• Journal of electromagnetic engineering and science
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• v.12 no.1
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• pp.37-44
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• 2012

This paper describes a compact and novel wireless vital sign sensor at 2.4 GHz that can detect heartbeat and respiration signals. The oscillator circuit incorporates a planar resonator, which functions as a series feedback element as well as a near-field radiator. The periodic movement of a human body during aerobic exercise could cause an input impedance variation of the radiator within near-field range. This variation results in a corresponding change in the oscillation frequency and this change has been utilized for the sensing of human vital signs. In addition, a surface acoustic wave (SAW) filter and power detector have been used to increase the system sensitivity and to transform the frequency variation into a voltage waveform. The experimental results show that the proposed sensor placed 20 mm away from a human body can detect the vital signs very accurately.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.163-166
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• 2005

Multilayer LTCC technology enables RF modules to be reduced dramatically by taking advantage of the three dimension flexibility. Compared to a conventional two dimensional PCB, LTCC allows higher density, reduced size, and lower cost. In this research, BPF based on LTCC for 900MHz ZigBee application was implemented which can replace SAW filter with using the material of the Dupont9599's dielectric constant 7.8. And distributed baud pass filter for 900MHz ZigBee system applications is presented. Using resonator stripline and capacitance, 2nd order band pass filter was designed. Adjusting resonator's length and capacitance is easy to tune at accurate center frequency by shifting band because ZigBee system is using narrow bandwidth, $902MHz^{\sim}928MHz$. Also resonator has no limitation in space, so reducing size is possibile. Designed filter had I.L. 2.8dB at 915MHz and attenuation at 815MHz, 1015MHz was 16dB, 15dB, respectively. Therefore, the sharpe cut-off and good insertion loss for ZigBee system application.

• The Journal of the Acoustical Society of Korea
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• v.14 no.4
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• pp.64-73
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• 1995

We developed a surface acoustic wave (SAW) computer aided design (CAD) for mobile communication using Kaier window function. The systems are composed of modules for designing apodization weighted IDT-uniform IDT, withdrawal weighted IDT-withdrawal weighted IDT, and resonator type. The design of SAW bandpass with center frequencies from 222MHz to 343MHz were simulated by the developed CAD system. Although the method proposed in this paper is formulated primarily for SAW filters, it is equally applicable to finite impulse response (FIR) digital filter design.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.10
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• pp.1147-1158
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• 2008

In this paper, we designed a phase-looking circuit that locks the 16.8 GHz VTDRO to a 700 MHz SAW oscillator using SPD as a phase detector Direct phase locking with loop filter alone causes the problem of lock time, so VTDRO is phase leered by loop filter with the aid of time varying square wave current generator. The current generator is related to the loop filter and needs the systematic toning. In this paper, a systematic design of the current generator and loop filter is presented. The fabricated PLDRO shows a stabilized frequency of 16.8 GHz, a output power 6.3 dBm, and a phase noise of -101 dBc/Hz at the 100 kHz offset.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.56-56
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• 2003

최근 정보통신 분야의 급격한 발달로 인하여 무선통신에 사용되는 주파수 영역 또한 계속 높아짐에 따라 대역통과 필터 소자의 삽입 손실, 소비 전력, 크기, MMIC화에 대한 많은 연구가 진행되고 있다 압전 현상을 이용한 박막형 공진기가 이러한 요구를 충족시키고, 현재의 SAW filter를 대체할 소자로 떠오르고 있다. 본 실험에서는 단결정 미세 구조를 만들 수 있고, 압전 효과 또한 우수하며, Surface Micromachining보다 비교적 제조 공정이 간단하고 선택적 에칭이 가능한 Bulk Micromachining을 이용하여 Si$_3$N$_4$ Membrane을 이용한 중심주파수 5.2GHz인 두께 진동모드 Film Bulk Acoustic Wave Resonator(FBAR)를 제작하고 공진기의 고주파 특성을 평가하였다. Membrane구조 형성을 위해 Backside면인 Si$_3$N$_4$, Si은 RIE(Reactive Ion Etching)와 선택적 에칭용액인 KOH로 각각 에칭하여 Membrane을 갖는 구조로 중심주파수 5.2GHz인 두께 진동모드 FBAR를 설계 및 제조하였다. 체적 탄성파 공진 현상은 r.f Magnetron Sputtering법으로 증착한 AIN 압전박막과 Mo전극으로부터 발생 가능하였다. 본 연구에서는 0.9$\mu\textrm{m}$-Si$_3$N$_4$ Membrane을 이용해 FBAR를 제작/평가하고, RIE을 통해 Membrane을 제거해 가면서 공진기의 특성 즉, Quality factor와 유효전기기계결합계수(K$_{eff}$) 및 S parameter특성을 비교 측정해 보았다. 측정해본 결과 Membrane Free일때가 훨씬더 공진 특성이 우수함을 볼 수 있다

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.112-112
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• 2009

