• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.1
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• pp.86-93
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• 2017

In this paper, we propose a novel defect detection method using component tree representations of scanning electron microscopy (SEM) images. The component tree contains rich information about the topological structure of images such as the stiffness of intensity changes, area, and volume of the lobes. This information can be used effectively in detecting suspicious defect areas. A quasi-linear algorithm is available for constructing the component tree and computing these attributes. In this paper, we modify the original component tree algorithm to be suitable for our defect detection application. First, we exclude pixels that are near the ground level during the initial stage of component tree construction. Next, we detect significant lobes based on multiple attributes and edge information. Our experiments performed with actual SEM wafer images show promising results. For a $1000{\times}1000$ image, the proposed algorithm performed the whole process in 1.36 seconds.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.13 no.5
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• pp.2529-2543
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• 2019

Scanning electron microscopy (SEM) image can link with the microscopic world through reflecting interaction between electrons and materials. The SEM images are easily subject to blurring distortions during the imaging process. Inspired by the fact that dark channel prior captures the changes to blurred SEM images caused by the blur process, we propose a method to evaluate the SEM images sharpness based on the dark channel prior. A SEM image database is first established with mean opinion score collected as ground truth. For the quality assessment of the SEM image, the dark channel map is generated. Since blurring is typically characterized by the spread of edge, edge of dark channel map is extracted. Then noise is removed by an edge-preserving filter. Finally, the maximum gradient and the average gradient of image are combined to generate the final sharpness score. The experimental results on the SEM blurred image database show that the proposed algorithm outperforms both the existing state-of-the-art image sharpness metrics and the general-purpose no-reference quality metrics.

• Progress in Medical Physics
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• v.33 no.4
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• pp.158-163
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• 2022

Purpose: We subjected scanning electron microscopic (SEM) images of the active layer of EBT3 film to texture analysis to determine the dose-response curve. Methods: Uncoated Gafchromic EBT3 films were prepared for direct surface SEM scanning. Absorbed doses of 0-20 Gy were delivered to the film's surface using a 6 MV TrueBeam STx photon beam. The film's surface was scanned using a SEM under 100× and 3,000× magnification. Four textural features (Homogeneity, Correlation, Contrast, and Energy) were calculated based on the gray level co-occurrence matrix (GLCM) using the SEM images corresponding to each dose. We used R-square to evaluate the linear relationship between delivered doses and textural features of the film's surface. Results: Correlation resulted in higher linearity and dose-response curve sensitivity than Homogeneity, Contrast, or Energy. The R-square value was 0.964 for correlation using 3,000× magnified SEM images with 9-pixel offsets. Dose verification was used to determine the difference between the prescribed and measured doses for 0, 5, 10, 15, and 20 Gy as 0.09, 1.96, -2.29, 0.17, and 0.08 Gy, respectively. Conclusions: Texture analysis can be used to accurately convert microscopic structural changes to the EBT3 film's surface into absorbed doses. Our proposed method is feasible and may improve the accuracy of film dosimetry used to protect patients from excess radiation exposure.

• Rapid Communication in Photoscience
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• v.1 no.1
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• pp.11-12
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• 2012

The naphthalic amide derivatives were synthesized by simple condensation and were crystallized by acetonitrile solution. The SEM images of products with methyl group and nitro group, respectively, showed rod shape while the SEM images of products with other groups ($N(CH_3)_2$, $OCH_3$, H, F, and Cl), respectively, showed plate shape. We were known from these results that the substituent of ending group played an important role in the crystallization of single molecule and the morphology of naphthalic derivatives could be controlled by only change of ending group in single molecule.

• Journal of Periodontal and Implant Science
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• v.39 no.4
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• pp.385-390
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• 2009

Purpose: In this study we evaluated the morphologic aspects of defects created by a piezoelectric ultrasonic scaler with scaler tip on casting gold alloy using scanning electron microscope (SEM) images and defect surface profiles. Methods: 54 blocks of type III casting gold alloy (Firmilay, Jellenko Inc, CA, USA) were scaled by a piezoelectric ultrasonic scaler (P-MAX, Satelec, France) with scaler tip (No. 1 tip) on a sledge device. 2-dimensional profiles of defects on all samples were investigated by a surface profilometer (a-Step 500, KLA-Tencor, CA, USA). The selected working parameters were lateral force (0.5 N, 1.0 N, 2.0 N), mode (P mode, S mode), and power setting (2, 4, 8). SEM images were obtained. Defect surface profiles were made on Microsoft Excel program using data obtained by a surface profilometer. Results: Among P mode samples, there were similarities on defect surface profiles and SEM images regardless of lateral force. The defects created in P mode were narrow and shallow although the depth and the width increased as power setting changed low (2) to high (8). In P mode samples, the defect depth was the greatest when lateral force of 0.5 N was applied. However all the depths were smaller than 1 m. SEM images of Lateral force of 0.5 N, S mode, power setting 2 and 4 were similar to that of P mode, but the other SEM images of S mode showed discernible changes. Defect depth of S mode samples was the greatest when lateral force of 1.0 N was applied. Conclusions: Within the limitations of this study, it can be concoluded that removing capability of piezoelectric scaler with scaler tip becomes maximized as power level becomes higher but the capability is restricted when excessive lateral force is applied on scaler tip.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.379.2-379.2
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• 2016

