of E/N, (E/N)_lim, for these binary gas mixtures were also derived and compared with those of the pure SF₆ gas.

• KEPCO Journal on Electric Power and Energy
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• v.6 no.4
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• pp.447-454
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• 2020

Since SF₆ gas was discovered in the early 1900s, it has been widely used as an insulation material for electrical equipment. While various indicators have been developed to diagnose oil-immersed transformers, there are still insufficient indicators for the diagnosis of gas-insulated transformers. When necessary, chemical diagnostic methods can be used for gas-insulated transformers. However, the field suitability and accuracy of those methods for transformer diagnosis have not been verified. In addition, since various types of decomposition gases are generated therein, it is also necessary to establish appropriate analysis methods to cover the variety of gases. In this study, a gas-insulated transformer was diagnosed through the analysis of decomposition gases. Reliability assessments of both simple analysis methods suitable for on-site tests and precise analysis methods for laboratory level tests were performed. Using these methods, a gas analysis was performed for the internal decomposition gases of a 154 kV transformer in operation. In addition, simulated discharge and thermal fault experiments were demonstrated. Each major decomposition gas generation characteristics was identified. The results showed that an approximate diagnosis of the inside of a gas-insulated transformer is possible by analyzing SO₂, SOF₂, and CO using simple analysis methods on-site. In addition, since there are differences in the types of decomposition gas generation patterns with various solid materials of the internal transformer, a detailed examination should be performed by using precise analysis methods in the laboratory.