• 제목/요약/키워드: SEM scan

검색결과 85건 처리시간 0.027초

미터 소급성을 갖는 원자간력 현미경을 이용한 1차원 격자 피치 측정과 불확도 평가 (Pitch Measurement of One-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation)

  • 김종안;김재완;박병천;엄태봉;강주식
    • 한국정밀공학회지
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    • 제22권4호
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    • pp.84-91
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    • 2005
  • We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

Features and Properties of $YBa_2$$Cu_3$$O_{7-x}$ Films Grown on SrTi$O_3$ by High Frequency PLD

  • Shi, D.Q.;Ko, R.K.;Song, K.J.;Chung, J.K.;Choi, S.J.;Park, Y.M.;Shin, K.C.;Yoo, S.I.;Park, C.
    • Progress in Superconductivity
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    • 제5권1호
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    • pp.75-79
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    • 2003
  • YBCO films were deposited with various thicknesses from 100nm to 1.6$\mu\textrm{m}$ on single crystal $SrTiO_3$ substrates by pulsed laser deposition (PLD). The effects of different deposition conditions, especially different deposition rates by means of changing the pulsed laser frequency up to 200Hz, on the J$_{c}$ value were studied. For YBCO film with the thickness of 200nm, the $J_{c}$ value of $2.1MA/\textrm{cm}^2$ has been achieved under the high deposition rate of 3.2nm/s (190nm/min). The $J_{c}$ can be maintained greater than $1M/\textrm{cm}^2$ with the thickness less than 1$\mu\textrm{m}$. The X-ray analysis was used to examine the texture, crystallization and surface quality. The SEM was employed to analyze the surface of YBCO, and it was shown the surface of YBCO film became rougher with increasing the thickness. There were many large singular outgrowths and networks of outgrowths on the surface of YBCO films which lowered the density of thick YBCO film. The outgrowth network was probably the a-axis YBCO corresponding to XRD $\theta$-2$\theta$scan and $\chi$-scan which were used to characterize a-axis orientation of YBCO film. The reason for J$_{c}$ declining with increasing the thickness was studied and discussed.sed.

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SAW 대역 통과 필터용 ZnO 박막의 특성 개선 연구 (Performance Improvement of ZnO Thin Films for SAW Bandpass Filter)

  • 이승환;강광용;유윤식
    • 한국전자파학회논문지
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    • 제25권12호
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    • pp.1219-1227
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    • 2014
  • 펄스 레이저 증착(Pulsed laser Deposition: PLD) 및 RF 스퍼터링 증착(Sputtering Deposition)의 단계적 적용을 통해, 표면탄성파 대역 통과 필터(Surface Acoustic Wave Bandpass Filter: SAW-BPF)용 ZnO 박막을 성장시켰다. PLD 방법으로 성장된 ZnO 박막위에 RF sputtering 방법을 사용하여 ZnO 박막을 재증착시켰으며, 성장된 ZnO 박막의 물성을 분석하기 위하여 XRD, SEM 및 AFM 분석장비를 사용하였다. 두 가지 증착 방법이 단계적으로 적용되어 성장된 ZnO 박막의 경우, 결정성과 배향성이 우수하게 유지되면서 표면거칠기가 향상되었다. 분석 결과, ${\omega}$-scan의 반치폭과 표면거칠기의 RMS 값은 각각 $0.79^{\circ}$와 1.108 nm였다. 그리고 성장된 양질의 ZnO 박막을 사용하여 SAW-BPF를 제작하여 측정한 결과는 응답 특성의 중심주파수가 260.8 MHz, 대역폭은 2.98 MHz, 그리고 삽입손실은 36.5 dB이었다.

정전압 분극곡선법에 의한 아말감의 부식 거동에 관한 연구 (A STUDY ON THE CORROSION BEHAVIOUR OF AMALGAMS BY USING OF POTENTIOSTATIC POLARIZATION METHOD)

