• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2008년도 추계학술대회 초록집
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• pp.43-44
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• 2008

실리콘 웨이퍼 위에 마이크로웨이브 플라즈마 화학증착법으로 나노결정질 다이아몬드 박막을 형성하고 그 위에 RF 마그네트론 스퍼터로 ZnO 박막을 적층한 후 SAW(Surface Acoustic Wave) 필터를 제작하여 평가하였다. 기판온도, 작업압력, Ar/$CH_4$ 비율을 변화시켜 최적공정 조건에서 30nm 수준의 결정립을 갖는 $4{\mu}m$ 두께의 다이아몬드 박막을 얻었고, RF 인가전력, 기판온도, Ar/$O_2$ 비율을 조정하여 결정성이 우수하고, 표면 거칠기가 좋으며, 높은 비저항을 갖는 $2.2{\mu}m$ 두께의 ZnO 박막을 얻었다. 박막의 특성은 FESEM과 XRD로 평가하였다. Lift-off 식각공정을 이용하여 일정한 선폭과 간격(Line/Space : 1.5/$1.5{\mu}m$)을 갖는 구리 전극 패턴을 형성하였다. Network Analyzer를 이용하여 측정한 SAW 필터의 중심주파수는 1.67GHz이었다.

• 한국표면공학회지
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• 제42권5호
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.49.3-49
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• 2002

$\textbullet$ Surface Acoustic Wave $\textbullet$ Tactile Display Principle $\textbullet$ Installed on PC Mouse Button $\textbullet$ Vibration Measurement $\textbullet$ Demonstration on PC Screen $\textbullet$ Comparison Tests

• 전자공학회논문지A
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• 제32A권7호
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• pp.94-103
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• 1995

Thin film acoustooptic beam deflector in proton-exchanged Y-cut LiNbO$_{3}$ was fabricated and measured. The planar waveguide was fabricated by using the proton-exchanged and annealing method in Y0cut LiNbO$_{3}$. Interdigital transducer for SAW(surface acoustic wave) was made by the laser lithography. Using above method, the thin film acoustooptic beam deflector was constructed. Its SAW wavelength was 20.mu.m at 174MHz center frequency. The interaction length between guided optical wave and SAW was 2.16mm. The measured 3dB bandwidth was 17MHz using He-Ne laser. And 70% diffraction efficiency was obtained at 970mW RF driving power.

• Korean Chemical Engineering Research
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• 제49권2호
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• pp.224-229
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• 2011

본 연구에서 탄성표면파(SH-SAW) 디바이스의 지연선에 코팅된 골드 위에서 면역 글로불린 G(IgG) 검출을 위한 SH-SAW 센서를 개발하고자 하였다. 실험결과, 금표면 위에 anti-MIgG 혼합물을 일관되게 고정시킬 수 있었다. G-anti MIgG 혼합물과 blocking buffer를 이용한 골드 표면 위에 고정화 하였을 때 주파수 변위를 측정한 결과, G-anti MIgG 는 초기 주파수에서 75.1 kHz 주파수 변위를 보였으며 blocking buffer는 215.7 kHz의 주파수 변위를 보였다. 100 MHz 센서에서 MIgG의 농도가 25, 50, 75, 100 ${\mu}g$일 때 46.3, 127.45, 161.21, 262.39 kHz 주파수 변위를 보였다.

• 한국기계가공학회지
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• 제15권5호
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• pp.100-108
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• 2016

In various industries, many researches studies have been done in using nano thin film fabrication technology. In the field of printed electronics, various electronic devices can be fabricated using a direct printing process of on multiple functional materials. It has the advantages of low prices, environment-friendly environmentally friendly, flexibleility, large scale, mass production produced, simple process and so on. In this study, a viable thin film fabrication technology has beenwas introduced using the surface acoustic wave mechanism for thin film deposition. Fabrication of thin films using organic, inorganic and composite of organic/inorganic materials have been were analyzed through the experimental research. In this experiment, organic material MEH:PPV, inorganic material ZnO and composite material MEH:PPV/ZnO have been depo sited as thin films.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2015년도 제46회 하계학술대회
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• pp.1243-1244
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• 2015

Finding solutions for the disabled is a major challenge for our society. In the case of a disability due to a malfunction of the nervous system, the origin may be accidental, genetic, or induced by environmental factors. This type of loss can cause loss or movement disorders (paraplegia, hemiplegia, quadriplegia, epilepsy, Parkinson's disease, multiple sclerosis, etc.) or malfunction of certain sensory functions (blindness, deafness, chronic pain, etc.). Many alternatives, more technology, have been imported to create interfaces between the human body and an artificial prosthesis in order to restore some functions of the human body. A wireless system, battery neurons probe was developed for one hand reading neural signals in the brain, and on the other hand also able to excite the neuron in the brain using a surface acoustic wave one ports (SAW) delay line reflection.

• 센서학회지
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• 제9권4호
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• pp.327-333
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• 2000

중심주파수가 340MHz이고 $1.435{\mu}m$의 IDT 전극 폭과 간격을 가진 양방향 전송형 SAW필터를 LN $128^{\circ}$ Y-X 웨이퍼의 압전기판으로 제작하였다. 전력 내구성을 개선시키기 위한 방안으로 Al에 비해 밀도가 크고, 열팽창계수가 작으며 접착력이 좋은 Ti를 압전체기판과 전극물질인 Al 사이에 증착시켰다. Ti의 두께 및 열처리 온도가 내전력 특성에 미치는 영향을 분석하였는데, Ti층이 두꺼울수록 내전력이 개선되었으며, 특히 $300^{\circ}C$에서 열처리하였을 때 가장 우수하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권2호
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• pp.83-90
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• 2005

In this paper, we proposed the newly design method for extracting of the saw resonator characteristic. For the parameters of the proposed equivalent model, we adjusted and optimized the variables of several functions. As verification of proposed method, we firstly designed and fabricated cellular saw resonator by using the proposed model resonator. As the simulated and measured results of the proposed design method are almost equaled, we confirmed the usefulness of this method. we knew the usefulness of this method. Finally we designed the 800MHz cellular Tx/Rx band pass filter by using this designed resonator.