The Ni oxide/PVP nanofibers were synthesized by sol-gel and electrospinning technique. The obtained Ni oxide/PVP (polyvinylpyrrolidone) nanofibers were calcined to remove the PVP compound at 873 and 1173 K. The Ni oxide/PVP nanofibers were analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The SEM images showed that the mat form was prepared by calcination of Ni oxide/PVP nanofibers at 873 K. And the crystal structure of Ni oxide at 1173 K was also confirmed by SEM images. XRD results shows the crystallinity of metallic Ni and NiO. TEM images also verified the crystal phase of Ni and Ni oxide. XP spectra revealed that the oxidation state of Ni to conclude the chemical composition of Cu oxide nanofibers.

• Applied Microscopy
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• v.39 no.1
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• pp.65-72
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• 2009

Cryo-SEM which enables specimens to be observed in frozen form has been used to study liquid specimens in their native states. Cryo-methods, sample preparation for cryo-SEM, are quite complex and involve several discrete but vitally interconnected steps which are rapid cooling, fracturing, sectioning, etching and coating. It is important to select practical techniques and to optimize conditions of each steps considering analytic purpose and specimen characters, viz., sample dimension, water contents. In this study, etching methods and sample preparation before freezing had been studied for observation of cyanobacteria, Synechocystis sp. PCC 6803 using cryo-SEM and their cryo-SEM images were compared to Conventional SEM (CSEM) images treated by chemical fixation. We could observe the improved morphological images of the pili of the surface and membranes of Synechocystis sp. PCC 6803 and the three-dimensional architectures of their biofilm, which were difficult to observe using chemical fixation and CSEM. These results suggest that cryo-methods/cryo-SEM are useful techniques for morphological study of biological specimen.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.7
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• pp.584-588
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• 2011

The ZnO thin films doped with Ga and Ge (GZO:Ge) were prepared on glass substrate using RF sputtering system. Structural, morphological and optical properties of the films deposited in different temperatures were studied. Proportion of the element of using target was 97 wt% ZnO, 2.5 wt% Ga and 0.5 wt% Ge with 99.99% highly purity. Structural properties of the samples deposited in different temperatures with 200 w RF power were investigated by field emission scanning electron microscopy, FE-SEM images and x-ray diffraction XRD analysis. Atomic force microscopy, AFM images were able to show the grain scales and surface roughness of each film rather clearly than SEM images. it was showed that increasing temperature have better surface smoothness by FE-SEM and AFM images. Transmittance study using UV-Vis spectrometer showed that all the samples have highly transparent in visible region (300~800 nm). In addition, it can be able to calculate bandgap energy from absorbance data obtained with transmittance. The hall resistivity, mobility, and optical band gap energy are influenced by the temperature.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1282-1287
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• 2007

The nature of the signal collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired images is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important for improving on the resolution of SEM. This paper presents the manufacture of secondary electron detector and the optimal position of electron detector through numerical analysis in SEM.

• Applied Microscopy
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• v.52
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• pp.12.1-12.8
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• 2022

The microstructure of diatom frustules found in mud sediments along the coast of Boryeong- city, South Korea, was observed using a scanning electron microscopy (SEM), and the constituent elements of diatoms were analyzed using energy-dispersive X-ray spectroscopy (EDS). Diatom frustules and clay minerals were present in the SEM images of the mud powder. High-magnification SEM images revealed that the surface of the frustules contained identically shaped circular pores, measuring 1 ㎛ in diameter, arranged at regular intervals. This study revealed that the diatom shell fragments in the mud powder ranged in size from 3 to 30 ㎛, with an average thickness of approximately 2.5 ㎛. The elements Si, Al, Fe, K, Na, Mg, and Ti were detected while analyzing the frustule constituents, with Si being the primary component with the highest content.