• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.16-22
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• 2008

We fabricated thermally-evaporated 10 nm-Ni/30 nm and 70 nm Poly-Si/200 nm-$SiO_2/Si$ structures to investigate the thermal stability of nickel silicides formed by rapid thermal annealing(RTA) of the temperature of $300{\sim}1100^{\circ}C$ for 40 seconds. We employed for a four-point tester, field emission scanning electron microscope(FE-SEM), transmission electron microscope(TEM), high resolution X-ray diffraction(HRIXRD), and scanning probe microscope(SPM) in order to examine the sheet resistance, in-plane microstructure, cross-sectional microstructure evolution, phase transformation, and surface roughness, respectively. The silicide on 30 nm polysilicon substrate was stable at temperature up to $900^{\circ}C$, while the one on 70 nm substrate showed the conventional $NiSi_2$ transformation temperature of $700^{\circ}C$. The HRXRD result also supported the existence of NiSi-phase up to $900^{\circ}C$ for the Ni silicide on the 30 nm polysilicon substrate. FE-SEM and TEM confirmed that 40 nm thick uniform silicide layer and island-like agglomerated silicide phase of $1{\mu}m$ pitch without residual polysilicon were formed on 30 nm polysilicon substrate at $700^{\circ}C\;and\;1000^{\circ}C$, respectively. All silicides were nonuniform and formed on top of the residual polysilicon for 70 nm polysilicon substrates. Through SPM analysis, we confirmed the surface roughness was below 17 nm, which implied the advantage on FUSI gate of CMOS process. Our results imply that we may tune the thermal stability of nickel monosilicide by reducing the height of polysilicon gate.

• Journal of the Korean Ceramic Society
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• v.39 no.10
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• pp.981-987
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• 2002

Monodispersed colloidal silica was prepared by Stober process. We have synthesized monodispersed colloidal silica of carious sizes (100 nm, 200 nm, 300 nm) by controlling volume ratios of TEOS(Tetraethylorthosilicate), $NH_4OH$, Ethanol and D. I. water. Shape and monodispersity of the synthesized colloidal particles were observed by Scanning Electron Microscopy(SEM) and laser light scattering particle analyzer. Self-assembled monolayer of monodispersed colloids was achieved by dipping Si substrate into a well-dispersed silica suspension. It was determined that uniformity and spatial extent of the self-assemble monolayer of monodispersed colloids are significantly influenced by the experimental parameters such as concentration, pH and surface tension of the colloidal suspension. We have observed a hexagonally well-ordered packing colloidal monolayer in a relatively large area (1.5 mm ${\times}$ 1.5 mm) as confirmed by SEM.

• Journal of the Mineralogical Society of Korea
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• v.13 no.4
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• pp.196-204
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• 2000

We present characteristics of hydrothermal chlorite and its interstratification with 7-$\AA$ mineral phase that occur in the propylitic alteration zone of the Bobae sericite deposit formed in rhyodacitic tuff. Chlorite is found as disseminated fine-grained aggregate or replacement materials of precursor minerals such as Fe-oxides and amphibole. Based on X-ray diffraction(XRD), all chlorites belong to IIb polytype and the (060) reflections averaging $1.53~1.54\AA$ indicate a trioctahedral structure. Chemical compositions of chlorite show that the Fe/(Fe+Mg) values are mostly in the range of 0.44~0.53, and cation deficiencies in octahedral sites range from 0.06 to 0.37. Under scanning electron microscope(SEM) chlorite occurs as well-crystallized aggregates and is subparallely stacked in interstices or between grain boundaries of associated minerals. transmission electron microscopic(TEM) images reveal that chlorite shows regular layers with $14-\AA$ spacings, locally interstratified with $7-\AA$ or $21-\AA$ periodicities. The $21- \AA$ periodicity corresponds to the sum of the $d_{001}$ values of chlorite and $7-\AA$ phase. The chlorite packet coexisting with 7-$\AA$ layers displays abundant defects such as edge dislocations and layer terminations. Selected-area electron diffraction(SAED) indicates that chlorite and $7-\AA$ phase are randomly interstratified in the mixed-layer areas. We propose a lateral change of layers for the polymorphic transition of $7-\AA$ phase to chlorite.e.

• Journal of the Korean institute of surface engineering
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• v.43 no.4
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• pp.170-175
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• 2010

The GaAs epitaxial layers were grown on Si(100) substrates by molecular beam epitaxy(MBE) using the two-step method. The Si(100) substrates were cleaned with different surface cleaning method of vacuum heating, As-beam, and Ga-beam at the substrate temperature of $800^{\circ}C$. Growth temperature and thickness of the GaAs epitaxial layer were $800^{\circ}C$ and 1 ${\mu}m$, respectively. The surface structure and epitaxial growth were observed by reflection high-energy electron diffraction(RHEED) and scanning electron microscope(SEM). Just surface structure of the Si(100) substrate cleaned by Ga-beam at $800^{\circ}C$ shows double domain ($2{\times}1$). RHEED patterns of the GaAs epitaxial layers grown on Si(100) substrates with cleaning method of vacuum heating, As-beam, and Ga-beam show spot-like, ($2{\times}4$) with spot, and clear ($2{\times}4$). From SEM, it is found that the GaAs epitaxial layers grown on Si(100) substrates with Ga-beam cleaning has a high quality.