  • 신동훈;엄정문
    • Restorative Dentistry and Endodontics
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    • 제12권1호
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    • pp.39-49
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    • 1986
  • The purpose of this study was to observe characteristic properties through the polarization curves and SEM images from 4 different types of amalgam obtained by using the potentiostats (Princeton EG & G) & SEM (Jeol/35), and to investigate the degree of corrosion on the oxidation peak of the each phase of amalgam. After each amalgam alloy and Hg was triturated as the direction of the manufacturer by means of the mechanical amalgamator (Shofu Co.), the triturated mass was inserted into the cylindrical metal mold which was 12mm in diameter and 10.0mm in height and was condensed by using routine manner. The specimen was removed from the mold and stored at room temperature for about 24 hours. The standard surface preparation was routinely carried out. Anodic polarization measurement was employed to confirm the corrosion behaviour of the amalgams in a 0.9% saline solution (P.H: 6.8-7.0) at $37^{\circ}C$. The initial rest potential (corrosion potential) was determined after 30 minutes of immersion of specimen in electrolyte, and the potential scan was begun at the point of 100mV cathodic from the corrosion potential. The scan rate was 0.17mV/sec. in the study to observe the degree of corrosion of each phase. SEI and EPMA images on the determined oxidation peaks of each amalgam were observed. The results were as follows: 1. In the four anodic polarization curves, low copper amalgams have three oxidation peaks and high copper amalgams have two oxidation peaks, -270mV, +26mV and +179mV(SEC) in the low copper lathe cut, and -300mV, +39mV and +163mV(SEC) in the low copper spherical. -4mV and +154mV(SEC) in the Dispersalloy, and +17mV and +180mV(SEC) in the Tytin as high copper amalgams. 2. ${\gamma}_2$ phase in the low copper amalgam and ${\eta}$ phase in the high copper amalgam were the most corrodible phases and Ag-Cu eutectic in high copper amalgam was the most slowly corroded phase. 3. Low copper amalgam was more susceptible in corrosion than high copper amalgam.

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구리광산에 적용된 부분단면굴착기용 국산 코니컬 픽커터의 성능평가 연구 (Performance Evaluation of Conical Picks for Roadheader in Copper Mines)

  • 최순욱;장수호;이철호;이규필;배영환;하태욱
    • 터널과지하공간
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    • 제25권6호
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    • pp.496-504
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    • 2015
  • 로드헤더는 커팅헤드에 픽커터를 설치하여 지반을 굴착하는 장비이다. 픽커터는 일반적으로 코니컬타입을 사용하며, 코니컬 픽커터는 선단부에 마모에 강한 텅스텐카바이드 팁을 사용하여 커터의 소모를 감소시키는 굴착 도구이다. 본 연구에서는 구리광산의 망토와 역암으로 구성된 복합지반을 대상으로 로드헤더 커팅헤드에 3종류의 코니컬 픽커터를 사용하여 내구성능을 살펴보았다. 현장적용 후, 픽커터의 육안조사와 중량감소율 측정, 그리고 CT 및 SEM을 이용한 내 외부 균열조사를 수행한 결과, 하드페이싱으로 보강한 코니컬 픽커터의 내구성능이 가장 우수하였으며, 각 코니컬 픽커터의 내 외부에서는 현장적용 전과 후 모두에서 매크로 크랙 및 미세균열을 발견할 수 없었다.

양극전착을 통한 그래핀-바나듐 산화물 복합체 제조 및 전기화학적 특성평가 (Electrochemical Properties of Graphene-vanadium Oxide Composite Prepared by Electro-deposition for Electrochemical Capacitors)

  • 정희영;정상문
    • Korean Chemical Engineering Research
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    • 제53권2호
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    • pp.131-136
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    • 2015
  • 본 연구에서는 전극 활물질로서 그래핀-바나듐 산화물 복합체를 pH 1.8 조건에서 0.5M $VOSO_4$ 수용액을 이용하여 전기화학적 전착을 이용해 합성하였다. 전착공정 후 다공성 바나듐 산화물이 작업전극에 생성된 것을 SEM, XRD, XPS를 통해 확인하였으며 생성된 바나듐 산화물은 $V^{5+}$$V^{4+}$로 존재한다. 그래핀에 전착된 바나듐 산화물의 직경 약 100 nm의 나노로드로 이루어진 망상 구조는 전극과 전해질과의 접촉을 향상시킨다. 4000 초의 전착공정을 거친 그래핀-바나듐 산화물 복합체를 작업전극으로 하여 3전극 셀에서 전기화학적 특성을 평가한 결과 20 mV/s의 주사속도에서 $854mF/cm^2$의 높은 정전용량을 나타내었고 1000회 충방전 후 초기 용량의 53%가 유지되었다.

창녕 화왕산성 출토 비격진천뢰(飛擊震天雷)의 보존 (Conservation of the Metal ball fired by a cannon)

  • 곽홍인;황정순;유혜선;정광룡
    • 박물관보존과학
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    • 제7권
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    • pp.25-31
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    • 2006
  • 경남 창녕군 화왕산성에서 발굴된 비격진천뢰의 보존처리를 실시하였다. 비격진천뢰는 일부 결실된 상태였다. 단, 결실된 부분은 내부를 관찰할 수 있도록 복원처리를 실시하지 않았다. X-선 투과검사 및 C.T(Computed Tomography)촬영 결과 주조과정에서 주형선 주위에 기공이 많이 발생한 것을 확인할 수 있었고, 표면에는 주조시 내범을 유지하기 위한 형지공이 확인되었으며, 이 부분에 다시 철판을 덧대어 보강한 흔적도 확인할 수 있었다. 표면에 존재하는 청색 부식물의 주성분은 SEM/EDS 분석결과 산소(O), 철(Fe), 인(P), 규소(Si), 알루미늄(Al)이라는 것을 확인하였으며, XRD 분석결과 청색 부식물은 비비아나이트[vivianite, Fe3(PO4)2·8H2O]로 확인되었다. 그리고 미세조직 분석결과 전형적인 회주철조직으로 판명되었다.

