• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.20 no.5
• /
• pp.437-443
• /
• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• Journal of Sensor Science and Technology
• /
• v.5 no.3
• /
• pp.41-48
• /
• 1996

We developed SAW gas sensor for monitoring SOx gas with high sensitivity. It was fabricated as a microsensor for detecting SOx gas by depositing sensing material on SAW device. As a detecting layer material, CdS was selected. Deposition of CdS in the form of thin films was carried out by the ultrasonic spray pyrolysis method using ultrasonic spray nozzle. Thin films with the uniform and large surface area for sensors were deposited. The stable pyrolysis environment provided by uniform and fine droplets formed by spray nozzle made it possible to obtain thin films with excellent quality. The minimum grain size of the CdS thin films was about 50 nm when deposited at $300^{\circ}C$. SAW gas sensors showed reasonable sensitivity and reproducibility. Further studies are required to investigate the interference of other gases to SOx gas detection.

• Proceedings of the KOSOMBE Conference
• /
• v.1991 no.05
• /
• pp.98-100
• /
• 1991

A sensitive surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing different phospholipids and fatty acids on the surface of the SAW device wi th the Langmuir-Blodgett technique. The characteristics of SAW device operating at 310 MHz deposited with phosphatidylcholine were analyzed. Amyl acetate, acetoin, menthone and other organic gases showed different affinities. The identification of odorants depending on the species of lipid used for coating is discussed in terms of the similarity of the normalized resonant frequency shift pattern. Using a number of different lipid-coated SAW devices, odorants could be identified by a neural-network pattern recognition with back-propagation algorithm.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.53 no.2
• /
• pp.73-78
• /
• 2004

AIN thin film has been deposited on the $AI_2$$O_3$substrate with reactive radio frequency( RF) magnetron sputtering method. In this work, elelctromechanical coupling coefficient of AIN thin film was increased with an increase of AIN thin film thickness, and the maximum value was 0.11%. Insertion loss of SAW device was decreased with an increase of AIN thin film thickness and the minimum value was 33［㏈］. SAW velocity of IDTs/AIN/$AI_2$$O_3$structure and IDTs/AIN/$AI_2$$O_3$/Si structure were about 5480［㎧］and 5040［㎧］respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.227-228
• /
• 2013

• Transactions of the Society of Information Storage Systems
• /
• v.8 no.1
• /
• pp.16-21
• /
• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

• Proceedings of the KIEE Conference
• /
• 1994.07b
• /
• pp.1457-1459
• /
• 1994

A surface acoustic wave(SAW) sensor for the detection of odorants has been constructed by depositing various phospholipids and fatty acids onto the surface of the SAW device. Applying the Langmuir-Blodgett technique, it was possible to deposit the optimal number of layers which was found to be between 10 and 20. Menthone, amylacetate, acetoin, and other organic gases showed different affinities to the coated lipids. An explanation is given for different odorant affinities based on the monolayer properties of phospholipids.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1992.05a
• /
• pp.144-146
• /
• 1992

Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.59 no.2
• /
• pp.390-396
• /
• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.4 no.2
• /
• pp.134-138
• /
• 1994

$LiTaO_3 (LT)$ single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, $Li_2O$ for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.