• Electrical & Electronic Materials
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• v.13 no.7
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• pp.8-13
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• 2000

• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.12
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• pp.2662-2670
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• 2009

The effect of the reflector type for the SAW filter on the characteristics of the slanted finger IDT filter have been studied by computer simulation. The IDT was evaporated by Aluminum-Copper alloy. The design condition was optimized by the phase shift of the SAWfilter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness are $5,000{\AA}$, and the width and the space of reflector are $3.6{\mu}m$ and $2.0{\mu}m$, respectively. Frequency response of the fabricated SFIT filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 8.2MHz. And we could obtain that the return loss is less then 16dB, the ripple characteristics is probably 4dB and the triple transit echo is less then 18dB after when we have matched impedance.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.38C no.9
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• pp.813-821
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• 2013

In this paper, a vital signal sensor based on impedance variation of resonator is presented. Proposed vital signal sensor can detect the vital signal, such as respiration and heart-beat signal. System is composed of resonator, oscillator, surface acoustic wave (SAW) filter, and power detector. The cyclical movement of a dielectric such as a human body, causes the impedance variation of resonator within the near-field range. So oscillator's oscillation frequency variation is effected on resonator's resonant frequency. SAW filter's skirt characteristic of frequency response can be transformed a small amount of frequency deviation to a large variation. Aim to enhance the existing sensor detection range, proposed sensor operates in 870 MHz ISM band, and detect respiration and heart-beat signal at distance of 120 mm.

• Korean Journal of Materials Research
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• v.6 no.3
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• pp.341-346
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• 1996

R-sapphire 기판위에 rf magnetron 스퍼터 방법으로 ZnO 박막을 증착하여 박막의 증착변수에 따른 결정성장방향과 SAW 특성을 분석하였다. 증착온도, 압력, rf 전력에 의해 박막 성장면이 (002)에서 (110)으로의 전이가 관찰되었다. 5mTorr, 40$0^{\circ}C$, 250W의 rf 전력에서 가장 우수한 (110)방향의 에피 ZnO 압전 박막의 SAW 특성을 분석하기 위하여 제작된 마스크를 사용하여 IDT를 구성한 후 SAW 특성을 분석한 결과 h/λ=0.08의 조건에서 전단속도가 약 5232m/s로서 고주파용 SAW 필터의 제조에 적합한 특성을 보이고 있다.

• Proceedings of the Acoustical Society of Korea Conference
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• 1985.10a
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• pp.43-46
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• 1985

In this paper, the SAW Comb filter which consists of 1 apodized IDT, 2 uniform IDTs, and the grating reflector is studied. The apodized IDT is designed by utilizing the Chebyshev window function, and the output IDTs are arrayed with 0.5$\mu$sec time delay to obtain the Comb characteristics. And also the frequency response below the first peak is sufficiently suppressed by the grating reflector which is constituted 180 electrodes. In experiment the SAW Comb filter is fablicated by depositing Al on the surface of YZ-LiNbO3 substrate. As the experimental result, the frequency characteristics of the SAW Comb filter are consistent with theoretical values in admitted errors.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.6
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• pp.481-486
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• 2001

ZnO thin films on glass substrate were depostied by RF magnetron reactive sputter with various argon/oxygen gas ratios and substrate temperatures. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, XPS and electrometer(keithley 617). All films showed a strong preferred orientation along the c-axis on glass substrate, and the chemical stoichiometry was obtained at Ar/O$_2$.=50/50. The propagation velocity of ZnO SAW filter was about 2,590 m/sec and insertion loss was a minimum value of abut -21dB.

• Proceedings of the IEEK Conference
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• 1998.06a
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• pp.367-370
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• 1998

A hybrid-integrated SAW(surface acoustic wave) douplexer including transmitter(Tx) filter, receiver(Rx) filter an dantenna terminal has been studied. The prototype duplxer was designed for CDMA system application in the 800 MHz-band. Ladder type SAW filters consisting of one port SAW resonators wer integrated on epoxy substrate to demonstrate the feasiblity of antenna duplexer. In order to perform the duplexing function, a strip line for impedance transformaton with length of .gamma./4 was inserted at rx path. The fabricted duplexer has an insertion loss of 3.0 dB at Tx path and 3.7 dB at Rx path. The attenuation has more than 40dB.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1390-1392
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• 2001

ZnO-based SAW(surface acoustic wave) filters are fabricated with the configuration of IDT/ZnO/$SiO_2$/Si(100) using various IDT materials such as Al, Cu/Ti, and Cu/Al. Their frequency response characteristics are measured and compared. The thickness of Al IDT is varied to examine the mass loading effect. In addition, effects of thermal treatment and electrical stress on the frequency responses of the fabricated SAW filters are investigated.

• Proceedings of the IEEK Conference
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• 2001.06a
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• pp.241-244
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• 2001

The design and fabrication of the surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) is investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. The slanted finger IDTS filter was simulated of three kind of IDTs structure. uniform-uniform IDT, uniform-withdrawal weighting IDTS, withdrawal weighting-withdrawal weighting IDTS. Uniform-withdrawal weighting IDTs structure SAW filters was designed and fabricated on 112$^{\circ}$ LiTaO$_3$, 128$^{\circ}$LiNbO$_3$ substrates. Designed SAW filter has about a 30% fractional bandwidth and a 70MHz center frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.40-43
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• 1996

Substrates of SAW filter are mainly single crystal such as LiNbO$_3$, LiTaO$_3$. However, fabrication of crystal is difficult and cost is very high. In this study, crystal was substituted for piezoelectric ceramics which has simple fabrication process. The same SAW filter mask was photolithographed on crystal(LiNbO$_3$) substrate and ceramic(PZT4, PZT5A and PZT8) substrate in order to compare experimental value with theoretical value. The difference of center frequency was only 3.7%. PZT8 showed good bandwidth properties. It is considered that PZT8 has higher mechanical quality factor and propagation velocity than PZT4, PTT5A.