• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.05a
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• pp.73-76
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• 1992

In this study, piezoelectric ceramics of composition 0.08Pb(Mn$\sub$1/3/Sb$\sub$2/3/)O$_3$ were manufactured by the Hot-press method and structural, piezoelectrical properties and temperature stability were investigated with addition of 0, 02, 0.4, 0.6, 0.8, 1.0 [wt%] Cr$_2$O$_3$. Also the SAW delayline was fabricated and the propagation characteristics of SAW were considered with SAW theories.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.242-243
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• 2005

SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From a measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

• Proceedings of the Korean Vacuum Society Conference
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• 1995.06a
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• pp.154-154
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• 1995

The Xu-Tec process is also called the double glow surface alloying technology and is a new method of surface metallurgy which can produce an alloy layers with sp ecial phisical and chemical properties on the surface of common and inexpensive mater ials. Many super alloys and alloy steels, sueh as nickel base alloys, high speed steels and staiinless steels, have been produced by Xu-Tee Process on the surfaces of carbon steels. The depth of the alloy lasyers may vary from several microns up to 300 micr ons with alloying elements in a concentration of few percentage to 100%. World wide patents for Xu-Tec process have been granted in the United states, Canada, United Ki ngdom, Australia and Japan. High performance saw blades have been successfully produced by the Xu-Tee process with much simper processing steps and less cost than bimetal high speed saw blades. A comparison of the cutting times and wear rates of the Xu-Tee blades with the conventional bimetal blades has been made. The Xu-Tee bIases demonstrates sim ilar or better performance than bimetal blades. A Xu-Tec Unit for the commercial pr oduction of Xu-Tec saw blades has been designed and manufactured. This Unit can t reat 10,000 haek saw blades at one time. Three Xu-Tec hack saw blades production I ines have been set up in China. China.

• Korean Journal of Materials Research
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• v.4 no.7
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• pp.783-791
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• 1994

Piezoelectric ZnO thin films were deposited on 7059 glass substrate by rf magnetron sputtering. The effects of deposition parameter, such as rf power, gas pressure and $O_{2}$/Ar gas ratio, on the crystallinity and electrical properties of the deposited ZnO thin films were studied. It was found that the deposition rate was higher than the previously reported values. ZnO films were suitable for SAW filter since a standard deviation of XRD (002) peak rocking curve was less than $6^{\circ}$. ZnO thin films, which were deposited at $O_{2}$/Ar ratio larger than 25%, showed high resistance. SAW filter was fabricated using ZnO film, of which thickness was 0.25 of the wavelength of the propatating surface acoustic wave. The measured frequency response was consistent with the calculated one. The SAW filter had center frequency 39.08 MHz, phase velocity 2501 m/sec and insertion loss 29 dB.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.252-252
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• 2009

In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.9
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• pp.417-422
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• 2002

ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.56-59
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• 1997

SAW filters of transversal type were fabricated on some piezoelectric substrates of the LN 128$^{\circ}$ Y-X, LN 64$^{\circ}$Y-X, Quartz ST-cut wafers through the simulation in which the number o: IDT and window function were changed for the required frequency, and the mask making. Their IDT spacing and width were 3 ${\mu}{\textrm}{m}$, chip size was 4.462 $\times$ 2.086 mm$^2$, and they had double electrode transversal type IDTs. In addition to pure Al electrode devices, Ti thin films having the different thicknesses was introduced between the Al electrode and the substrate for improving the power resistance strength. They had 11-12 dB insertion losses similar to those of pure Al electrode SAW filters in case of LN 128$^{\circ}$ Y-X, LN 64$^{\circ}$ Y-X, meaning that Ti thin film was not detrimental to the insertion loss and general frequency properties. The filters had the center frequencies 162MHz for LN 128$^{\circ}$ Y-X, 186MHz for 64$^{\circ}$ Y-X, and 131MHz for Quartz ST-cut substrates.

• Journal of the Semiconductor & Display Technology
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• v.17 no.3
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• pp.59-64
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• 2018

In recent years, the solar cell market has steadily grown with the demand for new energies. And wire sawing is one of the most critical processes in manufacturing solar cell wafer which is supposed to affect the breakage of wafers most during the process and afterwards. Generally, the defects of the wafers are generated from the structural vibrations of the machine. In the sawing process, the vibrations cause unnecessary normal stress on the cut surface of wafers, and eventually create the surface damage or leave the residual stress. In this study, the dynamic properties of a wire saw have been analyzed through the frequency response test and the computer simulation. And the effects of the design alterations have been investigated to stabilize the machine structure and further to reduce the vibrations. The result shows that relatively simple design alterations of supporting structure without any change of major parts of the machine can suppress the vibrations of the machine effectively.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.2
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• pp.267-275
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• 2012

Austenite stainless steel 304 has properties of high resistance to corrosion and temperature changes. Therefore, this material is widely used in various of industries. However, when the material is subjected to heating and cooling cycles the forming accuracy, for example, the right angle associated with a sharp bend such as corner is lost. This phenomenon is caused by the reversion of the deformation-induced martensite into austenite when the temperature in increased. This result in misfit of a structure or an assembly, and an increase in residual stress. Hence, it is important to understand this process. In this study, to evaluate the mechanical behavior of the deformation-induced martensite and reversed austenite, a scanning acoustic spectroscope including the capability of obtaining both phase and amplitude of the ultrasonic wave (i.e., the complex V(z) curve method) was used. Then, the velocities of the SAW propagating within the specimens made in different conditions were measured. The experimental differences of the SAW velocities obtained in this experiment were ranging from 2,750 m/s to 2,850 m/s, and the theoretical difference was 3.6% under the assumption that the SAW velocity was 2,800 m/s. The error became smaller as the martensite content was increased. Therefore, the SAW velocity may be a probe to estimate the marternsite content.

• Corrosion Science and Technology
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• v.17 no.6
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• pp.279-286
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• 2018

Austenitic stainless steels used in nuclear power plants mainly use pipes made of seamless pipes, which depend on imports. The manufacturing process and high cost are some of the problems associated with seamless pipes. Therefore, in this study, the corrosion characteristics of the seamless pipe and the SAW pipe were assessed to determine the safety and reliability of the SAW pipe in a bid to replace the seamless pipe. Microstructure was analyzed using an optical microscope and the degree of hardness was measured using a Rockwell B scale. Intergranular corrosion resistance was evaluated by ASTM A262 Practice A, C, and E methods. The degree of sensitization was determined using a DL-EPR test. Anodic polarization test was performed in deaerated 1% NaCl solution at $30^{\circ}C$ and the U-bend method was used to evaluate the SCC resistance in 0.01 M $Na_2S_4O_6$ at $340^{\circ}C$ and 40% NaOH solution at $290^{\circ}C$. Weld metal of the SAW pipe specimen showed relatively high degree of sensitization and intergranular corrosion rate. However, annealing to SAW pipes improved the corrosion properties in comparison to that of the seamless pipe.