Subcortical Ischemic Change as a Predictor of Driving Cessation in the Elderly

  • Jang, Mi;Hong, Chang Hyung;Kim, Hyun-Chung;Choi, Seong Hye;Seo, Sang Won;Kim, Seong Yoon;Na, Duk L.;Lee, Yunhwan;Chang, Ki Jung;Roh, Hyun Woong;Son, Sang Joon
    • Psychiatry investigation
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    • 제15권12호
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    • pp.1162-1167
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    • 2018
  • Objective Motor, perceptual, and cognitive functions are known to affect driving competence. Subcortical ischemic changes on brain magnetic resonance imaging (MRI) can reflect reduction in cognitive and motor performance. However, few studies have reported the relationship between subcortical ischemic changes and driving competence of the elderly. Thus, the objective of this study was to investigate the association between subcortical ischemic changes on MRI and driving abilities of the elderly. Methods Participants (n=540) were drawn from a nationwide, multicenter, hospital-based, longitudinal cohort. Each participant underwent MRI scan and interview for driving capacity categorized into 'now driving' and 'driving cessation (driven before, not driving now)'. Participants were divided into three groups (mild, n=389; moderate, n=116; and severe, n=35) depending on the degree of white matter hyperintensity (WMH) on MRI at baseline. Driving status was evaluated at follow-up. Statistical analyses were conducted using ${\chi}^2$ test, analysis of variance (ANOVA), structured equation model (SEM), and generalized estimating equation (GEE). Results In SEM, greater baseline degree of WMH was directly associated with driving cessation regardless of cognitive or motor dysfunction (${\beta}=-0.110$, p<0.001). In GEE models after controlling for age, sex, education, cognitive, and motor dysfunction, more severe change in the degree of WMH was associated with faster change from 'now driving' state to 'driving cessation' state over time in the elderly (${\beta}=-0.508$, p<0.001). Conclusion In both cross-sectional and longitudinal results, the degree of subcortical ischemic change on MRI might predict driving cessation in the elderly.

Effect of Laser Beam on Structural, Optical, and Electrical Properties of BaTiO3 Nanoparticles during Sol-Gel Preparation

  • Mostafa, Massaud;Ebnalwaled, Khaled;Saied, Hussien A.;Roshdy, Reham
    • 한국세라믹학회지
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    • 제55권6호
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    • pp.581-589
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    • 2018
  • This work concentrated on the effect of different laser beams on the microstructure and dielectric properties of $BaTiO_3$ nanoparticles at different calcinations times during the gelling preparation step. The nanoparticles were prepared by the sol-gel method. A green (1000 mW, 532 nm) and red laser beam (500 mW, 808 nm), were applied vertically at the center of stirring raw materials. The samples were sintered at $1000^{\circ}C$ for 2, 4, and 6 h. X-ray diffraction (XRD) analysis showed that samples prepared under the green laser have the highest purity. The FT-IR spectra showed that the stretching and bending vibrations of TiO bond without any other bonds, which are compatible to the X-ray diffraction (XRD) results. Samples were characterized by transmission electron microscopy (TEM), Scan electron microscopy (SEM), and UV-Visible spectrophotometer. Characterization showed the samples prepared under the green laser to have the highest particle size (~ 50 nm) and transparency for all sintering durations. Laser beam effects on electrical characterization were studied. BT nanoparticles prepared under the green laser show the higher dielectric constant, which was found to increase with sintering temperature.

Synthesis of Expanded Graphite-Titanium Oxide Composite and its Photocatalytic Performance

  • Oh, Won-Chun;Choi, Jong-Geun;Zhang, Feng-Jun;Go, Yu-Gyoung;Chen, Ming-Liang
    • 한국세라믹학회지
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    • 제47권3호
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    • pp.210-215
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    • 2010
  • In this study, an expanded graphite-titanium oxide composite is developed from expanded graphite (EG) and titanium n-butoxide (TNB). EG is synthesized by chemical intercalation of natural graphite (NG) and rapid expansion at high temperature. TNB is used as the titanium source. The performances of the prepared EG-$TiO_2$ composite are characterized by BET surface area measurements, scan electron microscope (SEM), X-ray diffraction patterns (XRD) and energy dispersive X-ray analysis (EDX). The catalytic activities of the EG-$TiO_2$ composite are investigated by analysis of the degradation of methylene blue (MB) in aqueous solution under irradiation of UV light. Compared with the pristine $TiO_2$ and activity carbon-$TiO_2$ (AC-$TiO_2$) composite, the EG-$TiO_2$ composite shows very high efficiency against MB solution, and the EG could improve the photocatalytic effect of $TiO_2$ in the MB degradation reaction under the irradiation of UV light.