Features and Properties of $YBa_2$$Cu_3$$O_{7-x}$ Films Grown on SrTi$O_3$ by High Frequency PLD

  • Shi, D.Q. (Korea Electrotechnology Research Institute) ;
  • Ko, R.K. (Korea Electrotechnology Research Institute) ;
  • Song, K.J. (Korea Electrotechnology Research Institute) ;
  • Chung, J.K. (Korea Electrotechnology Research Institute) ;
  • Choi, S.J. (Korea Electrotechnology Research Institute) ;
  • Park, Y.M. (Korea Electrotechnology Research Institute) ;
  • Shin, K.C. (Department of Inorganic Materials Engineering, Pusan National University) ;
  • Yoo, S.I. (School of Materials Science & Engineering, Seoul National University) ;
  • Park, C. (Korea Electrotechnology Research Institute)
  • Published : 2003.10.01

Abstract

YBCO films were deposited with various thicknesses from 100nm to 1.6$\mu\textrm{m}$ on single crystal $SrTiO_3$ substrates by pulsed laser deposition (PLD). The effects of different deposition conditions, especially different deposition rates by means of changing the pulsed laser frequency up to 200Hz, on the J$_{c}$ value were studied. For YBCO film with the thickness of 200nm, the $J_{c}$ value of $2.1MA/\textrm{cm}^2$ has been achieved under the high deposition rate of 3.2nm/s (190nm/min). The $J_{c}$ can be maintained greater than $1M/\textrm{cm}^2$ with the thickness less than 1$\mu\textrm{m}$. The X-ray analysis was used to examine the texture, crystallization and surface quality. The SEM was employed to analyze the surface of YBCO, and it was shown the surface of YBCO film became rougher with increasing the thickness. There were many large singular outgrowths and networks of outgrowths on the surface of YBCO films which lowered the density of thick YBCO film. The outgrowth network was probably the a-axis YBCO corresponding to XRD $\theta$-2$\theta$scan and $\chi$-scan which were used to characterize a-axis orientation of YBCO film. The reason for J$_{c}$ declining with increasing the thickness was studied and discussed.sed.

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