• Clean Technology
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• v.19 no.4
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• pp.401-409
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• 2013

BBiodegradable polymers have attracted great attention because of the increased environmental pollution by waste plastics. In this study, PLA (polylactic acid)/Clay-20 (Cloisite 20) and PLA (polylactic acid)/PBS (poly(butylene succinate)/Clay-20 (Cloisite 20) nanocomposites were manufactured in a twin-screw extruder. Specimens for mechanical properties of PLA/Clay-20 and PLA/PBS (90/10)/Clay-20 nanocomposites were prepared by injection molding. Thermal, mechanical, morphological and raman spectral properties of two nanocomposites were investigated by differential scanning calorimetry (DSC), tensile tester, scanning electron microscopy (SEM) and raman-microscope spectrophotometer, respectively. In addition, hydrolytic degradation properties of two nanocomposites were investigated by hydrolytic degradation test. It was confirmed that the crystallinity of PLA/Clay-20 and PLA/PBS/Clay-20 nanocomposite was increased with increasing Clay-20 content and the Clay-20 is miscible with PLA and PLA/PBS resin from DSC and SEM results. Tensile strength of two nanocomposites was decreased, but thier elongation, impact strength, tensile modulus and flexural modulus were increased with an increase of Clay-20 content. The impact strength of PLA/Clay-20 and PLA/PBS/Clay-20 nanocomposites with 5 wt% of Clay-20 content was increased above twice than that of pure PLA and PLA/PBS (90/10). The hydrolytic degradation rate of PLA/Clay-20 nanocomposite with 3 wt% of Clay-20 content was accelerated about twice than that of pure PLA. The reason is that degradation may occur in the PLA and Clay-20 interface easily because of hydrophilic property of organic Clay-20. It was confirmed that a proper amount of Clay-20 can improve the mechanical properties of PLA and can control biodegradable property of PLA.

• 한국태양에너지학회:학술대회논문집
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• 2012.03a
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• pp.400-403
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• 2012

$Cu_2ZnSnSe_4$(CZTSe) is emerged as a promising material for thin-film solar cells because of non-toxic, inexpensive and earth abundant more than $Cu(In,Ga)Se_2$ materials. For fabricating compound semiconductor thin-film solar cells, CdS is widely used for a buffer layer which fabricated by a chemical bath deposition method (CBD). Through the experiment, we controlled deposition temperature and mol ratio of solution conditions to find the proper grain 크기 and exact composition. The optimum CdS layers were characterized in terms of surface morphology by using a scanning electron microscope (SEM) and atomic force microscope (AFM). The optimized CdS layer process was applied on CZTSe thin-films. The thickness of buffer layer related with device performance of solar cells which controlled by deposition time. Local surface potential of CdS/CZTSe thin-films was investigated by Kelvin probe force microscopy (KPFM). From these results, we can deduce local electric properties with different thickness of buffer layer on CZTSe thin-films. Therefore, we investigated the effect of CdS buffer layer thickness on the CZTSe thin-films for decreasing device losses. From this study, we can suggest buffer layer thickness which contributes to efficiencies and device performance of CZTSe thin-film solar cells.

• Journal of the korean academy of Pediatric Dentistry
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• v.33 no.2
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• pp.201-206
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• 2006

A recent laboratory study has demonstrated improved caries lesion resistance with enamel that was exposed to $CO_2$ laser irradiation for very short time period. When topical fluoride treatment was performed before or after laser irradiation, reductions in dental caries. The purpose of this scanning electron microscopic(SEM) study and atomic force microscope study was to characterize surface alterations in tooth enamel after in vitro laser irradiation alone and combined topical fluoride treatment either before or after laser irradiation. The treatment effects of laser irradiation led to the formation of an irregular, mild porosities and fine fissures, also created granular materials. But when laser irradiation was followed by APF, the enamel surface had homogenous architecture. The result led to the caries resistance effects by these granular structures have been considered to represent redeposited mineral phases due to the mobilization of calcium, phosphate, and fluoride from lased enamel.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.246-250
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• 2006

Highly ordered gold nanodot arrays have been successfully obtained by vacuum evaporation using an anodic aluminum oxide (AAO) as a shadow mask. An AAO mask with the thickness of 300 um was prepared through an anodization process. The structure of the nanodot arrays was studied by a field- emission scanning electron microscope (FE-SEM) equipped with an energy dispersive spectrometer (EDS). A tapping mode atomic force microscope (AFM) was employed for studies of height and phase feature. The nanodot arrays were precisely reproduced corresponding to the hexagonal structure of the AAO mask in a large area. In the gold nanodot arrays, the average diameter of dots is approximately the same as the AAO pore size in the range from 70 um to 80 nm and 100 nm center-to-center spacing. EDS analysis indicated that the gold dots were almost entirely consisted of gold, a highly demanded material.

• Korean Journal of Materials Research
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• v.11 no.12
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• pp.1063-1067
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• 2001

The effect of the pulse parameters(pulse ratio and frequency) on the characteristics of the nitrided layer in the pulsed plasma nitrified SCM435 Steels was investigated. Material properties of the nitrided layer were analysed by employing optical microscope, scanning electron microscope(SEM), X-ray diffractometer(XRD) and micro-Vickers hardness tester. It was found that both the compound layer thickness and the surface hardness decreased with decreasing of pulse ratios. At high pulse ratio, the compound layer thickness and the surface hardness were rapidly decreased with decreasing frequency compared to lower pulse ratios.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.255-256
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• 2002

In this paper, the frictional behavior according to the contact geometry was investigated using a micro-tribotester built inside a Scanning Electron Microscope (SEM) and an Atomic Force Microscope (AFM). FFT (Fast Fourier Transform) analysis for friction was conducted as a method to interpret the contact condition. From the experimental results, it could be concluded that the relative dimensions and distribution of contact asperities on the surface could be predicted by the power spectrum and main frequency in the FFT analysis of the friction signal.