In this study, the effect of a long post-deposition thermal annealing(600 and 1000 $^{\circ}C$) on the surface acoustic wave (SAW) properties of polycrystalline (poly) aluminum-nitride (AlN) thin films grown on a 3C-SiC buffer layer was investigates. The poly-AlN thin films with a (0002) preferred orientation were deposited on the substrates by using a pulsed reactive magnetron sputtering system. Experimental results show that the texture degree of AlN thin film was reduced along the increase in annealing temperature, which caused the decrease in the electromechanical coupling coefficient ($k^2$). The SAW velocity also was decreased slightly by the increase in root mean square (RMS) roughness over annealing temperature. However, the residual stress in films almost was not affect by thermal annealing process due to small lattice mismatch different and similar coefficient temperature expansion (CTE) between AlN and 3C-SiC. After the AlN film annealed at 1000 $^{\circ}C$, the insertion loss of an $IDT/AlN/3C-SiC/SiO_2/Si$ structure (-16.44 dB) was reduced by 8.79 dB in comparison with that of the as-deposited film (-25.23 dB). The improvement in the insertion loss of the film was fined according to the decrease in the grain size. The characteristics of AlN thin films were also evaluated using Fourier transform-infrared spectroscopy (FT-IR) spectra and X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) images.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.3
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• pp.1-9
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• 2003

In this paper, we designed a highly suppressed sidelobe ladder type RF SAW bandpass filter based on 1-port resonator, for 800 MHz mobile communication system. In order to get the highest device characteristics, we optimized some important parameters such as the electrode thickness, electrode lambda weghting of the reflectors, and static capacitance ratio. Furthermore, we fabricated the Tx and Rx. filter using optimized parameters. Implemented filters can be used in 800 MHz mobile communication system and external impedance matching circuits are not needed. RF filter was fabricated on 36$^{\circ}$LiTaO$_3$ substrates with Al-Cu (W 3 %)and mounted 3.8mm$\times$3.8mm$\times$1.5mm SMD package. Developed filters has 2.3 dB insertion loss in the 25 MHz pass-band, 33MHz with 3-dB insertion loss, stop-band rejection of 30 dB, passband ripple is less than 0.5 The power durability of the filters measured about 3.5W and the maximum temperature variation within -2$0^{\circ}C$~8$0^{\circ}C$ was 0.09 dB/$^{\circ}C$ of 3-dB insertion loss.

• The Journal of the Acoustical Society of Korea
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• v.17 no.1
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• pp.17-23
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• 1998

본 논문은 높은 전기 역학적 결합 계수를 갖고 있는 64°LiNbO3기판에 leaky표면 탄성파를 이용하여 종 결합 형태의 대역이 넓고, 손실이 적은 필터의 제작을 위한 연구이다. 이 기판 위에 1차 모드와 2차 모드를 이용하고 입력 IDT와 출력IDT사이의 거리, 그리고 전 극의 두께 및 전극 개수를 적절하게 조절하므로서 통과 대역 폭이 15MHz이상, 삽입 손실 1.28dB 및 저지대역 50dB인 특성을 얻을 수 있었다. 아울러, 전극의 두께는 파장과의 비를 고려해 2500Å으로 할 때 최적의 결과를 얻을 수 있었으며, IDT와 IDT 사이의 거리는 0.25 λ, IDT와 반사기 사이의 거리는 0.46λ로 할 때 가장 이상적인 결과를 얻을 수 있었다. 제 작한 필터는 329.3MHz의 중심 주파수를 갖고 있는 소자로서 소형이고 낮은 삽입 손실을 갖 고 있으며, 무선 호출기에 사용 가능하다.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1999.06a
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• pp.253-269
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• 1999

The development of telecommunication and information technology requires to develop new piezoelectric materials with small size, low impedance, wide pass band width and high thermal stability of frequency. Langasite (La3Ga5SiO14) single crystal has been researched substitute of quartz and LiNbO3 for the applications of SAW filter, BAW filter and resonator. Its single crystal growth has been carried out by Czochralski Method. So, in order to get single crystal with higher quality, in this study, lnagasite (La3Ga5SiO14) single crystal was grown by using Floating Zone (FZ) method and characterized. For the growth of langasite single crystals, the langasite powder was synthesized at 135$0^{\circ}C$ for 5hrs and the feed rod was sintered at 135$0^{\circ}C$ for 5hrs. The growing rate was 1.5mm/h and the rotation speed was 15 rpm for an upper rotation and 13 rpm for a lower rotation. In order to prevent the evaporation of gallium oxide, Ar and O2 gas mixture was flowed. The growth direction was analyzed by Laue back-scattered analysis. The composition of grown crystal was analyzed suing XRD and WDS. The electrical properties of grown crystal at various frequencies and temperature were discussed.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.24-25
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• 2006

In this paper, ZnO thin films were prepared on p-Si(100) by RF magnetron sputtering. Before the depostion, the substrates were pre-heated to 500, 400, 300, $200^{\circ}C$ or not. During the deposition, the substrates were cooled down naturally or kept and then the films were investigated by XRD(X-ray diffraction) and SEM (scanning micro scope). It is showed the most outstanding result that the film was prepared on the substrate were cooled from $400^{\circ}C$. When the substrate was cooled from a certain temperature during deposition, it could be improve the c-axis orientation and useful for application of SAW(surface acoustic wave) filter and FBAR(film bulk acoustic wave resonator) device.